prof.dr. P.J. French

Professor
Bioelectronics (BE), Department of Microelectronics

Expertise: Biomedical devices, sensor technology

Themes: Health and Wellbeing

Biography

Paddy French received his B.Sc. in mathematics and M.Sc. in electronics from Southampton University, UK, in 1981 and 1982, respectively. In 1986 he obtained his Ph.D., also from Southampton University, which was a study of the piezoresistive effect in polysilicon. After 18 months as a post doc at Delft University, The Netherlands, he moved to Japan in 1988. For 3 years he worked on sensors for automotives at the Central Engineering Laboratories of Nissan Motor Company. He returned to Delft University in May 1991 and is now a staff member of the Laboratory for Electronic Instrumentation In 1999 he was awarded the Antoni van Leeuwenhoek chair and in June 2002 he became head of the Electronic Instrumentation Laboratory. He was Editor-in-chief of Sensors and Actuators A and General Editor of Sensors and Actuators A&B from 2002 to 2018. He is an IEEE Fellow. His research interests are integrated sensor systems, micromachining, in particular for medical and environmental applications.

EE-BD Biomedical Devices (BD) profile

A profile in our MSc-EE program dedicated to biomedical devices. Biomedical devices are used for medical diagnosis, monitoring and treatment. They can be fixed, portable, wearable, implantable and injectable. They are active and thus embed electronics, computing and software

EE3380TU Transduction effects

This course focuses on the interaction between different signal domains. These include effects such as thermo-electric effects, batteries and many more. For each domain, the physics behind the interaction will be discussed. The course will also include a practical to illustrate these interactions.

EE4C02 Systems Engineering

Introduction to systems engineering processes

ET4127 Themes in Biomedical Electronics

BioMEMS, biosensors, bioelectronics, ultrasound, microfluidics, wavefield imaging in monitoring, diagnosis and treatment

ET4257 Sensors and actuators

Overview of the most important principles of sensors and actuators realized in integrated silicon technology

ET4260 Microsystem integration

Fundamental and practical aspects of integrated microsystems in silicon

TM12001 Advanced Signal Acquisition

Instrumentation for technical medicine

  1. IC compatible materials for sensors
    PJ French;
    Key Engineering Materials,
    Volume 843, pp. 58-63, 2020. DOI: https://doi.org/10.4028/www.scientific.net/KEM.843
    document

  2. In-vivo microsystems: A review
    PJ French;
    Sensors,
    Volume 2, pp. 22, September 2020. DOI: doi:10.3390/s20174953
    Keywords: ... medical sensors, implants, in-vivo devices, microsystems.

    Abstract: ... In-vivo sensors yield valuable medical information by measuring directly on the living tissue of a patient. These devices can be surface or implant devices. Electrical activity in the body,from organs or muscles can be measured using surface electrodes. For short term internal devices,catheters are used. These include cardiac catheter (in blood vessels) and bladder catheters. Due to the size and shape of the catheters, silicon devices provided an excellent solution for sensors. Since many cardiac catheters are disposable, the high volume has led to lower prices of the silicon sensors. Many catheters use a single sensor, but silicon offers the opportunity to have multi sensors in a single catheter, while maintaining small size. The cardiac catheter is usually inserted for a maximum of 72 h. Some devices may be used for a short-to-medium period to monitor parameters after an operation or injury (1–4 weeks). Increasingly, sensing, and actuating, devices are being applied to longer term implants for monitoring a range of parameters for chronic conditions. Devices for longer term implantation presented additional challenges due to the harshness of the environment and the stricter regulations for biocompatibility and safety. This paper will examine the three main areas of application for in-vivo devices: surface devices and short/medium-term and long-term implants. The issues of biocompatibility and safety will be discussed.

  3. A wearable fluidic collection patch and ion chromatography method for sweat electrolyte monitoring during exercise
    Steijlen, Annemarijn SM; Bastemeijer, Jeroen; Groen, Pim; Jansen, Kaspar MB; French, Patrick J; Bossche, Andre;
    Analytical Methods,
    Volume 12, Issue 48, pp. 5885--5892, 2020. DOI: 10.1039/D0AY02014A
    Abstract: ... This paper presents a method to continuously collect and reliably measure sweat analyte concentrations during exercise. The method can be used to validate newly developed sweat sensors and to obtain insight into intraindividual variations of sweat analytes in athletes. First, a novel design of a sweat collection system is created. The sweat collection patch, that is made from hydrophilized foil and a double-sided acrylate adhesive, consists of a reservoir array that collects samples consecutively in time. During a physiological experiment, sweat can be collected from the back of a participant and the filling speed of the collector is monitored by using a camera. After the experiment, Na+, Cl− and K+ levels are measured with ion chromatography. Sweat analyte variations are measured during exercise for an hour at three different locations on the back. The Na+ and Cl− variations show a similar trend and the absolute concentrations vary with the patch location. Na+ and Cl− concentrations increase and K+ concentrations seem to decrease during this exercise. With this new sweat collection system, sweat Na+, Cl− and K+ concentrations can be collected over time during exercise at medium to high intensity, to analyse the trend in electrolyte variations per individual.

  4. A novel sweat rate and conductivity sensor patch made with low-cost fabrication techniques
    Steijlen, ASM; Bastemeijer, J; Jansen, KMB; French, PJ; Bossche, A;
    In 2020 IEEE Sensors,
    IEEE, pp. 1--4, 2020. DOI: 10.1109/SENSORS47125.2020.9278850
    Abstract: ... Sweat sensor patches offer new opportunities for unobtrusive monitoring of an athlete's physical status. This paper presents a novel sweat rate and sweat conductivity patch that is easy to prototype and can be made with common low-cost production techniques: laser cutting and standard printed circuit board (PCB) manufacturing. The device consists of a patch made from hydrophilic PET foil, a double-sided adhesive and a thin PCB with gold electrodes. Two electrodes, which are continuously in contact with the inflowing fluid, measure the sweat conductivity and a separate system with interdigitated electrodes measures the filling process of the reservoirs. Impedance measurement results of both systems demonstrate the working of the concept.

  5. Development of Sensor Tights with Integrated Inertial Measurement Units for Injury Prevention in Football
    Steijlen, ASM; Bastemeijer, J; Plaude, L; French, PJ; Bossche, A; Jansen, KMB;
    In Proceedings of the 6th International conference on Design4Health,
    2020.
    Abstract: ... In elite European football, 6 to 7 hamstring muscle injuries occur per team per season, which results in an absence of 14 to 180 days. These injuries occur typically in the last part of a training or match. This implies that the accumulation of demanding actions is an important factor for hamstring injury risk. In current practice, physical player load is measured at the field by deriving the global location of the player with GPS and RFID systems. However, these systems are not able to monitor leg movement and to distinguish demanding actions like kicking, cutting and jumping.In order to monitor these actions in the field, a novel design is being developed. The design consists of five sensor nodes with IMUs (Inertial measurement units), integrated in sports tights. IMUs can measure linear accelerations, angular velocities and magnetic fields in three directions. From these measurements, 3D kinematics of the lower limbs can be derived. An iterative design approach is used to develop the tights. Four prototypes will be developed. Each prototype is tested in a football specific setting, to identify areas of improvement from a technical point of view as well as from a user’s perspective. The final aim of this research is to develop sensor tights that can be worn unobtrusively by football players in the field. Real-time data are retrieved by the coach. This allows the coach to intervene when there is a high injury risk.

  6. Development of a microfluidic collection system to measure electrolyte variations in sweat during exercise
    Steijlen, ASM; Bastemeijer, J; Groen, WA; Jansen, KMB; French, PJ; Bossche, A;
    In 2020 42nd Annual International Conference of the IEEE Engineering in Medicine \& Biology Society (EMBC),
    IEEE, pp. 4085--4088, 2020. DOI: 10.1109/EMBC44109.2020.9176123
    Abstract: ... A wide variety of electrochemical sweat sensors are recently being developed for real-time monitoring of biomarkers. However, from a physiological perspective, little is known about how sweat biomarkers change over time. This paper presents a method to collect and analyze sweat to identify inter and intraindividual variations of electrolytes during exercise. A new microfluidic sweat collection system is developed which consists of a patch covering the collection surface and a sequence of reservoirs. Na + , Cl - and K + are measured with ion chromatography afterwards. The measurements show that with the new collector, variations in these ion concentrations can be measured reliably over time.

  7. Development of a microfluidic collection system to measure electrolyte variations in sweat during exercise
    Paddy French (Ed.);
    Montreal, Canada: IEEE, EMBC, , July 2020. DOI: DOI: 10.1109/EMBC44109.2020.9176123
    Keywords: ... sweat measurement, microfluidics.

    Abstract: ... A wide variety of electrochemical sweat sensors are recently being developed for real-time monitoring of biomarkers. However, from a physiological perspective, little is known about how sweat biomarkers change over time. This paper presents a method to collect and analyze sweat to identify inter and intraindividual variations of electrolytes during exercise. A new microfluidic sweat collection system is developed which consists of a patch covering the collection surface and a sequence of reservoirs. Na+, Cl- and K+ are measured with ion chromatography afterwards. The measurements show that with the new collector, variations in these ion concentrations can be measured reliably over time.

  8. Enhanced sensitivity of planar evanescent waveguide sensors: material and sensitivity study
    Paddy French (Ed.);
    SPIE, SPIE Photonics Europe, , April 2020. DOI: https://doi.org/10.1117/12.2555354
    Keywords: ... Evanescent waveguide sensing, Sensitivity, Waveguide materials.

    Abstract: ... This paper studies two different approaches for evanescent wave optical sensing: an horizontal one and a vertical one. In horizontal waveguides, the evanescent wave is distributed on the upper cladding. While in a vertical configuration, the evanescent wave is distributed on the left and right sides of the waveguide. In an horizontal configuration the evanescent wave can be also on both sides of the waveguide in order to increase the optical energy for sensing if the substrate under the waveguide is locally removed. However, in this configuration to achieve sensitive devices, the layers have to be freestanding and thin limiting practical implementations of such approaches. Furthermore, very few materials can be defined as tall and thin in the case of a vertical configuration, as the deposition techniques often used (PECVD/LPCVD) are meant for films in the couple of micron range. In the following we will investigate the properties of the materials used but also the fabrication feasibility for both configurations.

    document

  9. Development of Sensor Tights with Integrated Inertial Measurement Units for Injury Prevention in Football, Design4Health
    Paddy French (Ed.);
    Design4Health, , July 2020.
    Keywords: ... wearable sensors; injury prevention; smart clothing.

    Abstract: ... In elite European football, 6 to 7 hamstring muscle injuries occur per team per season, which results in an absence of 14 to 180 days (Ekstrand et al. 2017). These injuries occur typically in the last part of a training or match. This implies that the accumulation of demanding actions is an important factor for hamstring injury risk. In current practice, physical player load is measured at the field by deriving the global location of the player with GPS and RFID systems. However, these systems are not able to monitor leg movement and to distinguish demanding actions like kicking, cutting and jumping.In order to monitor these actions in the field, a novel design is being developed. The design consists of five sensor nodes with IMUs (Inertial measurement units), integrated in sports tights. IMUs can measure linear accelerations, angular velocities and magnetic fields in three directions. From these measurements, 3D kinematics of the lower limbs can be derived. An iterative design approach is used to develop the tights. Four prototypes will be developed. Each prototype is tested in a football specific setting, to identify areas of improvement from a technical point of view as well as from a user’s perspective. The final aim of this research is to develop sensor tights that can be worn unobtrusively by football players in the field. Real-time data are retrieved by the coach. This allows the coach to intervene when there is a high injury risk.

    ISBN: 978-1-8381117-0-0

  10. Enhancing silicon's functionality with additional sensing/actuating layers
    PJ French (Ed.);
    IEEE, IEEE CAS 2020, , October 2020. DOI: DOI: 10.1109/CAS50358.2020.9268034
    Keywords: ... Silicon, Temperature measurement, Graphene, Sensors, Semiconductor device measurement, Perpendicular magnetic anisotropy, Magnetoresistance.

    Abstract: ... This Silicon has long been known as an excellent material for electronic circuits and also for sensing and actuating. Effects such as the piezoresistive and Hall effects have long been used for sensing. However, there are a number of effects not found in silicon, such as piezoelectric and magnetoresistive. If these can be combined with electronic circuits the benefits of both sides can be combined. Many chemical sensors require additional layers as traps for ions or to react with the compound of interest. This paper will show how additional materials can enhance the silicon operation, but also discuss process compatibility issues.

  11. Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing
    Y. Xin; G. Pandraud; Y. Zhang; P. French;
    Sensors,
    Volume 19, pp. 12, 2019. DOI: 10.3390/s19153383
    Keywords: ... E-beam lithography, evanescent sensing, single-mode, SU-8 photoresist, taper, vertical waveguide.

    Abstract: ... In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide's surface, aimed at increasing the sensitivity by enlarging the sensing areas. We performed simulations to monitor the influence of different parameters on the waveguide's performance, including its height and width. E-beam lithography was used to fabricate the structure, as this one-step direct writing process enables easy, fast, and high-resolution fabrication. Furthermore, it reduces the sidewall roughness and decreases the induced scattering loss, which is a major source of waveguide loss. Couplers were added to improve the coupling efficiency and alignment tolerance, and will contribute to the feasibility of a plug-and-play optical system. Optical measurements show that the transmission loss is 1.03 ± 0.19 dB/cm. The absorption sensitivity was measured to be 4.8 dB per refractive index unit (dB/RIU) for saline solutions with various concentrations.

  12. Heart Rate Extraction in a Headphone Using Infrared Thermometry
    Ger de Graaf; Daniel Kuratomi Cruz; Jaap Haartsen; Frank Hooijschuur; Paddy French;
    IEEE Transactions on Biomedical Circuits and Systems,
    pp. 1--1, July 2019. DOI: 10.1109/tbcas.2019.2930312
    Abstract: ... In this work we have analyzed, built and tested a novel system that uses infrared differential thermometry to detect the heart rate in the auricle. The sensor system was fitted into a commercial headphone since this work is a first step into integration of the system in a Bluetooth headset. Infrared thermography is a non-contact technique with improved user comfort and low power consumption. Positive results have been obtained after extraction of the frequency features of the bioheat transfer signal on test persons in rest. The heart rate is a vital indicator of the health state of an individual. By continuously monitoring it, the fitness and health of the cardiovascular system of a user can be analyzed and impending problematic health episodes could be addressed better.

  13. Vertical SiC taper with a small angle fabricated by slope transfer method
    Yu Xin; Gregory Pandraud; Paddy J. French;
    Electronics Letters,
    Volume 55, Issue 11, pp. 661--663, May 2019. DOI: 10.1049/el.2019.0232
    Abstract: ... In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can bring the coupling efficiency in SiC waveguides to 80% (around 1 dB loss) or better from around 10% (10 dB loss) without taper. It further increases the alignment tolerance at the same time, which ensures the successful development of a plug-and-play solution for optical sensing. This is the first reported taper made in SiC.

  14. Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing
    Yu Xin; Gregory Pandraud; Yongmeng Zhang; Paddy French;
    Sensors,
    Volume 19, Issue 15, pp. 3383, August 2019. DOI: 10.3390/s19153383

  15. Vertical SiC taper with a small angle fabricated by slope transfer method
    Y Xin; G Pandraud; P.J. French;
    Electronics Letters,
    Volume 55, pp. 661-663, 2019. DOI: 10.1049/el.2019.0232
    Abstract: ... In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can bring the coupling efficiency in SiC waveguides to 80% (around 1 dB loss) or better from around 10% (10 dB loss) without taper. It further increases the alignment tolerance at the same time, which ensures the successful development of a plug-and-play solution for optical sensing. This is the first reported taper made in SiC.

  16. HEART RATE EXTRACTION IN A HEADPHONE USING INFRARED THERMOMETRY
    G. de Graaf; D. Kuratomi Cruz; J. Haartsen; F. Hooijschuur; P. French;
    IEEE Transactions on Biomedical Circuits and Systems.,
    Volume 13, Issue 5, pp. 1052-1062, 10 2019. DOI: 10.1109/TBCAS.2019.2930312
    Keywords: ... IR Sensor, heart rate, ear piece.

    Abstract: ... The heart rate is a vital indicator of the health state of an individual. By continuously monitoring it, the fitness and health of the cardiovascular system of a user can be analyzed and impending problematic health episodes could be addressed better. Existing techniques to measure heart rate, such as electrocardiogram or photoplethysmography, are either uncomfortable for the user, or are not low-power or sensitive to motion artifacts. Infrared thermography is a non-contact technique with improved user comfort and low power consumption. In this paper, we have analyzed, built, and tested a novel system that uses infrared differential thermometry to detect the heart rate in the auricle. The sensor system was fitted into a commercial headphone since this paper is a first step into integration of the system in a Bluetooth headset. To the best of our knowledge, there has been no previous work on the detection of the heart rate signal in the ear using infrared thermometry. Positive results have been obtained after extraction of the frequency features of the bioheat transfer signal on test persons in rest.

  17. Analyzing sweat to determine state of fatigue
    Miguel Thomas; Andre Bossche; Pim Groen; Jeroen Bastemeijer; Annemarijn Steijlen; Paddy French;
    In Proceedings SSI conference,
    Barcelona, Spain, April 2019.

  18. Analyzing sweat to determine state of fatigue
    Paddy French (Ed.);
    Barcelona, Spain: VDE VERLAG GMBH, Berlin, SSI Conference, , April 2019. ISBN 978-3-8007-4919-5.
    Keywords: ... Sweat, fatigue surface devices.

    Abstract: ... Sweating is a normal reaction of the body to exercise. Although much of sweat is water, there are many other components. These components can be an indication of the condition of the athlete. Increase of elements and salts in the tissue will also work their way through to the sweat. Measurement directly in tissue can be an excellent indicator, but a non-invasive approach is simpler to use and safer. Concentrations in sweat can also be an indication that the athlete is in danger of collapse. This paper looks into the components in sweat and how this change with exercise. The aim is to develop a simple, wearable system able to warn the athlete of the impending danger and prevent a potential accident.

    document

  19. IC compatible materials for sensors
    Paddy French (Ed.);
    Osaka, Japan: Scientific.net, Advanced Materials, Sciences and Engineering, , July 2019.
    Abstract: ... In cases where we can achieve integrated sensors using only layers already in the standard IC layers, the only compatibility issues may be the requirement for additional etch steps. In cases where additional layers are required, either for sensing or protection, we have to consider the compatibility of the materials. These issues can be thermal budget during processing, mechanical stress or chemical contamination. In some cases, this led to the option of hybrid, where the sensor and electronics are on separate chips, but combined in a single package. This paper will examine the development of integrated sensors, and the issues combining additional layers with a standard IC process.

  20. Coatings for sensing and protection in silicon sensors
    P.J. French;
    Advanced Materials Letters,
    Volume 9, Issue 6, pp. 392--399, May 2018. DOI: 10.5185/amlett.2018.1892
    Keywords: ... silicon sensor; coatings; harsh environments.

    Abstract: ... Silicon is an excellent material for sensing. Sensors for all signal domains can be realised, and in many cases, integrated with read-out electronics. However, in some applications an addition layer may be required for sensing and/or to protect the silicon device. Piezoelectric, polymers or magneto resistive layers can be added to expand the options of silicon. In the case of some implants, the polymer is used to protect the body from the device. In harsh chemical environments, the coating layer can be used to protect the silicon and in some cases also function as the sensor. Layers such as SiC represent a chemically resilient layer to protect the layers below, but this layer can also be used as a sensing layer. Atomic layer deposition (ALD) provides thin uniform, and pinhole free layers which can be used as protection and sensing. Other materials include graphene. In cases such as extreme temperature, it is more difficult to protect the silicon device, and in these cases the electronics must be isolated from the heat. This paper will show examples of how coating layers can enhance the sensing capabilities of silicon devices and also provide protection.

  21. Microsystems for implants
    Paddy French (Ed.);
    World Sensor Forum, China, , 2018.

  22. Micro-optics for microfluidics in biomedical applications
    Paddy French (Ed.);
    Toyama, Japan: PIERS, , 2018.

  23. Surface functionalisation of SU8 vertical waveguide for biomedical sensing: bacterial diagnostic
    Paddy French (Ed.);
    Graz, Austria: Eurosensors, , September 2018.
    Keywords: ... SU-8; vertical waveguide; biomedical sensing; surface functionalization.

    Abstract: ... In this paper, we present an SU-8 based evanescent waveguide with a vertical structure as a biomedical sensor. The waveguide is designed vertically to generate evanescent waves on both left and right surfaces for sensing. It is fabricated by E-beam lithography with only one-step process which has the advantage of a better surface quality compared with commonly used dry etching methods. Furthermore, fabrication time and cost is cut down greatly. The surface of the designed waveguide can be functionalized with antibodies to immobilize specific bacteria on it. After surface functionalization and incubation with E. coli solutions of different concentrations, the waveguides absorption was measured. The results demonstrate that the waveguide is sensitive to E. coli concentration changes. In addition, tapers were designed and added to the waveguide to relieve the alignment tolerance for the aim of making a plug-and-play bedside diagnostic system.

    document

  24. Horizontal and vertical tapered waveguides for evanescent wave sensing
    Y. Xin; X.W. Meng; G. Pandraud; L.S. Pakula; P.J. French;
    In The Conference for ICT-Research,
    Netherlands, NWO, STW and IPN, March 2017.

  25. Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication
    Y. Xin; G.Pandraud; A. van Langen-Suurling; P.J. French;
    In Ravinder Dahiya, Srinvas Tadigadapa (Ed.), IEEE Sensors,
    Glasgow, UK, IEEE, IEEE Sensors Council, pp. 4, November 2017.
    Keywords: ... vertical waveguide, SU-8, Evanescent wave.

    Abstract: ... In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

    ISBN: 978-1-5090-1012-7

  26. Design and fabrication of two types of tapered waveguides for evanescent sensing
    Y. Xin; Y.M. Zhang; G. Pandraud; P.J. French;
    In International Smart System Integration,
    Cork, Ireland, mesago, March 2017.

  27. A Novel Free-standing Evanescent Waveguide for Sensing
    X.W. Meng; Y. Xin; P. J. French;
    In The COMSOL Conference,
    Rotterdam, NL, COMSOL, October 2017.

  28. Heart rate monitoring using infrared thermometry in an earpiece
    D. Kuratomi Cruz; G. de Graaf; J.C. Haartsen; F. Hooijschuur; P.J. French;
    In Ravinder Dahiya, Srinivas Tadigadapa (Ed.), 2017 IEEE SENSORS,
    IEEE, IEEE, pp. 3, November 2017.
    Keywords: ... Heart rate; Infrared Thermometry; Wavelet Transform..

    Abstract: ... Heart rate is a key factor in cardiovascular system monitoring and sports science. Some recent commercial applications use sensors in the ear but are faced with motion artifacts which corrupts the signal. Infrared thermography is a non-contact technique and may minimize motion effects with better user comfort and lower power consumption. We propose a novel system that uses infrared differential thermometry to detect the heart rate in the auricle. The signal analysis is performed using a continuous wavelet transform which extract frequency features of the bioheat transfer waveforms. Preliminary results taken from the neck provide proof of concept and similar results from the ear are expected.

    ISBN: 978-1-5090-1012-7

  29. Precision in Harsh Environments
    P.J. French; G. Krijnen; F. Roozeboom;
    Microsystems & Nanoengineering:Nature,
    Volume 2, pp. 16048, Oct 2016. DOI: 10.1038/micronano.2016.48
    Abstract: ... Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnetic noise, radiation, or high vacuum. In the field of actuators, the devices must maintain stringent accuracy specifications for displacement, force, and response times, among others. These new requirements present additional challenges in the compensation for or elimination of cross-sensitivities. Many state-of-the-art precision devices lose their precision and reliability when exposed to harsh environments. It is also important that advanced sensor and actuator systems maintain maximum autonomy such that the devices can operate independently with low maintenance. The next-generation microsystems will be deployed in remote and/or inaccessible and harsh environments that present many challenges to sensor design, materials, device functionality, and packaging. All of these aspects of integrated sensors and actuator microsystems require a multidisciplinary approach to overcome these challenges. The main areas of importance are in the fields of materials science, micro/nano-fabrication technology, device design, circuitry and systems, (first-level) packaging, and measurement strategy. This study examines the challenges presented by harsh environments and investigates the required approaches. Examples of successful devices are also given.

  30. Generating the third dimension in flatland
    P.J. French;
    In Optofluidics 2016,
    Beijing, China, OSA, July 2016.

  31. Flexible Microsystems
    P.J. French; P.M. Sarro;
    In Proceeding Smart Systems Integration,
    Munich, Germany, mesago, pp. 181-188, March 2016.

  32. Detection of Anastomotic Leakage after Colon Surgery by Evanescent Waveguide
    Y. Xin; G. Pandraud; L. Pakula; P.J. French;
    In The Conference for ICT-Research,
    Netherlands, NOW, STW and IPN, March 2016.

  33. Optimisation of Bio-medical Optical Waveguide
    Y. Xin; G. Pandraud; L. Pakula; B. Morana; P.J. French;
    In 2016 IEEE NEMS Conference,
    Matsushima, Japan, IEEE, April 2016.

  34. Flexible Microsystems
    P.J. French; P.M. Sarro;
    In Proceeding Smart Systems Integration,
    Munich, Germany, mesago, pp. 181-188, March 2016.

  35. Design, Fabrication and Experiments of a Novel Standing SU-8 Evanescent Waveguide for Sensing
    Y.M. Zhang; Y. Xin; G. Pandraud; P.J. French;
    In MicroNano Conference,
    Netherlands, MinacNed, December 2016.

  36. Novel fabrication of 3D taper coupler of optical sensing waveguide
    Y. Xin; Y.M. Zhang; G. Pandraud; P.J. French;
    In Sensor Technology Conference Sense of Contact,
    Netherlands, December 2016.

  37. Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides
    Yu Xin; Gregory Pandraud; Lukasz S. Pakula; Bruno Morana; Paddy J. French;
    In 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
    April 2016. DOI: 10.1109/NEMS.2016.7758311
    Abstract: ... As a promising material in MEMS field, SiC is widely used to fabricate sensors in many applications. Considering its fabrication potential and optical properties, SiC was chosen as the core material of evanescent waveguide sensor in this paper. LPCVD and PECVD deposition were combined in fabricating the waveguide. To reduce the coupling loss and misalignment effect, 3D tapered couplers were designed to be added to the input and output of the waveguide and a novel slope transfer method was investigated to fabricate the taper slope. In initial experiments we have achieved a slope of 16.7°.

  38. Micromachined cochlear implant
    P.J. French; N. Lawand; L. Pakula; H. van Zeijl; J.H.M. Frijns; J. Braire;
    In Proceeding Smart Systems Integration,
    Copenhagen, Denmark, mesago, pp. 265-271, March 2015.

  39. Optimisation of Bio-medical Optical Waveguide
    Y. Xin; A. Purniawan; L. Pakula; G. Pandraud; P.J. French;
    In International Smart System Integration,
    Copenhagen, Denmark, mesago, March 2015.

  40. Precision in Harsh Environments
    P.J. French;
    In Microsystems & Nanoengineering Summit 2015,
    Beijing, China, IECAS, Aug 2015.

  41. Detection of Anastomotic Leakage after Colon Surgery by Evanescent Waveguide
    Y. Xin; A. Purniawan; L. Pakula; G. Pandraud; P.J. French;
    In The Conference for ICT-Research,
    Netherlands, NOW, STW and IPN, March 2015.

  42. Integrated Micromachining
    P.J. French;
    In The 7th International Conference on Sensors ASIASENSE 2015,
    Surabaya, Indonesia, ICOMMET, Oct 2015.

  43. Optical Waveguide with Freestanding Grating Couplers
    Y. Xin; A. Purniawan; G. Pandraud; L. Pakula; P. J. French;
    In IEEE Photonics Conference,
    Twente, the Netherlands, IEEE, Nov 2014.

  44. Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra
    P.N.A. Belmonte; D.W. de Lima Monteiro; R.F. de Oliveira Costa; P.J. French; G. Pandraud;
    In Micro-optics 2014,
    Brussels, Belgium, SPIE, pp. 1-7, Apr 2014.

  45. Simulation of Bio-medical Waveguide in Mechanical and Optical Fields
    Y. Xin; A. Purniawan; L. Pakula; G. Pandraud; P. J. French;
    In The COMSOL Conference,
    Cambridge, UK, COMSOL, Sep 2014.

  46. A freestanding thin film evanescent waveguide sensor for biomedical application
    Y. Xin; S.A. van’t Hof; A. Purniawan; L.S. Pakula; G. Pandraud; P.J. Trimp; P.J. French;
    In Sensor Technology Conference Sense of Contact,
    The Netherlands, March 2014.

  47. Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra
    Belmonte, PNA; de Lima Monteiro, DW; de Oliveira Costa, RF; French, PJ; Pandraud, G;
    In Micro-Optics 2014 Vol. 9130. Proceedings of SPIE- International Society for Optical Engineering,
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  48. Reliable inkjet-printed interconnections on foil type Li-ion batteries
    N.B. Palacios Aguilera; H.A. Visser; A. Sridhar; U. Balda-Irurzun; L.D. Vargas Llona; J. Zhou; R. Akkerman; P.J. French; A. Bossche;
    IEEE Transactions on Device and Materials Reliability,
    Volume 13, Issue 1, pp. 136-145, 2013.

  49. An improved system approach towards future cochlear implants
    N.S. Lawand; W. Ngamkham; G. Nazarian; P.J. French; W.A. Serdijn; G.N. Gaydadjiev; J.J. Briaire; J.H.M. Frijns;
    In Proc. 35th Annual International Conference of the IEEE EMBS (EMBC),
    Osaka, Japan, IEEE, pp. 5163-5166, July 3-7 2013.
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  50. Electrochemical study of potential materials for cochlear implant electrode array
    N.S. Lawand; V. Lopez; P.J. French;
    In The COMSOL Conference,
    Rotterdam, the Netherlands, COMSOL, Oct 2013.

  51. Titanium nitride (TiN) as a gate material in BiCMOS devices for biomedical implants
    N.S. Lawand; H.W. van Zeijl; P.J. French; JJ. Briaire; J.H.M. Frijns;
    In IEEE Sensors,
    Baltimore, USA, IEEE, Nov 2013.

  52. Selectivity and reusability study of functionalized ALD TiO2 evanescent wave sensors
    A. Purniawan; P.J. French; M.J.H. Almering; G. Pandraud; P.M. Sarro;
    In IEEE Sensors,
    Baltimore, USA, IEEE, Nov 2013.

  53. An improved system approach towards future cochlear implants
    N.S. Lawand; W. Ngamkham; G. Nazarian; P.J. French; W.A. Serdijn; G.N. Gaydadjiev; JJ. Briaire; J.H.M. Frijns;
    In IEEE EMBS,
    Osaka, Japan, IEEE, pp. 5163-5166, July 2013.

  54. Fabrication and optical measurements of a TiO2-ALD evanescent waveguide sensor
    A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    Sensors and Actuators A,
    Volume 188, pp. 127-132, Dec. 2012. DOI 10.1016/j.sna.2012.05.037.

  55. Piezo-thermal probe array for high throughput applications
    A. Gaitas; P.J. French;
    Sensors and Actuators A: Physical,
    Volume 186, pp. 125-129, 2012.

  56. Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor
    A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 188, pp. 127-132, 2012.

  57. Integrated MEMS: Opportunities \& Challenges
    P.J. French; P.M. Sarro;
    M Kahrizi (Ed.);
    Intech, , pp. 253-276, 2012.

  58. Integrated MEMS: Opportunities & Challenges
    P.J. French; P.M. Sarro;
    In Micromachining Techniques for Fabrication of Micro and Nano Structures,
    InTech, Feb. 2012. DOI 10.5772/31493.

  59. Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
    A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    In Proc. SPIE: Optical Sensing and Detection II,
    Brussels, Belgium, pp. 1-6, Apr 2012. DOI 10.1117/12.922498.

  60. Long term cochlear implant electrode improvement for stimulation and sensing neuronal activity
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceedings 6th International Conference on Sensing Technology,
    Kolkata, India, IEEE, Dec 2012.

  61. TiN as an microelectrode material for nerve stimulation and sensing
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Annual IEEE EMBS Micro and Nanotechnology in Medicine Conference,
    Hawaii, USA, IEEE, Dec 2012.

  62. Titanium nitride as a micro-electrode material for auditory nerve stimulation and sensing purposes
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceedings 4th International Conference on Neuroprosthetic Devices,
    Freiburg, Germany, NeuroTechZone, Nov 2012.

  63. Cochlear implant electrode development for improved implants
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proc. Conference for ICT-Research in the Netherlands (ICT.OPEN),
    Rotterdam, the Netherlands, Oct 2012.

  64. Sub-mm size opto-mechanical couplings for fast rotational OCT-scanning
    A.J. Loeve; G. de Haan; X. Huang; R. Draisma; J. Dankelman; P.J. French;
    In Proceedings SMIT 2012,
    Barcelona, Spain, September 2012.

  65. Next generation sensors & actuators in medicine
    P.J. French;
    In 7th International Symposium on objective measures in auditory implants,
    Amsterdam, the Netherlands, September 2012.

  66. Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceedings Eurosensors,
    Krakow, Poland, September 2012.

  67. Cochlear implant electrode development for improved implants
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceeding EMBS,
    San Diego, USA, August 2012.

  68. Flexible implantable sensors for long term blood pressure and blood flow measurements
    L. Pakula; P.J. Trimp; P.J. French;
    In Proceedings APCOT,
    Nanjing China, July 2012.

  69. Development of microelectrode material for nerve stimulation using TiN
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceeding IC-MAST-2012,
    Budapest, Hungary, May 2012.

  70. Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
    A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    In SPIE Photonics Europe Conference,
    Brussels, Belgium, SPIE, April 2012.

  71. A method to calibrate spring constant of cantilevers used in scanning force microscopy
    A. Bossche; J.F.L. Goosen; H. Sadeghian Marnani; C.K. Yang; A. van Keulen; P.J. French;
    Patent, 2005687, OCT-10-039 2012.

  72. Experimental characterization of roughness induced scattering losses in PECVD SiC waveguides
    G. Pandraud; E. Margallo-Balbas; C.K. Yang; P.J. French;
    Journal of Lightwave Technology,
    Volume 29, Issue 5, pp. 744-749, 2011. DOI 10.1109/JLT.2011.2108264.

  73. PECVD silicon carbide surface micriomachining technology and selected MEMS applications
    V. Rajaraman; L. Pakula; H. Yang; P.J. French; P.M. Sarro;
    International Journal of Advances in Engineering Sciences and Applied Mathematics,
    pp. 1-7, 2011.

  74. Experimental characterization of roughness induced scattering losses in PECVD SiC waveguides
    G. Pandraud; E. Margallo-Balbás; C.K. Yang; P.J. French;
    Journal of Lightwave Technology,
    Volume 29, Issue 5, pp. 744-749, 2011.

  75. Silicon probes for cochlear auditory nerve stimulation and measurement
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    Advanced Materials Research,
    Volume 254, pp. 82-85, 2011.

  76. Piezojunction effect: Stress influence on bipolar transistors
    J.F. Creemer; P.J. French;
    In Ultra-thin chip technology and applications,
    New York, Springer, 2011. DOI 10.1007/978-1-4419-7276-7.

  77. An investigation on ALD thin film evanescent waveguide sensor for biomedical application
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In Biomedical Engineering Systems and Technologies (BIOSTEC 2010), Communications Computer and Information Science,
    Berlin, Springer Verlag, 2011. DOI 10.1007/978-3-642-18472-7_15.

  78. TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 2506-2509, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969754.

  79. Post-operative wireless implants for monitoring, detection and treatment
    D. Subbaiyan; L. Pakula; P.J. French; J.F. Lange; J. Jeekel; G.J. Kleinrensink; H.J.C. Sterenborg; D.J. Robinson; F. van Zaane; J.G. Kaptein; K. Tang; G. Pandraud; J. van Veen; M. Draaier; K.A. Vakalapoulos;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 2192-2195, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969390.

  80. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbas; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1554-1557, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969736.

  81. Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
    V. Rajaraman; I. Sabageh; P.J. French; G. Pandraud; E. Cretu;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 647-650, Sep. 2011. DOI 10.1016/j.proeng.2011.12.161.

  82. All ALD TiO2-Al2O3-TiO2 horizontal slot waveguides for optical sensing
    A. Purniawan; P.J. French; G. Pandraud; Yujian Huang; P.M. Sarro;
    In Proc. IEEE SENSORS 2011 Conference,
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  83. Silicon probes for cochlear auditory nerve stimulation and measurement
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In International Conference on Materials for Advanced Technologies (ICMAT 2011),
    Singapore, June 2011.

  84. Implantable sensors: Safety and Efficiency
    P.J. French;
    In Proceedings EUROMAT 2011,
    Montpellier, France, September 2011.

  85. Shapeable Li-ion batteries as substrate: printed electronics reliability
    N.B. Palacios-Aguilera; U. Balda Irurzun; A. Sridhar; J. Bastemeijer; J.R. Mollinger; R. Akkerman; J. Zhou; P.J. French; A. Bossche;
    In International Conference on Electronics Packaging proceedings,
    Nara, Japan, pp. 844-848, April 2011.

  86. An Evanescent Waveguide Sensor Based Diagnostic of Post-Colon Surgery
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In Sensor Technology Conference Sense of Contact,
    Zeist, the Netherlands, April 2011.

  87. Post-operative wireless implants for monitoring, detection and treatment
    D. Subbaiyan; L. Pakula; P.J. French; J.F. Lange; J. Jeekel; G.J. Kleinrensink; H.J.C. Sterenborg; D.J. Robinson; F. van Zaane; J.G. kaptein; K. Tang; G. Pandraud; J. van Veen; M Draaier; K.A. Vakalapoulos;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, IEEE, pp. 2192-2195, 2011.

  88. Evanescent Waveguide Sensor For Post Anastomosis Evaluation
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In J. Dankelman; P Veltink; T. van Walsum (Ed.), 3rd Dutch Biomedical Engineering,
    BME, pp. 1-1, 2011.

  89. Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
    V. Rajaraman; I. Sabageh; P.J. French; G. Pandraud; E. Cretu;
    In Proceedings Eurosensors XXV,
    Athens, Greece, Elsevier, pp. 4-7, September 2011.

  90. Limitations of Gluing as a Replacement of Ultrasonic Welding: Attaching Lithium Battery Contacts to PCBs
    N.B. Palacios-Aguilera; J.R. Mollinger; J. Bastemeijer; J. Zhou; P.J. French; A. Bossche;
    In 6th International Microsystems, Packaging Assembly and Circuits Technology (IMPACT),
    Taipei, Taiwan, IEEE, pp. 251-254, 2011.

  91. Design and fabrication of stiff silicon probes: A step towards sophisticated cochlear implant electrodes
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceedings Eurosensors XXV,
    Athens, Greece, IEEE, pp. 1012-1015, September 2011.

  92. All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing
    A. Purniawan; P.J. French; G. Pandraud; Y. Huang; P.M. Sarro;
    In E. Lewis; T. Kenny (Ed.), Proceedings IEEE Sensors,
    Limerick, Ireland, IEEE, pp. 1954-1957, October 2011.

  93. Micromachined Silicon probes for cochlear auditory nerve stimulation
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In MicroNano Conference 2011,
    Ede, The Netherlands, NanotextNL, pp. 1-1, November 2011.

  94. Magnetic Microheaters for Cell Separation Manipulation and Lysing
    A. Gaitas; P.J. French;
    In S. Xia; L-S Fan (Ed.), 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11),
    Beijing, China, IEEE, pp. 1184-1187, June 2011.

  95. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbás; P.J. French; P.M. Sarro;
    In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, IEEE, pp. 1554-1557, June 2011.

  96. TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS),
    Beijing, China, IEEE, pp. 2506-2509, June 2011.

  97. Micromachining: from micro to nano
    P.J. French;
    In Proceedings BIT’s 1st Annual World Congress of Nano-S&T,
    Dalian, China, BIT, pp. 1-4, October 2011.

  98. Design and simulation of silicon electrodes for cochlear auditory nerve stimulation
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In 6th International Conference on Microtechnologies in Medicine and Biology (MMB 2011),
    Lucerne, Switzerland, MMB, pp. 255-256, May 2011.

  99. Piezoresistive Probe Array for High Throughput Applications
    A. Gaitas; P.J. French;
    In D Tsoukalas; C Tsamis (Ed.), Eurosensors XXV,
    Elsevier, pp. 1-4, 2011.

  100. An investigation on ALD thin film evanescent waveguide sensor for biomedical application
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In 3rd International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2010),
    Valencia, Spain, Springer Verlag, pp. 189-196, 2011.

  101. Development of Probes for Cochlear Implants
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In Proceedings IEEE Sensors,
    Limerick, Ireland, IEEE, pp. 1827-1830, October 2011.

  102. Sensitivity Measurement of TiO2-ALD Evanescent Waveguide Sensor
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In SAFE Conference,
    Veldhoven, the Netherland, November 2011.

  103. PECVD silicon carbide surface micriomachining technology and selected MEMS applications
    V. Rajaraman; L.S. Pakula; H. Yang; P.J. French; P.M. Sarro;
    International journal of advances engineering sciences and applied mathematics,
    Volume 2, Issue 1-2, pp. 28-34, 2010. DOI 10.1007/s12572-010-0020-9.

  104. Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method
    H. Sadeghian; C.K. Yang; K. Babaei Gavan; J.F.L. Goosen; EW.J.M. van der Drift; H.S.J. van der Zant; A. Bossche; P.J. French; F. van Keulen;
    Journal of Micromechanics and Microengineering,
    Volume 20, Issue 10, pp. 105027-105036, 2010.

  105. Miniature 10 kHz thermo-optic delay line in silicon
    E. Margallo Balbas; M. Geljon; G. Pandraud; P.J. French;
    Optics Letters,
    Volume 35, Issue 23, pp. 4027-4029, 2010. http://www.opticsinfobase.org/abstract.cfm?URI=ol-35-23-4027.

  106. Smart sensors: advantages and pitfalls
    P.J. French;
    NATO Science for Peace and Security Series. B: Physics and Biophysics,
    pp. 249-259, 2010.

  107. Effects of size and defects on the elasticity of silicon nanocantilevers
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; A. Bossche; U. Staufer; P.J. French; F. van Keulen;
    Journal of Micromechanics and Microengineering,
    Volume 20, Issue 064012, pp. 1-8, 2010.

  108. Impact of morphology on light transport in cancellous bone
    E. Margallo Balbas; P. Taroni; A. Pifferi; H.J. Koolstra; L.J. van Ruijven; P.J. French;
    Physics in Medicine and Biology,
    Volume 55, Issue 17, pp. 4917-4931, 2010.

  109. A telemetric light delivery system for metronomic photodynamic therapy (mPDT) in rats
    F. van Zaane; D. Subbaiyan; A. van der Ploeg; H.S. de Bruijn; E. Margallo Balbas; G. Pandraud; HJ.C.M. Sterenborg; P.J. French; D.J. Robinson;
    Journal of Biophotonics,
    Volume 3, Issue 5-6, pp. 347-355, 2010.

  110. Microlamp for in situ tissue spectroscopy for the dosimetry of photodynamic therapy
    J. Amor-rio; E. Margallo Balbas; B. Song; G. Pandraud; D. Subbaiyan; F. van Zaane; D.J. Robinson; H.W. Zandbergen; P.J. French;
    Procedia Engineering,
    Volume 5, pp. 323-326, 2010.

  111. Design and modeling of a flexible contact mode piezoresistive detector for a time based acceleration sensing
    V. Rajaraman; Hau Bou sing; L.A. Rocha; P.J. French; K.A.A. Makinwa;
    Procedia Engineering,
    Volume 5, pp. 1063-1066, 2010.

  112. Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability
    H. Sadeghian Marnani; D. Yang; J.F.L. Goosen; A. Bossche; P.J. French; F. van Keulen;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 162, pp. 220-224, 2010.

  113. Two types of silicon biomimetics MEMS gyroscopes
    w Cui; G. Pandraud; D.H.B. Wicaksono; Y. Chen; V. Rajaraman; P.J. French;
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  114. Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor
    A. Purniawan; G. Pandraud; P.J. French; E. Margallo Balbas; P.M. Sarro;
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  115. Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
    I. Sabageh; V. Rajaraman; E. Cretu; P.J. French;
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  116. Piezojunction effect: stress influence on bipolar transistors
    J.F. Creemer; P.J. French;
    J. Burghartz (Ed.);
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  117. Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer
    V. Rajaraman; G. de Graaf; P.J. French; K.A.A. Makinwa; R.F. Wolffenbuttel;
    {van Honschoten}, J; H Verputten; H Groenland (Ed.);
    MME, , pp. 20-23, 2010.

  118. Biomimetics learning from nature to make better transducers
    P.J. French; D.H.B. Wicaksono;
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  119. Modeling and excitation of a thermo optical delay line for optical coherence tomography
    M. Geljon; E. Margallo Balbas; G. Pandraud; P.J. French;
    In Proc. IEEE Sensors,
    Waikoloa, Hawai, USA, pp. 991-994, 2010. ISBN 978-1-4244-8168-2; DOI 10.1109/ICSENS.2010.5690932.

  120. Pull in time based acceleration sensing
    Hau Bou sing; V. Rajaraman; L.A. Machado da Rocha; P.J. French;
    In P.J. French (Ed.), STW.ICT conference on Research in Information and Communication Technology 2010,
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  121. Biomimetics: learning from nature to make better sensors
    P.J. French; D.H.B. Wicaksono;
    In {De Lima Monteiro}, D; O Bonnaud; N Morimoto (Ed.), Microelectronics Technology and Devices - SBMicro 2009,
    Electrochemical Society, pp. 193-202, 2010.

  122. Li-ion shapeable batteries: a flexible platform for system-in-package
    N.B. Palacios Aguilera; A. Sridhar; U. Balda Irurzun; L. Giangrande; J. Bastemeijer; J.R. Mollinger; D.J. Van Dijck; J. Zhou; P.J. French; A. Bossche;
    In {French et al}, P (Ed.), Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010,
    STW, pp. 131-135, 2010.

  123. Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
    I. Sabageh; V. Rajaraman; E. Cretu; P.J. French;
    In {French et al}, PJ (Ed.), Proceedings 13th Workshop on Semiconductors Advances for Future Electronics,
    STW, pp. 143-147, 2010.

  124. TiO2 ALD nanolayer as evanescent waveguide for biomedical sensor applications
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In {Jakoby et al}, B (Ed.), Proceedings Eurosensor XXIV Conference,
    Elsevier, pp. 1131-1135, 2010.

  125. Modeling and excitation of a thermo optical delay line for optical coherence tomography
    M. Geljon; E. Margallo Balbas; G. Pandraud; P.J. French;
    In T Kenny; G Fedder (Ed.), Proceedings IEEE Sensors 2010 Conference,
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  126. Time domain optical coherence tomography system with integrated delay line for surgical guidance applications
    M. Geljon; E. Margallo Balbas; G. Pandraud; D.H.B. Wicaksono; P.J. French;
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  127. Quantitative analysis and decoupling of mass and stiffness effects in cantilever mass sensors
    H. Sadeghian Marnani; C.K. Yang; H. Goosen; A. Bossche; P.J. French; F. van Keulen;
    In {Fedder et al}, G (Ed.), Proceedings Sensors 2010,
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  128. Micro-optics assembly in dental drill as a platform for imaging and sensing during surgical drilling
    D.H.B. Wicaksono; E. Margallo Balbas; G. Pandraud; P.J. French; P. Breedveld; J. Dankelman;
    In T Kenny; G Fedder (Ed.), Proceedings of the 9th IEEE Sensors Conference 2010,
    IEEE, pp. 265-268, 2010.

  129. Design and modeling of a flexible contact mode piezoresistive detector for time based acceleration sensing
    V. Rajaraman; Hau Bou sing; Luis Rocha; P.J. French; K.A.A. Makinwa;
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  130. Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
    I. Sabageh; V. Rajaraman; E. Cretu; P.J. French;
    In {van Honschoten}, J; H Verputten; H Groenland (Ed.), 21st Micromechanics and Micro systems Europe 2010,
    MME, pp. 96-99, 2010.

  131. To integrate or not to integrate
    P.J. French; P.M. Sarro;
    In G. Fedder; T. Kenney (Ed.), Proceedings IEEE Sensors 2010,
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  132. Evaluation of encapsulation materials for glued Li ion battery contacts
    N.B. Palacios Aguilera; L. Giangrande; J. Zhou; J.R. Mollinger; J. Bastemeijer; P.J. French; A. Bossche;
    In {French et al}, P (Ed.), Proceedings of 13th SAFE Workshop of the STW.ICT Conference 2010,
    STW, pp. 127-130, 2010.

  133. Al2O3 nanolayer as evanescent waveguide for biomedical sensor application
    A. Purniawan; Y. Huang; G. Pandraud; P.J. French; P.M. Sarro;
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    BIODEVICES, pp. 44-48, 2010. CD.

  134. ar-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membranes: Part 1. Optical absorptivity
    F. Jutzi; D.H.B. Wicaksono; G. Pandraud; N. de Rooij; P.J. French;
    Sensors and actuators a-physical,
    Volume 152, pp. 119-125, 2009.

  135. Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane: Part 2: Thermal property, and sensitivity
    F. jutzi; D.H.B. Wicaksono; G. Pandraud; N. de Rooij; P.J. French;
    Sensors and actuators a-physical,
    Volume 152, pp. 126-138, 2009.

  136. Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of physics: conference series,
    Volume 187, 2009.

  137. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    IOP journal of physics,
    pp. 1-4, 2009.

  138. Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 2: Thermal property, and sensitivity
    F. jutzi; D.H.B. Wicaksono; G. Pandraud; N. de rooij; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 152, pp. 126-138, 2009.

  139. Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-part 2.Thermal property and sensitivity
    F. jutzi; D.H.B. Wicaksono; G. Pandraud; N. de rooij; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A152-2(2), pp. 126-138, 2009.

  140. Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of Physics: Conference Series,
    Volume 187, pp. 012043-1-0120, 2009.

  141. Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 1. Optical absorptivity
    F. jutzi; D.H.B. Wicaksono; G. Pandraud; N. de rooij; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 152, pp. 119-125, 2009.

  142. Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; E. Drift; A. Bossche; P.J. French; F. van Keulen;
    Applied Physics Letters,
    Volume 94, Issue 221903, pp. 1-3, 2009.

  143. Effects of surface stress on nanocantilevers
    H. Sadeghian Marnani; C.K. Yang; K. Babaei Gavan; J.F.L. Goosen; EW.J.M. van der Drift; H.S.J. van der Zant; A. Bossche; P.J. French; F. van Keulen;
    E-Journal of Surface Science and Nanotechnology,
    Volume 7, pp. 161-166, 2009.

  144. Monthly report 18.3 for Nissan, december 2008
    P.J. French;
    Delft University of Technology, , 2009.

  145. Monthly report 18.4 for Nissan, March 2009
    P.J. French;
    Delft University of Technology, , 2009.

  146. Wireless sensor network project PLEISTER Package label electronics including sensing talkative radio
    J. Bastemeijer; J.R. Mollinger; L. Giangrande; Berenice Palacios Aguilera; P.J. French; A. Bossche;
    conference, 2009. NEO IEEE Sensors.

  147. Surface contamination induced resonance frequency shift of cantilevers
    H. Sadeghian; C.K. Yang; K. Babaei Gavan; J.F.L. Goosen; EW.J.M. van der Drift; H.S.J. van der Zant; P.J. French; A. Bossche; F. van Keulen;
    s.n. (Ed.);
    IEEE Computer Society, , pp. 396-399, 2009.

  148. A versatile CMOS compatible PECVD silicon carbide MEMS technology
    L. Pakula; V. Rajaraman; P.J. French;
    s.n. (Ed.);
    ICMEMS, , pp. 0-4, 2009.

  149. Experimental characterisation of roughness induced scattering loss in Si and SiC waveguide sensors
    E. Margallo; C.K. Yang; G. Pandraud; P.J. French;
    In Proceedings of IEEE SENSORS 2009,
    Christchurch, NZ, pp. 1557-1561, 2009.

  150. Rapid scanning delay line for optical coherence tomography based on the thermo-optic effect in silicon
    E. Margallo; G. Pandraud; P.J. French;
    In Proc. of Solid-State Sensors, Actuators and Microsystems Conference. TRANSDUCERS 2009,
    Denver, US, pp. 501-504, 2009.
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  151. Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
    V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In Proc. IEEE MEMS 2009,
    Sorrento, Italy, pp. 140-143, 2009.

  152. Single wafer surface micromachined field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
    In PM Sarro & C Hierold (Eds.), Proceedings of IEEE MEMS 2009 Conference,
    Sorrento, Italy, IEEE, pp. 848-851, 2009.

  153. Bio-inspired dome-shape SiO2/SiN membrane as strain-amplifying transducer
    D.H.B. Wicaksono; G. Pandraud; C.K. Yang; J. Dankelman; P.J. French;
    In J. Brugger; D. Briand (Ed.), Eurosensors XXIII,
    Lausanne, Switzerland, Elsevier, pp. 770-773), 2009.
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  154. Bio-inspired dome-shape SiO2/SiN membrane as strain-amplifying transducer
    D.H.B. Wicaksono; G. Pandraud; C.K. Yang; J. Dankelman; P.J. French;
    In J Brugger; D Briand (Ed.), Procedia Chemistry, Volume 1, Issue 1,
    Elsevier, pp. 770-773, 2009.

  155. Gluing as an alternative to solder flexible batteries for its use in system-in-a-package: preliminary results
    N.B. Palacios Aguilera; J.R. Mollinger; J. Bastemeijer; J. Zhou; P.J. French; A. Bossche;
    In s.n. (Ed.), Proceedings of 11th Electronics packaging technology conference,
    IEEE, pp. 550-555, 2009.

  156. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), IOP journal of physics;conference series,
    IOP, pp. 1-4, 2009.

  157. SOI digital accelerometer based on pull-in time configuration
    L. Pakula; V. Rajaraman; P.J. French;
    In s.n. (Ed.), NEMS,
    IEEE NEMS, pp. 1-4, 2009.

  158. Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
    V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In P.M. Sarro; C Hierold (Ed.), Proc. IEEE MEMS 2009,
    IEEE, pp. 140-143, 2009.

  159. Biomemitics:learning from nature to make better sensors
    P.J. French; D.H.B. Wicaksono;
    In s.n. (Ed.), proceedings of 24th symposium on microelectronics technology and devices-SBMicro 2009,
    The Electrochemical Society, pp. 193-202, 2009.

  160. Rapid scanning delay line for optical coherence tomography based on the thermo-optic effect in silicon
    E. Margallo; G. Pandraud; P.J. French;
    In s.n. (Ed.), Proc. of Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009,
    IEEE, pp. 501-504, 2009.

  161. Effect of Laser Deflection on Resonant Cantilever Sensors
    C.K. Yang; A. Bossche; P.J. French; H. Sadeghian Marnani; J.F.L. Goosen; F. van Keulen; K. Babaei Gavan; H.S.J. van der Zant; EW.J.M. van der Drift;
    In {Makhopadhyay, S.C.} (Ed.), Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand,
    IEEE, pp. 869-872, 2009.

  162. Single wafer surface micromachined field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
    In P.M. Sarro; C Hierold (Ed.), Single wafer surface micromachined field emission electron source,
    IEEE, pp. 848-851, 2009.

  163. Experimental characterisation of roughness induced scattering loss in Si and SiC waveguide sensors
    E. Margallo; C.K. Yang; G. Pandraud; P.J. French;
    In SC Mukhopadhyay (Ed.), Proceedings of IEEE SENSORS 2009,
    IEEE, pp. 1557-1561, 2009.

  164. Experimental characterisation of roughness induced scattering loss in Si and SiC waveguide sensors
    E. Margallo; C.K. Yang; G. Pandraud; P.J. French;
    In s.n. (Ed.), Proceedings of IEEE Sensors 2009,
    IEEE, pp. 1557-1561, 2009.

  165. Comparision of conductive glues and ultrasonic welding to contact formable batteries for its use in system-in-a-package: preliminary results
    N.B. Palacios Aguilera; J. Bastemeijer; J.R. Mollinger; J. Zhou; P.J. French; A. Bossche;
    In s.n. (Ed.), Proceedings of SAFE 2009,
    STW, pp. 99-102, 2009.

  166. Modeling heat generation and temperature distribution for temperature sensing during dental surgical drilling
    M. abayazid; D.H.B. Wicaksono; J. Dankelman; P.J. French;
    In s.n. (Ed.), Proceedings of SAFE 2009,
    STW, pp. 1-10, 2009.

  167. On the size-dependent elastic behavior of silicon nanocantilevers
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; A. Bossche; U. Staufer; P.J. French; F. van Keulen;
    In s.n. (Ed.), Proceedings of the MicroMechanics Europe 2009 Conference, September 20-22, 2009, Toulouse, France,
    MME, pp. 1-4, 2009.

  168. Surfaces Induce Errors in Resonance-Shift Sensing
    C.K. Yang; H. Sadeghian Marnani; K. Babaei Gavan; J.F.L. Goosen; E. Drift; H.S.J. van der Zant; A. Bossche; F. van Keulen; P.J. French;
    In s.n. (Ed.), Proceedings of the Sense of Contact 11, 8 April 2009, Zeist, The Netherlands,
    Sense of Contact 2009, pp. 1-6, 2009.

  169. Tissue spectroscopy by regularisation of an ill-posed black-body inverse problem
    J. Amor-rio; E. Margallo; P.J. French;
    In s.n. (Ed.), Proceedings of Sense of Contact 2009,
    STW, pp. 1-6, 2009.

  170. Early feasibility study for MOMS-based shear stress sensing in dental drilling
    D.H.B. Wicaksono; F. Carta; P.J. French; P. Breedveld; J. Dankelman;
    In s.n. (Ed.), Proceedings of SAFE 2009,
    STW, pp. 545-550, 2009.

  171. Size effects on the bending stiffness of silicon nanocantilevers
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; A. Bossche; P.J. French; F. van Keulen;
    In s.n. (Ed.), Proceedings of ProRISC 2009, 20th Annual Workshop on circuits, Systems and Signal Processing, SAFE 2009, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, November 26-27, 2009, Veldhoven, The Netherlands,
    ProRISC en SAFE, pp. 108-111, 2009.

  172. Integrated sensor-packaging probe for dental drilling system:design and early fabrication results
    D.H.B. Wicaksono; E. Margallo; P. Breedveld; P.J. French; J. Dankelman;
    In s.n. (Ed.), Proceedings of SAFE 2009,
    STW, pp. 556-560, 2009.

  173. Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application
    A. Purniawan; Y. Huang; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), 12th Annual Workshop on Semiconductor Advances for Future Electronics,
    s.n., pp. 48-51, 2009.

  174. Bio-inspired dome-shape SiO2/SiN membrane as strain-amplifying transducer
    D.H.B. Wicaksono; G. Pandraud; C.K. Yang; J. Dankelman; P.J. French;
    In s.n. (Ed.), Proceedings of Eurosensors, XXIII 2009,
    s.n., pp. 770-773, 2009.

  175. Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; A. Bossche; P.J. French; F. van Keulen;
    In {Brugger, J.}; {Briand, D.} (Ed.), Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland,
    Elsevier, pp. 1387-1390, 2009.

  176. Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method
    H. Sadeghian Marnani; C.K. Yang; J.F.L. Goosen; A. Bossche; P.J. French; F. van Keulen;
    In {Brugger, J.}; {Briand, D.} (Ed.), Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland,
    Elsevier, pp. 1387-1390, 2009.

  177. Wafer-level PECVD sic micropackaging technology for MEMS devices
    V. Rajaraman; P.J. French;
    In s.n. (Ed.), STW, pp. 1-4, 2009.

  178. Study of fabrication strategies for silicon in cochlear implants
    N.S. Lawand; P.J. French; J. Briaire; J.H.M. Frijns;
    In s.n. (Ed.), STW, pp. 28-31, 2009.

  179. System and method for micro- and nanoelectromechanical sample mass measurement
    H. Sadeghian Marnani; C.K. Yang; F. van Keulen; J.F.L. Goosen; A. Bossche; P.J. French;
    2009. Op naam van TU Delft; 2003643; Op naam van TU Delft.

  180. Infrared sensor comprising a golay cell
    D.H.B. Wicaksono; P.J. French; C. Maeda; K. Kagawa; H. Onome; E. Kakiuchi;
    2009.

  181. Field emission for cantilever sensors
    C.K. Yang; A.J. le Fèbre; G. Pandraud; EW.J.M. van der Drift; P.J. French;
    Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures,
    Volume 26, Issue 3, pp. 927-933, 2008.

  182. Fabrication and characterization of a PECVD SiC evanescent wave optical sensor
    G. Pandraud; P.J. French; P.M. Sarro;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 142, pp. 61-66, 2008.

  183. Nano-structure or nano-system:opportunities and pitfalls
    P.J. French; C.K. Yang;
    Sensors & Transducers,
    pp. 1-9, 2008.

  184. Further investigation of hydrogen silsesquioxane e-beam resist as etching mask for cryogenic silicon etching
    C.K. Yang; G. Pandraud; K. Babaei Gavan; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), Proceedings of SAFE 2008,
    STW, pp. 527-530, 2008.

  185. Automated resonance frequency determination for nano-cantilevers using motion detection
    E. Margallo-Balbás; C.K. Yang; P.J. French;
    In s.n. (Ed.), Proceedings of sense of contact X,
    Sense of Contact 2009, pp. 1-6, 2008.

  186. Application of PECVD a-SiC thin-film layer for encapsulation of microstructures
    V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
    STW, pp. 609-612, 2008.

  187. Thermal property of LPCVD SiN membrane for far infrared sensor application
    D.H.B. Wicaksono; F. Jutzi; G. Pandraud; P.J. French;
    In s.n. (Ed.), Thermal property of LPCVD SiN membrane for far infrared sensor application,
    ISSM, pp. 168-173, 2008.

  188. Design of a 2D TiO2 Photonic Crystal Waveguide Sensor
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
    STW, pp. 424-427, 2008.

  189. Telemetric light delivery and monitoring system for photodynamic therapy based on solid-state optodes
    E. Margallo Balbas; J.G. kaptein; HJ.C.M. Sterenborg; G. Pandraud; P.J. French; D.J. Robinson;
    In I Gannot (Ed.), Telemetric light delivery and monitoring system for photodynamic therapy based on solid-state optodes,
    SPIE, pp. 1-8, 2008.

  190. Rapid 3D transesophageal echocardiography using a fast rotating multiplane transducer
    K. Nathanail; M. van Stralen; C.A. Prins; F. van den Adel; P.J. French; N. de Jong; A. van der Steen; J.G. Bosch;
    In s.n. (Ed.), Proceedings of the IEEE symposium, Beijing 2008,
    IEEE, pp. 1-4, 2008.

  191. Measurement of pCO2 using HPTS-TOA for clinical applications
    K. Tang; J.J.F. van veen; A. Draaijer; D. Tanase; P.J. French;
    In s.n. (Ed.), Proceedings of sense of contact X,
    Sense of Contact 2009, pp. 1-4, 2008.

  192. Fabrication of accelerometers by thin-SOI micromachining
    V. Rajaraman; L. Pakula; K.A.A. Makinwa; P.J. French;
    In s.n. (Ed.), Proceedings of sense of contact X,
    Sense of contact X, pp. 1-4, 2008. NEO.

  193. Telemetric photonic implant for metronomic photodynamic therapy of glioblastoma
    E. Margallo-Balbás; J.G. kaptein; D. Tanase; F. van Zaane; D.J. Robinson; G. Pandraud; P.J. French; HJ.C.M. Sterenborg;
    In s.n. (Ed.), Proceedings of SAFE 2008,
    STW, pp. 407-410, 2008.

  194. Thin-SOI digital accelerometer employin pull-in time mode configuration
    L. Pakula; V. Rajaraman; P.J. French;
    In s.n. (Ed.), Proceedings of SAFE 2008,
    SAFE, pp. 420-423, 2008.

  195. Performance of miniaturized LPCVD-SiN-membrane-based 7-14 micrometer infrared thermal detector:analytical,modelling and experimental study
    D.H.B. Wicaksono; F. jutzi; G. Pandraud; P.J. French;
    In s.n. (Ed.), Proceedings of IEEE Sensors 2008,
    IEEE, pp. 498-501, 2008.

  196. Inductively coupled system for delivery and monitoring of photodynamic therapy in a rat model for glioblastoma
    E. Margallo-Balbás; J.G. kaptein; G. Pandraud; P.J. French; HJ.C.M. Sterenborg; D.J. Robinson;
    In s.n. (Ed.), Proceedings of IEEE Sensors 2008,
    IEEE Sensors, pp. 1233-1236, 2008.

  197. On chip measurement for side-wall roughness in SOI waveguides by atomic force microscopy
    C.K. Yang; E. Margallo Balbas; G. Pandraud; P.J. French;
    In s.n. (Ed.), Proceedings of First Mediterranean Photonics Conference,
    mediterranean photonics, pp. 48-50, 2008. NEO.

  198. 3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing
    L. Pakula; H. Yang; P.J. French;
    In s.n. (Ed.), Proceedings of ASDAM 2008,
    Slovak academy of sciences, pp. 227-230, 2008.

  199. Tissue-viability monitoring using an oxygen-tension sensor
    D. Tanase; N. komen; A. Draaijer; G.J. Kleinrensink; J. Jeekel; J.F. Lange; P.J. French;
    In s.n. (Ed.), Proceedings of BIOSTEC 2008,
    BIOSTEC 2008, pp. 109-122, 2008.

  200. Animal studies using an oxygen-tension sensor for tissue viability monitoring
    D. Tanase; N. komen; A. Draaijer; G.J. Kleinrensink; J.F. Lange; J. Jeekel; P.J. French;
    In s.n. (Ed.), Proceedings of BIOSTEC 2008,
    BIOSTEC 2008, pp. 50-55, 2008.

  201. Thin-film MEMS encapsulation using low-stress PECVD silicon carbide
    V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In G. Gerlach (Ed.), Proceedings Eurosensors XXII,
    Eurosensors, pp. 491-494, 2008.

  202. 3D SiC CMOS compatible surface micromachined accelerometer
    L. Pakula; H. Yang; P.J. French;
    In s.n. (Ed.), Proceedings of APCOT 2008,
    IEEE, pp. 1-4, 2008.

  203. ALD Tio2 photonic crystals for biosensors
    G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
    In sn. (Ed.), Proceedings of APCTP-ASEAN workshop on Advanced Material Science and Nanotechnology,
    APCTP-ASEAN workshop on AMSN, pp. 399-402, 2008.

  204. DRIE and bonding assisted low cost MEMS processing of inplane HAR inertial sensors
    V. Rajaraman; K.A.A. Makinwa; P.J. French;
    In s.n. (Ed.), Proceedings of ASDAM 2008,
    ASDAM, pp. 327-330, 2008.

  205. Miniature optical coherence tomography system based on silicon photonics
    E. Margallo-Balbás; G. Pandraud; P.J. French;
    In s.n. (Ed.), Miniature optical coherence tomography system based on silicon photonics,
    SPIE, pp. 1-11, 2008.

  206. A thin-SOI micromachined quasi-digital accelerometer
    L. Pakula; V. Rajaraman; P.J. French;
    In s.n. (Ed.), Proceedings Eurosensors XXII,
    Eurosensors, pp. 201-205, 2008.

  207. pO2 and pCO2 measurements for the prevention and early detection of anastomotic leakage
    D. Tanase; K. Tang; N. komen; S. Van veen; A. Draaijer; G.J. Kleinrensink; J.F. Lange; J. Jeekel; P.J. French;
    In s.n. (Ed.), BioMed 2008,
    Biomed 2008, pp. 1-2, 2008.

  208. Integrated MEMS:when is it smart to be smart
    P.J. French;
    In Daniel Toal (Ed.), Integrated MEMS:when is it smart to be smart,
    University of Limerick, pp. 1-7, 2008.

  209. Investigation of hydrogen silsesquioxane E-beam resist as etching mask for cryogenic silicon etching
    C.K. Yang; G. Pandraud; K. Babaei Gavan; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), Proceedings of APCTP-ASEAN workshop on Advanced Material Science and Nanotechnology,
    APCTP-ASEAN, pp. 1088-1092, 2008.

  210. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors,
    G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n (Ed.), Proceedings of the fourth IWON, APTC-ASEAN,
    s.n., pp. 339-402, 2008.

  211. Fabrication of accelerometers by thin-SOI micromachining
    V. Rajaraman; L. Pakula; K.A.A. Makinwa; P.J. French;
    In s.n. (Ed.), Proceedings of sense of contact X,
    Sense of contact X, pp. 1-4, 2008. NEO.

  212. Field emission for nanometre displacement sensing
    C.K. Yang; A.J. le Febre; G. Pandraud; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), apcot, pp. 200-203, 2008.

  213. Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications
    D.H.B. Wicaksono; F. jutzi; G. Pandraud; N.F. de Rooij; P.J. French;
    In s.n. (Ed.), apcot, pp. 397-400, 2008.

  214. Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application
    D.H.B. Wicaksono; F. jutzi; G. Pandraud; P.J. French;
    In s.n. (Ed.), ISSM, pp. 163-167, 2008.

  215. A novel method for nanoprecision alignment in wafer bonding applications
    L.D. Jiang; G. Pandraud; P.J. French; S.M. Spearing; M. kraft;
    Journal of Micromechanics and Microengineering,
    Volume 17, Issue 7, pp. S61-S67, 2007.

  216. PDL free plasma enhanced chemical vapor deposition SIC optical waveguides and devices
    G. Pandraud; P.M. Sarro; P.J. French;
    Optics Communications,
    Volume 269, Issue 2, pp. 338-345, 2007.

  217. PECVD SiC optical waveguide loss and mode characteristics
    G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Optics & Laser Technology,
    Volume 39, Issue 3, pp. 532-536, 2007.

  218. Shape based monte carlo code for light transport in complex heterogenous tissues (U_SP_2_I_IC_T)
    E. Margallo-Balbás; P.J. French;
    Optics Express,
    Volume 15, Issue 21, pp. 14086-14098, 2007.

  219. Nissan report June 2007
    P.J. French;
    Nissan, , 2007.

  220. Nissan report september 2007
    P.J. French;
    Nissan, , 2007.

  221. Modelling of bio-inspired IR sensor
    D.H.B. Wicaksono; P.J. French;
    Toyota Motor Europe, , 2007.

  222. Learning from nature (U_SP_2_I_IC_T)
    D.H.B. Wicaksono; P.J. French;
    STW, , 2007.

  223. Summary of progressand plan biomimetic far infrared sensor
    D.H.B. Wicaksono; P.J. French;
    Toyota Motor Europe, , 2007.

  224. Learning from nature
    D.H.B. Wicaksono; P.J. French;
    STW, , 2007.

  225. Short progress status report bio-inspired MEMS far-infrared sensor for night vision application
    F. jutzi; D.H.B. Wicaksono; P.J. French;
    Toyota Motor Europe, , 2007.

  226. The design and modelling of bio-inspired cheap MEMS far infrared sensor (FIR) for night vision application
    D.H.B. Wicaksono; P.J. French;
    Toyota Motor Europe, , 2007.

  227. Nissan report march 2007
    P.J. French;
    Nissan, , 2007.

  228. A Thermooptical delay line for optical coherence tomography: FEM evaluation of temporal performance
    E. Margallo-Balbás; G. Pandraud; P.J. French;
    s.n. (Ed.);
    s.l., , pp. 1-4, 2007.

  229. An optical sensor system for early bacteria detection in drain fluids
    S.R.A. chaeron; D. Tanase; E. Margallo-Balbás; P.J. Trimp; P.J. French; N. komen; J.F. Lange;
    s.n. (Ed.);
    SAFE, , pp. 564-567, 2007.

  230. PECVD silicon carbide waveguides for multichannel sensors
    G.Pandraud; P.J. French; P.M. Sarro;
    In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
    Atlanta, Georgia, USA, IEEE, pp. 395-398, Oct. 2007.

  231. Post-processing micromachined pull-in accelerometer
    L. Pakula; P.J. French;
    In s.n. (Ed.), Proceedings of Transducers 2007,
    IEEE, pp. 1171-1174, 2007.

  232. Wafer bonding with nanoprecision alignment for micro/nano systems
    L. Jiang; G. Pandraud; P.J. French; S.M. Spearing; M. kraft;
    In s.n. (Ed.), Proceedings of Transducers 2007,
    IEEE, pp. 2103-2106, 2007.

  233. SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)
    V. Rajaraman; G. Craciun; H. Yang; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures,
    SAFE, pp. 617-620, 2007.

  234. Design and modelling of a bio-inspired MEMS gyroscope
    D.H.B. Wicaksono; Y. Chen; P.J. French;
    In s.n. (Ed.), Proceedings of the International Conference on Electrical Engineering and Informatics (ICEEI2007),
    Institut Teknologi Bandung, pp. 226-229, 2007.

  235. Field emission as transducer for sub-micron and nano resonators
    C.K. Yang; P.J. French; EW.J.M. van der Drift; J.R. Kim; P. Hadley;
    In S. Lee; M Esashi (Ed.), Proceedings of the 5th IEEE Conference on Sensors 2006,
    IEEE, pp. 1207-1210, 2007.

  236. Oxygen-tension measurements -the first step towards prevention and early detection of anastomotic leakage
    D. Tanase; P.J. French; A. Draaijer; G.J. Kleinrensink; J.F. Lange; J. Jeekel;
    In s.n. (Ed.), Proceedings IEEE Sensors 2007,
    IEEE, pp. 68-71, 2007.

  237. Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope (U_SP_2_I_IC_T)
    Y. Chen; D.H.B. Wicaksono; L. Pakula; V. Rajaraman; P.J. French;
    In s.l. (Ed.), Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope.,
    SAFE, pp. 572-576, 2007.

  238. PECVD silicon carbide waveguides for multichannel sensors
    G. Pandraud; P.J. French; P.M. Sarro;
    In B Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conference,
    IEEE, pp. 395-398, 2007.

  239. Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor
    F. jutzi; D.H.B. Wicaksono; G. Pandraud; P.J. French;
    In s.n. (Ed.), Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor,
    SAFE, pp. 482-487, 2007.

  240. Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)
    V. Rajaraman; G. Craciun; H. Yang; L. Pakula; EW.J.M. van der Drift; K.A.A. Makinwa; P.J. French;
    In {A. Liu, J.Wu, C. Lu}; {C.D. Reddy} (Ed.), MEMS Technology and Devices,
    pan Stanford, pp. 238-241, 2007.

  241. Design of a biologically-inspired piezoresistive strain-sensing MEMS (U_SP_2_I_IC_T)
    D.H.B. Wicaksono; V. Rajaraman; P.J. French;
    In {A. Liu, J.Wu, C.Lu, C.D. Reddy} (Ed.), MEMS Technology and Devices,
    Pan Stanford publishing, pp. 340-343, 2007.

  242. On the initial design and simulation of a biologically-inspired MEMS gyroscope (U_SP_2_I_IC_T)
    D.H.B. Wicaksono; Y. Chen; V. Rajaraman; L. Pakula; P.J. French;
    In {A.Liu, J. Wu, C. Lu, C.D. Reddy} (Ed.), MEMS Technology and Devices,
    Pan Stanford publishing, pp. 336-339, 2007.

  243. Field emission for sensor applications
    C.K. Yang; EW.J.M. van der Drift; P.J. French;
    In G.C.M. Meyer (Ed.), Field emission for sensor applications,
    Sense of Contact 2009, pp. 1-6, 2007.

  244. Optical characterization of bone tissue for diffusion optical tomography applied to skeletal implants
    E. Margallo-Balbás; P.J. French; A. Pifferi; P. Taroni; D. Comelli; A. Farina; R. Cubbedu; A.J. Van veen; {Van Ruijven}, L.J.; ThH. Smit;
    In s.n. (Ed.), International Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007.,
    IEEE, pp. 219-223, 2007.

  245. DRIE assisted HAR MEMS processing of inertial sensors and actuators
    V. Rajaraman; S.L. Paalvast; G. Craciun; J.C. Wolff; K.A.A. Makinwa; P.J. French;
    In s.l. (Ed.), Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007,
    MME, pp. 333-336, 2007.

  246. Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope
    Y. Chen; D.H.B. Wicaksono; L. Pakula; V. Rajaraman; P.J. French;
    In s.n. (Ed.), Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007,
    MME, pp. 199-202, 2007.

  247. Early stages on design and simulation ofa silicon bio-inspired MEMS vibratory gyroscope
    Y. Chen; D.H.B. Wicaksono; P.J. French;
    In s.l. (Ed.), Early stages on design and simulation ofa silicon bio-inspired MEMS vibratory gyroscope,
    Sense of Contact 2009, pp. 1-5, 2007.

  248. Inductively powered implant for monitoring and application of telemetric metronomic photodynamic therapy
    J.G. kaptein; E. Margallo-Balbás; D. Tanase; P.J. French; D.J. Robinson;
    In s.n. (Ed.), SAFE,
    SAFE, pp. 1-4, 2007.

  249. Thermo-optical delay line for optical coherence tomography
    E. Margallo-Balbás; G. Pandraud; P.J. French;
    In L Dong; Y Katagiri; E Higurashi; H Toshiyoshi; Y-A Peter (Ed.), SPIE, pp. 1-9, 2007.

  250. Field Emission for Cantilever Sensing
    C.K. Yang; A.J. le Fèbre; G. Pandraud; EW.J.M. van der Drift; P.J. French;
    In P.J. French (Ed.), Safe 2007,
    Technology Foundation, pp. 1-4, 2007.

  251. A dome-shape bio-inspired piezoresistive MEMS strain sensor
    D.H.B. Wicaksono; G. Pandraud; L. Pakula; V. Rajaraman; P.J. French; J.F.V. Vincent;
    In s.n. (Ed.), Proceedings of the International Conference on Electrical Engineering and Informatics (ICEEI2007),
    Institut Teknologi Bandung, pp. 464-467, 2007.

  252. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; F. van Keulen; P. French; P.M. Sarro;
    J. Micromech and Microeng.,
    Volume 16, Issue 6, pp. 35-44, 2006.

  253. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; F. van Keulen; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 16, Issue 6, pp. 35-44, 2006.

  254. Polarization-insensitive PECVD SiC waveguides for sensor platform
    G. Pandraud; P.J. French; H.T.M. Pham; P.M. Sarro;
    Optical Materials,
    Volume 28, Issue 4, pp. 380-384, 2006.

  255. Development of Micro-navigation system for satellites (MISAT/Microned) (U-SP-2-I-ICT)
    L. Pakula; P.J. French;
    MISAT/MicroNed, Volume MISAT , 2006.

  256. Feasibility study for the design and the development of Bio-inspired small and Inexpensive Far Infrared Sensor for Night Vision Application (U-SP-2-I-ICT)
    D.H.B. Wicaksono; P.J. French;
    Toyota Motor Company, , 2006.

  257. Nissan report dec 2006
    P.J. French;
    Nissan, , 2006.

  258. Learning from Nature: Report for the users committe meeting (U-SP-2-I-ICT)
    D.H.B. Wicaksono; D. Tanase; P.J. French;
    STW, Volume STW report , 2006.

  259. Learning from nature
    D.H.B. Wicaksono; D. Tanase; P.J. French;
    OTB-RES-VI Transport and Infrastructure, , 2006.

  260. Monthly Report (16.1) June 2006
    P.J. French;
    NO, , 2006.

  261. Nissan report dec 2006
    P.J. French;
    Nissan, , 2006.

  262. Development of post processing modules for integrated sensors and actuators applications (U-SP-2-I-ICT)
    L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    STW, Volume STW , 2006.

  263. Monthly Report 15.4 (march 2006)
    P.J. French;
    NO, , 2006.

  264. Monthly Report (15.3) December 2005
    P.J. French;
    NO, , 2006.

  265. Monthly Report (16.2) september 2006
    P.J. French;
    NO, , 2006.

  266. Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
    P.J. French; P.M. Sarro;
    JG Korvinck; O Paul (Ed.);
    William Andrew Publishing, , pp. 805-851, 2006.

  267. Light Transport in Trabecular Bone: Monte Carlo Simulation based on 3D Triangle Meshes (U-SP-2-I-ICT)
    Eduardo Margallo-Balbás; P.J. French; P.A. Wieringa;
    {Michael J. Flynn}; {Jiang Hsieh} (Ed.);
    SPIE, , pp. 1-12, 2006.

  268. Micromachining Technology: Bulk micromachining
    P.J. French; P.M. Sarro;
    In MEMS, A practical guide to Design, Analysis and Applications,
    Norwich, NY, USA, William Andrew Publishing, 2006.

  269. Fabrication and characteristics of a PECVD SiC evanescent wave optical sensor
    G. Pandraud; P.J. French; P.M. Sarro;
    In P.Enoksson (Ed.), Proc. Eurosensors XX,
    Goteborg, Sweden, Sept. 2006.
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  270. Direct wafer bonding of processed LPCVD silicon nitride films
    C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
    In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
    Southampton, UK, pp. 89-92, Sept. 2006.
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  271. Fly's Proprioception-inspired micromachined strain-sensing structure: Idea, design,modelling and simulation and comparison with experimental results (U-SP-2-I-ICT)
    D.H.B. Wicaksono; L. Zhang; G. Pandraud; P.J. French; J.F.V. Vincent;
    In {Francis E.H.tay, Miao Jianmin}; {John Bergstrom, Ciprian Iliesc} (Ed.), s.l., pp. 336-341, 2006.

  272. A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; P.M. Sarro;
    In P. Enoksson (Ed.), Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX,
    Eurosensors, pp. 1-4, 2006.

  273. Nanoprecision alignment for wafer bonding (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; Jiang Liudi; S.M. Spearing; M. kraft;
    In R.F. Wolffenbuttel (Ed.), Proceedings of the The 17th Micromechanics Europe Workshop, MME'06,
    MME, pp. 1-4, 2006.

  274. Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; C.L. Hsu; J.F. Creemer; J.C. Wolff; B.J. Thijsse; P.M. Sarro;
    In R.F. Wolffenbuttel (Ed.), Proceedings of the The 17th Micromechanics Europe Workshop, MME'06,
    MME, pp. 1-4, 2006.

  275. Optical Analysis of Bone growth in a spinal cage: A Monte Carlo Evaluation of the Direct Problem (U-SP-2-I-ICT)
    E. Margallo Balbas; H. Ruano-Suarez; P.J. French;
    In s.n. (Ed.), Proceedings of the Sense of Contact VIII,
    STW, pp. 1-5, 2006.

  276. Preliminary Study on the Design of a Silicon Bio-inspired MEMS Gyroscope (U-SP-2-I-ICT)
    Yue chen; D.H.B. Wicaksono; L. Zhang; P.J. French;
    In P.J. French; {de Meyer}, K; W Krautschneider; J Schmitz; L.K. Nanver; {van de Sande}, MCM (Ed.), Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006,
    SAFE, pp. 379-383, 2006.

  277. Strain Amplifying property of Bioinspired Membrane-in-Recess Microstructure: Analytical Modelling (U-SP-2-I-ICT)
    Yue chen; D.H.B. Wicaksono; L. Zhang; P.J. French; J.F.V. Vincent;
    In P.J. French; W Krautschneider; J Schmitz; L.K. Nanver; {de Meyer}, K; {van de Sande}, MCM (Ed.), Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006,
    SAFE, pp. 373-378, 2006.

  278. A pull-in operation mode accelerometer (U_SP_2_I_IC_T)
    L. Pakula; P.J. French;
    In s.n. (Ed.), Proceedings of the 5th IEEE Conference on Sensors 2006,
    IEEE, pp. 1127-1130, 2006.

  279. Diffuse optical tomography in a spinal cage: Monte carlo simulation and invitro studies ((U_SP_2_I_IC_T)
    E. Margallo-Balbás; ThH. Smit; P.J. French;
    In Proceedings of the 5th IEEE Conference on Sensors 2006,
    IEEE, pp. 62-65, 2006.

  280. Multi-Sensor Cardiac-Output Investigations in Intensive care (U-SP-2-I-ICT)
    D. Tanase; A. Firouzian; B.P. Iliev; G. Pandraud; Z. Chang; P.J. French; G.A.M. Pop;
    In s.n. (Ed.), Proceedings of the 2006 International Conference on microtechnologies in medicine and biology,
    IEEE, pp. 52-55, 2006.

  281. Influence of Structural Parameters on Stress/Strain Amplification property of Biomimetics Membrane-in-Recess Si Microstructure (U-SP-2-I-ICT)
    D.H.B. Wicaksono; L. Zhang; Yue chen; P.J. French; N. Gharbage;
    In P.J. French; {de Meyer}, K; W Krautschneider; {van de Sand}, MCM; J Schmitz; L.K. Nanver (Ed.), Proceedings of the 17th ProRISC, Annual Workshop on Circuits, Systems and Signal Processing (ProRISC 2006),
    SAFE, pp. 398-403, 2006.

  282. Direct wafer bonding of processed LPCVD silicon nitride films
    C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
    In s.n. (Ed.), Proceedings of the 17th MME MicroMechanics Europe Workshop,
    H.Morgan Ed., pp. 89-92, 2006.

  283. Low Voltage, High Speed RF-Switch with High On-Off Capacitance Ratio (U-SP-2-I-ICT)
    L. Pakula; P.J. French; H. Yang;
    In s.n. (Ed.), Proceedings of APCOT 2006,
    apcot, pp. 1-5, 2006.

  284. Feasibility study on Field Emission Nano-Tip for Sensors (U-SP-2-I-ICT)
    C.K. Yang; P.J. French; EW.J.M. van der Drift;
    In STW (Ed.), Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006,
    s.l., pp. 404-407, 2006.

  285. Planar Sensor Structures for Whole Blood Viscosity Measurements
    A. Firouzian; D. Tanase; B.P. Iliev; Z. Chang; W.A. Van Duyl; P.J. French;
    In s.n. (Ed.), Planar Sensor Structures for Whole Blood Viscosity Measurements,
    SAFE, pp. 1-4, 2006.

  286. Numerical Modelling of Biomimetics Strain-sensing Microstructure (U-SP-2-I-ICT)
    D.H.B. Wicaksono; L. Zhang; Yue chen; P.J. French; N. Gharbage; J.F.V. Vincent;
    In {Peter Enoksson} (Ed.), Numerical Modelling of Biomimetics Strain-sensing Microstructure,
    Eurosensors, pp. 1-4, 2006.

  287. Fabrication and characteristics of PECVD SiC evanescent wave optical sensor (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; P.M. Sarro;
    In s.n. (Ed.), fabrication and characteristics of PECVD SiC evenescent wave optical sensor,
    Eurosensors, pp. 1-4, 2006.

  288. Microsensors for Multiple-parameter Medical Measurements (U-SP-2-I-ICT)
    D. Tanase; A. Firouzian; P.J. French; J.F.L. Goosen;
    In s.n. (Ed.), Microsensors for Multiple-parameter Medical Measurements,
    s.l., pp. 63-72, 2006.

  289. Vitality Sensor
    P.J. French; D. Tanase; J.F. Lange; J. Jeekel; G.J. Kleinrensink;
    2006.

  290. A porous SiC ammonia sensor
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
    Volume 109, Issue 1, pp. 44-46, 2005. 50/50 EI/ECTM-sb.

  291. Biomimetic strain-sensing microstructure for improved strain sensor: fabrication results and optical characterization
    D.H.B. Wicaksono; J.F.V. Vincent; G. Pandraud; G. Craciun; P.J. French;
    Journal of Micromechanics and Microengineering,
    Volume 15, pp. 72-81, 2005.

  292. Experimental study of bent SiC optical waveguides
    G. Pandraud; P.J. French; P.M. Sarro;
    Microwave & Optical Technology Letters,
    Volume 47, Issue 3, pp. 219-220, 2005. 100% EI, sb.

  293. Learning from nature
    D.H.B. Wicaksono; D. Tanase; P.J. French;
    STW, Volume STW Report , 2005.

  294. Development of post processing micromachining modules for integrated sensors and actuators applications
    T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    STW, Volume STW meeting , 2005.

  295. Low voltage, high speed RF switch with high switching capacitance ratio (U-SP-2-I-ICT)
    L. Pakula; P.J. French; H. Yang;
    s.n. (Ed.);
    s.l., , pp. 1-4, 2005. NEO.

  296. Steering of catheters
    D. Tanase; P.J. French;
    J. Dankelman; C.A. Grimbergen; HG Stassen (Ed.);
    Erlbaum, , pp. 228-251, 2005.

  297. Sensors for catheters and guidewires
    P.J. French; J.F.L. Goosen; J.J. Piek;
    J. Dankelman; C.A. Grimbergen; HG Stassen (Ed.);
    Lawrence Erlbaum, , pp. 254-270, 2005. BTA foutief 0 toegekend, sb.

  298. A new ammonia sensor based on a porous SiC membrane
    E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In Proc. Transducers 2005,
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  299. An ammonia sensor based on a porous SiC membrane
    E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
    In Proc. Eurosensors XIX,
    2005.
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  300. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L Goosen; F. van Keulen; P.J. French; P.M. Sarro;
    In Proc. MME 2005,
    pp. 382-385, 2005.

  301. Suspended submicron SiC waveguides for gas and chemical sensor
    G. Pandrau; C.K. Yang; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XIX,
    2005.
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  302. Compact building blocks for optical sensing on PECVD SiC technology
    G. Pandraud; D.H.B. Wicaksono; P.J. French; P.M. Sarro;
    In s.n. (Ed.), ICICI proceedings,
    ICICI, pp. 453-458, 2005. Editor onbekend JH /100% EI.

  303. A new ammonia sensor based on porous SIC membrane
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Transducers'05 Digest of technical papers,
    IEEE, pp. 1832-1835, 2005. Editor onbekend JH 50/50 EI/ECTM.

  304. Planar sensor structures for whole blood viscosity measurements
    A. Firouzian; D. Tanase; B.P. Iliev; Z.Y. Chang; W.A. van Duyl; P.J. French;
    In s.n. (Ed.), SAFE 14cdd3a0a38d424c902ad9ad027edbb9 ProRISC,
    Dutch Technology Foundation, pp. 151-154, 2005. Editor onbekend JH/STW.

  305. Simple optical characterisation for biopmimetic micromachined silicon strain-sensing structure
    D.H.B. Wicaksono; G. Pandraud; P.J. French;
    In C Quan; FS Chau; A Asundi; BS Wong; CT Lim (Ed.), Proceedings of the Third International Conference on Experimental Mechanics (ICEM 2004),
    SPIE, pp. 788-795, 2005.

  306. Field-emission nano-tip for microresonator detection
    C.K. Yang; G. Pandraud; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), Proceedings of the STW programs,
    STW, pp. 181-185, 2005. Editor onbekend JH/STW.

  307. Low temperature LPCVD SiN direct bonding for sensors
    C.L. Hsu; G. Pandraud; J.F. Creemer; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005),
    Dutch Technology Foundation, pp. 162-166, 2005. Bij EWI gehonoreerd als 1V / 100% EI.

  308. 3D Hall-effect sensor for use in a navigation system for intravascular interventions
    L.B. Hebrard; D. Tanase; G. Pandraud; P.J. French;
    In s.n. (Ed.), Proceedings of the Sense of Contact 7 workshop,
    Sence of Contact, pp. 1-6, 2005. Editor onbekend JH.

  309. An ammonia sensor based on porous SiC
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Proceedings of the Sense of Contact 7 workshop,
    Sense of Contact 2009, pp. 1-4, 2005. Editor onbekend JH/ 100% EI.

  310. Investigation of multi-sensor techniques for cardiac-output measurements in intensive care
    D. Tanase; B.P. Iliev; J.F.L. Goosen; Z.Y. Chang; G.A.M. Pop; J.M.M. Verwiel; C.J. Slager; L. Pakula; G.C.M. Meijer; P.J. French;
    In s.n. (Ed.), Proceedings of the 3rd annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology,
    IEEE, pp. 122-125, 2005. Editor onbekend JH.

  311. Optical measurements on drain fluid for the detection of anastomotic leakage
    L. Pakula; D. Tanase; G. de Graaf; P.J. French; K. Kraal; J.F. Lange;
    In s.n. (Ed.), Proceedings of the 3rd annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology,
    IEEE, pp. 72-75, 2005. Editor onbekend JH.

  312. Induced coupled plasma deep reactive ion etching based sensors
    G. Pandraud; D.H.B. Wicaksono; L.B. Hebrard; A.J.L. Adam; P.J. French;
    In s.n. (Ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop,
    s.n., pp. 68-71, 2005. Editor onbekend JH.

  313. Microsensors
    P.J. French; D. Tanase; J.F.L. Goosen;
    In s.n. (Ed.), Proceedings of the 1st International Medical Technology Congress "High Tech in Medicine",
    s.n., pp. 1-8, 2005. Editor onbekend JH.

  314. On detection of micro and submicron cantilevers
    C.K. Yang; K. Babaei Gavan; G. Pandraud; A.J. Katan; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop,
    s.n., pp. 316-319, 2005. Editor onbekend JH.

  315. Actuated elastomers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; A. van Keulen; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop,
    Chalmers University of Technology, pp. 382-385, 2005. Editor onbekend - IT.

  316. Smart microsystems technology for biomedical applications
    P.J. French; D. Tanase; J.F.L. Goosen;
    In RV Krishnan; R Sudaram; GM Kamath (Ed.), Proceedings of ISSS 2005, International Conference on Smart Materials Structures and Systems,
    ISSS, pp. PP-5-PP-8, 2005.

  317. Image processing and interpretation for optical characterisation of biomimetic mechanical-strain-sensing microstructure
    D.H.B. Wicaksono; G. Pandraud; P.J. French;
    In S Yudha; A Suparmanto (Ed.), ICICI proceedings,
    ICICI, pp. 341-346, 2005.

  318. Biomedical sensors
    P.J. French; D. Tanase; J.F.L. Goosen;
    In s.n. (Ed.), ICICI proceedings,
    ICICI, pp. 8-11, 2005. Editor onbekend JH.

  319. Low voltage high speed rf switch
    L. Pakula; H. Yang; P.J. French;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIX, proceedings,
    IEEE, pp. 1-4, 2005. Editor onbekend.

  320. An ammonia sensor based on porous SIC membrane
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Eurosensors XIX, Proceedings,
    IEEE, pp. 1-4, 2005. Editor onbekend JH /100% EI.

  321. Size-dependency of cryo-icp-etching-based process for the fabrication of biomimetic membrane-in-recess microstructure
    D.H.B. Wicaksono; G. Pandraud; G. Craciun; P.J. French;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIX, proceedings,
    IEEE, pp. 1-4, 2005. Editor onbekend.

  322. The 3-D Hall-effect sensor optimized thru backside deep etching
    L.B. Hebrard; G. Pandraud; J.B. kammerer; D. Tanase; P.J. French;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIX, proceedings,
    IEEE, pp. 1-4, 2005. Editor onbekend JH.

  323. Suspended submicron PEVCD SiC waveguides for gas and chemical sensors
    G. Pandraud; C.K. Yang; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Eurosensors XIX,
    IEEE, pp. 1-4, 2005. 100% EI, sb.

  324. Biomedical sensors overview
    P.J. French; D. Tanase; J.F.L. Goosen;
    In s.n. (Ed.), DISens symposium-book-2005,
    Technische Universiteit Delft, pp. 6-10, 2005. Editor onbekend JH.

  325. PECVD SIC RIB channel waveguides loss and passive devices
    G. Pandraud; T.M.H. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), ECIO'05 proceedings,
    s.n., pp. 262-265, 2005. Editor onbekend JH.

  326. Polarization-insensitive PECVD SiC waveguides for photonic sensing
    G. Pandraud; T.M.H. Pham; L. Pakula; P.M. Sarro; P.J. French;
    In M Voet; R Willsch; W Ecke; J Jones; B Culshaw (Ed.), 17th International Conference on Optical Fibre Sensors,
    SPIE, pp. 836-839, 2005. 100% EI, sb.

  327. Surgical drill system and surgical drill bit to be used
    P.J. French;
    2005.

  328. Vitaliteitssensor
    P.J. French;
    2005. Lijst Liewe OCT-05-009; NL2005/00508; Lijst Liewe OCT-05-009.

  329. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. J. Connolly; H. T. M. Pham; J. Groeneweg; P. M. Sarro; P. J. French;
    Sensors and Actuators B,
    Volume 100, Issue 1-2, 2004, pp. 216-220, 2004.

  330. Fabrication of a CMOS compatible pressure sensor for harsh environment
    L.S.Pakula; H.Yang; H.T.M.Pham; P.J. French; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 14, Issue 11, pp. 1478-1483, 2004.

  331. The saturation current of silicon bipolar transistors at moderate stress levels and its relation to the energy-band structure
    J.F. Creemer; P.J. French;
    Journal of Applied Physics,
    Volume 96, Issue 8, pp. 4530-4538, 2004.

  332. Galvanic etch stop for Si in KOH
    E. Connolly; P.J. French; J.J. Kelly;
    Journal of Micromechanics and Microengineering,
    Volume 14, pp. 1215-1219, 2004.

  333. Fabrication of a CMOS compatible pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 14, pp. 1478-1483, 2004. ed.is niet bekend.

  334. Sensors for catheter applications
    P.J. French; D. Tanase; J.F.L. Goosen;
    Sensors Update,
    Volume 13, Issue 1, pp. 107-153, 2004. ed. is Allen, M en Crooks, RM.

  335. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
    Volume 100, pp. 216-220, 2004. 50-50 EI-ECTM.

  336. Magnetic-based navigation system for endovascular interventions
    D. Tanase; J.F.L. Goosen; N.H. Bakker; P.J. Trimp; J.A. Reekers; P.J. French;
    Klinische Fysica,
    Issue 1, pp. 3-7, 2004.

  337. Learning from nature
    D.H.B. Wickasono; D. Tanase; P.J. French;
    EI Lab, Delft University of Technology, , 2004.

  338. Development of post processing micromachining modules for integrated sensors and actuators applications
    T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    Delft University of Technology - EI/ECTM-DIMES, Volume STW - DMF.5103 , 2004.

  339. Monthly report 13.4 March 2004
    P.J. French;
    s.n., , 2004.

  340. Technology of silicon-based liquid crystal wavefront correctors
    G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang; A.N. Simonov;
    Delft University of Technology, , 2004.

  341. The development of micromachined humidity sensors based on a dielectric of porous silicon
    E. Connolly; P.J. French;
    Delft University of Technology, , 2004.

  342. Development of dry etch technology for intelligent micromachined devices
    G. Craciun; EW.J.M. van der Drift; P.J. French;
    Delft University of Technology, , 2004.

  343. Monthly report 14.1 June 2004
    P.J. French;
    s.l., , 2004.

  344. Sensors for catheter applications
    P.J. French; D. Tanase; J.F.L. Goosen;
    H. Baltes; GK Fedder; J.G. Korvink (Ed.);
    Wiley, , pp. 107-153, 2004. niet eerder opgevoerd JH.

  345. Steering of catheters
    N.H. Bakker; D. Tanase; J.A. Reekers; P.J. French; C.A. Grimbergen;
    J. Dankelman; C.A. Grimbergen; HG Stassen (Ed.);
    Erlbaum, , pp. 228-251, 2004.

  346. Design and preliminary fabrication of a new micromachined silicon strain sensor based on the campaniform sensillum of insects
    D.H.B. Wickasono; G. Pandraud; G. Craciun; J.F.L. Goosen; W.A. van Duyl; J.F.V. Vincent; P.J. French;
    The Institute of Electrical Engineers of Japan, , pp. 437-442, 2004. ed. is niet bekend.

  347. Integrated microsystems in the macro-world
    P.J. French;
    AIAA, , pp. 1-10, 2004. ed. is niet bekend.

  348. Integrated microsystems industrial applications
    P.J. French;
    In IWONN'04; Proceedings of the Second international workshop on nanophysics and nanotechnology,
    s.n., pp. 1-10, 2004.

  349. Fabrication results and qualitative optical characterisation of a new type biomimetric strain-sensing micro-structures
    D.H.B. Wickasono; G. Pandraud; G. Craciun; J.F.V. Vincent; P.J. French;
    In MME 2004; Proceedings of the 15th micromechanics Europe workshop,
    s.n., pp. 80-83, 2004. ed. is niet bekend.

  350. Relative humidity sensors for harsh enviroments
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In G.C.M. Meijer (Ed.), The sense of contact VI; sensor workshop for industry and science,
    s.n., pp. 1-6, 2004.

  351. Surface micromachined CMOS compatible vertical accelerometer
    L. Pakula; H. Yang; P.J. French;
    In The sense of contact 6: where industry meets science workshop sensortechnology,
    s.n., pp. 1-4, 2004. ed. is niet bekend.

  352. CMOS compatible pressure sensors: a comparison between SiC and SiN
    L. Pakula; H. Yang; P.J. French; P.M. Sarro;
    In SAFE bdf98e4d646247d79cef99391c2b9226 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
    STW Technology Foundation, pp. 769-773, 2004. ed. is niet bekend.

  353. SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor
    G. Pandraud; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
    In SAFE 38da0e1eb22143fbb7fad260632affd7 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
    STW Technology Foudation, pp. 1-4, 2004. ed. is niet bekend.

  354. Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects
    D.H.B. Wickasono; G. Pandraud; J.F.V. Vincent; P.J. French;
    In SAFE 2004; Proceedings of semiconductor advances for future electronics,
    Technology Foundation STW, pp. 787-792, 2004. ed. is niet bekend.

  355. A new ammonia sensor
    E. Connolly; B. Timmer; T.M.H. Pham; P.M. Sarro; W. Olthuis; P.J. French;
    In H Varwijk (Ed.), SAFE 2004; Proceedings of semiconductor advances for future elecronics,
    STW Technology Foundation, pp. 1-4, 2004.

  356. Design, and early stages-fabrication of new biomimetric strain-sensing microstructures
    D.H.B. Wickasono; G. Pandraud; G. Craciun; J.F.V. Vincent; P.J. French;
    In M Djamal; Sukirno; Z Su'ud; Khairurriijal; Suprijadi; A Waris (Ed.), Proceedings seminar instrumentasi berbsis fisika II,
    Departemen Fisika Institut Teknologi Bandung, pp. 57-62, 2004.

  357. Porous SiC as an ammonia sensor
    E. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Proceedings of IEEE Sensors, 2004,
    IEEE, pp. 178-181, 2004. niet eerder opgevoerd -sb 50/50 EI/ECTM.

  358. Silicon carbide membrane relative humidity sensor with aluminium electrodes
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems,
    IEEE, pp. 193-196, 2004. ed. is niet bekend.

  359. Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the campaniform sensillum of insects
    D.H.B. Wicaksono; G. Pandraud; G. Craciun; J.F.V. Vincent; P.J. French;
    In s.n. (Ed.), Proceedings of IEEE Sensors, 2004,
    IEEE, pp. 542-545, 2004. niet eerder opgevoerd.

  360. A novel ull-in accelerometer
    L. Pakula; H. Yang; P.J. French;
    In ICEE 2004; Coference proceedings of the international conference on electrical engineering 2004 joint conference with AsiPcific conference of tranducers and micro-nano technology 2004,
    ICEE, pp. 163-167, 2004. ed. is niet bekend.

  361. Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
    G. Craciun; H. Yang; L. Pakula; EW.J.M. van der Drift; P.J. French;
    In Takashi KAWAMURA; Eun-Woong LEE; Yanchang Lu; Kwan James (Ed.), ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004,
    The Institute of the Electrical Engineers of Japan, pp. 174-178, 2004. ed. is niet bekend.

  362. SiC passive optomechanical transducer head for sensor applications
    G. Pandraud; L. Pakula; H.M.T. Pham; P.J. French; P.M. Sarro;
    In Digest of technical papers; XVIII Eurosensors,
    University of Rome, pp. 1-4, 2004. ed. is niet bekend/50-50 EI-ECTM.

  363. Silicon Carbide Membrane Relative Humidity Sensor with Aluminium Electrodes
    E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In MEMS 2004,
    Maastricht, The Netherlands, pp. 193-196, Jan. 2004. ISBN 0-7803-8265-X.
    document

  364. SiC passive optomechanical transducer head for sensor applications
    G. Pandrau; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XVIII,
    Rome, pp. 24-28, Sept. 2004. ISBN 88-7621-282-5.

  365. Porous SiC as ammonia sensor
    E.J. Connolly; B. Timmer; H.T.M.Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
    In Proc. Eurosensors XVIII,
    Rome, pp. 672-674, Sept. 2004. 88-7621-282-5.

  366. Method of Manufacturing an Electronic Device and Electronic Device (U-SP-2-I-ICT)
    K.A.A. Makinwa; S.G. den Hartog; P.J. French;
    2004.

  367. Method of manufacturing an electronic device and electronic device
    H. Boezen; S.G. den Hartog; P.J. French; K.A.A. Makinwa;
    2004. Koninklijke Philips Electronics NV/niet eerder opgevoerd; WO2004071943; Koninklijke Philips Electronics NV/niet eerder opgevoerd.

  368. Modified Reynold's equation and analytical analysis of squeeze-film air damping of perforated structures
    M. Bao; H. Yang; Y. Sun; P.J. French;
    Journal of Micromechanics and Microengineering,
    Volume 13, pp. 795-800, 2003.

  369. Navigation system for endovascular interventions
    D. Tanase; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    Minimally Invasive Therapy and Allied Technologies,
    Volume 12, Issue 3/4, 2003.

  370. Technology of silicon-based liquid crystal wavefront correctors
    G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang;
    s.n., Volume STW project DOE.5490 , 2003.

  371. Monthly report 12.4
    P.J. French;
    s.n., Volume Report 12.4 march 2003 , 2003.

  372. Development of post processing micromachining modules for integrated sensors and actuators applications
    H.M.T. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    s.n., Volume DMF 5103 , 2003.

  373. Monthly report 13.3 December 2003
    P.J. French;
    s.n., , 2003. Nog niet eerder opgevoerd.

  374. The development of micromachined humidity sensors based on a dielectric of porous silicon - meeting 5
    E. Connolly; P.J. French;
    s.n., Volume STW project DEL 4694 , 2003.

  375. Integrated Hartmann-Shack wavefront sensor progress report
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
    s.n., Volume STW project DOE.5375 , 2003.

  376. Progress report may 2003
    G. Craciun; EW.J.M. van der Drift; P.J. French;
    s.n., Volume STW project DEL 4577 , 2003.

  377. Monthly report 13.2
    P.J. French;
    s.n., Volume Report 13.2 june 2003 , 2003.

  378. Monthly report 13.2 sept
    P.J. French;
    s.n., Volume Report 13.2 september 200 , 2003.

  379. the development of micromachined humidity sensors based on a dielectric of porous silicon - meeting 6
    E. Connolly; P.J. French;
    s.n., Volume STW project DEL 4694 , 2003.

  380. Polyimide Sacrificial Layer for an All-Dry Post-Process Surface Micromachining Module
    H.T.M. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In Transducers,
    Boston, Massachuesetts, USA, pp. 813-816, Jun. 2003. ISBN 0-7803-7731-1.
    document

  381. Stiction of Surface Micromachined Structures: A Study of the Problem and the Possible Solutions
    H.T.M. Pham; L.S. Pakula; P.J. French; P.M. Sarro;
    In Proc. SAFE 2003,
    Veldhoven, The Netherlands, pp. 711-715, Nov. 2003. ISBN 90-73461-39-1.

  382. Electromechamical optical attenuation in micromachined SiC waveguides
    G. Pandraud; H. Yang; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. SAFE 2003,
    Veldhoven, The Netherlands, pp. 631-634, Nov. 2003. ISBN 90-73461-39-1.

  383. Fabrication of a CMOS Compatible Pressure Sensor for Harsh Environments
    L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P. M. Sarro;
    In Proc. 16th IEEE International MEMS conference,
    Kyoto, Japan, pp. 502-505, Jan. 2003.
    document

  384. Polyimide sacrificial layer for an all-dray post-process surface micromachining module
    T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In Transducers'03 Digest of technical papers,
    IEEE, pp. 813-816, 2003.

  385. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. Connolly; T.M.H. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 678-682, 2003. CD-ROM 50/50 EI/ECTM.

  386. Surface micromachined CMOS compatible vertical accelerometer
    L. Pakula; H. Yang; P.J. French;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 707-710, 2003. CD-ROM.

  387. Preliminary study on the design of a new micromachined silicon strain sensor based on the Campaniform sensillum of insects
    D.H.B. Wickasono; W.A. van Duyl; J.F.V. Vincent; P.J. French;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electornics,
    Stichting voor de Technische Wetenschappen, pp. 721-725, 2003. CD-ROM.

  388. Electromechanical optical attenuation in micromachined SiC waveguids
    G. Pandraud; H. Yang; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 631-634, 2003. CD-ROM.

  389. A novel RF switch with low driving voltage
    L. Pakula; H. Yang; P.J. French;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 753-756, 2003. CD-ROM.

  390. Stiction of surface micromachined structures: a study of the problem and the possible solutions
    T.M.H. Pham; L. Pakula; P.J. French; P.M. Sarro;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 711-715, 2003. CD-ROM.

  391. Development of integrated MEMS devices (invited)
    P.J. French;
    In SJ Prosser; E Lewis (Ed.), Proceedings of the twelfth conference on sensors and their applications,
    Institute of Physics, pp. 55-61, 2003.

  392. Design of a novel electrostatic switch with low operating voltage and high speed
    H. Yang; L. Pakula; P.J. French;
    In s.n. (Ed.), MME 2003 14th Micromechanics Europe workshop,
    s.n., pp. 33-36, 2003.

  393. A CMOS compatible SiC accelerometer
    L. Pakula; H. Yang; P.J. French;
    In s.n. (Ed.), IEEE Sensors 2003,
    IEEE, pp. 761-764, 2003. CD-rom.

  394. A practical galvanic etch-stop in Koh using sodium hypochorite
    E. Connolly; S. Sakarya; P.J. French; X.H. Xia; J.J. Kelly;
    In s.n. (Ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems,
    IEEE, pp. 566-569, 2003.

  395. IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process
    G. Craciun; H. Yang; L. Pakula; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In s.n. (Ed.), IEEE Sensors 2003,
    IEEE, pp. 440-444, 2003. CD-rom.

  396. Fabrication of a CMOS compatibile pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems,
    IEEE, pp. 502-505, 2003.

  397. A practical galvanic etch-stop in Koh using sodium hypochlorite
    E. Connolly; S. Sakarya; P.J. French; X.H. Xia; J.J. Kelly;
    In s.n. (Ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems,
    IEEE, pp. 566-569, 2003.

  398. 3D position and orientation measurements with a magnetic sensor for use in vascular interventions
    D. Tanase; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    In s.n. (Ed.), IEEE EMBS-APBME 2003 IEEE EMBS Asian-Pacific conference on biomedical engineering,
    IEEE, pp. 1-2, 2003.

  399. Polymide sacrificial layer for an all-dry post-process surface micromachining module
    T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In s.n. (Ed.), TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems,
    IEEE, pp. 813-816, 2003.

  400. Magnetic-based navigation system for radiation-dose reduction in endovascular interventions
    D. Tanase; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    In s.n. (Ed.), WC 2003 World congress on medical physics and biomedical engineering,
    World Congress on Medical Physics and Biomedical Engineering, pp. 1-5, 2003. CD-ROM.

  401. A novel pull-in accelerometer
    H. Yang; L. Pakula; P.J. French;
    In s.n. (Ed.), EUROSENSORS 17th European conference on solid-state transducers,
    University of Minho, pp. 204-207, 2003.

  402. Fabrication of a CMOS compatible vertical accelerometer
    L. Pakula; H. Yang; T.M.H. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), EUROSENSORS 17th European conference on solid-state transducers,
    University of Minho, pp. 635-638, 2003.

  403. Membrane porous-SiC humidity sensor with aluminium electrodes
    E. Connolly; H.M.T. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), E-MRS 2003 20th Anniversary European Materials Research Society Spring meeting,
    s.n., pp. 1-2, 2003.

  404. Relative Humidity sensors using porous SiC membranes and Al electrodes
    E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In Proc. Eurosensors XVII,
    University of Minho, Guimaraes, Portugal, pp. 621-622, Sep. 24 2003. ISBN 90-73461-39-1.
    document

  405. Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
    E.J. Connolly; G.M. O Halloran; H.T.M. Pham; P.M. Sarro; P.J. French;
    Sensors and Actuators A,
    Volume 99, Issue 1-2, pp. 25-30, Apr. 2002.

  406. A new model of the effect of mechanical stress on the saturation current of bipolar transistors
    J.F. Creemer; P.J. French;
    Sensors and Actuators A,
    Volume 97-98, pp. 289-295, Apr. 2002.

  407. Polyimide sacrificial layer and novel materials for post-processing surface micromachining
    A. Bagolini; L. Pakula; T.L.M. Scholtes; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, Issue 4, pp. 385-389, Jul. 2002. ISSN 0960-1317.

  408. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Craciun; M.A. Blauw; E. van der Drift; P.M. Sarro; P.J. French;
    J. of Micromechanics Microengineering,
    Volume 12, Issue 4, pp. 390-394, Jul. 2002.

  409. Multi-parameter sensor system with intravascular navigation for catheter/guide wire application
    D. Tanase; J.F.L. Goosen; P.J. Trimp; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 116-124, 2002.

  410. Polysilicon: a versatile material for microsystems
    P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 99, pp. 3-12, 2002.

  411. A novel electrochemical etching technique for n-type silicon
    S. Izuo; H. Ohji; P.J. French; K. Tsutsumi;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 720-724, 2002.

  412. Polyimide sacrificial layer and novel materials for post-processing surface micromachining
    A. Bagolini; L. Pakula; T.L.M. Scholtes; T.M.H. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 385-389, 2002.

  413. A new model of the effect of mechanical stress on the saturation current of bipolar transistors
    J.F. Creemer; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 289-295, 2002.

  414. Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
    E. Connolly; G.M. O'Halloran; T.M.H. Pham; P.M. Sarro; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 99, pp. 25-30, 2002.

  415. Advanced time-multiplexed plasma etching of high aspect ratio silicon structures
    M.A. Blauw; G. Craciun; W.G. Sloof; P.J. French; EW.J.M. van der Drift;
    Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures,
    Volume 20, Issue 6, pp. 3106-3110, 2002.

  416. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 390-394, 2002.

  417. Pillar structures with a sub-micron space fabricated by macroporous-based micromachining
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 744-748, 2002.

  418. Delft University of Technology labotory review
    P.J. French;
    Transactions of the institute of electrical engineers of Japan,
    Volume 121E, Issue 10, pp. 576-577, 2002.

  419. Progress report may 2002
    G. Craciun; EW.J.M. van der Drift; P.J. French;
    STW, Volume STW Project DEL 4577 , 2002.

  420. Monthly report 12.3
    P.J. French;
    s.n., Volume Report 12.3 dec. 2002 , 2002.

  421. Integrated Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
    Delft University of Technology, Faculty ITS, , 2002.

  422. Pressure Sensor for Automotive Applications
    L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 649-652, Nov. 2002. ISBN 90-73461-33-2.

  423. Single Step Cryogenic SF6/O2 Plasma Etching Process for the Development of Inertial Devices
    G. Craciun; H. Yang; H.W. van Zeijl; L. Pakula; M.A. Blauw; E. van der Drift; P.J. French;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 612-615, Nov. 2002. ISBN 90-73461-33-2.

  424. Relative Humidity Sensors based on Porous Polysilicon and Porous Silicon Carbide
    E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 603-607, Nov. 2002. ISBN 90-73461-33-2.

  425. Pressure Sensor for Harsh Environments
    L.S. Pakula; H .Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. MME 2002,
    Sinaia, Romania, pp. 295-298, Oct. 2002. ISBN 973-0-02472-3.

  426. Relative-Humidity Sensors Based on Porous Polysilicon and Porous Silicon Carbide
    E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
    In IEEE Sensors 2002,
    Hyatt Orlando, Orlando, Florida, USA, pp. 12.4/1-12.4/4, Jun. 2002. ISBN 0-7803-7455-X.

  427. Radiation dose reduction in minimally-invasive intravascular procedures using a magnetic guidance system
    D. Tanase; N.H. Bakker; D. van Loon; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    In Second annual international IEEE-EMBS special topic conference of microtechnologies in medicine and biology,
    IEEE, pp. 305-308, 2002. CD-Rom.

  428. A surface micromachined accelerometer working in the pull-in operation mode
    H. Yang; L. Pakula; P.J. French;
    In Proceedings SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 700-703, 2002.

  429. Anisotropy of the piezojunction effect in silicon transistors
    J.F. Creemer; P.J. French;
    In Technical digest: MEMS 2002 IEEE international conference Las Vegas,
    IEEE, pp. 316-319, 2002.

  430. A novel operation mode for accelerometers
    H. Yang; L. Pakula; P.J. French;
    In Xiamen University Press, pp. 303-306, 2002.

  431. MEMS technologies in Delft
    P.J. French;
    In WH Ko; W-X Gao (Ed.), Xiamen University Press, pp. 5-10, 2002.

  432. Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices
    G. Craciun; H. Yang; H.W. van Zeijl; L. Pakula; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 612-614, 2002.

  433. Relative humidity sensors based on porous polysilicon and porous silicon carbide
    E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 603-607, 2002.

  434. Pressure sensor for automotive applications
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In Proceedings of SenSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 649-652, 2002.

  435. Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope
    G. Craciun; H. Yang; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In MME'02 micromechanics Europe,
    Nat. Inst. for Res. and Development in Microtechnologies, pp. 55-58, 2002.

  436. 12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide
    E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
    In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors,
    IEEE, pp. 499-502, 2002.

  437. Pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In MME'02 micromechanics Europe,
    Nat. Inst. for Res. and Development in Microtechnoplogies, pp. 295-298, 2002.

  438. Galvanic etch stop in KOH with reduced au area using NaOCI
    E. Connolly; P.J. French; X.H. Xia; J.J. Kelly;
    In Eurosensors 2002,
    Czech Technical University, pp. 443-446, 2002.

  439. Navigation system for endovascular interventions
    D. Tanase; D. van Loon; J.F.L. Goosen; J.A. Reekers; P.J. Trimp; P.J. French;
    In Eurosensors 2002,
    Czech Technical University, pp. 529-532, 2002.

  440. Electromagnetic navigation system for guide wires and/or catheters
    D. Tanase; D. van Loon; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    In I Margineanu; A Nicolaide; M Cernat (Ed.), 8th international conference on optimization of electrical and electronic equipments - OPTIM 2002,
    Transilvania University Press, pp. 725-728, 2002.

  441. The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance
    J.F. Creemer; F. Fruett; G.C.M. Meijer; P.J. French;
    IEEE Sensors Journal,
    Volume 1, pp. 98-108, 2001.

  442. The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance
    J.F. Creemer; F. Fruett; G.C.M. Meijer; P.J. French;
    IEEE Sensors Journal,
    Volume 1, Issue 2, pp. 98-108, 2001.

  443. Integration of silicon MEMS devices: materials and processing considerations
    P.J. French;
    Smart Materials Bulletin,
    pp. 7-13, 2001.

  444. Macroporous-based micromachining on full wafers
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 92, pp. 384-387, 2001.

  445. Etching and passivation of silicon in alkaline solution: a coupled chemical/electrochemical system
    X.H. Xia; C.M.A. Ashruf; P.J. French; J. Rappich; J.J. Kelly;
    The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter),
    Volume 105, pp. 5722-5729, 2001.

  446. Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication
    J.J. Kelly; X.H. Xia; C.M.A. Ashruf; P.J. French;
    IEEE Sensors Journal,
    Volume 1, Issue 2, pp. 127-142, 2001.

  447. Report for Nissan Motor Company Japan
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  448. Progress report for the fifth user's committee meeting of STW project DEL.3908
    J.F. Creemer; P.J. French;
    s.n., , 2001. DEL.3908.

  449. Development of deep dry etching for intelligent mocromachine devices.
    M.A. Blauw; M.F. Craciun; EW.J.M. van der Drift; P.J. French;
    TU Delft, , 2001. Confidenial.

  450. Report for Nissan Motor Company Japan
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  451. Development of deep dry etching for intelligent mocromachine devices.
    M.A. Blauw; M.F. Craciun; EW.J.M. van der Drift; P.J. French;
    TU Delft, , 2001. Confidenial.

  452. Report for Nissan Motor Company Japan
    P.J. French;
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  453. CO2 blood sensor for catheter applications
    V. Trogrlic; J.F.L. Goosen; P.J. Trimp; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 884-887, 2001.

  454. Electrochemical etching for n-type silicon using a novel etchant
    S. Izuo; H. Ohji; P.J. French; K. Tsutsumi;
    In {E Obermeier} (Ed.), Springer, pp. 1-4, 2001.

  455. Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    In {E Obermeier} (Ed.), Springer, pp. 1-4, 2001.

  456. Multi-parameter catheter sensor system with intravascular navigation
    D. Tanase; J.F.L. Goosen; P.J. Trimp; P.J. French;
    In {E Obermeier} (Ed.), Transducers'01: technical papers.Vol. 2,
    Springer, pp. 1658-1661, 2001.

  457. An analytical model of the piezojunction effect for arbitrary stress and current orientations
    J.F. Creemer; P.J. French;
    In {E Obermeier} (Ed.), Transducers '01: technical papers - Vol 1,
    Springer, pp. 256-259, 2001.

  458. Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures
    G. Cracium; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In Transducers '01: technical papers. Vol 1,
    Springer, pp. 612-615, 2001.

  459. Smart sensor interface for a 3D hall sensor
    D. van Loon; D. Tanase; M.F. Snoeij; P.J. French; P.J. Trimp;
    In SAFE-ProRISC-SeSens 2001: proceedings. Semiconductor Advances for Future Eelctronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 825-829, 2001.

  460. Fabrication of a DNA separation chip using macroporous silicon micromachining
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 843-847, 2001.

  461. High aspect ratio cryogenic etching of silicon with SF6/O2 plasma
    G. Cracium; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
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  462. Magnetic sensor for use on guide wires or catheters
    D. Tanase; J.F.L. Goosen; J.A. Reekers; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semicinductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 868-872, 2001.

  463. New post-processing modules
    L. Pakula; H.M.T. Pham; C.R. de Boer; P.M. Sarro; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 848-851, 2001.

  464. Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic
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    In SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology,
    STW Technology Foundation, pp. 773-776, 2001.

  465. Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.
    M.A. Blauw; G. Craciun; EW.J.M. van der Drift; P.J. French;
    In M Elwenspoek (Ed.), Proceedings of the National Dutch Sensor Symposium.,
    pp. 89-94, 2001.

  466. Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures.
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In E Obermeier (Ed.), Proceedings of the Transducers '01 - Eurosensors XV.,
    pp. 612-615, 2001.

  467. High aspect ratio cyrogenic etching of Silicon with SF6/O2 plasma.
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.J. French;
    In STW Technologiestichting (Ed.), Proceedings of the 2nd Workshop on Semiconductors Sensor and Actuator Technology (SESENS).,
    pp. 783-786, 2001.

  468. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
    In M Hill (Ed.), Proceedings of the 12th Micromechanics Europe Workshop MME.,
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  469. Damping caused by the gas flow in the holes of perforated structures
    H. Yang; M. Bao; L. Pakula; P.J. French;
    In {PD Franzon} (Ed.), Proceedings of SPIE Vol. 4593,
    SPIE Press, pp. 307-313, 2001.

  470. Fabrication of mechanical structures using macro-porous silicon
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    In {J-C Chiao} (Ed.), Proceedings of SPIE Vol. 4592,
    SPIE Press, pp. 96-103, 2001.

  471. Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide
    E. Connolly; G.M.O. O. Halloran; P.M. Sarro; P.J. French;
    In {M Elwenspoek} (Ed.), Proceedings,
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  472. Fabrication of mechanical structures using macro-porous silicon
    H. Ohji; P.J. French; S. Izuo; K. Tsutsumi;
    In {M Elwenspoek} (Ed.), Proceedings,
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  473. Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining
    M.A. Blauw; G. Cracium; P.J. French;
    In Proceedings,
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  474. Novel material for low temperature post-processing micromachining
    L. Pakula; H.M.T. Pham; P.M. Sarro; P.J. French;
    In MME 2001: workshop,
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  475. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Cracium; M.A. Blauw; P.M. Sarro; P.J. French;
    In MMe 2001:workshop,
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  476. Effects of gas flow in holes on the squeeze film damping of perforated structures
    H. Yang; L. Pakula; M. Bao; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 888-891, 2001.

  477. The piezojunction effect in bipolar transistors at moderate stress levels: a theoretical and experimental study
    J.F. Creemer; P.J. French;
    Sensors and Actuators A,
    Volume 82, Issue 1-3, pp. 181-185, May 2000.

  478. Galvanic etching for sensor fabrication
    Ashruf C.M.A.; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    Journal of micromechanics and microengineering,
    Volume 10, pp. 505-515, 2000. ISSN 0960-1317.

  479. The Piezojunction effect in bipolar transistors at moderate stress levels: a theoretical and experimental study
    J.F. Creemer; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 82, pp. 181-185, 2000.

  480. Galvanic cell formation in silicon/metal contacts: the effect on silicon surface morphology
    X.H. Xia; C.M.A. Ashruf; P.J. French; J.J. Kelly;
    Chemistry of Materials,
    Volume 12, pp. 1671-1678, 2000.

  481. Initial pits for electrochemical etching in hydrofluoric acid
    H. Ohji; P.J. French; S. Izuo; K. Tsutsumi;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 85, pp. 390-394, 2000.

  482. Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)
    H. Ohji; P.T.J. Gennissen; P.J. French; K. Tsutsumi;
    Journal of Micromechanics and Microengineering,
    Volume 10, Issue 3, pp. 440-444, 2000.

  483. Galvanic etching for sensor fabrication
    C.M.A. Ashruf; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    Journal of Micromechanics and Microengineering,
    Volume 10, pp. 505-515, 2000.

  484. Fabrication of mechanical structures in p-type silicon using electrochemical etching
    H. Ohji; P.J. French; K. Tsutsumi;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 82, pp. 254-258, 2000.

  485. Eind rapportage samenwerking EWR en TU-Delft
    P.J. French; P.J. Trimp; W.M. Oppedijk Van Veen; J.P.L. Schoormans; M. Pennings;
    Faculty of Information Technology and Systems, TU Delft, , 2000.

  486. Report for Nissan Motor company Japan
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  487. Report for Nissan Motor Company Japan
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  488. Development and applications of novel optoelectromechanical system micro-machined in silicon
    G. Vdovin; P.J. French; J.H. Huijsing; M. Loktev;
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  489. Report for Nissan Motor Company Japan
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  490. A theoretical and experimental study of the Piezojunction effect in silicon and its application in new sensor structures: progress report for the 3rd user's committee meeting of STW project DEL.3908
    J.F. Creemer; P.J. French;
    s.n., , 2000. DEL.3908.

  491. Report for Nissan Motor Company Japan
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  492. MEMS/MOEMS technology capabilities and trends
    P.J. French;
    {P Rai-Choudhury} (Ed.);
    SPIE Press, , pp. 1-46, 2000.

  493. Sealing RIE etch holes for an epi-micromachined pressure sensor
    J.F.L. Goosen; J.P. Dartee; C. de Boer; P.J. French; P.M. Sarro;
    In Proc. MME,
    Uppsala, Sweden, pp. B8.1-B8.4, Oct. 2000.

  494. Pressure, flow and oxygen sensors on one chip for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In Proc. MEMS,
    Miyazaki, Japan, pp. 537-540, Jan. 2000.

  495. Anisotropic etching of silicon using a galvanic cell
    P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    In 2nd Workshop on Physical Chemistry of Wet Etching of Silicon,
    Toulouse, pp. 1-8, May 2000.

  496. The Piezojunction effect in silicon and its applications to sensors and circuits
    J.F. Creemer; P.J. French;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 627-631, 2000.

  497. Study of electrochemical etching for 3-D device design
    S. Izuo; H. Ohji; K. Tsutsumi; P.J. French;
    In {H Adachi} (Ed.), Technical digest,
    Institute of Electrical Engineers of Japan, pp. 267-270, 2000.

  498. Three-dimensional magnetic sensor for use in intravascular interventions
    D. Tanase; J.F.L. Goosen; P.J. Trimp; P.J. French;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 693-696, 2000.

  499. Measurement of pressure, flow and oxygen saturation in blood using an integrated sensor
    J.F.L. Goosen; P.J. French;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 639-642, 2000.

  500. Progress in the optimisation of the porous silicon layer of a capacitive humidity sensor based on porous silicon
    E. Connolly; G.M.O. O. Halloran; P.J. French;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 623-626, 2000.

  501. Study of galvanic etching for practical applications
    X.H. Xia; C.M.A. Ashruf; P.J. French; J.J. Kelly;
    In {JP Veen} (Ed.), SAFE- ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 715-717, 2000.

  502. Silicon sensors for use in catheters
    J.F.L. Goosen; D. Tanase; P.J. French;
    In Proceedings,
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  503. Pressure, flow and oxygen saturation sensors on one chip for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In MEMS 2000: proceedings,
    IEEE, pp. 537-540, 2000.

  504. Sealing RIE etch holes for an epi-micromachined pressure sensor
    J.F.L. Goosen; J.P. Dartee; C. den Boer; P.J. French; P.M. Sarro;
    In {Y Bäcklund}; {C Hedlund} (Ed.), MME '00,
    s.n., pp. 1-4, 2000.

  505. Macroporous based micromachining on full wafers
    H. Ohji; S. Izuo; P.J. French; K. Tsutsumi;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
    Mikroelektronik Centret, pp. 415-418, 2000.

  506. The orientation dependence of the Piezojunction effect in bipolar transistors
    J.F. Creemer; P.J. French;
    In {WA Lane}; {GM Crean}; {FA Mccabe}; {H Grunbacher} (Ed.), ESSDERC 2000: proceedings,
    Frontier Group, pp. 416-419, 2000.

  507. Anisotropic etching of silicon using a galvanic cell
    P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    In Abstracts booklet,
    s.n., pp. 1-8, 2000.

  508. Catheter navigation system for intravascular use
    D. Tanase; J.F.L. Goosen; P.J. Trimp; J.A. Reekers; P.J. French;
    In Proceedings,
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  509. Method of producing silicon device
    H. Ohji; K. Tsutsumi; P.J. French; T. Aoyama;
    2000.

  510. Inertia force sensor and method for producing inertia force sensor
    H. Ohji; K. Tsutsumi; P.J. French; T. Aoyama;
    2000.

  511. Light controlled electrochemical etching: equipment and devices
    P.J. French;
    2000.

  512. Galvanic porous silicon formation without external contacts
    C.M.A. Ashruf; P.J. French; PM.M.C. Bressers; J.J. Kelly;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 74, Issue 1-3, pp. 118-122, 1999.

  513. Single step electrochemical etching in ammonium fluoride
    H. Ohji; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 74, pp. 109-112, 1999.

  514. Physical sensors for medical applications
    P.J. French;
    {P.J. French}; {C Grimbergen} (Ed.);
    Delft University of Technology, , 1999.

  515. 3rd Report project ET 970037 [vertrouwelijk]
    P.J. French;
    Delft University of Technology, , 1999.

  516. Report for Nissan Motor Company Japan
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  517. Report for Nissan Motor Company Japan
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  518. Report for Nissan Motor Company Japan
    P.J. French;
    s.n., , 1999. 9.3.

  519. A theoretical and experimental study of the piezojunction effect in silicon and its application in new sensor structures
    J.F. Creemer; P.J. French;
    Delft University of Technology, , 1999.

  520. Report for Nissan motor Company Japan
    P.J. French;
    s.n., , 1999. 9.1.

  521. Report for Nissan Motor Company Japan
    P.J. French;
    s.n., , 1999. 8.10.

  522. Report for Nissan Motor Company Japan
    P.J. French;
    s.n., , 1999. 8.12.

  523. Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)
    H. Ohji; P.T.J. Gennissen; P.J. French; K. Tsutsumi;
    IEEE, , pp. 1-5, 1999.

  524. Pressure and flow sensor for use in catheters
    J.F.L.Goosen; P.J. French; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication 1999 Symposium,
    Santa Clara, CA, SPIE, pp. 38-45, Sep. 1999. ISBN 0-8194-3473-6.

  525. Influence of the Formation Parameters on the Humidity Sensing Characteristics of a Capacitive Humidity Sensor Based on Porous Silicon
    G.M. O'Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 117-120, Sept. 1999. ISBN 90-76699-02-X.

  526. Combination of Epi-Poly and Electropolishing for Fabrication of Accelerometers with Large Substrate Separation Gaps
    P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M. O'Halloran; P.M. Sarro;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 1029-1032, Sept. 1999.

  527. Practical considerations of the galvanic etch-stop for device application
    C.M.A.Ashruf; P.J. French; P.M. Sarro; W. van d.Vlist; E.L.Oemar; L.J.Breems; J.J.Kelly;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, pp. 560-563, Jun. 1999.

  528. Fabrication of mechanical structures in p-type silicon using electrochemical etching
    H. Ohji; P.J. French; K. Tsutsumi;
    In Transducers '99: digest of technical papers. Vol. 1,
    Institute of Electrical Engineers of Japan, pp. 1086-1089, 1999.

  529. Theoretical and experimental study of the piezojunction effect in bipolar transistors at moderate stress levels
    J.F. Creemer; P.J. French;
    In Transducers '99: digest of technical papers. Vol. 1,
    Institute of Electrical Engineers of Japan, pp. 204-207, 1999.

  530. A new high temperature pressure sensor based on a thermal read-out principle
    U.A. Dauderstadt; C.M.A. Ashruf; P.J. French;
    In Transducers '99: digest of technical papers. Vol. 1,
    Institute of Electrical Engineers of Japan, pp. 1610-1613, 1999.

  531. Practical considerations of the galvanic etch-stop for device applications
    C.M.A. Ashruf; P.J. French; P.M. Sarro; W. van der Vlist; E.L. Oemar; L.J. Breems; J.J. Kelly;
    In Transducers '99: digest of technical papers. Vol. 1,
    Institute of Electrical Engineers of Japan, pp. 560-563, 1999.

  532. Time at risk: ALARP trade-offs over time
    T.J. Bedford; E. Atherton; P.J. French;
    In {GI Schuëller}; {P Kafka} (Ed.), Safety and reliability: proceedings of ESREL '99,
    Balkema, pp. 1441-1446, 1999.

  533. The Piezojunction effect in mechanical and bandgap sensors
    J.F. Creemer; P.J. French;
    In SAFE99: proceedings. ProRISC99: proceedings [CD-ROM],
    STW Technology Foundation, pp. 105-109, 1999.

  534. Editorship
    P.J. French;
    In {P.J. French}; {E Peeters} (Ed.), Proceedings of SPIE 3876,
    International Society for Optical Engineering, pp. -, 1999.

  535. Development of silicon accelerometers using epi-micromachining
    P.T.J. Gennissen; P.J. French;
    In {P.J. French}; {E Peeters} (Ed.), Micromachined devices and components V (Proceedings of SPIE 3876),
    International Society for Optical Engineering, pp. 84-92, 1999.

  536. A comparison of CBA and MAUT for ALARP decision-making
    P.J. French; E. Atherton; T.J. Bedford;
    In {LHJ Goossens} (Ed.), Proceedings,
    Delft University Press, pp. 550-553, 1999.

  537. Developing MEMS technology: choosing the options to meet requirements
    P.J. French;
    In {PD Mangalgiri}; {AR Upadhya}; {A Selvarajan} (Ed.), Proceedings,
    Allied Publishers, pp. 182-189, 1999.

  538. Pressure and flow sensor for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In {P.J. French}; {E Peeters} (Ed.), Micromachined devices and components V (Proceedings of SPIE 3876),
    International Society for Optical Engineering, pp. 38-44, 1999.

  539. A study of the reliability of passivation layers for sensor applications
    P.J. Trimp; J.R. Mollinger; A. Bossche; F.R. Riedijk; P.J. French;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
    Delft University of Technology, pp. 823-826, 1999.

  540. Initial pits for electrochemical etching in hydrofluoric acid
    H. Ohji; P.J. French; S. Izuo; K. Tsutsumi;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
    Delft University of Technology, pp. 1037-1040, 1999.

  541. Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
    P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M.O. O. Halloran; P.M. Sarro;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
    Delft University of Technology, pp. 1029-1032, 1999.

  542. Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
    G.M.O. O. Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
    In Eurosensors XIII: proceedings,
    Delft University of Technology, pp. 117-120, 1999.

  543. Integration of MEMS devices
    P.J. French;
    In {NW Bergmann}; {O Reinhold}; {NC Tien} (Ed.), Electronics and structures for MEMS (Proceedings of SPIE 3891),
    International Society for Optical Engineering, pp. 39-48, 1999.

  544. A new contactless electrochemical etch stop based on a gold/silicon/TMAH galvanic cell
    C.M.A. Ashruf; P.J. French; P.M.M.C. Bressers; P.M. Sarro; J.J. Kelly;
    Sensors and Actuators A,
    Volume 66, Issue 1-3 (1998), pp. 284-292, 1998.

  545. Temperature dependence and drift of a thermal accelerometer
    U.A. Dauderstadt; P.M. Sarro; P.J. French;
    Sensors & Actuators A,
    Volume 66, Issue 1-3, pp. 244-249, 1998.

  546. Electrochemical etch stop engineering for bulk micromachining
    C.M.A. Ashruf; P.J. French; P.M. Sarro; M.C. Bressers; J.J. Kelly;
    Mechatronics,
    Volume 8 (1998), pp. 595-612, 1998.

  547. Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 8, pp. 45-53, 1998.

  548. Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]
    C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly; PM.M.C. Bressers;
    Mechatronics,
    Volume 1998, Issue 8, pp. 595-612, 1998.

  549. Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 8, Issue 2, pp. 45-53, 1998.

  550. Galvanic etching of silicon
    C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly;
    In Proc.SPIE Micromachining and Microfabrication 98 Symposium,
    Santa Clara, USA, SPIE, pp. 82-87, Sep. 1998.

  551. Integration Technology
    P.J. French; P.M. Sarro;
    In Proc. SPIE Smart Electronics and MEMS Symposium,
    San Diego, USA, SPIE, pp. 60-71, Mar. 1998.

  552. Porous silicon membrane for humidity sensing applications
    G.M. O'Hallaran; J. Groeneweg; P.M. Sarro; P.J. French;
    In Proc. Eurosensors XII Conf.,
    Southampton, UK, pp. 901-904, Sep. 1998.

  553. Thickness of membranes fabricated with galvanic etch-stop, uniformity and reproducibility
    E.L. Oemar; C.M.A. Ashruf; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XII Conf.,
    Southampton, UK, pp. 3-6, Sep. 1998.

  554. Temperature dependence of a thermal accelerometer
    U.A. Dauderstadt; P.M. Sarro; P.J. French;
    In Proc. Dutch Sensor Conf,
    Twente, pp. 55-60, Mar. 1998.

  555. Membrane fabrication with galvanic etch-stop cell
    C.M.A. Ashruf; E.L. Oemar; P.J. French; P.M. P.M. Sarro M.C. Bressers; J.J. Kelly;
    In Proc. Dutch Sensor Conf,
    Twente, pp. 139-142, Mar. 1998.

  556. Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]
    gmo O'Halloran; J. Groeneweg; P.M. Sarro; P.J. French;
    In proceedings,
    s.n., pp. 901-904, 1998.

  557. New silicon micromachining techniques for microsystems
    P.J. French; P.T.J. Gennissen; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 62, Issue 1-3, pp. 652-662, Jul. 1997.

  558. Dual structural polysilicon BiFET-compatible surface-micromachining module
    Drieenhuizen; B.P. van; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 7, Issue 3, pp. 148-150, Sep. 1997.

  559. Optimization of a low stress silicon nitride process for surface micromachining applications
    P.J. French; P.M. Sarro; R. Malle; E.J.M. Fakkeldij; R.F. Wolffenbuttel;
    Sensors and Actuators A,
    Volume 58, pp. 149-157, 1997.

  560. Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    Sensors and Actuators A,
    Volume 62, pp. 636-645, 1997.

  561. Strain effects in multilayers
    C.M.A. Ashruf; P.J. French; C. de Boer; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
    Austin, Texas, USA, SPIE, pp. 149-159, Sep. 1997.

  562. Bulk micromachined pressure sensor based on epi-poly technique
    P.T.J. Gennissen; C.M.A. Ashruf; M. Kaak; P.J. French; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
    Austin, Texas, USA, SPIE, pp. 212-219, Sep. 1997.

  563. Study of Selective and Non-Selective Deposition of Single- and Polycrystalline Silicon Layers in an Epitaxial Reactor
    M. Bartek; P.T.J. Gennissen; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Proc. Transducers 97,
    Chicago, USA, pp. 1403-1406, Jun. 1997.

  564. Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    In Proc. MME 97 Conf,
    Southampton, UK, pp. 18-30, Aug. 1997.

  565. Fabrication of micromechanical structures with a new electrodeless electrochemical etch stop
    C.M.A. Ashruf; P.J. French; P.M. Sarro; M. Nagao; M. Esashi;
    In Proc. 9th Int. Conf. Solid-State Transducers,
    Chicago, USA, pp. 703-706, Jun. 1997.

  566. A bulk micromachined humidity sensor based on porous silicon
    G.M. O'Hallaran; P.M. Sarro; J. Groeneweg; P.J. Trimp; P.J. French;
    In Proc. 9th Int. Conf. Solid-State Transducers,
    Chicago, USA, pp. 563-566, Jun. 1997.

  567. The development of a low-stress polysilicon process compatible with standard device processing
    P.J. French; B.P. van Drieenhuizen; D. Poenar; J.F.L. Goosen; R. Mallee; P.M. Sarro; R.F. Wolffenbuttel;
    Journal of Microelectromechanical Systems,
    Volume 5, Issue 3, pp. 187-196, 1996.

  568. Bipolar compatible epitaxial poly for surface micromachined smart sensors
    P.T.J. Gennissen; P.J. French; M. Bartek; P.M. Sarro; A. van den Boogaard; C. Visser;
    In Proc. SPIE Conference on Micromachining & Microfabrication, Process Technology II,
    Austin, USA, SPIE, pp. 135-142, Oct. 1996.

  569. New developments in the integration of micromachined sensors
    P.M. Sarro; P.J. French; P.T.J. Gennissen;
    In Proc. SPIE Micromachining and Microfabrication 1996 Symposium,
    Austin, Texas, USA, SPIE, pp. 26-36, Oct. 1996.

  570. Dual structural polysilicon BiFET-compatible surface-micromachining module
    B.P.van Drieenhuizen; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Proc. MME 96,
    Barcelona, Spain, pp. 70-73, Oct. 1996.

  571. Bipolar compatible epitaxial poly for smart sensors - stress minimization and applications
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. Eurosensors X,
    Leuven, Belgium, pp. 187-190, Sep. 1996.

  572. IC-compatible silicon fusion bonding
    A. Berthold; P.M. Sarro; P.J. French; M.J. Vellekoop;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 489-491, Sep. 1996.

  573. New micromachining techniques for microsystems
    P.J. French; P.T.J. Gennissen; P.M. Sarro;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 465-472, Sep. 1996.

  574. Thick polysilicon microstructures by combination of epitaxial and poly growth in a single deposition step
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. 1996 National Sensor Conference,
    Delft, The Netherlands, pp. 189-192, Mar. 1996.

  575. New etchant for the fabrication of porous silicon
    G.M. O'Hallaran; M. Kuhl; P.M. Sarro; P.T.J. Gennissen; P.J. French;
    In Moustakas, Dismukes, Pearton) (Ed.), Proc. 189th Electrochemical Society Meeting: III-V Nitride Materials and Compounds,
    Los Angeles, California, USA, pp. 180-185, May 1996.

  576. Low-stress nitride as oxidation mask for submicrometre LOCOS isolation
    H.W. van Zeijl; L.K. Nanver; P.J. French;
    Electronics Letters,
    Volume 31, Issue 11, pp. 927-929, May 1995.

  577. Automatic etch stop on buried oxide using epitaxial lateral overgrowth
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Transducers 95,
    Stockholm, Sweden, pp. 75-78, Jun. 1995.

  578. PSG layers for surface micromachining
    D. Poenar; P.J. French; R. Malle; P.M. Sarro; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 41, Issue 1-3, pp. 304-309, Apr. 1994.

  579. An integrated silicon colour sensor using selective epitaxial growth
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    Sensors and Actuators A,
    Volume 41, Issue 1-3, pp. 123-128, Apr. 1994.

  580. Reactive ion etching (RIE) techniques for micromachining applications
    Y.X. Li; M.R. Wolffenbuttel; P.J. French; M. Laros; P.M. Sarro; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 41, Issue 1-3, pp. 317-323, Apr. 1994.

  581. Surface micromachined tuneable interferometer array
    K. Aratani; P.J. French; P.M. Sarro; D. Poenar; R.F. Wolffenbuttel; S. Middelhoek;
    Sensors and Actuators A: Physical,
    Volume 43, Issue 1-3, pp. 17-23, May 1994.

  582. A Novel Silicon Colour Sensor Using Selective Epitaxial Growth
    M. Bartek; P.T.J. Gennissen; E.J. Blaauw; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers 93),
    Yokohama, Japan, pp. 144-147, Jun. 1993.

  583. Selective epitaxial growth for smart silicon sensor applications
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. Eurosensors VII,
    Budapest, Hungary, Sep. 1993.

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