dr. C. Shen

PhD student
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Nov 2011): Silicon Micromachined Vertical Structures for Nanoparticle Separation
Promotor: Lina Sarro

Expertise: Microsieves for dynamic filtration of nano particles


Chenggang Shen was born in Shanghai, China in Oct. 1979. In June 2001, After recieving the bachelor degeree in Mechanical Engineering from Shanghai Jiao Tong University (SJTU), he joined Semiconductor Manufacturing International Corporation (SMIC Shanghai) and work in its first fab (fab1, 8 inch). In June 2004, he was relocated to SMIC(Beijing) for the new fab (fab4, 12 inch). In September 2005, he came to Delft University of Technology (TU/D) for master study in microelectronics. His thesis was done in Philips Research,Eindhoven under the supervision of Dr.Ronald Dekker and Prof.P.M.Sarro with the topic ""Micormachined High-Q Cavity Resonators"". Since June 2007 to now, he is a Ph.D student at Delft University of Technology, in the Microsystems/MEMS technology group of ECTM, supervised by Prof. P. M. Sarro. The present research focuses is on microsieves for dynamic filtration of nano particles.

Last updated: 16 Jun 2014

Chenggang Shen