dr. B. Morana

Postdoc
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Jul 2015): Silicon carbide thin films for MEMS nanoreactors for in-situ transmission electron microscopy
Promotor: Lina Sarro, Frederik Creemer

Projects history

MEMS nanoreactors for atomic-scale microscopy of nanomaterials under industrially relevant conditions

MEMS nanoreactors are used to study chemical reactions in high-resolution microscopes

  1. Quantum Signature of a Squeezed Mechanical Oscillator
    A. Chowdhury; P. Vezio; M. Bonaldi; A. Borrielli; F. Marino; B. Morana; G. A. Prodi; P. M. Sarro; E. Serra; F. Marin;
    Physical Review Letters,
    Volume 124, pp. 023601, 2020. DOI: https://doi.org/10.1103/PhysRevLett.124.023601

  2. Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration
    L.M. Middelburg; H.W. van Zeijl; S. Vollebregt; B. Morana; GuoQi Zhang;
    IEEE Sensors,
    Volume 20, Issue 19, pp. 11265-11274, 2020. DOI: 10.1109/JSEN.2020.2998915

  3. Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments
    Jiarui Mo; L.M. Middelburg; B. Morana; H.W. Van Zeijl; S. Vollebregt; GuoQi Zhang;
    IEEE Sensors,
    2020.
    document

  4. Calibrated quantum thermometry in cavity optomechanics
    Chowdhury, Avishek; Vezio, Paolo; Bonaldi, Michele; Borrielli, Antonio; Marino, Francesco; Morana, Bruno; Pandraud, Gregory; Pontin, Antonio; Prodi, Giovanni; Sarro, Lina; Serra, Enrico; Marin, Francesco;
    Quantum Science and Technology,
    2019.

  5. Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes
    Cinzia Silvestri; Michele Riccio; René H. Poelma; Aleksandar Jovic; Bruno Morana; Sten Vollebregt; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
    Small,
    Volume 14, Issue 20, pp. 1800614, 2018. DOI: 10.1002/smll.201800614

  6. Imaging Correlations in Heterodyne Spectra for Quantum Displacement Sensing
    Pontin, A.; Lang, J. E.; Chowdhury, A.; Vezio, P.; Marino, F.; Morana, B.; Serra, E.; Marin, F.; Monteiro, T. S.;
    Physical Review Letters,
    2018. DOI: https://doi.org/10.1103/PhysRevLett.120.020503

  7. Wafer-Scale Integration for Semi-Flexible Neural Implant Miniaturization
    Marta Kluba; Bruno Morana; Angel Savov; Henk Van Zeijl; Gregory Pandraud; Ronald Dekker;
    In Proceedings Eurosensors,
    pp. 941, 2018. DOI: https://doi.org/10.3390/proceedings2130941

  8. Effect of droplet shrinking on surface acoustic wave response in microfluidic applications
    Thu Hang Bui; Van Nguyen; Sten Vollebregt; Bruno Morana; Henk van Zeijl; Trinh Chu Duc; P.M. Sarro;
    Applied Surface Science,
    Volume 426, pp. 253-261, 2017.
    document

  9. Liquid identification by using a micro-electro-mechanical interdigital transducer
    Thu Hang Bui; Bruno Morana; Atef Akhnoukh; Trinh Chu Duc; Pasqualina M Sarro;
    Analyst,
    Volume 142, Issue 5, pp. 763-771, 2017.

  10. Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity
    Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; GuoQi Zhang; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 266-269, 2017.

  11. A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis
    T.H. Bui; B. Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
    Journal of Applied Physics,
    Volume 120, Issue 7, pp. 074504, 2016.

  12. Control of recoil losses in nanomechanical SiN membrane resonators
    A. Borrielli; L. Marconi; F. Marin; F. Marino; B. Morana; G. Pandraud; A. Pontin; G. A. Prodi; P. M. Sarro; E. Serra; M. Bonaldi;
    Physical Review B,
    Volume 94, pp. 121403, 2016.

  13. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
    Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
    Nanoscale,
    Volume 8, pp. 8266-8275, 2016.
    document

  14. Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
    E. Serra; M. Bawaj; A. Borrielli; G. Di Giuseppe; S. Forte; N. Kralj; N. Malossi; L. Marconi; F. Marin; F. Marino; B. Morana; R. Natali; G. Pandraud; A. Pontin; G. A. Prodi; M. Rossi; P. M. Sarro; D. Vita;
    AIP Advances,
    Volume 6, pp. 065004, 2016.

  15. Optimisation of Bio-medical Optical Waveguide
    Y. Xin; G. Pandraud; L. Pakula; B. Morana; P.J. French;
    In 2016 IEEE NEMS Conference,
    Matsushima, Japan, IEEE, April 2016.

  16. Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators
    S. Thomas; A. Jovic; B. Morana; F. Buja; A. Gkouzou; G. Pandraud; P.M. Sarro;
    In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
    pp. 1144-1147, 2016.
    document

  17. Effect of the interruption of the propagation path on the response of surface acoustic wave transducers
    Thu Hang Bui; An Tran; Bruno Morana; Jia Wei; Trinh Chu Duc; P.M. Sarro;
    In Proceedings of the IEEE Sensors conference,
    2016.

  18. All-SiC surface micromachined nanoreactor for in-situ transmission electron microscopy
    B. Morana; C. Silvestri; J.F. Creemer; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 753-756, 2016.

  19. Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides
    Yu Xin; Gregory Pandraud; Lukasz S. Pakula; Bruno Morana; Paddy J. French;
    In 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
    April 2016. DOI: 10.1109/NEMS.2016.7758311
    Abstract: ... As a promising material in MEMS field, SiC is widely used to fabricate sensors in many applications. Considering its fabrication potential and optical properties, SiC was chosen as the core material of evanescent waveguide sensor in this paper. LPCVD and PECVD deposition were combined in fabricating the waveguide. To reduce the coupling loss and misalignment effect, 3D tapered couplers were designed to be added to the input and output of the waveguide and a novel slope transfer method was investigated to fabricate the taper slope. In initial experiments we have achieved a slope of 16.7°.

  20. Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials
    G. Fiorentino; B. Morana; S. Forte; P.M .Sarro;
    Journal of Vacuum Science and Technology A,
    Volume 33, pp. 01A142, 2015.

  21. A measurement apparatus for switching losses based on an heat-flux sensor
    Iero, Demetrio; Della Corte, Francesco G.; Fiorentino, Giuseppe; Sarro, Pasqualina M.; Morana, B.;
    In AISEM Annual Conference,
    pp. 1-4, 2015.

  22. SAW device for liquid vaporization rate and remaining molecule sensing
    Thu Hang Bui; Bruno Morana; An Tran; Tom Scholtes; Trinh Chu Duc; Pasqualina M. Sarro;
    In IEEE Sensors Conference,
    2015.

  23. Silicon Carbide Technologies applied to MEMS Nanoreactors for in-situ Transmission Electron Microscopy
    Bruno Morana;
    PhD thesis, Delft University of Technology, 2015.

  24. Atomic-scale imaging of Pt and Pd nanoparticle catalysts during CO oxidation at 1 Bar reaction conditions
    Vendelbo, SB; Elkjaer, CF; Puspitasari, I; Creemer, JF; Dona, P; Mele, L; Morana, B; Nelissen, BJ; Roobol, S; Rijn, R van; Helveg, S; Kooyman, PJ;
    Microscopy and Microanalysis,
    Volume 20, Issue S3, pp. 1570-1571, 2014.

  25. Stiction-Induced Sealing of Surface Micromachined Channels
    B Morana; RH Poelma; G Fiorentino; J Wei; JF Creemer; PM Sarro;
    Journal of Microelectromechanical Systems,
    Volume 23, Issue 2, pp. 459-470, 2014.
    document

  26. Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings
    Poelma, RH; Morana, Bruno; Vollebregt, Sten; Schlangen, Erik; van Zeijl, HW; Fan, Xuejun; Zhang, GuoQi;
    Advanced Functional Materials,
    Volume 24, Issue 36, pp. 5737-5744, 2014.
    document

  27. Visualization of oscillatory behaviour of Pt nanoparticles catalysing CO oxidation
    Vendelbo, SB; Elkj{\ae}r, CF; Falsig, H; Puspitasari, I; Dona, P; Mele, L; Morana, B; Nelissen, BJ; Rijn, R van; Creemer, JF; Kooyman, PJ; Helveg, S;
    Nature Materials,
    Volume 13, Issue 9, pp. 884-890, 2014.

  28. Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications
    C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; GuoQi Zhang; P.M. Sarro;
    In IEEE Sensors,
    pp. 827-830, 2014.
    document

  29. CNT bundles growth on microhotplates for direct measurement of their thermal properties
    C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; GuoQi Zhang; P.M. Sarro;
    In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
    San Francisco, USA, Jan. 2014.
    document

  30. Atomic-scale imaging of catalysts at 1 bar reaction conditions
    Elkjaer, CF; Vendelbo, SB; Puspitasari, I; Dona, P; Mele, L; Morana, B; Rijn, R van, Nelissen, BJ; Creemer, JF; Kooyman, PJ; Helveg, S;
    In Abstracts Workshop TAILOR-2014,
    pp. 49, 2014.

  31. Heat flux sensor for power loss measurements of switching devices
    Iero, Demetrio; Corte, Francesco G Della; Fiorentino, Giuseppe; Sarro, Pasqualina M; Morana, B;
    In Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on,
    IEEE, pp. 327--330, 2013.

  32. Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates
    Morana, B; Fiorentino, G; Pandraud, G; Creemer, JF; Sarro, PM;
    In Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on,
    IEEE, pp. 484--487, 2013.

  33. Stiction-driven sealing of surface micromachined channels
    B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
    In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
    Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202.

  34. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbas; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1554-1557, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969736.

  35. An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
    J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
    In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622.

  36. In situ HRTEM of a catalyst using a nanoreactor at 1 bar
    S.B. Vendelbo; J.F. Creemer; S. Helveg; B. Morana; L. Mele; A.M. Molenbroek; P.M. Sarro; H.W. Zandbergen; P.J. Kooyman;
    In Netherlands Catalysis and Chemistry Conference (NCCC-XII),
    Noordwijk, pp. 332, Feb. 2011.

  37. A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
    B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
    In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441.

  38. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbás; P.J. French; P.M. Sarro;
    In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, IEEE, pp. 1554-1557, June 2011.

  39. Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
    L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
    J. Micromech. Microeng.,
    Volume 20, 2010.

  40. LPCVD amorphous SiCx for freestanding electron transparent windows
    B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
    In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
    Wanchai, Hong Kong, IEEE, pp. 572-575), 2010.

  41. Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
    F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
    In Proceedings of IEEE Sensors 2009 Conference,
    Christchurch, New Zealand, pp. 799-802, 2009.
    document

  42. Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition
    L. Mele; B. Morana; C.R. de Boer; J.F. Creemer; P.M. Sarro;
    In Proceeding title: Proceedings of the Eurosensors XXIII Conference,
    Lausanne, Switzerland, pp. 1531-1534, 2009.
    document

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Last updated: 10 Feb 2020