dr.ir. F. Santagata
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics
PhD thesis (Dec 2011): Mechanical Robustness and Hermeticity Monitoring for MEMS Thin Film Encapsulation
Promotor: Lina Sarro
With zero-level packaging or thin-film encapsulation, MEMS are already sealed during wafer processing.Projects history
Gallium nitride (GaN) on silicon system integration
3D System-in-package Design Using Stacked Silicon Submount Technology
Thin-film encapsulation of MEMS microcavities
Jianwen Sun; Robert Sokolovskij; Elina Iervolino; Fabio Santagata; Zewen Liu; Pasqualina M. Sarro; GuoQi Zhang;
IEEE Transactions on Electron Devices,
2019. DOI: 10.1109/TED.2019.2936912
document
Sokolovskij, R.; Zhang, J.; Iervolino, E.; Zhao, C.; Santagata, F.; Wang, F.; Yu, H.; Sarro, P. M.; GuoQi Zhang;
Sensors and Actuators B: Chemical,
2018. DOI: 10.1016/j.snb.2018.08.015
Mingzhi Dong; E Iervolino; F Santagata; G Zhang; GuoQi Zhang;
IEEE Sensors Journal,
Volume 17, Issue 9, pp. 2814-2821, 2017.
R Sokolovskij; E Iervolino; C Zhao; F Santagata; F Wang; H Yu; PM Sarro; GuoQi Zhang;
In Proceedings of Eurosensors,
pp. 463, 2017.
Yevgen Bilevych; Stefan E. Brunner; Hong Wah Chan; Edoardo Charbon; Harry van der Graaf; Cornelis W. Hagen; Gert Nützelf; Serge D. Pintof; Violeta Prodanović; Daan Rotman; Fabio Santagata; Lina Sarro; Dennis R. Schaar;
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
Volume 809, pp. 171-174, 2016.
Mingzhi Dong; Elina Iervolino; Fabio Santagata; GuoQi Zhang;
Sensors and Actuators A: Physical,
Volume 247, pp. 115-124, 2016.
Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
Nanoscale,
Volume 8, pp. 8266-8275, 2016.
document
R. Sokolovskij; J. Sun; F. Santagata; E. Iervolino; S. Li; G.Y. Zhang; P.M.Sarro; GuoQi Zhang;
In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
pp. 1094-1097, 2016.
Mingzhi Dong; Fabio Santagata; Robert Sokolovskij; Jia Wei; Cadmus Yuan; GuoQi Zhang;
Microelectronics International,
Volume 32, Issue 2, pp. 63-72, 2015.
C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; GuoQi Zhang; P.M. Sarro;
In IEEE Sensors,
pp. 827-830, 2014.
document
Xueming Li; E Iervolino; F Santagata; Jia Wei; Cadmus Yuan; PM Sarro; GuoQi Zhang;
In IEEE Sensors,
pp. 2151-2154, 2014.
C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; GuoQi Zhang; P.M. Sarro;
In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
San Francisco, USA, Jan. 2014.
document
Mingzhi Dong; Santagata, F; Jia Wei; Yuan, C; GuoQi Zhang;
In Proceedings - 64th Electronic Components and Technology Conference,
pp. 1192-1197, 2014.
H. van der Graaf; M.A. Bakker; H.W. Chan; E. Charbon; F. Santagata; P.M. Sarro; D.R. Schaart;
IOP Journal of Instrumentation,
Volume 8, Issue 1, pp. C01036, January 2013.
document
E. Iervolino; M. Riccio; F. Santagata; J. Wei; A.W. van Herwaarden; A. Irace; G. Breglio; P.M. Sarro;
Sensors and Actuators A,
Volume 190, pp. 6-12, Feb. 2013. DOI 10.1016/j.sna.2012.10.008.
F. Santagata; C. Farriciello; G. Fiorentino; H.W. van Zeijl; C. Silvestri; GuoQi Zhang; P.M. Sarro;
Journal of Micromechanics and Microengineering,
2013.
G. Fiorentino; W. Syed; F. Santagata; M. Spirito; G. Pandraud; A. Neto; P. M. Sarro; A. J. L. Adam;
In 2013 IEEE SENSORS,
pp. 1-4, Nov 2013.
Mingzhi Dong; Fabio Santagata; Jia Wei; Cadmus Yuan; GuoQi Zhang;
In 10th China International Forum on Solid State Lighting,
2013.
Fiorentino, G; Syed, W; Santagata, F; Spirito, M; Pandraud, G; Neto, A; Sarro, PM; Adam, AJL;
In Sensors, 2013 IEEE,
IEEE, pp. 1--4, 2013.
F. Santagata; G. Almanno; S. Vollebregt; C Silvestri; GuoQi Zhang; P.M. Sarro;
In 8th IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS),
pp. 1214-1217, Apr 2013. DOI 10.1109/NEMS.2013.6559937.
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
Sensors and Actuators A,
2012. DOI 10.1016/j.sna.2011.11.023.
F. Santagata; J.F. Creemer; E. Iervolino; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 22, Issue 10, Sep. 2012. DOI 10.1088/0960-1317/22/10/105025.
F. Santagata; J.J.M. Zaal; V.G. Huerta; L. Mele; J.F. Creemer; P.M. Sarro;
Journal of Microelectromechanical Systems,
Volume 21, Issue 1, pp. 100-109, Feb. 2012. DOI 10.1109/JMEMS.2011.2170817.
B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202.
M. Nie; F. Santagata; T. Moh; Q.-A. Huang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 1747-1750, Oct 2012.
F. Santagata; G. Fiorentino; M. Nie; C. Farriciello; R. Poelma; GuoQi Zhang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 668-671, Oct 2012.
F. Santagata; E. Iervolino; L. Mele; A.W. van Herwaarden; J.F. Creemer; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 11, pp. 1-7, 2011. DOI 10.1088/0960-1317/21/11/115007.
F. Santagata; J.F. Creemer; E. Iervolino; L. Mele; A.W. van Herwaarden; P.M. Sarro;
IEEE Journal of Microelectromechanical Systems,
Volume 20, Issue 3, pp. 676-684, Jun. 2011. DOI 10.1109/JMEMS.2011.2127457.
C. Shen; V.R.S.S. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 854-857, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969464.
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2690-2693, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969500.
E. Iervolino; L. Mele; F. Santagata; A.W. van Herwaarden; W. van der Vlist; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1038-1041, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969167.
L. Mele; T. Rossi; M. Riccio; E. Iervolino; F. Santagata; A. Irace; G. Breglio; J.F. Creemer; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 387-390, Sep. 2011. DOI 10.1016/j.proeng.2011.12.096.
J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622.
B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441.
J.J.M. Zaal; F. Santagata; W.D. van Driel; GuoQi Zhang; J.F. Creemer; P.M. Sarro;
In 12th Internat. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments Microelectronics and Microsystems (EuroSimE 2011),
Linz, Austria, pp. 1-6, Apr. 2011. ISBN 978-1-4577-0106-1.
document
C. Shen; VRSS. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
IEEE, pp. 854-857, 2011.
C. Shen; V.R.S.S Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference,
IEEE, pp. 854-857, 2011.
J.F. Creemer; G. Pandraud; F. Santagata;
Patent No. WO2011019276, Feb. 2011.
F. Santagata;
PhD thesis, Delft University of Technology, Dec. 2011. ISBN 978-90-8570-759-2; Promotor: prof.dr. P.M. Sarro.
L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
J. Micromech. Microeng.,
Volume 20, 2010.
Santagata; F.; E. Iervolino; Laros; J.M.W.; Groeneweg; J.; Creemer; J.F.; van Herwaarden; A.W.; P.M. Sarro and;
In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
Wanchai, Hong Kong, IEEE, pp. 643-646), 2010.
B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
Wanchai, Hong Kong, IEEE, pp. 572-575), 2010.
F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
In PM Sarro & C Hierold (Eds.), Proceedings of IEEE MEMS 2009 Conference,
Sorrento, Italy, IEEE, pp. 848-851, 2009.
F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
In Proceedings of IEEE Sensors 2009 Conference,
Christchurch, New Zealand, pp. 799-802, 2009.
document
F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
In P.M. Sarro; C Hierold (Ed.), Single wafer surface micromachined field emission electron source,
IEEE, pp. 848-851, 2009.
F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
In s.n. (Ed.), Proceedings Eurosensors XXII,
Dresden, Germany: Eurosensors XXII, pp. 625-628, 2008.
document
F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
In s.n. (Ed.), Proceedings Eurosensors XXII,
Eurosensors XXII, pp. 625-628, 2008.
L. La Spina; V. d'Alessandro; F. Santagata; N. Rinaldi; L. K. Nanver;
In Proc. IEEE BCTM,
Boston, USA, pp. 131-134, Oct. 2007.
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Last updated: 21 Jul 2020
Fabio Santagata
Alumnus- Left in 2011
- Now: Director of Product Innovation at Shenzhen 3nod Acousticlink Co., Ltd.
- Personal webpage
- Google Scholar profile