Department of Microelectronics
Faculty of Electrical Engineering, Mathematics, and Computer Science

dr. A. Arslan

Postdoc
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Apr 2015): Single-grain Silicon Technology for Large Area X-ray Imaging
Promotor: Kees Beenakker, Ryoichi Ishihara

Biography

Aslihan Arslan was born in Ordu, Turkey in 1983. She received B.Sc. and M.Sc. degree in Physics, and Electrical and Computer Engineering from Middle East Technical University, Ankara and Koc University, Istanbul, respectively. During her master, she worked as a research and teaching assistant in Optical Microsystem Laboratory with Prof. Dr. Hakan Urey on comb actuated MEMS scanners and actuators. Meanwhile, she worked with Microvision Inc., USA in high resolution pico-projector project. In 2010, she started PhD in Thin-film Transistor group in Department of Microelectronics, Delft University of Technology. She is working on development of low dose and large area X-ray image sensor using single grain TFT technology. Her PhD research is funded by HiDRaLoN consortium. In 2011, she is awarded HSP Huygens Scholarship.

Publications

  1. Singe-Step CMOS Compatible Fabrication of High Aspect Ratio Microchannels Embedded in Silicon
    M. Kluba; A. Arslan; R. Stoute; J. Muganda; R. Dekker;
    In Eurosensors,
    2017.
    document

  2. CMOS compatible embedded microchannels
    R. Stoute; J.M. Muganda; S. Dahar; A. Arslan; R.J.M Henderikx; P.C.M. van Stiphout; J.M.J. den Toonder; R. Dekker;
    In 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences,
    2016.

  3. High Aspect Ratio Buried Channel Fabricated Using Two Step DRIE Process
    M. M. Kluba; A. Arslan; R. Dekker;
    In ICT.OPEN,
    2016.

  4. Single-grain Silicon Technology for Large Area X-ray Imaging
    Aslihan Arslan;
    PhD thesis, Delft University of Technology, 2015.
    document

  5. Improvement on MIS Properties of Single-Grain Germanium by Pulsed-Laser Annealing
    P. Sun; M. van der Zwan; A. Arslan; E. Charbon andR. Ishihara;
    In Proc. IEEE Semiconductor Interface Specialists Conference (SISC),
    December 2013.
    document

  6. Improvement on MIS Properties of Single-Grain Germanium by Pulsed-Laser Annealing
    Pengfei Sun; M. van der Zwan; A. Arslan; E. Charbon; R. Ishihara;
    In 44th IEEE Semiconductor Interface Specialists Conference,
    Arlington, USA, 2013.

  7. Thick single grain silicon formation with microsecond green laser crystallization
    A. Arslan; H.J. Kahlert; P. Oesterlin; D.T. Mofrad; R. Ishihara; C.I.M. Beenakker;
    ECS Transactions,
    Volume 50, Issue 8, pp. 35-42, Oct. 2012. ISBN 978-1-62332-007-2.

  8. High-sensitivity single-grain Si PIN photodiode with thick-silicon and deep doped regions
    A. Arslan; R. Ishihara; C.I.M. Beenakker;
    In 8th International Thin-Film Transistor Conference,
    Lisbon, Portugal, Jan. 2012.

  9. Design and fabrication of single grain (SG) TFTs and lateral PIN photodiodes for low dose X-ray detection
    A. Arslan; R. Ishihara; J. Derakhshandeh; C.I.M. Beenakker;
    In Proc. of SPIE Medical Imaging Conference,
    Lake Buena Vista, Orlando, USA, pp. 79614N-1-79614N, Feb. 2011. DOI 10.1117/12.877959.
    document

  10. Single grain TFTs and lateral photodiodes for large area X-ray detection
    A. Arslan; R. Ishihara; C.I.M. Beenakker;
    In Proc. 2011 International Image Sensor Workshop (IISW),
    Hokkaido, Japan, pp. 301-304., Jun. 2011.

  11. Comb-Actuated Resonant Torsional Microscanner with Mechanical Amplification
    A. Arslan; D. Brown; W. Davis; S. Holmstrom; S. K. Gokce; H. Urey;
    Journal of Microelectromechanical Systems (JMEMS),
    Volume 19, pp. 936-943, 2010.

  12. High Performance Single Grain Si- TFT X-ray Image Sensors
    A. Arslan; R. Ishihara; C.I.M. Beenakker;
    In Semiconductor Advances for Future Electronics Workshop (SAFE),
    Veldhoven, The Netherlands, Nov. 2010.

  13. Micro-lens Array Integrated 2D MEMS Actuator for High Resolution Beam Scanning
    S. K. Gokce; S. Holmstrom; C. Hibert; C. Ataman; A. Arslan; H. R. Seren; H. Urey;
    In 11th National Conference on Photonics,
    Ankara, Turkey, 2010.

  14. MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
    S. Gokce; S. Holmstrom; C. Hibert; C. Ataman; A. Arslan; H. R. Seren; H. Urey;
    In Procedia Chemistry,
    pp. 1319-1322, 2009.
    document

  15. 2D Scanning MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
    S. Gokce; S. Holmstrom; C. Hibert; C. Ataman; A. Arslan; H. R. Seren; H. Urey;
    In IEEE/LEOS Optical MEMS and Nanophotonics,
    Florida, USA, 2009.

  16. MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
    S. K. Gokce; S. Holmstrom; C. Ataman; A. Arslan; H. R. Seren; H. Urey;
    In Eurosensors XXIII Conference,
    Lausanne, Switzerland, 2009.
    document

  17. Comb-Actuated Resonant Torsional Scanner for Microdisplays
    A. Arslan; D. Brown; W. Davis; S. Holmstrom; S. K. Gokce; H. Urey;
    In IEEE/LEOS Optical MEMS and Nanophotonics,
    Florida, USA, 2009.
    document

  18. Polymer Waveguide and LED Array Integration on FR4 Scanner
    M. Sayinta; A. Arslan; H. Urey;
    In Microoptics Conference,
    Brussels, Belgium, 2008.
    document

  19. Mechanically Coupled Comb Drive MEMS Stages
    A. Arslan; C. Ataman; S. Holmstrom; K. Hedsten; P. Enoksson; H. Urey;
    In IEEE/LEOS Optical MEMS & Nanophotonics,
    Freiburg, Germany, 2008.

  20. MEMS Laser Scanner for Endoscopic Imaging Application
    A. Arslan; C. Ataman; H. Urey;
    In 10th National Optics and Photonics Meeting,
    Kocaeli, Turkey, 2008.

  21. Maskless Lithography Setup and Polymer Waveguide Fabrication
    A. Arslan; H. Urey;
    In 9th National Optics and Photonics Meeting,
    Ankara, Turkey, 2007.

BibTeX support

Last updated: 13 Feb 2017

Aslihan Arslan

Alumnus