Department of Microelectronics

Faculty of Electrical Engineering, Mathematics, and Computer Science

Tom Salden

SiC pressure sensor for the range 80Pa to 1MPa

MSc thesis: Design, Production and Characterisation of an LPCVD-Based Poly-Silicon Carbide Pressure Sensor for Extreme Environments
Advisor(s): GuoQi Zhang, Brahim Mansouri

Program: MSc Microelectronics

Tom Salden, MSc