Lina Sarro

Publications

  1. Effect of droplet shrinking on surface acoustic wave response in microfluidic applications
    Thu Hang Bui; Van Nguyen; Sten Vollebregt; Bruno Morana; Henk van Zeijl; Trinh Chu Duc; P.M. Sarro;
    Applied Surface Science,
    Volume 426, pp. 253-261, 2017.
    document

  2. Liquid identification by using a micro-electro-mechanical interdigital transducer
    Thu Hang Bui; Bruno Morana; Atef Akhnoukh; Trinh Chu Duc; Pasqualina M Sarro;
    Analyst,
    Volume 142, Issue 5, pp. 763-771, 2017.

  3. CVD transfer-free graphene for sensing applications
    Chiara Schiattarella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Maria Lucia Miglietta; Girolamo Di Francia; Pasqualina Maria Sarro;
    Beilstein Journal of Nanotechnology,
    Volume 8, pp. 1015-1022, 2017.
    document

  4. Effects of graphene defects on gas sensing properties towards NO2 detection
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Mario Miscuglio; Brigida Alfano; Maria L. Miglietta; Ettore Massera; Girolamo Di Francia; Pasqualina M. Sarro;
    Nanoscale,
    Volume 9, pp. 6085-6093, 2017.
    document

  5. Integrated SiGe Detectors for Si Photonic Sensor Platforms
    Gregory Pandraud; Silvana Milosavljevic; Amir Sammak; Matteo Cherchi; Aleksandar Jovic; Pasqualina Sarro;
    In Proceedings of Eurosensors,
    pp. 559, 2017.

  6. An Innovative Approach to Overcome Saturation and Recovery Issues of CVD graphene-Based Gas Sensors
    F. Ricciardella; S. Vollebregt; T. Polichetti; B. Alfano; E. Massera; P. M. Sarro;
    In Proceedings of IEEE Sensors Conference,
    pp. 1224-1226, 2017.

  7. A transfer-free wafer-scale method for the fabrication of suspended graphene beams for squeeze-film pressure sensors
    S. Vollebregt; R.J. Dolleman; H.S.J. van der Zant; P.G. Steeneken; P.M. Sarro;
    In Graphene Week,
    2017.

  8. Wafer-scale measurements of the specific contact resistance between different metals and mono- and multi-layer graphene
    S. Vollebregt; M. Singh; D.J. Wehenkel; R. van Rijn; P.M. Sarro;
    In Proc. of the 43rd international conference on Micro and Nanoengineering (MNE),
    pp. 152, 2017.

  9. Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
    In Proceedings of Eurosensors 2017,
    pp. 445, 2017.
    document

  10. Polymeric strain gauges as pressure sensor for microfabricated organ-on-chips
    W.F. Quiros Solano; N. Gaio; C. Silvestri; G. Pandraud; P.M. Sarro;
    In Proc.of Transducers 2017, the 19th International Conference on Solid-state Sensors, Actuators, and Microsystems,
    pp. 1296-1299, 2017.

  11. High sensitive CVD graphene-based gas sensors operating under environmental conditions
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
    In Graphene Conference,
    2017.

  12. Suspended graphene beams with tunable gap for squeeze-film pressure sensing
    S. Vollebregt; R.J. Dolleman; H.S.J. van der Zant; P.G. Steeneken; P.M. Sarro;
    In Proc.of Transducers 2017, the 19th International Conference on Solid-state Sensors, Actuators, and Microsystems,
    pp. 770-773, 2017.

  13. Ultra-thin ALD MGO membranes as mems transmission dynodes in a timed photon counter
    Violeta Prodanovic; Hong Wah Chan; Anil U Mane; Jeffrey W Elam; Harry VD Graaf; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 740-743, 2017.

  14. Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners
    Aleksandar Jovic; Gregory Pandraud; Nuria Sanchez; Juan Sancho; Kirill Zinoviev; Jose L Rubio; Eduardo Margallo; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 797-800, 2017.

  15. Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity
    Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; Kouchi Zhang; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 266-269, 2017.

  16. Potential applications of electron emission membranes in medicine
    Yevgen Bilevych; Stefan E. Brunner; Hong Wah Chan; Edoardo Charbon; Harry van der Graaf; Cornelis W. Hagen; Gert Nützelf; Serge D. Pintof; Violeta Prodanović; Daan Rotman; Fabio Santagata; Lina Sarro; Dennis R. Schaar;
    Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
    Volume 809, pp. 171-174, 2016.

  17. A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis
    T.H. Bui; B. Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
    Journal of Applied Physics,
    Volume 120, Issue 7, pp. 074504, 2016.

  18. SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract
    F. Puppo; M.-A. Doucey; J.-F. Delaloye; T.S.Y. Moh; G. Pandraud; P.M. Sarro; G. De Micheli; S. Carrara;
    IEEE Sensors Journal,
    Volume 16, Issue 10, pp. 3374-3381, 2016.
    document

  19. The Tynode: A new vacuum electron multiplier
    Harry van der Graaf; Hassan Akhtar; Neil Budko; Hong Wah Chan; Cornelis W. Hagen; Conny C.T. Hansson; Gert Nützel; Serge D. Pinto; Violeta Prodanović; Behrouz Raftari; Pasqualina M. Sarro; John Sinsheimer; John Smedle;
    Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
    2016.
    document

  20. Control of recoil losses in nanomechanical SiN membrane resonators
    A. Borrielli; L. Marconi; F. Marin; F. Marino; B. Morana; G. Pandraud; A. Pontin; G. A. Prodi; P. M. Sarro; E. Serra; M. Bonaldi;
    Physical Review B,
    Volume 94, pp. 121403, 2016.

  21. Cytostretch, an Organ-on-Chip Platform
    Gaio, N.; van Meer, B.; Quiros Solano, W.; Bergers, L.; van de Stolpe, A.; Mummery, C.; Sarro, P.M.; Dekker, R.;
    Micromachines,
    Volume 7, Issue 7, pp. 120, 2016.

  22. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
    Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; Kouchi Zhang; Pasqualina M. Sarro;
    Nanoscale,
    Volume 8, pp. 8266-8275, 2016.
    document

  23. Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
    E. Serra; M. Bawaj; A. Borrielli; G. Di Giuseppe; S. Forte; N. Kralj; N. Malossi; L. Marconi; F. Marin; F. Marino; B. Morana; R. Natali; G. Pandraud; A. Pontin; G. A. Prodi; M. Rossi; P. M. Sarro; D. Vita;
    AIP Advances,
    Volume 6, pp. 065004, 2016.

  24. Stretchable Binary Fresnel Lens for Focus Tuning
    Xueming Li; Lei Wei; Ren H. Poelma; Sten Vollebregt; Jia Wei; Hendrik Paul Urbach; Pasqualina M. Sarro; Kouchi Zhang;
    Scientific Reports,
    Volume 6, pp. 25348, 2016.

  25. Dynamical two-mode squeezing of thermal fluctuations in a cavity opto-mechanical system
    A. Pontin; M. Bonaldi; A. Borrielli; L. Marconi; F. Marino; G. Pandraud; G. A. Prodi; P.M. Sarro; E. Serra; F. Marin;
    Physical Review Letters,
    Volume 116, pp. 103601, 2016.

  26. Flexible Microsystems
    P.J. French; P.M. Sarro;
    In Proceeding Smart Systems Integration,
    pp. 181-188, 2016.

  27. Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application
    Ying-ge Li; Lian-xiang Ma; P. M. Sarro; Dong-xing Du; Xue-feng Liu;
    In Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA),
    pp. 368-370, 2016.

  28. PEDOT:PDMS: a conductive and flexible polymer for sensor integration in Organ-on-Chip platforms
    W.Quiros Solano; N.Gaio; C. Silvestri; G. Pandraud; P.M. Sarro;
    In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
    pp. 1184-1187, 2016.

  29. A calorimetry-based measurement apparatus for switching losses in high power electronic devices
    D. Iero; F.G. Della Corte; G. Fiorentino; P.M. Sarro;
    In IEEE International Energy Conference,
    pp. 1-5, 2016.

  30. Flexible Microsystems
    P.J. French; P.M. Sarro;
    In Proceeding Smart Systems Integration,
    Munich, Germany, mesago, pp. 181-188, March 2016.

  31. Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators
    S. Thomas; A. Jovic; B. Morana; F. Buja; A. Gkouzou; G. Pandraud; P.M. Sarro;
    In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
    pp. 1144-1147, 2016.
    document

  32. Effect of the interruption of the propagation path on the response of surface acoustic wave transducers
    Thu Hang Bui; An Tran; Bruno Morana; Jia Wei; Trinh Chu Duc; P.M. Sarro;
    In Proceedings of the IEEE Sensors conference,
    2016.

  33. High sensitive gas sensors realized by a transfer-free process of CVD graphene
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Lina Sarro;
    In Proceedings of the IEEE Sensors conference,
    2016.

  34. A predefined wafer-scale CVD graphene deposition method requiring no transfer
    Sten Vollebregt; Lina Sarro;
    In Graphene Week,
    2016.

  35. Fabrication process of Si microlenses for OCT systems
    A. Jovic; G. Pandraud; K. Zinoviev; J. L. Rubio; E. Margallo; P. M. Sarro;
    In Proc. SPIE 9888, Micro-Optics,
    2016.
    document

  36. All-SiC surface micromachined nanoreactor for in-situ transmission electron microscopy
    B. Morana; C. Silvestri; J.F. Creemer; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 753-756, 2016.

  37. A novel mixing surface acoustic wave device for liquid sensing applictions
    Thu Hang Bui; B, Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 745-748, 2016.

  38. A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors
    S. Vollebregt; B. Alfano; F. Ricciardella; A.J.M. Giesbers; Y. Grachova; H.W. van Zeijl; T. Polichetti; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 17-20, 2016.

  39. Flexible Microsystems
    P.J. French; P.M. Sarro;
    In Proceeding Smart Systems Integration,
    Munich, Germany, mesago, pp. 181-188, March 2016.

  40. Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties
    E.Serra; M. Bonaldi; A.Borrielli; L.Conti; G. Pandraud; P. M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 227, pp. 48-54, 2015.

  41. SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract
    Puppo, F.; Doucey, Marie-Agnes; Delaloye, Jean-Francois; Moh, T.S.Y.; Pandraud, G.; Sarro, P.M.; De Micheli, G.; Carrara, S.;
    IEEE Sensors Journal,
    2015.

  42. Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics
    E. Serra; M. Bonaldi; A. Borrielli; F. Marin; L. Marconi; F. Marino; G. Pandraud; A. Pontine; G.A. Prodi; P.M. Sarro;
    Microelectronic Engineering,
    2015.
    document

  43. Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances
    G Fiorentino; S Vollebregt; FD Tichelaar; R Ishihara; PM Sarro;
    IOP Nanotechnology,
    Volume 26, Issue 6, pp. 064002, 2015.
    document

  44. Structured film for compensation of anthropogenic radiative forcing
    G. Vdovin; P.M. Sarro; O. Soloviev; M. Loktev; R. Angel;
    Optics Letters,
    2015.

  45. Ingredients for sensors science
    Arnaldo D'Amicoa; Corrado Di Natalea; Pasqualina M. Sarro;
    Sensors and Actuators B: Chemical,
    Volume 207, pp. 1060-1068, 2015.

  46. Design, Fabrication, and Measurements of a 0.3 THz On-Chip Double Slot Antenna Enhanced by Artificial Dielectrics
    W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; P. M. Sarro; A. Neto;
    IEEE Transactions on Terahertz Science and Technology,
    Volume 5, Issue 2, pp. 288-298, March 2015.

  47. On-chip double slot antenna at 300 GHz enhanced by artificial dielectrics
    Syed, W. H.; Fiorentino, G.; Cavallo, D.; Sarro, P. M.; Neto, A.;
    In Eur. Conf. Antennas Propag.,
    2015.

  48. Performance enhancement of 300 GHz on-chip double slot antenna by means of artificial dielectrics
    Syed, W. H.; Fiorentino, G.; Cavallo, D.; Sarro, P. M.; Neto, A.; Lager, I. E.;
    In 45th European Microwave Conference,
    2015.

  49. Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing
    William Quiros Solano; Gregory Pandraud; Pasqualina M. Sarro;
    In IEEE Sensors Conference,
    2015.

  50. SAW device for liquid vaporization rate and remaining molecule sensing
    Thu Hang Bui; Bruno Morana; An Tran; Tom Scholtes; Trinh Chu Duc; Pasqualina M. Sarro;
    In IEEE Sensors Conference,
    2015.

  51. Crystallinity variations over the length of vertically aligned carbon nanotubes grown by chemical vapour deposition
    S. Vollebregt; P. Padmanabhan; C. Silvestri; P.M. Sarro;
    In 41st Micro and Nano Engineering conference,
    2015.

  52. The Role of Edge Defects in Liquid Phase Exfoliated and Chemical Vapor Deposited Graphene for NO2 Detection
    F Ricciardella; S Vollebregt; T Polichetti; B Alfano; PM Sarro; ML Miglietta; E Massera; G Di Francia;
    In GraphITA,
    2015.

  53. Optimization of Silicon-rich Silicon Nitride Films for Electron Multiplication in Timed Photon Counters
    V. Prodanovic; H.W. Chan; J. Smedley; A. Theulings; S. Tao; H.v.d. Graaf; P.M. Sarro;
    In Procedia Engineering 120: EUROSENSORS 2015,
    pp. 1111-1114, 2015.

  54. Tunable binary fresnel lens based on stretchable PDMS/CNT compsite
    Xueming Li; L. Wei; S. Vollebregt; R. Poelma; Y. Shen; Jia Wei; P. Urbach; P.M. Sarro; Kouchi Zhang;
    In Transducers,
    pp. 2041-2044, 2015.

  55. Molybdenum grown CVD graphene Schottky diodes
    S. Vollebregt; F. Ricciardella; Y. Grachova; T. Polichetti; P.M. Sarro;
    In Graphene Week,
    2015.

  56. Silicon-PDMS optofluidic integration
    Testa Genni; Gianluca Persichetti; Pasqualina M. Sarro; Romeo Bernini;
    In Proc. SPIE 9367, Silicon Photonics X,
    pp. 936718, 2015.

  57. A measurement apparatus for switching losses based on an heat-flux sensor
    Iero, Demetrio; Della Corte, Francesco G.; Fiorentino, Giuseppe; Sarro, Pasqualina M.; Morana, B.;
    In AISEM Annual Conference,
    pp. 1-4, 2015.

  58. Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
    Iannacci, J; Serre, E; Di Criscienzo, R; Sordo, G; Gottardi, M; Borrielli, A; Bonaldi, M; Kuenzig, T; Schrag, G; Pandraud, G; Sarro, PM;
    Microsystem Technologies: micro and nanosystems - information storage and processing systems,
    Volume 20, Issue 4-5, pp. 627-640, 2014.

  59. Stiction-Induced Sealing of Surface Micromachined Channels
    B Morana; RH Poelma; G Fiorentino; J Wei; JF Creemer; PM Sarro;
    Journal of Microelectromechanical Systems,
    Volume 23, Issue 2, pp. 459-470, 2014.
    document

  60. Fabrication and application of temperature triggered MEMS switch for active cooling control in solid state lighting system
    Huaiyu Ye; Jai Wei; van Zeijl, HW; Sarro, PM; Kouchi Zhang;
    Microelectronics Reliability,
    Volume 54, Issue 6-7, pp. 1338-1343, 2014.

  61. A hybrid silicon-PDMS optofluidic platform for sensing applications
    Testa, G; Persichetti, G; Sarro, PM; Bernini, R;
    Biomedical Optics Express,
    Volume 5, Issue 2, pp. 417-426, 2014.

  62. Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments
    Borrielli, A; Bonaldi, M; Serre, E; Bagolini, A; Bellutti, P; Cataliotti, FS; Marin, F; Marino, F; Pontin, A; Prodi, GA; Pandraud, G; Sarro, PM; Lorito,; & Zoumpoulidis, T;
    Microsystem Technologies,
    Volume 20, Issue 4-5, pp. 907-917, 2014.

  63. Selective coating deposition on high Q single crystal silicon resonators for the investigation og thermal nois statistical properties
    E. Serra; M. Bonaldi; A. Borrielli; L. Conti; G. Pandraud; P.M. Sarro;
    In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
    pp. 1485-1488, 2014.

  64. Developing High-Optical Quality Silicon Resonators Working in the Quantum Regime
    E. Serra, M. Bonaldi, A. Borrielli, F. Marin, L. Marconi, F. Marino, G. Pandraud, A. Pontin, G.A. Prodi; P.M. Sarro;
    In 40th Micro and Nano Engineering Conference,
    2014.

  65. MEMS-Based Multi-Modal Vibration Energy Harvesters for Ultra-Low Power Autonomous Remote and Distributed Sensing
    Jacopo Iannacci; Enrico Serra; Guido Sordo; Michele Bonaldi; Antonio Borrielli; Ulrich Schmid; Achim Bittner; Michael Schneider; Thomas Kuenzig; Gabriele Schrag; Gregory Pandraud; Pasqualina Sarro;
    In 14th Mechatronics Forum International Conference,
    2014.

  66. Miniaturized particulate matter sensor for portable air quality monitoring devices
    Xueming Li; E Iervolino; F Santagata; Jia Wei; Cadmus Yuan; PM Sarro; Kouchi Zhang;
    In IEEE Sensors,
    pp. 2151-2154, 2014.

  67. High Sensitive Detection in Tumor Extracts with SiNW-FET in-Air Biosensors
    F. Puppo; M.-A. Doucey; J.-F. Delaloye; T.S.Y. Moh; G. Pandraud; P.M. Sarro; G. De Micheli; S. Carrara;
    In IEEE Sensors,
    pp. 866-869, 2014.

  68. Associated IDTs in Surface Acoustic Wave Devices for Closed-loop Control Inkjet System
    Thu Hang Bui; T. Bui Duc; T. Chu Duc; P.M. Sarro;
    In IEEE Sensors,
    pp. 1936-1939, 2014.

  69. Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications
    C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; Kouchi Zhang; P.M. Sarro;
    In IEEE Sensors,
    pp. 827-830, 2014.
    document

  70. Front-to-back ratio enhancement of on-chip antenna using artificial dielectrics at 300 GHz
    Syed, WH; Fiorentino, G; Cavallo, D; Spirito, M; Neto, A; Sarro, PM;
    In Proceedings - 2014 USNC-URSI Radio Science Meeting (Joint with AP-S Symposium),
    pp. 140, 2014.

  71. Artificial Dielectric Layer Based on PECVD Silicon Carbide for Terahertz Sensing Applications
    G. Fiorentino; W. Syed; A. Adam; A. Neto; P.M. Sarro;
    In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
    pp. 1497-1500, 2014.

  72. High Quality Wafer-scale CVD Graphene on Molybdenum Thin Film for Sensing Application
    Yelena Grachova; Sten Vollebregt; Andrea Leonardo Lacaita; Pasqualina M. Sarro;
    In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
    pp. 1501-1504, 2014.
    document

  73. Optofluidic hybrid platform with integrated solid core waveguides
    Testa, G; Persichetti, G; Sarro, PM; Bernini, R;
    In Proceedings of SPIE - Integrated Optics: Devices, Materials and Technologies XVIII Vol. 8988. Proceedings of SPIE- International Society for Optical Engineering,
    pp. 1-6, 2014.

  74. 3D solid-state supercapacitors obtained by ALD coating of high-density carbon nanotubes bundles
    Fiorentino, Giuseppe; Vollebregt, Sten; Tichelaar, FD; Ishihara, Ryoichi; Sarro, Pasqualina M;
    In Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on,
    IEEE, pp. 342--345, 2014.

  75. Enhancement of Front to Back Ratio of on Chip Antenna by Artificial Dielectrics at 300 GHz
    Syed, WH; Fiorentino, G; Cavallo, D; Spirito, M; Neto, A; Sarro, PM;
    In 39th International Conference on Infrared, Millimeter, and Terahertz Waves,
    2014.

  76. CNT bundles growth on microhotplates for direct measurement of their thermal properties
    C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; Kouchi Zhang; P.M. Sarro;
    In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
    San Francisco, USA, Jan. 2014.
    document

  77. Numerical modeling of flexible actuator for dynamic lighting
    Teng Ma; Xueming Li; Jia Wei; Kouchi Zhang; P. M. Sarro;
    In 15th International Conference on thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems,
    2014.

  78. Front-to-back ratio enhancement of on-chip antenna using artificial dielectrics at 300 GHz
    W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; A. Neto; P. M. Sarro;
    In 2014 USNC-URSI Radio Science Meeting (Joint with AP-S Symposium),
    pp. 140-140, July 2014.

  79. Enhancement of front to back ratio of on chip antenna by artificial dielectrics at 300 GHz
    W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; A. Neto; P. M. Sarro;
    In 2014 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz),
    pp. 1-2, Sept 2014.

  80. The Tipsy Single Soft Photon Detector and the Trixy Ultrafast Tracking Detector
    H. van der Graaf; M.A. Bakker; H.W. Chan; E. Charbon; F. Santagata; P.M. Sarro; D.R. Schaart;
    IOP Journal of Instrumentation,
    Volume 8, Issue 1, pp. C01036, January 2013.
    document

  81. Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications
    Yujian Huang; Gregory Pandraud; Pasqualina M. Sarro;
    Journal of Vacuum Science & Technology A,
    Volume 31, Issue 1, pp. 01A148, 2013.

  82. Resonance frequency of locally heated cantilever beams
    E. Iervolino; M. Riccio; F. Santagata; J. Wei; A.W. van Herwaarden; A. Irace; G. Breglio; P.M. Sarro;
    Sensors and Actuators A,
    Volume 190, pp. 6-12, Feb. 2013. DOI 10.1016/j.sna.2012.10.008.

  83. Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
    F. Santagata; C. Farriciello; G. Fiorentino; H.W. van Zeijl; C. Silvestri; Kouchi Zhang; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    2013.

  84. Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates
    Morana, B; Fiorentino, G; Pandraud, G; Creemer, JF; Sarro, PM;
    In Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on,
    IEEE, pp. 484--487, 2013.

  85. A CMOS-compatible metamaterial to enhance the front to back radiation ratio in terahertz antenna for sensing application
    Fiorentino, G; Syed, W; Santagata, F; Spirito, M; Pandraud, G; Neto, A; Sarro, PM; Adam, AJL;
    In Sensors, 2013 IEEE,
    IEEE, pp. 1--4, 2013.

  86. Heat flux sensor for power loss measurements of switching devices
    Iero, Demetrio; Corte, Francesco G Della; Fiorentino, Giuseppe; Sarro, Pasqualina M; Morana, B;
    In Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on,
    IEEE, pp. 327--330, 2013.

  87. Carbon Nanotube based heat-sink for solid state lighting
    F. Santagata; G. Almanno; S. Vollebregt; C Silvestri; Kouchi Zhang; P.M. Sarro;
    In 8th IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS),
    pp. 1214-1217, Apr 2013. DOI 10.1109/NEMS.2013.6559937.

  88. Selectivity and reusability study of functionalized ALD TiO2 evanescent wave sensors
    A. Purniawan; P.J. French; M.J.H. Almering; G. Pandraud; P.M. Sarro;
    In IEEE Sensors,
    Baltimore, USA, IEEE, Nov 2013.

  89. A CMOS-compatible metamaterial to enhance the front to back radiation ratio in terahertz antenna for sensing application
    G. Fiorentino; W. Syed; F. Santagata; M. Spirito; G. Pandraud; A. Neto; P. M. Sarro; A. J. L. Adam;
    In 2013 IEEE SENSORS,
    pp. 1-4, Nov 2013.

  90. The atomic layer deposition array defined by etch-back technique: A new method to fabricate TiO2 nanopillars, nanotubes and nanochannel arrays
    Yujian Huang; G. Pandraud; P.M. Sarro;
    Nanotechnology,
    Volume 23, pp. 1-8, Nov. 2012. DOI 10.1088/0957-4484/23/48/485306.

  91. Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors
    Yujian Huang; G. Pandraud; P.M. Sarro;
    Optics Letters,
    Volume 37, Issue 15, pp. 3162-3164, Aug. 2012. DOI 10.1364/OL.37.003162.

  92. Hybrid silicon-PDMS optofluidic ARROW waveguide
    G. Testa; Yujian Huang; L. Zeni; P.M. Sarro;
    IEEE Photonics Technology Letters,
    Volume 24, Issue 15, pp. 1307-1309, Aug. 2012. DOI 10.1109/LPT.2012.2202645.

  93. 6 DOF force and torque sensor for micro-manipulation applications
    P. Estevez; J.M. Bank; M. Porta; J. Wei; P.M. Sarro; M. Tichem; U. Staufer;
    Sensors and Actuators A,
    Volume 186, pp. 86-93, Oct. 2012. DOI 10.1016/j.sna.2012.02.037.

  94. Fabrication and optical measurements of a TiO2-ALD evanescent waveguide sensor
    A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    Sensors and Actuators A,
    Volume 188, pp. 127-132, Dec. 2012. DOI 10.1016/j.sna.2012.05.037.

  95. Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers
    J. Wei; S. Magnani; P.M. Sarro;
    Sensors and Actuators A,
    Volume 186, pp. 80-85, Oct. 2012. DOI 10.1016/j.sna.2012.02.021.

  96. A buried vertical filter for micro and nanoparticle filtration
    S.J. Li; C. Shen; P.M. Sarro;
    Sensors and Actuators A,
    Volume 186, pp. 203-209., Oct. 2012. DOI 10.1016/j.sna.2012.04.027.

  97. A molybdenum MEMS microhotplate for high-temperature operation
    L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
    Sensors and Actuators A,
    2012. DOI 10.1016/j.sna.2011.11.023.

  98. Linear and rotational thermal micro-stepper motors
    A. Khiat; J.W. Spronck; J. van Schieveen; S. Milosavljevic; J. Wei; P. Estevez; P.M. Sarro; U. Staufer;
    Microelectronic Engineering,
    Volume 98, pp. 497-501, Oct. 2012. DOI 10.1016/j.mee.2012.07.086.

  99. Microcantilevers encapsulated in fluid wells for sensing in liquids
    W.J. Venstra; W.H. Wien; P.M. Sarro; J. van Eijk;
    Microelectronic Engineering,
    Volume 97, pp. 247-250, Sep. 2012. DOI 10.1016/j.mee.2012.03.030.

  100. Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides
    G. Pandraud; E. Margallo-Balbs; P.M. Sarro;
    Journal of Nanophotonics,
    Volume 6, pp. 1-7, Nov. 2012. DOI 10.1117/1.JNP.6.063530.

  101. Micromachined nanofiltration modules for lab-on-a-chip applications
    C. Shen; V.R.S.S. Mokkapati; H.T.M. Pham; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 22, Issue 2, pp. 1-10., Jan. 2012. DOI 10.1088/0960-1317/22/2/025003.

  102. Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
    F. Santagata; J.F. Creemer; E. Iervolino; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 22, Issue 10, Sep. 2012. DOI 10.1088/0960-1317/22/10/105025.

  103. Mechanical design and characterization for MEMS thin-film packaging
    F. Santagata; J.J.M. Zaal; V.G. Huerta; L. Mele; J.F. Creemer; P.M. Sarro;
    Journal of Microelectromechanical Systems,
    Volume 21, Issue 1, pp. 100-109, Feb. 2012. DOI 10.1109/JMEMS.2011.2170817.

  104. Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
    T. Alan; T. Yokosawa; J. Gaspar; G. Pandraud; O. Paul; F. Creemer; P.M. Sarro; H.W. Zandbergen;
    Applied Physics Letters,
    Volume 100, pp. 1-4, 2012. DOI 10.1063/1.3688490.

  105. Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor
    A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 188, pp. 127-132, 2012.

  106. Integrated MEMS: Opportunities \& Challenges
    P.J. French; P.M. Sarro;
    M Kahrizi (Ed.);
    Intech, , pp. 253-276, 2012.

  107. Integrated MEMS: Opportunities & Challenges
    P.J. French; P.M. Sarro;
    In Micromachining Techniques for Fabrication of Micro and Nano Structures,
    InTech, Feb. 2012. DOI 10.5772/31493.

  108. High accuracy dual side overlay with wet anisotropic etching for HAR MEMS
    H.W. van Zeijl; K. Best; P.M. Sarro;
    In Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2012),
    pp. 180-183, 2012. ISBN 978-1-4665-6275-2.

  109. Ultra-flexible devices for 360 _m diameter guidewires
    B. Mimoun; V. Henneken; P.M. Sarro; R. Dekker;
    In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
    Paris, France, IEEE, pp. 472-475, Jan. 2012. ISBN: 978-978-1-4673-0325-5, DOI 10.1109/MEMSYS.2012.6170227.

  110. Stiction-driven sealing of surface micromachined channels
    B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
    In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
    Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202.

  111. Silicon nanowire FET arrays for real time detection of chemical activation of cells
    T.S.Y. Moh; S.K. Srivastava; S. Milosavljevic; M. Roelse; G. Pandraud; H.W. Zandbergen; L.C.P.M de Smet; C.J.M van Rijn; E.J.R. Sudhlter; M.A. Jongsma; P.M. Sarro;
    In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
    Paris, France, IEEE, pp. 1344-1347, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170424.

  112. Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
    A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    In Proc. SPIE: Optical Sensing and Detection II,
    Brussels, Belgium, pp. 1-6, Apr 2012. DOI 10.1117/12.922498.

  113. A comparison between PECVD and ALD for the fabrication of slot-waveguide-based sensors
    G. Pandraud; A. Purniawan; E. Margallo-Balbs; P.M. Sarro;
    In Proc. SPIE: Nanophotonics IV,
    Brussels, Belgium, Apr. 2012. DOI 10.1117/12.922400.

  114. Analyzing protein denaturation using fast differential scanning calorimetry
    R. Splinter; A.W. van Herwaarden; E. Iervolino; G. Vanden Poel; D. Istrate; P.M. Sarro;
    In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
    Krakow, Poland, Procedia Engineering, pp. 140-143, Sep 2012. DOI 10.1016/j.proeng.2012.09.104.

  115. Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating
    A.T. Tran; G. Pandraud; H. Schellevis; P.M. Sarro;
    In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
    Krakow, Poland, Procedia Engineering, pp. 104-107, Sep 2012. DOI 10.1016/j.proeng.2012.09.095.

  116. A novel approach for piezoresistivity characterization of silicon nanowires
    M. Nie; F. Santagata; T. Moh; Q.-A. Huang; P.M. Sarro;
    In Proc. 11th IEEE Sensors Conference,
    Taipei, Taiwan, pp. 1747-1750, Oct 2012.

  117. Encapsulated aluminum nitride SAW devices for liquid sensing applications
    A.T. Tran; G. Pandraud; T.S.Y. Moh; H. Schellevis; A. Akhnoukh; A. Purniawan; P.M. Sarro;
    In Proc of the 11th IEEE Sensors Conf,
    Taipei, Taiwan, pp. 604-607, Oct. 2012.

  118. Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency
    M. Aarts; J. Wei; P.M. Sarro;
    In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012),
    Kyoto, Japan, pp. 253-256, Mar. 2012. ISBN: 978-1-4673-1124-3; DOI 10.1109/NEMS.2012.6196768.

  119. Multilayer conformal coating of highly dense Multi-Walled Carbon Nanotubes bundles
    G. Fiorentino; S. Vollebregt; R. Ishihara; P.M. Sarro;
    In 2012 12th IEEE Conference on Nanotechnology (IEEE-NANO),
    Birmingham, UK, Aug. 2012. ISBN 978-1-4673-2198-3; DOI 10.1109/NANO.2012.6322054.

  120. Optofluidics: waveguides and devices
    G. Testa; Yujian Huang; L. Zeni; P.M. Sarro; R. Bernini;
    In Proc. SPIE: Integrated Optics: Devices, Materials, and Technologies XVI,
    Feb 2012. DOI 10.1117/12.908683.

  121. Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system
    J. Wei; H. Ye; H.W. van Zeijl; P.M Sarro; Kouchi Zhang;
    In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
    Krakow, Poland, Procedia Engineering, pp. 849-852, Sep 2012. DOI 10.1016/j.proeng.2012.09.280.

  122. Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
    F. Santagata; G. Fiorentino; M. Nie; C. Farriciello; R. Poelma; Kouchi Zhang; P.M. Sarro;
    In Proc. 11th IEEE Sensors Conference,
    Taipei, Taiwan, pp. 668-671, Oct 2012.

  123. Monitoring of meniscus motion at nozzle orifice with capacitive sensor for inkjet applications
    J. Wei; C. Yue; Kouchi Zhang; J.F. Dijksman; P.M. Sarro;
    In Proc. 11th IEEE Sensors Conference,
    Taipei, Taiwan, pp. 2172-2175, Oct 2012.

  124. Evaluation of Antibody Surface Functionalisation of TiO2-ALD Waveguide Using Escherichia coli type K12
    A. Purniawan; M. Almering; G. Pandraud; K.A. Vakalopoulos; P.J. French,; P.M. Sarro;
    In Proc. Conference for ICT-Research in the Netherlands,
    Rotterdam, the Netherlands, Oct 2012.

  125. Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
    A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
    In SPIE Photonics Europe Conference,
    Brussels, Belgium, SPIE, April 2012.

  126. Encapsulated aluminum nitride SAW devices for liquid sensing applications
    A.T. Tran; G. Pandraud; M. Nie; H. Schellevis; A. Akhnoukh; A. Purniawan; P.M. Sarro;
    In Proc. 11th IEEE Sensors Conference,
    IEEE, pp. 604-607, 2012.

  127. A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors
    G. Pandraud; A. Purniawan; E. Margallo-Balbás; P.M. Sarro;
    In DL Andrews; J-M Nunzi; A Ostendorf (Ed.), Proceeings of SPIE - Nanophotonics IV,
    SPIE, pp. 1-7, 2012. harvest.

  128. Temperature calibration and electrical characterization of the differential scanning calorimeter chip UFS1 for the Mettler-Toledo Flash DSC 1
    E. Iervolino; A.W. van Herwaarden; F.G. van Herwaarden; E. van de Kerkhof; P.P.W. van Grinsven; A.C.H.I. Leenaers; V.B.F. Mathot; P.M. Sarro;
    Thermochimica Acta,
    Volume 522, Issue 1-2, pp. 53-59, Aug. 2011. DOI 10.1016/j.tca.2011.01.023.

  129. A surface micromachined thermopile detector array with an interference-based absorber
    H. Wu; A. Emadi; P.M. Sarro; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 21, Issue 7, pp. 1-8, Jun. 2011. DOI 10.1088/0960-1317/21/7/074009.

  130. MEMS silicon-based micro-evaporator
    M. Mihailovic; C.M. Rops; J. Hao; L. Mele; J.F. Creemer; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 21, Issue 7, pp. 1-9, 2011. DOI 10.1088/0960-1317/21/7/075007.

  131. An analytical model and verification for MEMS Pirani gauges
    F. Santagata; E. Iervolino; L. Mele; A.W. van Herwaarden; J.F. Creemer; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 21, Issue 11, pp. 1-7, 2011. DOI 10.1088/0960-1317/21/11/115007.

  132. Mixed motion in deterministic ratchets due to anisotropic permeability
    T. Kulrattanarak; R.G.M. van der Sman; Y.S. Lubbersen; C.G.P.H. Schron; H.T.M. Pham; P.M. Sarro; R.M. Boom;
    Journal of Colloid and Interface Science,
    Volume 354, Issue 1, pp. 7-14., Feb. 2011. DOI 10.1016/j.jcis.2010.10.02.

  133. MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses
    E. Iervolino; A.W. van Herwaarden; W. van der Vlist; P.M. Sarro;
    IEEE/ASME Journal of Microelectromechanical Systems,
    Volume 20, Issue 6, pp. 1277-1286, Dec. 2011. DOI 10.1109/JMEMS.2011.2167672.

  134. Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride or PE-ALD titanium nitride for void-free bottom-up copper electroplating
    M. Saadaoui; H. van Zeijl; W.H.A. Wien; H.T.M. Pham; C. Kwakernaak; H.C.M. Knoops; W.M.M. Erwin Kessels; R.M.C.M. van de Sanden; F.C. Voogt; F. Roozeboom; P.M. Sarro;
    IEEE Transactions on Components, Packaging and Manufacturing Technology,
    Volume 1, Issue 11, pp. 1728-1738, 2011. DOI 10.1109/TCPMT.2011.2167969.

  135. A tube-shaped buried Pirani gauge for low detection limit with small footprint
    F. Santagata; J.F. Creemer; E. Iervolino; L. Mele; A.W. van Herwaarden; P.M. Sarro;
    IEEE Journal of Microelectromechanical Systems,
    Volume 20, Issue 3, pp. 676-684, Jun. 2011. DOI 10.1109/JMEMS.2011.2127457.

  136. A surface micromachined thermopile detector array with an interference-based absorber
    H.W. Wu; A. Emadi; P.M. Sarro; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 21, Issue 7, pp. 1-8, 2011.

  137. PECVD silicon carbide surface micriomachining technology and selected MEMS applications
    V. Rajaraman; L. Pakula; H. Yang; P.J. French; P.M. Sarro;
    International Journal of Advances in Engineering Sciences and Applied Mathematics,
    pp. 1-7, 2011.

  138. An investigation on ALD thin film evanescent waveguide sensor for biomedical application
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In Biomedical Engineering Systems and Technologies (BIOSTEC 2010), Communications Computer and Information Science,
    Berlin, Springer Verlag, 2011. DOI 10.1007/978-3-642-18472-7_15.

  139. Low temperature encapsulation of nanochannels with water inside
    C. Shen; V.R.S.S. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 854-857, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969464.

  140. Sputtered molybdenum as conductive material for high-temperature microhotplates
    L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 2690-2693, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969500.

  141. TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 2506-2509, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969754.

  142. Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography
    J. Wei; Y. Gao; A.J. Houtepen; G. Pandraud; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1749-1752, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969819.

  143. IC compatible top down process for silicon nanowire FET arrays with three 100 surfaces for (BIO) chemical sensing
    T.S.Y. Moh; Y. Maruyama; C. Shen; G. Pandraud; L.C.P.M. de Smet; H.D. Tong; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1590-1593, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969796.

  144. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbas; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1554-1557, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969736.

  145. Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum
    E. Iervolino; L. Mele; F. Santagata; A.W. van Herwaarden; W. van der Vlist; J.F. Creemer; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1038-1041, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969167.

  146. MEMS silicon-based resistojet micro-thruster for attitude control of nano-satellites
    M. Mihailovic; T.V. Mathew; J.F. Creemer; B.T.C. Zandbergen; P.M. Sarro;
    In of 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 262-265, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969432.

  147. Process for low temperature deposition of strain gauge materials based on chromium nitride thin films
    H.A. Mol; H. Schellevis; P.M. Sarro; Y. Hou;
    In Proc. IEEE SENSORS 2011 Conference,
    Limerick, Ireland, pp. 226-229, Oct. 2011. ISBN 978-1-4244-9288-6; DOI 10.1109/ICSENS.2011.6127044.

  148. Developer etched single and arrays of three 100 planes silicon nanowires (SiNWs) FET
    T.S.Y. Moh; Y. Maruyama; G. Pandraud; L.C.P.M. de Smet; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
    In Proc. ICT.OPEN: Micro technology and micro devices (SAFE 2011),
    Veldhoven, The Netherlands, Nov. 2011.

  149. Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations
    A.T. Tran; G. Pandraud; H. Schellevis; T. Alan; V. Aravindh; O. Wunnicke; P.M. Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 673-676, Sep. 2011. DOI 10.1016/j.proeng.2011.12.166.

  150. 6 DOF force and torque sensor for micro-manipulation applications
    P. Estevez; J.M. Bank; M. Porta; J. Wei; P.M. Sarro; M. Tichem; U. Staufer;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 39-42, Sep. 2011. DOI 10.1016/j.proeng.2011.12.010.

  151. Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
    L. Mele; T. Rossi; M. Riccio; E. Iervolino; F. Santagata; A. Irace; G. Breglio; J.F. Creemer; P.M. Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 387-390, Sep. 2011. DOI 10.1016/j.proeng.2011.12.096.

  152. Suspended submicron silicon-beam for high sensitivity piezoresistive sensing
    J. Wei; S. Magnani; P.M. Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 1437-1440, Sep. 2011. DOI 10.1016/j.proeng.2011.12.355.

  153. A buried vertical filter for micro and nanoparticle filtration
    S.J. Li; C. Shen; P.M. Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 1193-1196, Sep. 2011. DOI 10.1016/j.proeng.2011.12.294.

  154. A silicon-based MEMS resistojet for propelling cubesats
    T.V. Mathew; B.T.C. Zandbergen; M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proc. 62nd International Astronautical Congress,
    Cape Town, South Africa, pp. 1-8, Oct. 2011.

  155. An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
    J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
    In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622.

  156. In situ HRTEM of a catalyst using a nanoreactor at 1 bar
    S.B. Vendelbo; J.F. Creemer; S. Helveg; B. Morana; L. Mele; A.M. Molenbroek; P.M. Sarro; H.W. Zandbergen; P.J. Kooyman;
    In Netherlands Catalysis and Chemistry Conference (NCCC-XII),
    Noordwijk, pp. 332, Feb. 2011.

  157. Conventional micro-fabrication process for silicon nanowires FET with three 100 surfaces
    T.S.Y. Moh; G. Pandraud; L.C.P.M. de Smet; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
    In International Conference on Materials for Advanced Technologies (ICMAT 2011),
    Suntec City, Singapore, Jun. 2011.

  158. Biosensing
    E.J.R. Sudholter; G.Z. Garyfallou; D. Ullien; L.C.P.M. Smet; S. Srivastava; M.A. Jongsma; M. Mescher; J.H. Klootwijk; T.S.Y. Moh; P.M. Sarro; C. Rijn;
    In Book of Abstracts, 4th IRUN Symposium on NanoTechnology,
    Nijmegen, The Netherlands, pp. 32-33, Oct. 2011.

  159. Microcantilevers encapsulated in fluid wells for sensing in liquids
    W.J. Venstra; W.H. Wien; P.M. Sarro; J. van Eijk;
    In 37th International Conference on Micro and Nano Engineering (MNE 2011),
    Berlin, Germany, pp. 1, Sep. 2011.
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  160. Linear and rotation thermal micro-stepper
    A. Khiat; J. Spronck; J. van Schieveen; S. Milosavljevic; J. Wei; P. Estevez; P.M. Sarro; U. Staufer;
    In 37th International Conference on Micro and Nano Engineering (MNE 2011,
    Berlin, Germany, pp. 1, Sep. 2011.
    document

  161. A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
    B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
    In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441.

  162. Reflectance-based TiO2 photonic crystal sensors
    Yujian Huang; G. Pandraud; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 2682-2685, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969771.

  163. PECVD SiC photonic crystal sensor
    G. Pandraud; Yujian Huang; P.M. Sarro; F. Bernal Arango;
    In Proc. IEEE SENSORS 2011 Conference,
    Limerick, Ireland, pp. 367-370, Oct. 2011. ISBN 978-1-4244-9288-6; DOI 10.1109/ICSENS.2011.6127130.

  164. All ALD TiO2-Al2O3-TiO2 horizontal slot waveguides for optical sensing
    A. Purniawan; P.J. French; G. Pandraud; Yujian Huang; P.M. Sarro;
    In Proc. IEEE SENSORS 2011 Conference,
    Limerick, Ireland, pp. 1954-1957, Oct. 2011. ISBN 978-1-4244-9288-6.
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  165. Co-design of wafer level thin film package assembly
    J.J.M. Zaal; F. Santagata; W.D. van Driel; Kouchi Zhang; J.F. Creemer; P.M. Sarro;
    In 12th Internat. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments Microelectronics and Microsystems (EuroSimE 2011),
    Linz, Austria, pp. 1-6, Apr. 2011. ISBN 978-1-4577-0106-1.
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  166. Reflectance-based photonic crystal liquid sensors made of ALD TiO2
    Yujian Huang; G. Pandraud; P.M Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 1389-1392, Sep. 2011. DOI 10.1016/j.proeng.2011.12.343.

  167. Low temperature encapsulation of nanochannels with water inside
    C. Shen; VRSS. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
    In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    IEEE, pp. 854-857, 2011.

  168. An Evanescent Waveguide Sensor Based Diagnostic of Post-Colon Surgery
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In Sensor Technology Conference Sense of Contact,
    Zeist, the Netherlands, April 2011.

  169. Evanescent Waveguide Sensor For Post Anastomosis Evaluation
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In J. Dankelman; P Veltink; T. van Walsum (Ed.), 3rd Dutch Biomedical Engineering,
    BME, pp. 1-1, 2011.

  170. All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing
    A. Purniawan; P.J. French; G. Pandraud; Y. Huang; P.M. Sarro;
    In E. Lewis; T. Kenny (Ed.), Proceedings IEEE Sensors,
    Limerick, Ireland, IEEE, pp. 1954-1957, October 2011.

  171. Low power PECVD SIC delay lines for optical coherence tomography in the visible
    G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbás; P.J. French; P.M. Sarro;
    In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, IEEE, pp. 1554-1557, June 2011.

  172. TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS),
    Beijing, China, IEEE, pp. 2506-2509, June 2011.

  173. An investigation on ALD thin film evanescent waveguide sensor for biomedical application
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In 3rd International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2010),
    Valencia, Spain, Springer Verlag, pp. 189-196, 2011.

  174. Sensitivity Measurement of TiO2-ALD Evanescent Waveguide Sensor
    A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
    In SAFE Conference,
    Veldhoven, the Netherland, November 2011.

  175. Low temperature encapsulation of nanochannels with water inside
    C. Shen; V.R.S.S Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
    In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference,
    IEEE, pp. 854-857, 2011.

  176. Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring
    J. Wei; C. Yue; M. van der Velden; Z.L. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
    Sensors and Actuators A,
    Volume 162, Issue 2, pp. 406-417, 2010.

  177. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
    J. Wei; C. Yue; Z.L. Chen; Z.W. Liu; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 20, Issue 6, 2010.

  178. Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
    L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
    J. Micromech. Microeng.,
    Volume 20, 2010.

  179. PECVD silicon carbide surface micriomachining technology and selected MEMS applications
    V. Rajaraman; L.S. Pakula; H. Yang; P.J. French; P.M. Sarro;
    International journal of advances engineering sciences and applied mathematics,
    Volume 2, Issue 1-2, pp. 28-34, 2010. DOI 10.1007/s12572-010-0020-9.

  180. Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring
    J. Wei; C. Yue; M. van der Velden; T. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 162, Issue 2, pp. 406-417, 2010.

  181. Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides
    G. Pandraud; A.B. Neira; E. Margallo Balbas; C.K. Yang; P.M. Sarro;
    IEEE Photonics Technology Letters,
    Volume 22, Issue 6, pp. 398-400, 2010.

  182. Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible
    G. Pandraud; E. Margallo Balbas; P.M. Sarro;
    Proceedings of SPIE- International Society for Optical Engineering,
    Volume 7715, pp. 1-10, 2010.

  183. Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor
    A. Purniawan; G. Pandraud; P.J. French; E. Margallo Balbas; P.M. Sarro;
    conference, 2010. CD.

  184. LPCVD amorphous SiCx for freestanding electron transparent windows
    B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
    In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
    Wanchai, Hong Kong, IEEE, pp. 572-575), 2010.

  185. Design and Development of an Ultra Compact Silicon Phase-Change Heat Exchanger
    Rops; C M; M. Mihailovic; P.M. Sarro;
    In Proceedings of the 2nd European Conference Microfluidics,
    Toulouse, France, Dec. 2010.

  186. MEMS Silicon-Based Micro-Evaporator with Diamond-Shaped Fins
    M. Mihailovic; C. Rops; J.F. Creemer; P.M. Sarro;
    In Proceedings of EUROSENSORS XXIV,
    Linz, Austria, Sep. 2010.

  187. Electrical characterization of TiSi/TiN layer stack in temperature range from 0 500 C
    M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proceedings of 13th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
    Veldhoven, The Netherlands, pp. 114-117, 2010.

  188. A piezoresistive sensor for pressure monitoring at inkjet nozzle
    J. Wei; P.M. Sarro; T. Chu Duc;
    In Proc. IEEE Sensors,
    pp. 2093-2096, 2010.

  189. A position and force-distribution sensor-array for monitoring the contact condition of objects in microhandling
    J. Wei; M. M. Porta. Tichem; U. Staufer; P.M. Sarro;
    In Proc. the 23th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010),
    pp. 623-626, 2010.

  190. Al2O3 nanolayer as evanescent waveguide for biomedical sensor application
    A. Purniawan; Y. Huang; G. Pandraud; P.J. French; P.M. Sarro;
    In {Amft et al}, O (Ed.), Proceedings of 3rd International Conference on Biomedical Electronics and Devices,
    BIODEVICES, pp. 44-48, 2010. CD.

  191. TiO2 ALD nanolayer as evanescent waveguide for biomedical sensor applications
    A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
    In {Jakoby et al}, B (Ed.), Proceedings Eurosensor XXIV Conference,
    Elsevier, pp. 1131-1135, 2010.

  192. To integrate or not to integrate
    P.J. French; P.M. Sarro;
    In G. Fedder; T. Kenney (Ed.), Proceedings IEEE Sensors 2010,
    IEEE, pp. 2179-2185, 2010.

  193. PECVD SIC- SiO2-SIC Horizontal Slot Waveguides for Sensing Photonics devices
    G. Pandraud; A. Barbosa Neira; E. Margallo Balbas; P.M. Sarro;
    In G. Fedder; T. Kenney (Ed.), Proceedings IEEE SENSORS 2010,
    IEEE, pp. 975-978, 2010.

  194. Modulation speed improvement in a FabryPerot thermo-optical modulator through a driving signal optimization technique
    F.G. della Corte; M. Merenda; G. Cocorullo; M. Iodice; I. Rendina; P.M. Sarro;
    Optical engineering,
    Volume 48, Issue 7, 2009.

  195. Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of physics: conference series,
    Volume 187, 2009.

  196. Photolithography on bulk micromachined substrates. Journal of micromechanics and microengineering
    W.J. Venstra; J.W. Spronck; P.M. Sarro; J. van Eijk;
    Journal of micromechanics and microengineering,
    Volume 19, pp. 1-6, 2009.

  197. Pattern transfer on a vertical cavity sidewall using SU8
    T. Verhaar; J. Wei; P.M. Sarro;
    Journal of micromechanics and microengineering,
    Volume 19, 2009.

  198. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    IOP journal of physics,
    pp. 1-4, 2009.

  199. A 2_2 Optofluidic Multimode Interference Coupler
    R. Bernini; G. Testa; L. Zeni; P.M. Sarro;
    IEEE journal of selected topics quantum electronics,
    Volume 15, Issue 5, pp. 1478-1484, 2009. ISSN 1077-260X.

  200. Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of Physics: Conference Series,
    Volume 187, pp. 012043-1-0120, 2009.

  201. Alignment and Overlay Characterization for 3D Integration and Advanced Packaging
    H.W. van Zeijl; P.M. Sarro;
    In Proc. of 11th Electronic packaging and Technology conference 2009 (EPTC 2009),
    Singapore, IEEE, 2009. ISBN 978-1-4244-5100-5.

  202. Electro less deposition and structuring of silver electrodes inside closed micro fluidic channels
    F.C.A. Heuck; P.M. Sarro; J.H.C.M. Slabbekoorn; T. Akiyama; U. Staufer;
    In Proceedings of the Euspen 9th International Conference,
    Bedford: Euspen, pp. 158-161, 2009.

  203. Paalvast, SL, Sarro, PM & Munnig Schmidt, RH
    S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
    In Proceedings of the EuroSimE 2009,
    Montigny le Bretonneux, pp. 318-321, 2009.

  204. Fast response thermal linear motor with reduced power consumption
    S.L. Paalvast; H.T.M. Pham; P.M. Sarro; R.H. Munnig Schmidt;
    In Proceedings of the Eurosensors XXIII Conference, august 2009,
    Lausanne, pp. 690-693, 2009.

  205. Characterization of ultrathin membranes to enable TEM observation of gas reaction at high pressures
    Alan; T; Gaspar; J; Paul; O; H.W. Zandbergen; J.F. Creemer; P.M. Sarro;
    In Proceedings of the ASME 2009 International Mechanical Engineering Congress & Exposition,
    Lake Buena Vista, Florida, USA: American Society of Mechanical Engineers (ASME), pp. 1-5, 2009.

  206. Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
    F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
    In Proceedings of IEEE Sensors 2009 Conference,
    Christchurch, New Zealand, pp. 799-802, 2009.
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  207. Silicon-based MEMS micro-evaporator
    J. Hao; M. Mihailovic; C.M. Rops; J.F. Creemer; P.M. Sarro;
    In Proceedings of 20th Micromechanics Europe Workshop (MME),
    Toulouse, France, pp. 1-4, 2009.
    document

  208. Thermal analysis of peptides with a calorimeterchip
    E. Iervolino; I.M.O. Finoulst; A.W. van Herwaarden; W.H.A. Wien; P.D.E. Verhaert; P.M. Sarro;
    In Proceedings of 15th international conference on solid-state sensors, actuators & microsystems,
    2009.
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  209. Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K
    M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
    Veldhoven, The Netherlands, pp. 36-39, 2009.
    document

  210. Mems nanoreactor for atomic-resolution microscopy of nanomaterials in their working state
    J.F. Creemer; S. Helveg; G.H. Hoveling; S. Ullman; P.J. Kooyman; A.M. Molenbroek; H.W. Zandbergen; P.M. Sarro;
    In Proceedings 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009,
    Sorrento, IEEE, pp. 76-79, 2009.
    document

  211. Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition
    L. Mele; B. Morana; C.R. de Boer; J.F. Creemer; P.M. Sarro;
    In Proceeding title: Proceedings of the Eurosensors XXIII Conference,
    Lausanne, Switzerland, pp. 1531-1534, 2009.
    document

  212. Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology
    H.T.M. Pham; T. Kulrattanarak; R.G.M. van der Sman; C. Schroen; R.M. Boom; P.M. Sarro;
    In Proc. of the Eurosensors XXIII conference,
    Lausanne, Switzerland, pp. 345-348, 2009.
    document

  213. Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
    A.T. Tran; H. Schellevis; C. Shen; H.T.M. Pham; P.M. Sarro;
    In Proc. of SAFE 2009,
    Veldhoven, The Netherlands, STW, pp. 121-124, 2009.
    document

  214. Sensing Microgripper with PID Control
    P. Phan Huu; V.Q. Nguyen; T. Chu Duc; P.M. Sarro;
    In Ngo Nguyen; N.K. Cheung (Ed.), Proc. of 2008 International Conference on Advanced Technologies for Communications,
    Hanoi, Vietnam, pp. 319-322), 2009.

  215. Vertical Contact Position Detection and Grasping Force Monitoring for Micro-Gripper Applications
    M. Porta; J. Wei; M. Tichem; P.M. Sarro; U. Staufer;
    In Proc. IEEE Sensors 2009 Conference,
    Christchurch, New Zealand, pp. 967-970, 2009.

  216. Thermal characterization of microliter amounts of liquids by a micromachined calorimetric transducer
    S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
    In Proc. IEEE MEMS 2009,
    Sorrento, Italy: IEEE, pp. 535-538, 2009.

  217. Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
    V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In Proc. IEEE MEMS 2009,
    Sorrento, Italy, pp. 140-143, 2009.

  218. Single wafer surface micromachined field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
    In PM Sarro & C Hierold (Eds.), Proceedings of IEEE MEMS 2009 Conference,
    Sorrento, Italy, IEEE, pp. 848-851, 2009.

  219. Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture
    C. Yue; J. Wei; Z.L. Chen; Z.W. Liu; P.M. Sarro;
    In P. Pons (Ed.), Proceedings of 20th Micromechanics Europe Workshop (MME),
    Toulouse, France, LAAS-CNRS, pp. 1-4, 2009.

  220. Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias
    M. Saadaoui; H.W. van Zeijl; H.T.M. Pham; H.C. Knoops; W.M.M. Kessels; M.C.M. van de Sanden; F. Roozeboom; Y. Lamy; K.B. Jinesh; W. Besling; P.M. Sarro;
    In MRS Proceedings Volume 1112, Materials and Technologies for 3-D Integration,
    Warrendale, PA, pp. 1-8, 2009.

  221. A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
    C. Shen; T.M.H. Pham; P.M. Sarro;
    In Micro Electro Mechanical Systems,
    Sorrento, Italy, pp. 383-386, 2009.

  222. A contact position detection and interaction force monitoring sensor for micro-assembly applications.
    J. Wei; M. Porta; M. Tichem; P.M. Sarro;
    In K Najafi & M Schmidt (Eds.), Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers 2009),
    Denver, USA, IEEE, pp. 2385-2388), 2009. ISBN 978-1-4244-4193-8.

  223. Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring.
    J. Wei; C. Yue; Z.L. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
    In J. Brugger; D. Briand (Ed.), Eurosensors XXIII,
    Lausanne, Switzerland, Elsevier, pp. 120-123), 2009.
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  224. Through Silicon Interconnect Using grayscale Lithography for MEMS Applications.
    H.W. van Zeijl; D. Liu; P.M. Sarro;
    In J. Brugger; D. Briand (Ed.), Eurosensors XXIII,
    Lausanne, Switzerland, Elsevier, pp. 1543-1546, 2009.
    document

  225. Alignment insensitive anisotropic etching of silicon cavities with smooth 49 sidewalls
    C. Shen; H.T.M. Pham; P.M. Sarro;
    In he 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009,
    pp. 1071-1074, 2009.
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  226. Aluminum thermal motor for high bandwidth positioning stages
    S.L. Paalvast; H.T.M. Pham; P.M. Sarro; R.H. Munnig Schmidt;
    In 9th international conference of the european society for precision engineering and nanotechnology,
    San Sebastian, SP, pp. 54-58, 2009.

  227. Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications
    Yujian Huang; P.M. Sarro;
    In Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
    Veldhoven, The Netherlands, pp. 24-27, 2009.
    document

  228. Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.
    S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
    In L.J. Ernst; Kouchi Zhang (Ed.), Proceedings of the EuroSimE 2009,
    Montigny le Bretonneux, IEEE, pp. 318-321, 2009. ISBN 978-1-4244-4159-4.

  229. Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring
    J. Wei; C. Yue; ZL. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
    In J Brugger; D Briand (Ed.), Proceeding of EUROSENSORS XXIII,
    Elsevier, pp. 120-123, 2009.

  230. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), IOP journal of physics;conference series,
    IOP, pp. 1-4, 2009.

  231. Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
    V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In P.M. Sarro; C Hierold (Ed.), Proc. IEEE MEMS 2009,
    IEEE, pp. 140-143, 2009.

  232. Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application
    A. Purniawan; Y. Huang; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), 12th Annual Workshop on Semiconductor Advances for Future Electronics,
    s.n., pp. 48-51, 2009.

  233. Single wafer surface micromachined field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
    In P.M. Sarro; C Hierold (Ed.), Single wafer surface micromachined field emission electron source,
    IEEE, pp. 848-851, 2009.

  234. Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
    R. Li; .Y Lamy; W.F.A. Besling; F. Roozeboom; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 18, 2008.

  235. Fabrication and characterization of a PECVD SiC evanescent wave optical sensor
    G. Pandraud; P.J. French; P.M. Sarro;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 142, pp. 61-66, 2008.

  236. Fabrication and optical characterization of nano-hole arrays in gold and gold/palladium films on glass
    O.M. Piciu; M.W. Docter; M. van der KrogtC; Y. Garini; I.T. Young; P.M. Sarro; A. Bossche;
    Institution of Mechanical Engineers. Proceedings. Part N: Journal of Nanoengineering and Nanosystems,
    Volume 221, Issue 3, pp. 107-114, 2008.

  237. Design and performance of a room-temperature TeraHertz detection array for real-time imaging
    I. Kasalynas; A.J.L. Adam; T.O. Klaassen; J.N. Hovenier; G. Pandraud; V.P. Iordanov; P.M. Sarro;
    IEEE Journal of Selected Topics in Quantum Electronics,
    Volume 14, Issue 2, pp. 363-369, 2008.

  238. Thin-film encapsulation of a silicon field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
    In s.n. (Ed.), Proceedings Eurosensors XXII,
    Dresden, Germany: Eurosensors XXII, pp. 625-628, 2008.
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  239. Monocrystalline silicon microhotplate heater
    M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proceedings of EUROSENSORS XXII,
    Dresden, Germany, pp. 1611-1614, Sep. 2008.

  240. Electrical behaviour of mono-Si based microhotplate heater
    M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proceedings of 11th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
    Veldhoven, The Netherlands, pp. 411-414, 2008.

  241. Temperature Calibration of Fast Scan Calorimeter Chips.
    E. Iervolino; A.W. van Herwaarden; P.M. Sarro;
    In Proceedings Eurosensors XXII,
    Dresden, Germany, Sep. 2008.

  242. Analysis and characterization of an electrothermal silicon-polymer
    J. Wei; P.M. Sarro;
    In Proc. the 2008 annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008),
    pp. 436-439, 2008.

  243. A novel semi SOI fabrication process for integrated 3D micromachining
    J. Wei; T. Chu Duc; P.M. Sarro;
    In Proc. IEEE NEMS 2008,
    pp. 717-720, 2008.

  244. Electrothermal microgripper with large jaws displacement and integrated force sensors
    T.Chu Duc; G.K.lau; J.F. Creemer; P.M. Sarro;
    In Proc. IEEE MEMS 2008,
    Tucson, Arizona, USA, pp. 519-522, Jan. 2008.

  245. Design and characterization of a novel icp plasma tool for high speed and high accuracy drie processing
    N. Launay; H. W. van Zeijl; P. M. Sarro;
    In Proc. IEEE MEMS 2008,
    Tucson, Arizona, USA, pp. 311-314, Jan. 2008.

  246. An electro-thermal silicon-polymer micro-gripper for simultaneous in-plane and out-of-plane motions
    J. Wei; T. Chu Duc; P.M. Sarro;
    In Proc. EUROSENSORS XXII,
    pp. 1466-1469, 2008.

  247. 3D Microstructuring of silicon and SU8 polymer for microsystems applications
    P.M. Sarro; J. Wei; T. Chu Duc;
    In Proc. 19th Micromechanics Europe (MME 2008),
    pp. 237-241, 2008.

  248. Highly uniform coating of vertical sidewall for 3D pattern definition
    T. Verhaar; J. Wei; P.M. Sarro;
    In Proc. 19th Micromechanics Europe (MME 2008),
    pp. 141-145, 2008.

  249. Novel electrothermal bimorph actuator for large out-of-plane displacement and force
    J.Wei; T.Chu Duc; G.K.Lau; P.M. Sarro;
    In IEEE MEMS 2008,
    Tucson, Arizona, USA, pp. 46-49, Jan. 2008.

  250. Application of PECVD a-SiC thin-film layer for encapsulation of microstructures
    V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
    STW, pp. 609-612, 2008.

  251. Design of a 2D TiO2 Photonic Crystal Waveguide Sensor
    E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
    STW, pp. 424-427, 2008.

  252. Very thin SiC membranes for micromachines vacuum sensors
    H.T.M. Pham; C. Fan; G. Pandraud; J.F. Creemer; N.M. van der Pers; P. Visser; K. Kwakernaak; P.M. Sarro;
    In s.n. (Ed.), Proceedings of IEEE sensors 2008,
    IEEE Sensors, pp. 1143-1146, 2008.

  253. ALD Tio2 photonic crystals for biosensors
    G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
    In sn. (Ed.), Proceedings of APCTP-ASEAN workshop on Advanced Material Science and Nanotechnology,
    APCTP-ASEAN workshop on AMSN, pp. 399-402, 2008.

  254. Thin-film MEMS encapsulation using low-stress PECVD silicon carbide
    V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
    In G. Gerlach (Ed.), Proceedings Eurosensors XXII,
    Eurosensors, pp. 491-494, 2008.

  255. Thin-film encapsulation of a silicon field emission electron source
    F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
    In s.n. (Ed.), Proceedings Eurosensors XXII,
    Eurosensors XXII, pp. 625-628, 2008.

  256. Atomic layer deposition TiO2 photonic crystal waveguide of biosensors,
    G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
    In s.n (Ed.), Proceedings of the fourth IWON, APTC-ASEAN,
    s.n., pp. 339-402, 2008.

  257. A dual-side fabrication method for silicon plate springs with high out-of plane stiffness
    S.L.Paalvast; H.W. van Zeijl; J.Su; P.M. Sarro; J. van Eijk;
    J. Micromech. and Microeng.,
    Volume 17, Issue 7, pp. 197-203, 2007.

  258. An in-plane thermal unimorph using confined polymers
    G.K.Lau; T.Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
    J. Micromech. and Microeng.,
    Volume 17, Issue 7, pp. 174-183, 2007.

  259. Piezoresistive cantilever beam for force sensing in two dimensions
    T.Chu Duc; J.F. Creemer; P.M. Sarro;
    IEEE Sensors,
    Volume 7, pp. 96-104, 2007.

  260. 2-D MMI devices based on integrated hollow ARROW waveguides
    R.Bernini; E.De Nuccio; F.Brescia; A.Minardo; L.Zeni; P.M. Sarro;
    IEEE J.of Selected Topics Quantum Electronics,
    Volume 13, Issue 2, pp. 194-201, 2007.

  261. Powerful polymeric thermal micro-actuator with embedded silicon microstructure
    G.K. Lau; .F.L Goosen; F. van Keulen; T. Chu Duc; P.M. Sarro;
    Applied Physics Letters,
    Volume 90, Issue 21, 2007.

  262. Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
    B. Yan; H.T.M. Pham; Y. Ma; Y. Zhuang; P.M. Sarro;
    Appl. Phys. Lett.,
    Volume 91, pp. 101902.1-3, 2007.

  263. Polymer constraint effect for electro-thermal bimorph microactuators
    T. Chu Duc; G.K. Lau; P.M. Sarro;
    Appl. Phys. Lett.,
    Volume 91, 2007.

  264. PDL free plasma enhanced chemical vapor deposition SIC optical waveguides and devices
    G. Pandraud; P.M. Sarro; P.J. French;
    Optics Communications,
    Volume 269, Issue 2, pp. 338-345, 2007.

  265. PECVD SiC optical waveguide loss and mode characteristics
    G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
    Optics & Laser Technology,
    Volume 39, Issue 3, pp. 532-536, 2007.

  266. In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets
    H.T.M.Hoa; C.d.Boer; J.Wei; P.M. Sarro;
    In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
    Lyon, France, IEEE, pp. 497-500, Jun. 2007.

  267. Power efficient V-shape electro-thermal actuator using constrained SU8
    G.K.Lau; T.Chu Duc; J.F.L Goosen; P.M. Sarro; F. van Keulen;
    In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
    Lyon, France, IEEE, pp. 287-290, Jun. 2007.

  268. Fabrication of vertical electrodes on channel sidewall for picoliter liquid measurements
    Jia Wei; M. van der Velden; P.M. Sarro;
    In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
    Lyon, France, IEEE, pp. 1613-1616, Jun. 2007.

  269. Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness
    H.W. van Zeijl; S.L. Paalvast; J. Su; J. van Eijk; P.M. Sarro;
    In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
    Lyon, France, IEEE, pp. 1605-1608, Jun. 2007.

  270. Local Sealing of High Aspect Ratio Vias for Single Step Bottom-up Copper Electroplating of Through Wafer Interconnects
    M. Saadaoui; W. Wien; H. V. Zeijl; H. Schellevis; M. Laros; P. M. Sarro;
    In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
    Atlanta, Georgia, USA, IEEE, pp. 974-977, Oct. 2007.

  271. PECVD silicon carbide waveguides for multichannel sensors
    G.Pandraud; P.J. French; P.M. Sarro;
    In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
    Atlanta, Georgia, USA, IEEE, pp. 395-398, Oct. 2007.

  272. Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems
    M. van der Velden; J.W. Spronck; R.H. Munnig Schmidt; J. Wei; P.M. Sarro;
    In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
    Atlanta, Georgia, USA, IEEE, pp. 1241-1244, Oct. 2007.

  273. Integrated Silicon-polymer laterally stacked bender for sensing microgrippers
    T. Chu Duc; G.K.Lau; J.F.L Goosen; F. van Keulen; P.M. Sarro;
    In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
    Daegu, Korea, IEEE, pp. 662-665, Oct. 2007.

  274. Nano-hole arrays in thin Au/Pd film on glass for high speed molecular analysis
    O. Piciu; M van der .Krogt; M.Docter; P.M. Sarro; A.Bossche;
    In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
    Daegu, Korea, IEEE, pp. 608-611, Oct. 2007.

  275. Electro-thermally actuated polymeric stack for linear in-plane actuation
    G.K. Lau; T .Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
    In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
    Daegu, Korea, IEEE, pp. 538-541, Oct. 2007.

  276. 2D electro-thermal microgripper with large clamping and rotation motion at low driving voltage
    T.Chu Duc; J.Wei; G.K.Lau; P.M. Sarro;
    In Proc. 20th IEEE International Conference on MicroElectroMechganical Systems (IEEE MEMS 2007),
    Kobe, Japan, pp. 687-690, Jan. 2007.

  277. Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion
    J.Wei; T.Chu Duc; P.M. Sarro;
    In Proc. 18th MicroMechanics Europe (MME 2006),
    Guimares, Portugal, Univ. Minho, pp. 187-190, Sept.16-18 2007.

  278. Simulation and measurement of a comb-structure silicon-polymer thermally actuated microgripper
    F. Krecinic; T.Chu Duc; G.K. Lau; P.M. Sarro;
    In Proc. 18th MicroMechanics Europe (MME 2006),
    Guimares, Portugal, Univ. Minho, pp. 215-218, Sept.16-18 2007.

  279. Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
    C. Olivadoti; H.T.M. Pham; P.M. Sarro;
    In Proc. 18th MicroMechanics Europe (MME 2006),
    Guimares, Portugal, Univ. Minho, Sept. 2007.

  280. Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
    M. Cannavo; H.W. van Zeijl; G. Pandraud; J. V. Driel; T. Alan; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, The Netherlands, STW, pp. 509-512, Nov. 2007.

  281. Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
    J.Wei; T. Chu Duc; M. van der Velden; P. M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, The Netherlands, STW, pp. 625-628, Nov. 2007.

  282. Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias
    M. Saadaoui; W. Wien; H. van Zeijl; A. van den Bogaard; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, The Netherlands, STW, pp. 543-546, Nov. 2007.

  283. Roughness treatment of silicon surface after Deep Reactive Ion Etching
    H.T.M. Pham; Charles R. de Boer; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, The Netherlands, pp. 535-538, Nov. 2007.

  284. A comparative study of the strength of Si, SiN and SiC used at nanoscales
    T. Alan; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, The Netherlands, STW, pp. 395-398, Nov. 2007.

  285. Integrated silicon optical sensors based on hollow core waveguide
    R. Bernini; E. De Nuccio; A. Minardo; L. Zeni; P.M. Sarro;
    In A. Kubby; G.T. Reed (Ed.), Photonics West, Proc. SPIE: Silicon Photonics II,
    San Jose, California, USA, SPIE, Jan. 2007.

  286. Nano-hole Arrays in Thin Au/Pd Film on Glass, for High Speed Molecular Analysis
    O.M. Piciu; M. van der KrogtC; F. Tatar; P.M. Sarro; A. Bossche; M.W. Docter; Y. Garini; I.T. Young;
    In s.n. (Ed.), Proceedings of 5th IEEE Conference on Sensors,
    IEEE, pp. 608-611, 2007.

  287. PECVD silicon carbide waveguides for multichannel sensors
    G. Pandraud; P.J. French; P.M. Sarro;
    In B Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conference,
    IEEE, pp. 395-398, 2007.

  288. Sub-wavelength apertures in Au/Pd film for fluorescence measurements
    O.M. Piciu; M. van der KrogtC; M.W. Docter; Y. Garini; I.T. Young; P.M. Sarro; A. Bossche;
    In s.n. (Ed.), Sense of Contact 2009, pp. 1-4, 2007.

  289. Monocrystalline Si-based microhotplate heater
    M. Mihailovic; J.F. Creemer; P.M. Sarro;
    In Proc. SAFE/STW,
    Veldhoven, The Netherlands, pp. 608-611, Nov. 2007.

  290. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; F. van Keulen; P. French; P.M. Sarro;
    J. Micromech and Microeng.,
    Volume 16, Issue 6, pp. 35-44, 2006.

  291. Lateral nanoNewton force sensing piezocantilevers for microparticle handling
    T. Chu Duc; J.F. Creemer; P.M. Sarro;
    J. Micromech and Microeng.,
    Volume 16, Issue 6, pp. 102-106, 2006.

  292. In-package MEMS-based thermal actuators for micro-assembly
    V.A. Henneken; M. Tichem; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 16, pp. S107-S115, 2006.

  293. Silicon Micromachining of High Aspect Ratio, High-Density Through-Wafer Electrical Interconnects for 3-D Multichip Packaging
    Zheyao Wang; Lianwei Wang; N. T. Nguyen; Wim A. H. Wien; Hugo Schellevis; Pasqualina M. Sarro; Joachim N. Burghartz;
    IEEE Tr. Advanced Packaging,
    Volume 29, Issue 3, Aug. 2006.

  294. Development and characterization of an integrated silicon micro flow cytometer
    R.Bernini; E.De Nuccio; F.Brescia; A.Minardo; L.Zeni; P.M. Sarro; R.Palumbo; M.R.Scarfi;
    Analytical and Bioanalytical Chemistry,
    Volume 386, pp. 1267-1272, 2006.

  295. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; F. van Keulen; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 16, Issue 6, pp. 35-44, 2006.

  296. Polarization-insensitive PECVD SiC waveguides for sensor platform
    G. Pandraud; P.J. French; H.T.M. Pham; P.M. Sarro;
    Optical Materials,
    Volume 28, Issue 4, pp. 380-384, 2006.

  297. Development of post processing modules for integrated sensors and actuators applications (U-SP-2-I-ICT)
    L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    STW, Volume STW , 2006.

  298. Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
    P.J. French; P.M. Sarro;
    JG Korvinck; O Paul (Ed.);
    William Andrew Publishing, , pp. 805-851, 2006.

  299. Micromachining Technology: Bulk micromachining
    P.J. French; P.M. Sarro;
    In MEMS, A practical guide to Design, Analysis and Applications,
    Norwich, NY, USA, William Andrew Publishing, 2006.

  300. Advanced silicon micromachining for 3D micro and nanostructuring
    P.M. Sarro; J.Wei;
    In Proc. IWOFM-IWONN Conference,
    Halong, Vietnam, Dec. 2006.
    document

  301. Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers
    W.J. Venstra; M. van der Velden; J.W. Spronck; J. van Eijk; P.M. Sarro;
    In Proc. IEEE Sensors 2005,
    Irvine, California, USA, pp. 584-587, Oct. 2006.
    document

  302. ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
    O. Piciu; M. van der Krogt; M. Docter; P.M. Sarro; A. Bossche;
    In Proc. IEEE Sensors 2005,
    Irvine, California, USA, pp. 452-456, Oct. 2006.

  303. MEMS Hotplates with TiN as a Heater Material
    J.F. Creemer; D. Briand; W. van der Vlist; C. de Boer; H.W. Zandbergen; P.M. Sarro;
    In Proc. IEEE Sensors 2005,
    Irvine, California, USA, pp. 330-333, Oct. 2006.

  304. Fabrication and characteristics of a PECVD SiC evanescent wave optical sensor
    G. Pandraud; P.J. French; P.M. Sarro;
    In P.Enoksson (Ed.), Proc. Eurosensors XX,
    Goteborg, Sweden, Sept. 2006.
    document

  305. Silicon bulk micromachining: from sub-mm to nm 3D structuring
    P.M. Sarro;
    In P.Enoksson (Ed.), Proc. Eurosensors XX,
    Goteborg, Sweden, Sept. 2006.
    document

  306. Improved thermal U-beam actuators for micro-assembly
    V. Henneken; M. Tichem; P.M. Sarro;
    In P.Enoksson (Ed.), Proc. Eurosensors XX,
    Goteborg, Sweden, Sept. 2006.
    document

  307. Piezoresistive cantilever for nano-Newton sensing in two dimensions
    T. Chu Duc; J.F. Creemer; P.M. Sarro;
    In Proc. 19th IEEE International Conference on MicroElectroMechganical Systems (IEEE MEMS 2006),
    Istanbul, Turkey, pp. 586-589, 2006.
    document

  308. Direct wafer bonding of processed LPCVD silicon nitride films
    C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
    In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
    Southampton, UK, pp. 89-92, Sept. 2006.
    document

  309. A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
    H.W. van Zeijl; J. Su; S.L. Paalvast; P.M. Sarro; J. van Eijk;
    In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
    Southampton, UK, pp. 209-212, Sept. 2006.
    document

  310. Silicon-polymer laterally stacked bimorph micro-gripper
    T. Chu Duc; G.K. Lau; J. Wei; P.M. Sarro;
    In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
    Southampton, UK, pp. 197-200, Sept. 2006.

  311. In-plane thermal unimorph using confined polymers
    G.K.Lau; T.Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
    In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
    Southampton, UK, pp. 117-120, Sept. 2006.

  312. Study on 2-lever DRIE for 3D MEMS structures
    J.Wei; T.ChuDuc; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 494-497, Nov. 2006.
    document

  313. Copper electroplating for 3D interconnects
    M.Saadaoui; W.Wien; H.van Zeijl; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 523-526, Nov. 2006.
    document

  314. Fabrication of porous anodic aluminum oxide templates and pattern transfer
    B.Yan; V.Vespini; H.T.M.Pham; H.Schellevis; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 498-501, Nov. 2006.
    document

  315. A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
    J.Su; H.W.van Zeijl; S.L.Paalvast; P.M. Sarro; J.van Eijk;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 394-397, Nov. 2006.
    document

  316. Integrated Silicon-Polymer Laterally Stacked Bender for Sensing Microgrippers
    T. Chu Duc; J. Wei; P. M. Sarro; G. K. Lau;
    In IEEE SENSORS 2006, EXCO,
    Daegu, Korea, Oct. 2006.
    document

  317. Electrostatically squeezed elastometers for out-of-plane microactuation
    G.K.Lau; J.F.L Goosen; F. van Keulen; P.French; P.M. Sarro;
    In APCOT 2006,
    Singapore, Jun. 2006.
    document

  318. Some properties of a room temperature THz detection array
    G. Pandraud; V.P. Iordanov; I. Kasalynas; A.J.L. Adam; T.O. Klaassen; J.N. Hovenier; P.M. Sarro;
    In s.n. (Ed.), Some properties of a room temperature THz detection array,
    SPIE, pp. 1-7, 2006.

  319. A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; P.M. Sarro;
    In P. Enoksson (Ed.), Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX,
    Eurosensors, pp. 1-4, 2006.

  320. Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; C.L. Hsu; J.F. Creemer; J.C. Wolff; B.J. Thijsse; P.M. Sarro;
    In R.F. Wolffenbuttel (Ed.), Proceedings of the The 17th Micromechanics Europe Workshop, MME'06,
    MME, pp. 1-4, 2006.

  321. Fabrication Technology of Periodical Nano-cavities for Bio-analytical Applications (U-SP-2-I-ICT)
    O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
    In s.n. (Ed.), Proceedings of the Sense of Contact VIII,
    STW, pp. 1-6, 2006.

  322. Fabrication and Optical Characterization of Nano-hole Arrays for Molecular Detections (U-SP-2-I-ICT)
    O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
    In s.n. (Ed.), Proceedings of the 10th MicroTAS Conference 2006,
    MicroTAS, pp. 666-669, 2006.

  323. Direct wafer bonding of processed LPCVD silicon nitride films
    C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
    In s.n. (Ed.), Proceedings of the 17th MME MicroMechanics Europe Workshop,
    H.Morgan Ed., pp. 89-92, 2006.

  324. Optical Nano-hole Arrays for Molecular Recognition and Detection (U-SP-2-I-ICT)
    O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
    In s.n. (Ed.), Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology¿APCOT 2006,
    apcot, pp. 1-4, 2006.

  325. Nano-hole arrays in thin Au/Pd film on glass for high speed molecular analysis
    O. Piciu; M. van der Krogt; M. Docter; P.M. Sarro; A. Bossche;
    In S. Lee; M Esashi (Ed.), Proc. IEEE Sensors 2006 Conference,
    IEEE, pp. 608-611, 2006.

  326. Fabrication and characteristics of PECVD SiC evanescent wave optical sensor (U-SP-2-I-ICT)
    G. Pandraud; P.J. French; P.M. Sarro;
    In s.n. (Ed.), fabrication and characteristics of PECVD SiC evenescent wave optical sensor,
    Eurosensors, pp. 1-4, 2006.

  327. Particle filters integrated inside a silicon wafer
    W.Venstra; N.P. Pham; P.M. Sarro; J. van Eijk;
    Microlelectronic Engineering,
    Volume 78-79, 2005.

  328. Spray coating of photoresist for pattern transfer on high topography surfaces
    N P Pham; J.N.Burghartz; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 15, pp. 691-697, 2005.

  329. Evaluation of an empirical mdel to estimate and optimize mechanical properties of PECVD SiC films
    H.T.M.Hoa; C.de Boer; P.M. Sarro;
    Journal of the Electrochemical Society,
    Volume 152, Issue 11, 2005.

  330. A porous SiC ammonia sensor
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
    Volume 109, Issue 1, pp. 44-46, 2005. 50/50 EI/ECTM-sb.

  331. Experimental study of bent SiC optical waveguides
    G. Pandraud; P.J. French; P.M. Sarro;
    Microwave & Optical Technology Letters,
    Volume 47, Issue 3, pp. 219-220, 2005. 100% EI, sb.

  332. Development of post processing micromachining modules for integrated sensors and actuators applications
    T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    STW, Volume STW meeting , 2005.

  333. Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications, Materials
    S.B.S. Heil; E. Langereis; F. Roozeboom; A. Kemmeren; N.P. Pham; P.M. Sarro; M.C.M. van de Sanden; W.M.M. Kessels;
    In Technology and Reliability of Advanced Interconnects 2005,
    pp. B6.4.1-B6.4.6, 2005.
    document

  334. Lateral nanoNewton force sensing piezocantilevers for microparticle handling
    C.D.Trinh; J.F. Creemer; P.M. Sarro;
    In Proc. MME,
    2005.
    document

  335. In-package MEMS-based thermal actuators for micro-assembly
    V. Henneken; M. Tichem; P.M. Sarro;
    In Proc. MME,
    2005.

  336. Non-Catalyst and Low Temperature Growth of Vertically Aligned Carbon Nanotubes for Nanosensor Arrays
    H.T.M. Hoa; C. de Boer; P.M. Sarro;
    In Proc. Transducers 2005,
    pp. 97-100, 2005.
    document

  337. A new ammonia sensor based on a porous SiC membrane
    E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In Proc. Transducers 2005,
    2005.
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  338. Highly Controllable Electrochemical Deep Etching Process On Silicon
    Y.Chen; L.Wang; P.M. Sarro;
    In Proc. IEEE MEMS 2005 Conf,
    2005.
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  339. Porous silicon layeras a conformal insulator layer for high aspect ratio through wafer interconnects
    N.P. Pham; G.P. Salvador; P.M. Sarro;
    In Proc. Eurosensors XIX,
    2005.

  340. An ammonia sensor based on a porous SiC membrane
    E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
    In Proc. Eurosensors XIX,
    2005.
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  341. Integrated antiresonant hollow core waveguids as platforms for microoptical microfluidic TAS applications
    R. Bernini; E. De Nuccio; F. Mottola; A. Minardo; P.M. Sarro; L. Zeni;
    In Proc. Eurosensors XIX,
    2005.

  342. Actuated elastometers with rigid vertical electrodes
    G.K. Lau; J.F.L Goosen; F. van Keulen; P.J. French; P.M. Sarro;
    In Proc. MME 2005,
    pp. 382-385, 2005.

  343. Influence of anodization parameters on the pore size and shape of anodic aluminum oxide nanotemplates
    S.H. Le; A. Camerlingo; H.T.M. Pham; P.M. Sarro;
    In Proc. Eurosensors XIX,
    2005.
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  344. The fabrication of optical hole-arrays for use in the atto-liter plate device for single molecule detection
    O.M. Piciu; M.C. van der krogt; M. Docter; P.M. Sarro; A.Bossche;
    In Proc. Eurosensors XIX,
    2005.

  345. Suspended submicron SiC waveguides for gas and chemical sensor
    G. Pandrau; C.K. Yang; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XIX,
    2005.
    document

  346. A new ammonia sensor based on porous SIC membrane
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Transducers'05 Digest of technical papers,
    IEEE, pp. 1832-1835, 2005. Editor onbekend JH 50/50 EI/ECTM.

  347. Low temperature LPCVD SiN direct bonding for sensors
    C.L. Hsu; G. Pandraud; J.F. Creemer; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005),
    Dutch Technology Foundation, pp. 162-166, 2005. Bij EWI gehonoreerd als 1V / 100% EI.

  348. An ammonia sensor based on porous SiC
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Proceedings of the Sense of Contact 7 workshop,
    Sense of Contact 2009, pp. 1-4, 2005. Editor onbekend JH/ 100% EI.

  349. Actuated elastomers with rigid vertical electrodes
    G.K. Lau; J.F.L. Goosen; A. van Keulen; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop,
    Chalmers University of Technology, pp. 382-385, 2005. Editor onbekend - IT.

  350. ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
    O.M. Piciu; M. van der KrogtC; M.W. Docter; P.M. Sarro; A. Bossche;
    In s.n. (Ed.), Proceedings of IEEE Sensors, 2005,
    s.l., pp. 452-456, 2005. NEO.

  351. Compact building blocks for optical sensing on PECVD SiC technology
    G. Pandraud; D.H.B. Wicaksono; P.J. French; P.M. Sarro;
    In s.n. (Ed.), ICICI proceedings,
    ICICI, pp. 453-458, 2005. Editor onbekend JH /100% EI.

  352. An ammonia sensor based on porous SIC membrane
    E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Eurosensors XIX, Proceedings,
    IEEE, pp. 1-4, 2005. Editor onbekend JH /100% EI.

  353. The fabrication of optical hole-arrays for use in the atto-liter titer plate device for single molecule detection
    O.M. Piciu; M. van der KrogtC; M.W. Docter; P.M. Sarro; A. Bossche;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIX,
    IEEE, pp. 1-4, 2005.

  354. Suspended submicron PEVCD SiC waveguides for gas and chemical sensors
    G. Pandraud; C.K. Yang; P.J. French; P.M. Sarro;
    In s.n. (Ed.), Eurosensors XIX,
    IEEE, pp. 1-4, 2005. 100% EI, sb.

  355. PECVD SIC RIB channel waveguides loss and passive devices
    G. Pandraud; T.M.H. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), ECIO'05 proceedings,
    s.n., pp. 262-265, 2005. Editor onbekend JH.

  356. Polarization-insensitive PECVD SiC waveguides for photonic sensing
    G. Pandraud; T.M.H. Pham; L. Pakula; P.M. Sarro; P.J. French;
    In M Voet; R Willsch; W Ecke; J Jones; B Culshaw (Ed.), 17th International Conference on Optical Fibre Sensors,
    SPIE, pp. 836-839, 2005. 100% EI, sb.

  357. Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2005. Technische Universiteit Delft - 25/75 ECTM/EI, sb; US2005059158; Technische Universiteit Delft - 25/75 ECTM/EI, sb.

  358. Inrichting voor het uitvoeren van een reactie
    V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro;
    2005. TUD 25/75 ECTM/EI-sb; 1024578; TUD 25/75 ECTM/EI-sb.

  359. Microfluidic device for carrying out a reaction
    V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro;
    2005. TUD - 25/75 ECTM/EI, sb; WO2005037433; TUD - 25/75 ECTM/EI, sb.

  360. Filter-protected photodiodes for high-throughput enzymatic analysis
    V.P. Iordanov; J.Bastermeijer; R.Ishihara; P.M. Sarro; A.Bossche; M.Vellekoop;
    IEEE Sensors Journal,
    Volume 4, Issue 5, pp. 584-588, Oct. 2004.

  361. Integrated Coulter counter based on 2-dimensional liquid aperture control
    J.H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators B: Chemical,
    2004.

  362. Arrow optical waveguides based sensors
    R.Bernini; S.Campopiano; L.Zeni; P.M. Sarro;
    Sensors and Actuators B,
    Volume 100, Issue 1-2, pp. 143-146, 2004.

  363. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. J. Connolly; H. T. M. Pham; J. Groeneweg; P. M. Sarro; P. J. French;
    Sensors and Actuators B,
    Volume 100, Issue 1-2, 2004, pp. 216-220, 2004.

  364. Integrated Coulter counter based on 2-dimensional liquid aperture control
    J. H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P. M. Sarro; M. J. Vellekoop;
    Sensors and Actuators B,
    Volume 102, Issue 1, pp. 44-50, 2004.

  365. Metal patterning on high topography surface for 3D RF devices fabrication
    N.P. Pham; E. Boellaard; W. Wien; L.D.M. van den Brekel; J.N. Burghartz; P.M. Sarro;
    Sensors and Actuators A,
    Volume 115, pp. 557-562, Mar. 2004.

  366. Microfluidic sensor based on integrated optical hollow waveguides
    S.Campopiano; R.Bernini; L.Zeni; P.M. Sarro;
    Optics letters,
    Volume 29, Issue 16, pp. 1894-1896, Aug. 2004.

  367. Photoresist Coating Methods for the Integration of Novel 3-D RF Microstructures
    N.P. Pham; E. Boellaard; J.N. Burghartz; P.M. Sarro;
    Journal of Microelectromechanical Systems,
    Volume 13, Issue 3, pp. 491-499, Jun. 2004. ISSN 1057-7157.

  368. Fabrication of a CMOS compatible pressure sensor for harsh environment
    L.S.Pakula; H.Yang; H.T.M.Pham; P.J. French; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 14, Issue 11, pp. 1478-1483, 2004.

  369. Polymer interconnections for 3D-chip stacking technology: directional volume patterning of flexible substrates with conducting polymer wires
    C.Videlot; J. Ackermann; F.Fages; T.N.Nguyen; L.Wang; P.M. Sarro; D.Crawley; K.Nikolic; M.Forshaw;
    J. Micromech. Microeng.,
    Volume 14, pp. 1618-1624, 2004.

  370. Gel-layer- assisted, directional electropolymerization: a versatile method for high resolution volume and/or surface patterning of flexible substrates with conjugated polymers
    J. Ackermann; C.Videlot; T.N.Nguyen; L.Wang; P.M. Sarro;
    Advanced Materials,
    Volume 16, Issue 19, 2004.

  371. Fabrication of a CMOS compatible pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 14, pp. 1478-1483, 2004. ed.is niet bekend.

  372. Integrated Coulter counter based on 2-dimensional liquid aperture control
    J.H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
    Volume 102, Issue 1, pp. 44-50, 2004. ed. is niet bekend.

  373. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
    Volume 100, pp. 216-220, 2004. 50-50 EI-ECTM.

  374. Nano-array advances: Light measurement & temperature control
    I.T. Young; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; L.R. van den Doel; A. Bossche; P.M. Sarro; G. van DedemWK;
    Cytometry,
    Volume 59A, Issue 1, pp. 53-53, 2004. phpub 31.

  375. Filter-protected photodiodes for high-throughput enzymatic analysis
    V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M.J. Vellekoop;
    IEEE Sensors Journal,
    Volume 4, Issue 5, pp. 584-588, 2004. 50-50 ECTM-EI.

  376. High-speed wavefront sensor compatible with standard CMOS technology
    D. W. de Lima Monteiro; G. Vdovin; P. M. Sarro;
    Sensors and Actuators A,
    Volume 109, Issue 3, pp. 220-230, Jan. 2004.

  377. Development of post processing micromachining modules for integrated sensors and actuators applications
    T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    Delft University of Technology - EI/ECTM-DIMES, Volume STW - DMF.5103 , 2004.

  378. Technology of silicon-based liquid crystal wavefront correctors
    G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang; A.N. Simonov;
    Delft University of Technology, , 2004.

  379. Nano impulse progress report May 2004; optical titre plate for molecular detection
    O.M. Piciu; A. Bossche; P.M. Sarro;
    s.n., , 2004.

  380. M3: the third dimension of silicon, Advanced Micro and Nanosystems
    P.M. Sarro;
    In Enabling Technologies for MEMS and Nanodevices,
    Wiley, 2004.

  381. Nanostructure formation on anodic aluminum oxide nanotemplates
    H. T.M. Pham; C.R. de Boer; P. M. Sarro;
    In The Second International Workshop on Nanophysics and Nanotechnology,
    Hanoi, Vietnam, pp. 91-98, Oct. 2004.

  382. Particle discrimination with an improved projection cytometer
    J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
    In Proceed. MicroTAS 2004,
    Malmo, Sweden, pp. 419-421, Sep. 2004.

  383. Integrated antiresonant hollow waveguide liquid sensor
    S. Campopiano; R.Bernini; L.Zeni; P.M. Sarro;
    In Proc. Eurosensors XVIII,
    Rome, pp. 765-766, Sept. 2004. ISBN: 88-7621-282-5.

  384. Particle size discrimination with a liquid aperture coulter counter
    J. Nieuwenhuizen; P. Svasek; P.M. Sarro; M.J. Vellekoop;
    In Proc. Eurosensors XVIII,
    Rome, pp. 317-320, Sept. 2004. ISBN: 88-7621- 282-5.

  385. TiN for MEMS hotplate heaters
    J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; L. Steenweg; H.W. Zandbergen;
    In Proc. Eurosensors XVIII,
    Rome, pp. 706-707, Sept. 2004. ISBN 88-7621-282-5.

  386. High-aspect-ratio bulk micromachined vias contacts
    N.P. Pham; P.M. Sarro;
    In Proc SAFE, & Prorisc 2004,
    Veldhoven, pp. 657-661, Nov. 2004. ISBN 90-73461-43X.
    document

  387. Integrated Sensors Arrays For Bioluminescence And Fluorescence Bio-Chemical Analysis
    V.Iordanov; B. Iliev; A.Bossche; J. Bastemeijer; P.M. Sarro; I.T.Young; G. van Dedem; M.Vellekoop;
    In Proc. IEEE Sensors 2004 Conf.,
    2004.

  388. Design of in-package MST-based actuators for micro-assembly
    V. Henneken; S. van der Bedem; M. Tichem; B. Karpuschewski; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 747-752, Nov. 2004. ISBN 90-73461-43X.

  389. Titanium Nitride for MEMS Hotplates
    J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; T. Nathoeni; L. Steenweg; V. Svetchnikov; H.W. Zandbergen;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 742-746, Nov. 2004. ISBN 90-73461-43X.

  390. Characterization of ferroelectric thin films materials for FeRAM
    S.H. Le; B. R. Salmassi; J. N. Burghartz; P.M. Sarro;
    In Proc SAFE & Prorisc 2004,
    Veldhoven, pp. 710-713, Nov. 2004. ISBN 90-73461-43X.

  391. Particle size discrimination with a liquid aperture Coulter counter
    J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
    In Palombie (Ed.), Proceedings of Eurosensors XVIII,
    University of Rome, pp. 317-320, 2004.

  392. Sensorized nanoliter reactor chamber for DNA multiplication
    V.P. Iordanov; B.P. Iliev; V. Joseph; J. Bastemeijer; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
    In D. Rocha; P.M. Sarro; M.J. Vellekoop (Ed.), Proceedings of IEEE Sensors, 2004,
    IEEE, Piscataway, pp. 229-232, 2004. niet eerder opgevoerd 50/50 EI/ECTM.

  393. Integrated nanoliter sensors reactor chamber for DNA multiplication - thermal characterization
    V.P. Iordanov; B.P. Iliev; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
    In G.C.M. Meijer (Ed.), The sense of contact VI; sensor workshop for industry and science,
    s.n., pp. 1-6, 2004. verdeling?.

  394. Relative humidity sensors for harsh enviroments
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In G.C.M. Meijer (Ed.), The sense of contact VI; sensor workshop for industry and science,
    s.n., pp. 1-6, 2004.

  395. Integrated nanoliter sensors reactor chamber for PCR analysis - from the idea to a complete system
    B.P. Iliev; V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
    In G.C.M. Meijer (Ed.), The sense of contact VI,
    s.n., pp. 1-6, 2004. phpub 32.

  396. Integrated sensors for nanoliter bioluminescence and fluorescence bio-chemical analysis
    V.P. Iordanov; B.P. Iliev; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; H.R.C. Dietrich; L.R. van den Doel; G. van DedemWK; A.R. Kroon; M.J. Vellekoop;
    In G.C.M. Meijer (Ed.), The sense of contact VI,
    s.n., pp. 1-6, 2004. phpub 34.

  397. CMOS compatible pressure sensors: a comparison between SiC and SiN
    L. Pakula; H. Yang; P.J. French; P.M. Sarro;
    In SAFE bdf98e4d646247d79cef99391c2b9226 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
    STW Technology Foundation, pp. 769-773, 2004. ed. is niet bekend.

  398. Titanium nitride for MEMS hotplates
    J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; T. Nathoeni; L.A. Steenweg; V. Svetchnikov; H.W. Zandbergen;
    In W Krautschneider; C Claeys (Ed.), SAFE 2004; Semiconductor advances for future electronics,
    STW Technology Foundation, pp. 742-746, 2004.

  399. SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor
    G. Pandraud; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
    In SAFE 38da0e1eb22143fbb7fad260632affd7 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
    STW Technology Foudation, pp. 1-4, 2004. ed. is niet bekend.

  400. A new ammonia sensor
    E. Connolly; B. Timmer; T.M.H. Pham; P.M. Sarro; W. Olthuis; P.J. French;
    In H Varwijk (Ed.), SAFE 2004; Proceedings of semiconductor advances for future elecronics,
    STW Technology Foundation, pp. 1-4, 2004.

  401. Integrated sensor arrays for bioluminescence and fluorescence bio-chemical analysis
    V.P. Iordanov; B.P. Iliev; A. Bossche; J. Bastemeijer; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
    In D. Rocha; P.M. Sarro; M.J. Vellekoop (Ed.), Proceedings of IEEE Sensors, 2004,
    IEEE, Piscataway, pp. 810-813, 2004. niet eerder opgevoerd 50/50 EI/ECTM.

  402. Particle discrimination with an improved projection cytometer
    J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
    In T Laurell; J Nilsson; K Jensen; JD Harrison; JP Kutter (Ed.), Proceedings of MicroTas 2004,
    Royal Society of Chemistry, pp. 419-421, 2004.

  403. Porous SiC as an ammonia sensor
    E. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
    In s.n. (Ed.), Proceedings of IEEE Sensors, 2004,
    IEEE, pp. 178-181, 2004. niet eerder opgevoerd -sb 50/50 EI/ECTM.

  404. SiC passive optomechanical transducer head for sensor applications
    G. Pandraud; L. Pakula; H.M.T. Pham; P.J. French; P.M. Sarro;
    In Digest of technical papers; XVIII Eurosensors,
    University of Rome, pp. 1-4, 2004. ed. is niet bekend/50-50 EI-ECTM.

  405. Silicon micro-optics for smart light control
    G.V. Vdovin; D.W. de Lima Monteiro; O. Akhzar-Mehr; M. Loktev; S. Sakarya; O.A. Soloviev; P.M. Sarro;
    In H. Urey; DL Dickensheets (Ed.), Proceedings of SPIE MOEMS display and imaging systems II,
    The International Society for Optical Engineering, pp. 135-149, 2004.

  406. Silicon carbide membrane relative humidity sensor with aluminium electrodes
    E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems,
    IEEE, pp. 193-196, 2004. ed. is niet bekend.

  407. Silicon Carbide Membrane Relative Humidity Sensor with Aluminium Electrodes
    E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In MEMS 2004,
    Maastricht, The Netherlands, pp. 193-196, Jan. 2004. ISBN 0-7803-8265-X.
    document

  408. SiC passive optomechanical transducer head for sensor applications
    G. Pandrau; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XVIII,
    Rome, pp. 24-28, Sept. 2004. ISBN 88-7621-282-5.

  409. A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure
    W. Venstra; M. Laros; J.W. Spronck; P.M. Sarro; J. van Eijk;
    In Proc. Eurosensors XVIII,
    Rome, pp. 313-316, Sept. 2004. 88-7621-282-5.

  410. Porous SiC as ammonia sensor
    E.J. Connolly; B. Timmer; H.T.M.Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
    In Proc. Eurosensors XVIII,
    Rome, pp. 672-674, Sept. 2004. 88-7621-282-5.

  411. Spatial light modulators based on micromachined reflective membranes on viscoelastic layers
    S. Sakarya; G. Vdovin; P.M. Sarro;
    Sensors and Actuators A,
    Volume 108, Issue 1-3, pp. 271-275, Nov. 2003.

  412. Three terminals optoelectronics devices integrated into a silicon on silicon waveguide
    G. Coppola; A. Irace; G. Breglio; M. Iodice; L. Zeni; A. Cutolo; P.M. Sarro;
    Optics and Lasers Engineering,
    Volume 39, Issue 3, pp. 317-332, Mar. 2003. ISSN 0143-8166.

  413. Transient analysis of a high-speed thermo-optic modulator integrated in an all-silicon waveguide
    M. Iodice; F.G. Della Corte; I. Rendina; P.M. Sarro; M. Bellucci;
    Optical-Engineering,
    Volume 42, Issue 1, pp. 169-175, Jan. 2003.

  414. Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer
    W.J. Venstra; P.M. Sarro;
    Microelectronic Engineering,
    Volume 67-68, pp. 502-507, Jun. 2003.

  415. Electrical Characteristics of Plasma-Enhanced Chemical Vapor Deposited Silicon Carbide Thin Films
    H.T.M. Pham; T. Akkaya; C.R. de Boer; P.M. Sarro;
    Material Science Forum,
    Volume 433-436, pp. 451-454, 2003. ISSN 0255-5476.

  416. 3D molecular interconnection technology
    D. Crawley; K. Nikolic; M. Forshaw; J. Ackermann; C. Videlot; T.N. Nguyen; L. Wang; P.M. Sarro;
    J. Micromech. Microeng,
    Volume 13, Issue 5, pp. 655-662, Jun. 2003.

  417. Planar antiresonant reflecting optical waveguides as integrated optical refractometer
    R. Bernini; S. Campopiano; L. Zeni; C. de Boer; P.M. Sarro;
    IEEE Sensors Journal,
    Volume 3, Issue 5, pp. 652-657, Oct. 2003.

  418. Micro-patterning of self-supporting layers with conducting polymer wires for 3D-chip interconnection applications
    J. Ackermann; C. Videlot; T.N. Nguyen; L. Wang; P.M. Sarro; D. Crawley; K. Nikoli; M. Forshaw;
    Applied Surface Science,
    Volume 212-213, pp. 411-416, May 2003.

  419. Self-Adjustment of Micro-mechatronic Systems
    M. Tichem; B. Karpuschewski; P.M. Sarro;
    Annals of the CIRP,
    Volume 52, Issue 1, pp. 17-20, 2003.

  420. Miniaturized analytical assays in biotechnology
    R.M. van Guijt; R. Moerman; A.R. Kroon; G. van DedemWK; R. van den Doel; L. van Vliet; I.T. Young; F.P.J. Laugere; A. Bossche; P.M. Sarro;
    Biotechnology Advances: research reviews,
    Volume 21, Issue 5, pp. 431-444, 2003. 50/50 EI/ECTM.

  421. Monitoring enzymatic reactions with in situ sensors
    I.T. Young; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; R. Moerman; L.R. van den Doel; G. van DedemWK; A. Bossche; B.L. Gray; P.M. Sarro; P.W. Verbeek; L. van VlietJ;
    Proceedings of SPIE- International Society for Optical Engineering,
    Volume 4966, pp. 76-82, 2003.

  422. Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
    D.W. de Lima Monteiro; O. Akhzar-Mehr; P.M. Sarro; G.V. Vdovin;
    Optics Express,
    Volume 11, Issue 18, pp. 2244-2252, 2003.

  423. On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices
    F.P.J. Laugere; R.M. van Guijt; J. Bastemeijer; G. van der Steen; A. Berthold; H.A. Baltussen; P.M. Sarro; G. van DedemWK; M.J. Vellekoop; A. Bossche;
    Analytical Chemistry,
    Volume 75, Issue 2, pp. 306-312, 2003.

  424. Integrated flow-cells for novel adjustable sheath flows
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    Lab On a Chip: microfluidic and nanotechnologies for chemistry, biology, and bioengineering,
    Issue 3, pp. 56-61, 2003.

  425. Monitoring enzymatic reactions in nanolitre wells
    I.T. Young; R. Moerman; L.R. van den Doel; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; G. van DedemWK; A. Bossche; B.L. Gray; P.M. Sarro; P.W. Verbeek; L. van VlietJ;
    Journal of Microscopy,
    Volume 212, Issue 3, pp. 254-263, 2003. 50/50 EI/ECTM.

  426. Technology of silicon-based liquid crystal wavefront correctors
    G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang;
    s.n., Volume STW project DOE.5490 , 2003.

  427. Development of post processing micromachining modules for integrated sensors and actuators applications
    H.M.T. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
    s.n., Volume DMF 5103 , 2003.

  428. Integrated Hartmann-Shack wavefront sensor progress report
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
    s.n., Volume STW project DOE.5375 , 2003.

  429. M3: the third dimension of silicon
    P.M. Sarro;
    Delft University of Technology: , Apr. 2003. ISBN 90-75774-02-8.

  430. Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
    G.V. Vdovin; O. Akhzar-Mehr; P.M. Sarro; D.W. de Lima Monteiro; M. Loktev;
    UF Behringer; B Courtois; AM Khounsary; DG Uttamchandani (Ed.);
    The International Society for Optical Engineering, , pp. 107-111, 2003.

  431. Polyimide Sacrificial Layer for an All-Dry Post-Process Surface Micromachining Module
    H.T.M. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In Transducers,
    Boston, Massachuesetts, USA, pp. 813-816, Jun. 2003. ISBN 0-7803-7731-1.
    document

  432. Technological approaches for fabrication of elastomer based spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SPIE,
    pp. 279-286, 2003. ISSN 0277-786X.

  433. Through-Wafer Electrical Vias for RF Silicon technology
    Z. Wang; L. Wang; H. Schellevis; W. Wien; J.N. Burghartz; P.M. Sarro;
    In Proc. SAFE 2003,
    Veldhoven, The Netherlands, pp. 761-765, Nov. 2003. ISBN 90-73461-39-1.

  434. Stiction of Surface Micromachined Structures: A Study of the Problem and the Possible Solutions
    H.T.M. Pham; L.S. Pakula; P.J. French; P.M. Sarro;
    In Proc. SAFE 2003,
    Veldhoven, The Netherlands, pp. 711-715, Nov. 2003. ISBN 90-73461-39-1.

  435. Electromechamical optical attenuation in micromachined SiC waveguides
    G. Pandraud; H. Yang; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. SAFE 2003,
    Veldhoven, The Netherlands, pp. 631-634, Nov. 2003. ISBN 90-73461-39-1.

  436. Experimental results of a three-terminal optical modulator based on a BMFET device
    A. Irace; G. Breglio; M. Tordi; G. Coppola; C.R. de Boer; P.M. Sarro;
    In Proc. of SPIE,
    Brugge, Belgium, pp. 125-132, Oct. 2003. ISSN 0277-786X.
    document

  437. Wafer thinning for high-density, through-wafer interconnects
    L. Wang; C.C.G. Visser; C.R. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
    In Proc. of SPIE,
    San Jose, CA, pp. 532-539, Jan. 2003. ISSN 0277-786X.
    document

  438. Fabrication of a microfluidic chip for PCR applications
    M. Bu; B. Husband; T. Melvin; G. ensell; N.P. Pham; P.M. Sarro; J.S. Wilkinson; A.G.R. Evans;
    In Proc. MME 2003,
    Delft, The Netherlands, pp. 119-122, Nov. 2003. ISBN 90-808266-1-8.
    document

  439. Liquid crystal wavefront corrector with modal response
    M. Loktev; G. Vdovin; P.M. Sarro;
    In Proc. Eurosensors XVII,
    University of Minho, Guimaraes, Portugal, pp. 598-599, Sep. 2003.

  440. A model for film thickness using direct spray coating
    N.P. Pham; J.N. Burghartz; P.M. Sarro;
    In Proc. IEEE EPTC conference,
    Singapore, Dec. 2003.
    document

  441. Metal patterning on high topography surface for 3-D RF devices fabrication
    N.P. Pham; E. Boellaard; W. Wien; L.D.M. van den Brekel; J.N. Burghartz; P.M. Sarro;
    In Proc. Eurosensors XVII,
    University of Minho, Guimaraes, Portugal, pp. 440-443, Sep. 2003.

  442. High Aspect Ratio through-Wafer Interconnections for 3D-Microsystems
    L. Wang; A. Nichelatti; H. Schellevis; C. de Boer; C. Visser; T.N. Nguyen; P.M. Sarro;
    In Proc. 16th IEEE International MEMS conference,
    Kyoto, Japan, pp. 634-637, Jan. 2003.
    document

  443. Fabrication of a CMOS Compatible Pressure Sensor for Harsh Environments
    L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P. M. Sarro;
    In Proc. 16th IEEE International MEMS conference,
    Kyoto, Japan, pp. 502-505, Jan. 2003.
    document

  444. Integrated optical refractometer based on rib-ARROW waveguide
    R. Bernini; S. Campopiano; L.Zeni; P.M. Sarro;
    In Proc Eurosensors XVII,
    University of Minho, Guimaraes, Portugal, pp. 139-142, Sep. 2003.
    document

  445. Polyimide sacrificial layer for an all-dray post-process surface micromachining module
    T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In Transducers'03 Digest of technical papers,
    IEEE, pp. 813-816, 2003.

  446. Electromechanical optical attenuation in micromachined SiC waveguids
    G. Pandraud; H. Yang; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 631-634, 2003. CD-ROM.

  447. Stiction of surface micromachined structures: a study of the problem and the possible solutions
    T.M.H. Pham; L. Pakula; P.J. French; P.M. Sarro;
    In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 711-715, 2003. CD-ROM.

  448. Relative humidity sensors using porous SiC membranes and Al electrodes
    E. Connolly; T.M.H. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In SAFE 2003 Semiconductor advances for future electronics,
    Stichting voor de Technische Wetenschappen, pp. 678-682, 2003. CD-ROM 50/50 EI/ECTM.

  449. Wafer thinning for high-density, through-wafer interconnects
    L. Wang; C.C.G. Visser; C.R. de Boer; J.M.W. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
    In JA Yasaitis; MA Perez-Maher; JM Karam (Ed.), Proceedings of SPIE. Vol. 4979; micromachining and microfabrication process technnology VIII,
    The International Society for Optical Enginering, pp. 532-539, 2003.

  450. Development of a silicon-based modal liquid crystal wavefront corrector
    M. Loktev; G.V. Vdovin; P.M. Sarro;
    In M Hrabovsky; D Senderakova; P Tomanek (Ed.), Proceedings of SPIE; Photonics, devices, and systems II,
    The International Society for Optical Engineering, pp. 558-564, 2003.

  451. Modal corrector integrated in silicon: possibilities for implementation
    M. Loktev; G.V. Vdovin; P.M. Sarro;
    In A Kohnle; JD Gonglewski (Ed.), Proceedings of SPIE; optics in atmospheric propagation and adaptive systems V,
    The International Society for Optical Engineering, pp. 196-205, 2003.

  452. Technological aspects of a custom CMOS sensor for adaptive optics
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
    In M Hrabovsky; D Sendrakova; P Tomanek (Ed.), Proceeding of SPIE; photonics, devices, and systems II,
    The International Society for Optical Engineering, pp. 31-36, 2003.

  453. Fabrication technology for micromachined spatial light modulators
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In GC Righini (Ed.), Proceedings of SPIE; integrated optical devices: fabrication and testing,
    The International Society for Optical Engineering, pp. 219-226, 2003.

  454. Technological approaches for fabrication of elatomer based spatial light modulators
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In H. Urey (Ed.), Proceedings of SPIE; MOEMS display and imaging systems,
    The International Society for Optical Engineering, pp. 334-341, 2003.

  455. PCR Array on chip - thermal characterization
    V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro; M. Malatek; I.T. Young; G. van DedemWK; M.J. Vellekoop;
    In s.n. (Ed.), IEEE Sensors 2003,
    IEEE, pp. 1045-1048, 2003. CD-rom 50/50 EI/ECTM.

  456. First measurement results with an integrated projection citometer
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In MA Northrup; KF Jensen; DJ Harrison (Ed.), MTAS 2003 Seventh international conference on micro total analysis systems,
    Transducer Research Foundation, pp. 1219-1222, 2003. CD ROM.

  457. Fabrication of a CMOS compatibile pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In s.n. (Ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems,
    IEEE, pp. 502-505, 2003.

  458. Polymide sacrificial layer for an all-dry post-process surface micromachining module
    T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
    In s.n. (Ed.), TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems,
    IEEE, pp. 813-816, 2003.

  459. Liquid crystal wavefront corrector with modal response
    M. Loktev; G.V. Vdovin; P.M. Sarro;
    In s.n. (Ed.), Eurosensors XVII The 17th European conference on solid-state transducers,
    University of Minho, pp. 352-353, 2003.

  460. Membrane porous-SiC humidity sensor with aluminium electrodes
    E. Connolly; H.M.T. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), E-MRS 2003 20th Anniversary European Materials Research Society Spring meeting,
    s.n., pp. 1-2, 2003.

  461. Novel flow-cell to create sheath flows with adaptable sample flow dimensions
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In G Fiedler; D Donhoffer (Ed.), Beiträge der Informationstagung Mikroelektronik 2003,
    Osterreichischer Verband für Elektrotechnik, pp. 1-5, 2003.

  462. Technology of spatial light modulator based on viscoelastic layers
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In M Hrabovsky; D Sendrakova; P Tomanek (Ed.), Proceeding of SPIE; Photonics, devices, and systems II,
    The International Society for Optical Engineering, pp. 477-482, 2003.

  463. Fabrication of a CMOS compatible vertical accelerometer
    L. Pakula; H. Yang; T.M.H. Pham; P.M. Sarro; P.J. French;
    In s.n. (Ed.), EUROSENSORS 17th European conference on solid-state transducers,
    University of Minho, pp. 635-638, 2003.

  464. Relative Humidity sensors using porous SiC membranes and Al electrodes
    E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
    In Proc. Eurosensors XVII,
    University of Minho, Guimaraes, Portugal, pp. 621-622, Sep. 24 2003. ISBN 90-73461-39-1.
    document

  465. Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2003. niet eerder opgenomen; 1017989; niet eerder opgenomen.

  466. Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
    E.J. Connolly; G.M. O Halloran; H.T.M. Pham; P.M. Sarro; P.J. French;
    Sensors and Actuators A,
    Volume 99, Issue 1-2, pp. 25-30, Apr. 2002.

  467. Technology of reflective membranes for spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    Sensors and Actuators A,
    Volume 97-98, pp. 468-472, Apr. 2002.

  468. Silicon thin-film UV filter for NADH fluorescence analysis
    V.P. Iordanov; G.W. Lubking; R. R. IshiharaF. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators A,
    Volume 97-98, pp. 161-166, Apr. 2002.

  469. X-ray spectroscopy with a Multi-anode Sawtooth Silicon Drift Detector: the diffusion process
    J. Sonsky; R.W.Hollander; P.M. Sarro; C.W.E. van Eijk;
    Nucl. Instr. and Meth. A,
    Volume 477, pp. 93-98, 2002. ISSN 0168-9002.

  470. Polyimide sacrificial layer and novel materials for post-processing surface micromachining
    A. Bagolini; L. Pakula; T.L.M. Scholtes; H.T.M. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, Issue 4, pp. 385-389, Jul. 2002. ISSN 0960-1317.

  471. Through-wafer copper electroplating for 3-D interconnects
    N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, Issue 4, pp. 395-399, Jul. 2002. ISSN 0960-1317.

  472. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Craciun; M.A. Blauw; E. van der Drift; P.M. Sarro; P.J. French;
    J. of Micromechanics Microengineering,
    Volume 12, Issue 4, pp. 390-394, Jul. 2002.

  473. Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection
    A. Berthold; F. Laugere; H. Schellevis; C.R. de Boer; M. Laros; R.M. Guijt; P.M. Sarro; M.J. Vellekoop;
    Electrophoresis,
    Volume 23, Issue 20, pp. 3511-3519, Oct. 2002. ISSN 0173-0835.

  474. Technological aspects of a custom CMOS sensor for adaptive optics
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
    Proceedings of SPIE- International Society for Optical Engineering,
    pp. 31-36, 2002.

  475. Through-wafer copper electroplating for three-dimensional interconnects
    N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 395-399, 2002.

  476. Polyimide sacrificial layer and novel materials for post-processing surface micromachining
    A. Bagolini; L. Pakula; T.L.M. Scholtes; T.M.H. Pham; P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 385-389, 2002.

  477. Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
    E. Connolly; G.M. O'Halloran; T.M.H. Pham; P.M. Sarro; P.J. French;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 99, pp. 25-30, 2002.

  478. Technology of reflective manbranes for spatial light modulators
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 468-472, 2002.

  479. Technology of spatial light modulators based on viscoelastic layers
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    Proceedings of SPIE- International Society for Optical Engineering,
    pp. 466-471, 2002.

  480. Silicon thin-film UV filter for NADH fluorescence analysis
    V.P. Iordanov; G.W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 161-166, 2002.

  481. Through-wafer copper electroplating for three-dimensional interconnects
    N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 395-399, 2002.

  482. Fabrication of a glass-implemented microcapillary elettrophoresis device integrated contactless conductivity
    A. Berthold; F.P.J. Laugere; H. Schellevis; C.R. de Boer; M. Laros; R.M. van Guijt; P.M. Sarro; M.J. Vellekoop;
    Electrophoresis,
    Volume 23, Issue 21, pp. 3511-3519, 2002. wet 6.

  483. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
    Journal of Micromechanics and Microengineering,
    Volume 12, pp. 390-394, 2002.

  484. Integrated Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
    Delft University of Technology, Faculty ITS, , 2002.

  485. Technology for integrated spatial light modulators based on reflective membranes
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    JD Gonglewski; MA Vorontsov; MT Gruneisen (Ed.);
    SPIE, , pp. 21-28, 2002.

  486. Agile beams and micromachined membrane deformable mirrors
    G. Vdovin; P.M. Sarro;
    In The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002),
    pp. 576-577, 2002. ISBN 0-7803-7500-9.

  487. Self-adjustment of optical interconnects using in-package MEMS-based actuators
    K.J. van Nielen; W.J. Venstra; M. Tichem; M. Laros; P.M. Sarro; B. Karpuschewski;
    In J. Saneistr; P. Ripka (Ed.), Proceedings Eurosensors XVI,
    Prague, Czech Republic, Czech Technical University, pp. 794-797, Sep. 2002.

  488. Substrate Options and Add-On Process Modules for Monolithic RF Silicon Technology
    J.N. Burghartz; M. Bartek; B. Rejaei; P.M. Sarro; A. Polyakov; N.P. Pham; E. Boullaard; K.T. Ng;
    In Proc. 2002 Bipolar/BiCMOS Circuits and Technology Meeting (BCTM 2002),
    Monterey, CA, pp. 17-23, Sept. 2002. ISBN 0-7803-7562-9.

  489. Development of a silicon-based modal liquid crystal wavefront corrector
    M.Y. Loktev; G.V. Vdovin; P.M. Sarro;
    In Proc. SPIE: Photonics, Devices, and Sytems II,
    Prague, Czech Republic, pp. 558-564, May 2002.

  490. Technological aspects of a custom CMOS sensor for adaptive optics
    D. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
    In Proc. SPIE: Photonics, Devices, and Sytems II,
    Prague, Czech Republic, pp. 31-36, May 2002.

  491. Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
    G.V. Vdovin; O. Akhzar Mehr; P.M. Sarro; D.W. de Lima Monteiro; M.Y. Loktev;
    In Proc. SPIE: MEMS/MOEMS: Advances Photonic Communications, Sensing, Metrology, Packaging and Assembly,
    Brugge, Belgium, pp. 107-111, Oct. 2002.

  492. Modal corrector integrated in silicon: possibilities for implementation
    M.Y. Loktev; G.V. Vdovin; P.M. Sarro;
    In Proc. SPIE: Optics Atmospheric Propagation and Adaptive Systems V,
    Agia Pelagia, Greece, pp. 196-205, Sept. 2002.

  493. Fabrication technology for micromachined spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SPIE: Integrated Optical Devices: Fabrication and Testing,
    Brugge, Belgium, pp. 219-226, Oct. 2002.

  494. Low-cost technological approaches to micromachined spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applications IV,
    Seattle, WA, USA, pp. 264-271, Jul. 2002.

  495. CMOS-compatible wells for integrated high-speed screening arrays
    B.L. Gray; R. Moerman; L.R. van den Doel; H.R. Dietrich; V.P. Iordanov; N.P. Pham; L.M. Sarro; A. Bossche; M.J. Vellekoop;
    In Proc. SPIE: Biomedical Nanotechnology Architectures and Applications,
    pp. 103-108, Jan. 2002.

  496. Technology for integrated spatial light modulators based on reflective membranes
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In J.D. Gonglewski; M.A. Vorontsov; M.T. Gruneisen (Ed.), Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applic. III,
    pp. 21-28, Feb. 2002.

  497. Customized CMOS wavefront sensor
    D.W. de Lima Monteiro; G.V. Vdovin; J.G. Rocha; V.P. Iordanov; M.Y. Loktev; P.M. Sarro;
    In J.D. Gonglewski; M.A. Vorontsov; M.T. Gruneisen (Ed.), Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applic. III,
    pp. 88-99, Feb. 2002.

  498. Technology for Integrated Spatial Light Modulators based on Viscoelastic Layers
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 672-675, Nov. 2002. ISBN 90-73461-33-2.

  499. Electrical and Optical Properties of PECVD SiC Thin Films for Surface Micromachined Devices
    H.T.M. Pham; T. Akkaya; C. de Boer; C.C.G. P. Visser.M. Sarro;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 662-666, Nov. 2002. ISBN 90-73461-33-2.

  500. Filtered Photodiode Arrays for NADH Fluorescence Analysis
    V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M. Vellekoop;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 627-630, Nov. 2002. ISBN 90-73461-33-2.

  501. Pressure Sensor for Automotive Applications
    L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 649-652, Nov. 2002. ISBN 90-73461-33-2.

  502. Fluorescence Measurements in Thick-Film Polymer Wells
    B.L. Gray; V.P. Iordanov; R. van den Doel; P.M. Sarro; A. Bossche;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 622-626, Nov. 2002. ISBN 90-73461-33-2.

  503. Relative Humidity Sensors based on Porous Polysilicon and Porous Silicon Carbide
    E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
    In Proc. SeSens 2002,
    Veldhoven, The Netherlands, STW, pp. 603-607, Nov. 2002. ISBN 90-73461-33-2.

  504. Photoresist wells for integrated high-speed screening arrays
    B.L. Gray; R. Moerman; L.R. van den Doel; V.P. Iordanov; N.P. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
    In Proc. SESENS 2002,
    Veldhoven, The Netherlands, pp. 791-794, Nov. 2002. ISBN 90-73461-28-6.

  505. Spin, Spray and Eloctroplating of Photoresist for MEMS Structures: A Comparison
    N.P. Pham; E. Boellaard; P.M. Sarro; J.N. Burghartz;
    In Proc. SAFE 2002,
    Veldhoven, The Netherlands, STW, pp. 81-86, Nov. 2002. ISBN 90-73461-33-2.

  506. Thinning of Micromachined Wafers for High-Density, Through-Wafer Interconnects
    L. Wang; C.C.G. Visser; C. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
    In Proc. SAFE 2002,
    Veldhoven, The Netherlands, STW, pp. 121-126, Nov. 2002. ISBN 90-73461-33-2.

  507. Pressure Sensor for Harsh Environments
    L.S. Pakula; H .Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
    In Proc. MME 2002,
    Sinaia, Romania, pp. 295-298, Oct. 2002. ISBN 973-0-02472-3.

  508. Planar Antiresonant Reflecting Optical Waveguides as Sensors for Liquid Substances
    R. Bernini; S. Campopiano; L. Zeni; C. de Boer; P.M. Sarro;
    In Proc. IEEE Sensors 2002,
    Orlando, Florida, USA, pp. 13.4/1-13.4/4, Jun. 2002. ISBN 0-7803-7455-X.

  509. Through-Wafer Copper Electroplating for RF Silicon Technology
    N.T. Nguyen; K. Ng; E. Boellaard; N.P. Pham; G. Craciun; P.M. Sarro; J.N. Burghartz;
    In Proc. ESSDERC 2002,
    Firenze, Italy, University of Bologna, pp. 255-258, Sep. 2002. ISBN 88-900847-8-2.

  510. Fabrication of Crystalline Membranes Oriented in the (111) plane in a (100) Silicon Wafer
    W.J. Venstra; P.M. Sarro;
    In Micro- and NanoEngineering 2002 International Conference,
    Lugano, Switzerland, pp. 226-227, Sep. 2002.

  511. CMOS-Compatible Optical Filter for High-Throughput Enzymatic-Analysis Devices
    V.P. Iordanov; R. Ishihara; P.M. Sarro; J. Bastemeijer; A. Bossche; M.J. Vellekoop;
    In IEEE Sensors 2002,
    Hyatt Orlando, Orlando, Florida, USA, pp. 9.6/1-9.6/4, Jun. 2002. ISBN 0-7803-7455-X.

  512. Electronic baseline-suppression for liquid conductivity detection in a capillary electrophoresis microchip
    F. Laugere; J. Bastemeijer; G. van der Steen; M.J. Vellekoop; P.M. Sarro; A. Bossche;
    In IEEE Sensors 2002,
    Hyatt Orlando, Orlando, Florida, USA, pp. 20.3/1-20.3/4, Jun. 2002. ISBN 0-7803-7455-X.

  513. Electrical characteristics of plasma enhanced chemical vapor deposition silicon carbide thin films
    H.T.M. Pham; T. Akkaya; C.R. de Boer; P.M. Sarro;
    In Fourth European Conference on Silicon Carbide and Related Materials (ECSCRM 2002),
    Linkoping, Sweden, Sep. 2002.

  514. Relative-Humidity Sensors Based on Porous Polysilicon and Porous Silicon Carbide
    E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
    In IEEE Sensors 2002,
    Hyatt Orlando, Orlando, Florida, USA, pp. 12.4/1-12.4/4, Jun. 2002. ISBN 0-7803-7455-X.

  515. Self-adjustment of optical interconnects using in-package MEMS-based actuators
    K.J. van Nielen; W.J. Venstra; M. M. Tichem. Laros; P.M. Sarro; B. Karpuschewski;
    In Eurosensors XVI - Part 2,
    Prague, Czech Republic, Czech Technical University, pp. 457-458, Sep. 2002. ISBN 80-01-02576-4.

  516. Technology for integrated spatial light modulators based on reflective membranes
    S. Sakarya; P.M. Sarro; G.V. Vdovin;
    In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics for industry and medicine,
    s.n., pp. 107-114, 2002.

  517. In-situ doped PECVD SiC for surface micromachined devices
    C.R. de Boer; L. Pakula; P.M. Sarro; T.M.H. Pham;
    In J Saneistr; P Ripka (Ed.), Eurosensors XVI 16th European Conference on Solid-State Transducers,
    Czech Technical University, pp. 232-235, 2002.

  518. Micromachined spatial light modulators based on viscoalastic layers
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In Xiamen University Press, pp. 625-628, 2002.

  519. Micromachined membrane deformable mirrors for laser applications
    G.V. Vdovin; P.M. Sarro; V. Kiyko;
    In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics for industry and medicine,
    s.n., pp. 35-48, 2002.

  520. Integrated Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; A. Vilaca; G.V. Vdovin; M. Loktev; P.M. Sarro;
    In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics foor industry and medicine,
    s.n., pp. 179-183, 2002.

  521. Technology for integrated spatial light modulators based on viscoelastic layers
    S. Sakarya; G.V. Vdovin; P.M. Sarro;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 672-675, 2002.

  522. Filtered photodiode arrays for NADH fluorescence analysis
    V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M.J. Vellekoop;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 627-630, 2002.

  523. Fluorescence measurements in thick-film polymer wells
    B.L. Gray; V.P. Iordanov; P.M. Sarro; A. Bossche;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 622-626, 2002.

  524. Relative humidity sensors based on porous polysilicon and porous silicon carbide
    E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
    In Proceedings of SeSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 603-607, 2002.

  525. Pressure sensor for automotive applications
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In Proceedings of SenSens 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 649-652, 2002.

  526. Thinning of micromachined wafers for high-density, through-wafer interconnects
    L. Wang; C.C.G. Visser; C.R. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
    In Proceedings of SAFE 2002,
    STW Stichting voor de Technische Wetenschappen, pp. 121-126, 2002.

  527. Separation and detection of organic acids in a CE microchip with contactless four-electrode conductivity detection
    F.P.J. Laugere; G. van der Steen; J. Bastemeijer; R.M. van Guijt; P.M. Sarro; M.J. Vellekoop; A. Bossche;
    In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002: proceedings of the µTAS 2002 symposium, held in Nara, Japan, 3-7 November 2002,
    Kluwer Academic Publishers, pp. 491-493, 2002.

  528. 9.6: CMOS compatible optical filter for high-throughput enzymatic analysis devices
    V.P. Iordanov; R. Ishihara; P.M. Sarro; J. Bastemeijer; A. Bossche; M.J. Vellekoop;
    In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors. Vol. I,
    IEEE, pp. 225-228, 2002.

  529. 12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide
    E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
    In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors,
    IEEE, pp. 499-502, 2002.

  530. 20.3: Electronic baseline-suppression for liquid conductivity detection in a capillary electrophoresis microchip
    F.P.J. Laugere; J. Bastemeijer; G. van der Steen; M.J. Vellekoop; P.M. Sarro; A. Bossche;
    In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors. Vol. 1,
    IEEE, pp. 450-453, 2002.

  531. Pressure sensor for harsh environments
    L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
    In MME'02 micromechanics Europe,
    Nat. Inst. for Res. and Development in Microtechnoplogies, pp. 295-298, 2002.

  532. SU-8 structures for integrated high-speed screening
    B.L. Gray; V.P. Iordanov; P.M. Sarro; A. Bossche;
    In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium,
    Kluwer Academic Publishes, pp. 464-466, 2002.

  533. Virtual flow channel: a novel micro-fluidics system with orthogonal, dynamic control of sample flow dimensions
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002: proceedings of the µTAS 2002 symposium, held in Nara, Japan,
    Kluwer Academic Publishers, pp. 103-105, 2002.

  534. Influence of deposition parameters and temperature on stress and strain of In Situ doped PECVD silicon carbide
    T.M.H. Pham; C.R. de Boer; L. Pakula; P.M. Sarro;
    In S Yoshida (Ed.), ICSCRM2001 Proceedings of the International Conference on Silicon Carbide and Related Materials,
    Trans Tech Publications, pp. 759-762, 2002.

  535. Through-wafer copper electroplating for RF silicon technology
    N.T. Nguyen; T.K. Ng; E. Boellaard; N.P. Pham; G. Craciun; P.M. Sarro; J.N. Burghartz;
    In ESSDERC 2002 32nd European Solid-State Device Research Conference,
    University of Bologna, pp. 255-258, 2002.

  536. CMOS-compatible wells for integrated high-speed screening arrays
    B.L. Gray; R. Moerman; L.R. van den Doel; H.R.C. Dietrich; V.P. Iordanov; N.P. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
    In DJ Bornhop; DA Dunn; RP Mariella; CJ Murphy; DV Nicolau; Shuming Nie; M Palmer; R Raghavachari (Ed.), Biomedical Nanotechnology Architectures and Applications, Proceedings,
    SPIE, pp. 103-108, 2002. ISSN 0277-786X, phpub 31.

  537. Integrated Coulter counter with non-caxial sheath-flow and dynamic aperture control
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In Eurosensors 2002,
    Czech Technical University, pp. 1194-1197, 2002.

  538. In-situ doped PECVD SiC for surface micromachined devices
    H.T.M. Pham; C.R. de Boer; L.S. Pakula; P.M. Sarro;
    In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
    Prague, Czech Republic, Czech Technical University, pp. 119-120, Sep. 2002. ISBN 80-01-02576-4.

  539. Integrated Coulter counter with non-coaxial sheath-flow and dynamic aperture control
    J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
    Prague, Czech Republic, Czech Technical University, pp. 699-700, Sep. 2002. ISBN 80-01-02576-4.

  540. Direct spray coating of photoresist - a new method for patterning 3-D structures
    N.P. Pham; T.L.M. Scholtes; R. Klerks; E. Boellaard; P.M. Sarro; J.N. Burghartz;
    In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
    Prague, Czech Republic, Czech Technical University, pp. 89-90, Sep. 2002. ISBN 80-01-02576-4.

  541. Realization of High Aspect Ratio Interconnections Based on Macroporous Silicon
    A. Nichelatti; T. Nguyen; P.M. Sarro;
    In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
    Prague, Czech Republic, Czech Technical University, pp. 97-98, Sep. 2002. ISBN 80-01-02576-4.

  542. Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2002. niet eerder gehonnoreerd; WO 02/090945 A2; niet eerder gehonnoreerd.

  543. Thin photodiodes for a neutron scintillator silicon-well detector
    C.P. Allier; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro; M. de Boer; J.B. Czirr; J.P. Chaminade; C. Fouassier;
    IEEE Transactions on Nuclear Science,
    Volume 48, Issue 4, pp. 1154-1157, Aug. 2001.

  544. Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers
    J. Sonsky; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro; V. Kouchpil;
    IEEE Trans. on Nuclear Science,
    Volume 48, pp. 258-261, 2001. ISSN 0018-9499.

  545. IC-compatible two-level bulk micromachining process module for RF silicon technology
    N.P. Pham; P.M. Sarro; K.T. Ng; J.N. Burghartz;
    IEEE Tr. Electron Devices,
    Volume 48, Issue 8, pp. 1756-1764, Aug. 2001.

  546. Capillary electrophoresis with on-chip four-electrode capacitively coupeled conductivity detection for application in bioanalysis
    R.M. van Guijt; E. Baltussen; G. van der Steen; H. Frank; H. Billiet; T.G.M. Schalkhammer; F.P.J. Laugere; M.J. Vellekoop; A. Berthold; P.M. Sarro; G. van Dedem;
    Electrophoresis,
    Volume 22, pp. 2537-2541, 2001.

  547. Capillary electrophoresis with on-chip four-electrode capacitively coupled conductivity for application in bioanalysis.
    R.M. van Guijt; H.A. Baltussen; G. van der Steen; H. Frank; H.A. Billiet; T.G.M. Schalkhammer; F.P.J. Laugere; M.J. Vellekoop; A. Berthold; P.M. Sarro; G. van DedemWK;
    Electrophoresis,
    Volume 22, Issue 12, pp. 2537-2541, 2001.

  548. Thermophysical characterisation of PolySi0,7Ce0,3 for use in thermoelectric devices
    D.D.L. Wijngaards; S.H. Kong; P.M. Sarro; R.F. Wolffenbuttel;
    {E Obermeier} (Ed.);
    Springer, , pp. 1010-1013, 2001.

  549. Si based thin-film filter with high visible-over-UV selectivity for biochemical fluorescence analysis
    V.P. Jordanov; W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    {E Obermeier} (Ed.);
    Springer, , pp. 1-4, 2001.

  550. Polycrystalline silicon thin-film on glass as a UV filter for NADH fluorescence measuremants
    V.P. Jordanov; R. Ishihara; P.M. Sarro; M.J. Vellekoop; R.F. Wolffenbuttel; J. Bastemeijer; A. Bossche;
    STW Technology Foundation, , pp. 799-802, 2001.

  551. Integrated high rejection filter for NADH fluorescence measuremnts
    V.P. Jordanov; W. Lubking; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    AMA Service, , pp. 107-111, 2001.

  552. Thermophysical Characterisation of PolySi0.7Ge0.3 for Use in Thermoelectric Devices
    D.D.L. Wijngaards; S.H. Kong; P.M. Sarro; R.F. Wolffenbuttel;
    In The 11th International Conference on Solid-State Sensors and Actuators (Transducers 01),
    Munich, Germany, pp. 1010-1013, Jun. 2001. ISBN 3-540-42150-5.
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  553. Technology of reflective membranes for spatial light modulators
    S. Sakarya; G.Vdovin; P.M. Sarro;
    In The 11th Intern. Conf. on Solid-State Sensors and Actuators (Transducers 01),
    Munich, Germany, pp. 1336-1339, Jun. 2001. ISBN 3-540-42150-5.
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  554. Si Based Thin-Film Filter with High Visible-Over-UV Selectivity for Biochemical Fluorescence Analysis
    V.P. Iordanov; G.W. Lubking; R. R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    In The 11th Intern. Conf. on Solid-State Sensors and Actuators (Transducers 01),
    Munich, Germany, pp. 1182-1185, Jun. 2001. ISBN 3-540-42150-5.

  555. Direct Spray Coating of Photoresist for MEMS applications
    N.P.Pham; T.M.L.Scholtes; R.Klerk; B.Wieder; P.M. Sarro; J.N.Burghartz;
    In Proceedings of the SPIE,
    San Fransisco, USA, pp. 312-319, Oct. 2001. ISBN 0-8194-4285-2.
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  556. Evaluation of In-Situ Doped PECVD SiC Thin Films for Surface Micromachining
    H.T.M. Pham; C.R. de Boer; C. Kwakernaak; W.G. Sloof; P.M. Sarro;
    In Proceedings of SESENS 2001,
    Veldhoven, The Netherlands, pp. 856-860, 2001. ISBN 90-73461-29-4.
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  557. Temperature Optical Sensor based on all silicon Bimodal Waveguide
    G. Coppola; C. R. de Boer; G. Breglio; M. Iodice; A. Irace; P. M. Sarro;
    In Proceedings of SESENS 2001,
    Veldhoven, The Netherlands, pp. 777-782, 2001. ISBN 90-73461-29-4.
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  558. Dry Etching Release of Structures in Post-Process Surface Micromachining using Polyimide as a Sacrificial Layer
    A. Bagolini; H.T.M. Pham; T.L.M. Scholtes; L. Pakula; P.M. Sarro;
    In Proceedings of SESENS 2001,
    Veldhoven, The Netherlands, pp. 769-772, 2001. ISBN 90-73461-29-4.
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  559. Optoelectronic Modulator Realized by a Fully Compatible Bipolar Process
    G. Coppola; C.R. de Boer; G. Breglio; A. Irace; P. M. Sarro;
    In Proceedings of SAFE 2001,
    Veldhoven, The Netherlands, pp. 24-29, 2001. ISBN 90-73461-29-4.

  560. Wafer Thinning for Highly Dense 3D Electronic Structures
    L. Wang; P.M. Sarro;
    In Proceedings of SAFE 2001,
    Veldhoven, The Netherlands, pp. 214-219, 2001. ISBN 90-73461-29-4.
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  561. Through-wafer Copper plug formation for 3-dimensional ICs
    T.Nguyen Nhu; E Boellard; N.P.Pham; V.G.Kutchukov; G.Craciun; P.M. Sarro;
    In Proceedings of SAFE 2001,
    Veldhoven, The Netherlands, pp. 141-144, 2001. ISBN 90-73461-29-4.

  562. Spray coating of AZ4562 photoresist for MEMS applications
    N.P.Pham; P.M. Sarro; J.N.Burghartz;
    In Proceedings of SAFE 2001,
    Veldhoven, The Netherlands, 2001. ISBN 90-73461-28-6.

  563. Through-wafer copper electroplating for 3-D interconnects
    N.T.Nguyen; E. Boellaard; N.P.Pham; G.Craciun; V.G.Kutchoukov; P.M. Sarro;
    In M.Hill; B.Lane (Ed.), Proceedings MME 2001,
    Cork-Ireland, pp. 74-77, Sept. 2001.

  564. Flexible silicon micromachined structures for use in integrated spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SeSens 2001,
    Veldhoven, The Netherlands, STW, pp. 861-864, Nov., 2001 2001. ISBN 90-73461-?.
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  565. Technology for Spatial Light Modulators based on Reflective Silicon Structures
    S. Sakarya; G.Vdovin; P.M. Sarro;
    In Proc. Sensor Technology Conference,
    The Netherlands, pp. 25-30, 2001.
    document

  566. Micromachined Si-well scintillator pixel sensors for thermal neutron detection
    C.P. Allier; R.W. Hollander; C.W.E. van Eijk; M. de Boer; J.G.E. Gardeniers; P.M. Sarro; J.B. Czirr;
    In M. Elwenspoek (Ed.), Proc. Sensor Technology Conf,
    Enschede, The Netherlands, pp. 191-196, May 2001. ISBN 0-7923-7012-0.
    document

  567. Integrated high rejection filter for NADH fluorescence measurements
    V.P. Iordanov; G.W. Lubking; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    In Proc. Sensor2001,
    Nurnberg, Germany, May 2001.

  568. Polyimide sacrificial layer for post-processing surface micromachining
    A. Bagolini; T.L.M. Scholtes; H.T.M. Pham; L. Pakula; P.M. Sarro;
    In M.Hill; B.Lane (Ed.), Proc. MME 2001,
    Cork, Ireland, pp. 58-61, Sept. 2001.

  569. A Micromachining Post-Process Module with Pattern Transfer in Deep Cavities for RF Silicon Technology
    N.P. Pham; P.M. Sarro; K. Ng; J.N. Burghartz;
    In Proc. MEMS 2001,
    Interlaken, Switzerland, pp. 345-348, Jan. 2001. ISBN 0-7803-5998-4.

  570. Influence of deposition parameters and temperature on stress and strain of in-situ doped PECVD Silicon carbide
    H.T.M. Pham; C.R. de Boer; L. Pakula; P.M. Sarro;
    In S. Yoshida et al. (Ed.), Proc. International Conference on Silicon Carbide and Related Materials 2001 (ICSCRM2001),
    Tsukuba, Japan, pp. 759-762, Oct. 2001. ISBN 0-87849-X.

  571. Integrated Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; A. Vilaca; G. Vdovin; M. Loktev; P.M. Sarro;
    In Proc. 3rd Adaptive optics conference for Industry and Medicine,
    Albuquerque, USA, pp. 179-183, 2001.

  572. Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining
    H.T.M. Pham; C.R. de Boer; C. Kwakernaak; W.G. Sloof; P.M. Sarro;
    In Proc of SPIE Micromachining and Microfabrication,
    San Francisco, CA, pp. 272-279, 2001. ISBN 0-8194-4285-2.

  573. Effect of annealing on mechanical and optical properties of in-situ doped sic thin films
    H.T.M. Pham; C.R. de Boer; C.C.G. P. Visser.M. Sarro;
    In Proc of SPIE International Symposium on Optoelectronics and Microelectronics,
    Nanjing, China, pp. 59-66, 2001. ISBN 0-8194-4340-9.

  574. Integrated RF passive components - discrete vs. distributed
    J.N. Burghartz; K.T. Ng; N.P. Pham; B. Rejaei; P.M. Sarro;
    In Device Research Conference,
    pp. 113-114, 2001.
    document

  575. Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems
    F.P.J. Laugere; A. Berthold; W. Lubking; J. Bastemeijer; R.M. van Guijt; E. Baltussen; P.M. Sarro; M.J. Vellekoop;
    In {E Obermeier} (Ed.), Transducers'01: technical papers. Vol.2,
    Springer, pp. 1178-1181, 2001.

  576. Technology of reflective membranes for spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {E Obermeier} (Ed.), Tansducers'01: technical papers,
    Springer, pp. 1336-1339, 2001.

  577. Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer
    A. Bagolini; H.M.T. Pham; T.L.M. Scholtes; L. Pakula; P.M. Sarro;
    In SAFE2001: proceedings,
    STW Technology Foundation, pp. 769-772, 2001.

  578. Photoresist wells for integrated high-speed screening arrays
    B.L. Gray; R. Moerman; L.R. van den Doel; V.P. Jordanov; P.N. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
    In SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 791-794, 2001.

  579. Flexible silicon micromachined structures for use in integrated spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 861-864, 2001.

  580. New post-processing modules
    L. Pakula; H.M.T. Pham; C.R. de Boer; P.M. Sarro; P.J. French;
    In SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
    STW Technology Foundation, pp. 848-851, 2001.

  581. Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic
    E. Connolly; G.M.O. O. Halloran; H.M.T. Pham; P.M. Sarro; P.J. French;
    In SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology,
    STW Technology Foundation, pp. 773-776, 2001.

  582. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
    G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
    In M Hill (Ed.), Proceedings of the 12th Micromechanics Europe Workshop MME.,
    pp. 62-65, 2001.

  583. Technology for spatial light modulators based on reflective silicon structures
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {M Elwenspoek} (Ed.), Proceedings,
    Kluwer, pp. 25-30, 2001.

  584. Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide
    E. Connolly; G.M.O. O. Halloran; P.M. Sarro; P.J. French;
    In {M Elwenspoek} (Ed.), Proceedings,
    Kluwer, pp. 83-88, 2001.

  585. Measurement system for biochemical analysis based on capillary electrophoresis and microscale conductivity detection
    F.P.J. Laugere; A. Berthold; R.M. van Guijt; E. Baltussen; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
    In {M Elwenspoek} (Ed.), Proceedings,
    Kluwer, pp. 1-6, 2001.

  586. Polyimide sacrificial layer for postprocessing surface micromachining
    A. Bagolini; T.L.M. Scholtes; H.M.T. Pham; L. Pakula; P.M. Sarro;
    In MME 2001,
    s.n., pp. 58-61, 2001.

  587. Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    G. Cracium; M.A. Blauw; P.M. Sarro; P.J. French;
    In MMe 2001:workshop,
    s.n., pp. 62-65, 2001.

  588. Novel material for low temperature post-processing micromachining
    L. Pakula; H.M.T. Pham; P.M. Sarro; P.J. French;
    In MME 2001: workshop,
    s.n., pp. 70-73, 2001.

  589. Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems.
    F.P.J. Laugere; A. Berthold; G.W. Lubking; J. Bastemeijer; R.M. van Guijt; H.A. Baltussen; P.M. Sarro; M.J. Vellekoop;
    In Digest of techn. papers of tranducers '01,
    pp. 1178-1181, 2001.

  590. Silicon carbide as a new MEMS technology
    P.M. Sarro;
    Sensors and Actuators A,
    Volume 82, pp. 210-218, 2000. ISSN 0924-4247.

  591. Effect of Surfactant on Surface Quality of Silicon Microstructures Etched in Saturated TMAHW Solutions
    P.M. Sarro; D. Brida; W. van der Vlist; S. Brida;
    Sensors and Actuators A,
    Volume 85, pp. 340-345, 2000. ISSN 0924-4247.

  592. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
    A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators A,
    Volume 82, Issue 1-3, pp. 224-228, 2000.

  593. Design and fabrication of infrared detector arrays for satellite attitude control
    A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; E.J.G. Goudena; M. Laros; P.M. Sarro; C.A. Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
    Sensors and Actuators A,
    Volume 83, pp. 101-108, 2000.

  594. Micro-CAT with redundant electrodes (CATER)
    F.D. van den Berg; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
    Nuclear Instruments and Methods Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
    Volume 453, Issue 3, pp. 530-535, Oct. 2000.

  595. Galvanic etching for sensor fabrication
    Ashruf C.M.A.; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    Journal of micromechanics and microengineering,
    Volume 10, pp. 505-515, 2000. ISSN 0960-1317.

  596. Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells
    C.P. Allier; R.W. Hollander; P.M. Sarro; M. de Boer; C.W.E. van Eijk;
    IEEE Trans. on Nuclear Science,
    Volume 47, Issue 4, pp. 1303-1306, 2000.

  597. X-ray Detection With Multi-anode Sawtooth Silicon Drift Detectors
    J. Sonsky; J. Huizenga; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
    IEEE Trans. Nucl. Sci.,
    Volume 47, Issue 3, pp. 750-755, 2000. ISSN 0018-9499.

  598. Silicon drift detector with reduced lateral diffusion: experimental results
    J. Sonsky; H. Valk; J. Huizenga; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
    IEEE Nucl. Instrum. and Meth. Phys. Res. A,
    Volume 439, Issue 2-3, pp. 513-518, 2000.

  599. Scintillation light read-out by thin photodiodes in silicon wells
    C.P. Allier; R.W. Hollander; P.M. Sarro; C.W.E. van Eijk;
    IEEE Nuclear Instruments & Methods Physics Research A,
    Volume 442, pp. 255-258, 2000.

  600. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
    A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 82, Issue 1-3, pp. 224-238, 2000.

  601. Galvanic etching for sensor fabrication
    C.M.A. Ashruf; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    Journal of Micromechanics and Microengineering,
    Volume 10, pp. 505-515, 2000.

  602. A Micromachining Post-Process Module for RF Silicon Technology
    N.P. Pham; K.T. Ng; M. Bartek; P. M. Sarro; B. Rejaei; J.N. Burghartz;
    In Proc. IEDM 2000,
    San Francisco, USA, pp. 481-484, Dec. 2000. ISBN 0-7803-6438-4.

  603. Low-loss small cross-section silicon-on-silicon rib waveguides with high-confining ion-implanted lower cladding
    M. Iodice; G. Cocorullo; F. G. Della Corte; T. Polichetti; I. Rendina; P. M. Sarro;
    In SPIE Photonics West Conf.,
    San Jose, Ca, USA, pp. 120-126, Jan. 2000.

  604. Technology of reflective micromachined pixelated membranes for use in spatial light modulators
    Sakarya S.; G. Vdovin; P.M. Sarro;
    In SeSens 2000,
    pp. 689-691, Dec. 2000. ISBN 90-73461-24-3.

  605. Infrared Thermal Imaging of SiNx membranes
    A. Irace; G. Breglio; P. Spirito; P.M. Sarro;
    In SPIE Photonics West Conf.,
    San Diego, USA, Jul. 2000.

  606. Fluorescence analysis in subnanoliter reactor wells: evaluation of different possible illumination configurations
    Iordanov V.; W. Lubking; P.M. Sarro; M.J. Vellekoop;
    In SeSens 2000,
    pp. 643-645, Dec. 2000.

  607. Integrated shape sensor for particles and cells based on optical projection
    J.H. Nieuwenhuis; G.W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In Proc. XIV Eurosensors Conf.,
    Copenhagen, Denmark, pp. 891-894, Aug. 2000.

  608. Micromachined membrane deformable mirrors for space applications
    G. Vdovin; P.M. Sarro; S. Manhart; Z. Sodnik;
    In Proc. XIV Eurosensors Conf.,
    Copenhagen, Denmark, pp. 559-560, Aug. 2000.

  609. Multisensing in Subnanoliters High-Speed Screning (HSS) Arrays
    M.J. Vellekoop; K.T. Hjelt; G.W. Lubking; J. Bastermeijer; P.M. Sarro; et al;
    In Proc. XIV Eurosensors Conf.,
    Copenhagen, Denmark, pp. 39-42, Aug. 2000. ISBN 87-89935-50-0.

  610. Reflective 2D pixelated membranes for micromachined spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. XIV Eurosensors Conf.,
    Copenhagen, Denmark, pp. 333-336, Aug. 2000. ISBN 87-89935-50-0.

  611. Two-step glass-etching for microfluidic devices
    A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In Proc. SeSens 2000 workshop,
    Veldhoven, pp. 613-616, Dec. 2000.

  612. A novel micromachining process using pattern transfer over large topography for RF components
    N.P. Pham; P.M. Sarro; K.T. Ng; R. Behzad; J.N. Burghartz;
    In Proc. SAFE,
    Veldhoven, pp. 125-128, 2000. ISBN 90-73461-24-3.

  613. A Sub-Surface Metallization Post-Process IC Module for RF Technology
    K.T. Ng; N.P. Pham; B. Rejaei; P.M. Sarro; J.N. Burghartz;
    In Proc. of IEEE BCTM,
    Minneapolis, pp. 195-198, Sept. 25-27 2000. ISBN 0-7803-6384-1.

  614. Sealing RIE etch holes for an epi-micromachined pressure sensor
    J.F.L. Goosen; J.P. Dartee; C. de Boer; P.J. French; P.M. Sarro;
    In Proc. MME,
    Uppsala, Sweden, pp. B8.1-B8.4, Oct. 2000.

  615. Pressure, flow and oxygen sensors on one chip for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In Proc. MEMS,
    Miyazaki, Japan, pp. 537-540, Jan. 2000.

  616. IC-compatible Two-level Bulk Micromachining for RF Silicon Technology
    N.P. Pham; P.M. Sarro; K.T. Ng; J.N. Burghartz;
    In Proc. ESSDERC,
    Cork, Ireland, pp. 204-207, Sept. 2000. ISBN 2-86332-248-6.

  617. IC-compatible process for pattern transfer in deep wells for integration of RF components
    N.P.Pham; P.M. Sarro; J.N.Burghartz;
    In J.M.Karam; Y.Yasitis (Ed.), Proc of SPIE Micromachining and Microfabrication Process Technology VI,
    Santa Clara, pp. 390-397, Sept. 2000. ISSN 0277-786X.

  618. Characterization of a Bullk-Micromachined Post-Process Module for Silicon RF Technology
    K.T. Ng; N.P. Pham; P.M. Sarro; B. Rejaei Salmassi; J.N. Burghartz;
    In IEEE topical meeting on Silicon Monolithic integrated Circuits RF systems,
    pp. 99-102, Apr. 2000.

  619. Anisotropic etching of silicon using a galvanic cell
    P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    In 2nd Workshop on Physical Chemistry of Wet Etching of Silicon,
    Toulouse, pp. 1-8, May 2000.

  620. Integrated shape sensor for particles and cells based on optical projection
    J.H. Nieuwenhuis; W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 669-672, 2000.

  621. Fluorescence analysis in subnanoliter reactor wells: evaluation of different possible illumination configurations
    V.P. Jordanov; W. Lubking; P.M. Sarro; M.J. Vellekoop;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 643-645, 2000.

  622. Technology of reflective micromachined pixelated membranes for use in spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 689-691, 2000.

  623. Two-step glass wet-etching for micro-fluidic devices
    A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
    STW Technology Foundation, pp. 613-616, 2000.

  624. Multisensing in subnanoliter high-speed screening (HSS) arrays.
    M.J. Vellekoop; K.H. Hjelt; G.W. Lubking; J. Bastemeijer; P.M. Sarro; T.G.M. Schalkhammer; D. Criado; V.P. Iordanov;
    In Proceedings of Eurosensors XIV. 14th European conference on solid state transducers. Copenhagen, August 2000.,
    pp. 39-42, 2000.

  625. Pressure, flow and oxygen saturation sensors on one chip for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In MEMS 2000: proceedings,
    IEEE, pp. 537-540, 2000.

  626. Microarrays for biotechnology: The imaging challenge.
    L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; R. Moerman; J. Frank; G. van DedemWK; K.T. Hjelt; L. van VlietJ; I.T. Young;
    In YJ Zhang (Ed.), Proceedings ICIG'2000, First International Conference on Image and Graphics,
    pp. 36-41, 2000. ISSN: 1006-8961.

  627. Integration of a Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In {G.D. Love} (Ed.), Proceedings,
    World Scientific, pp. 215-220, 2000.

  628. Sealing RIE etch holes for an epi-micromachined pressure sensor
    J.F.L. Goosen; J.P. Dartee; C. den Boer; P.J. French; P.M. Sarro;
    In {Y Bäcklund}; {C Hedlund} (Ed.), MME '00,
    s.n., pp. 1-4, 2000.

  629. Multisensing in subnanoliter high-speed screening (HSS) arrays
    M.J. Vellekoop; K.T. Hjelt; W. Lubking; J. Bastemeijer; P.M. Sarro; T.G.M. Schalkhammer; D. Criado; V.P. Jordanov;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
    Mikroelektronik Centret, pp. 39-42, 2000.

  630. Reflective 2D pixelated membranes for micromachined spatial light modules
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
    Mikroelektronik Centret, pp. 333-336, 2000.

  631. Anisotropic etching of silicon using a galvanic cell
    P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
    In Abstracts booklet,
    s.n., pp. 1-8, 2000.

  632. Integrated shape sensor for particles and cells based on optical projection
    J.H. Nieuwenhuis; W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
    Mikroelektronik Centret, pp. 891-894, 2000.

  633. Measurement of thermal conductivity and diffusivity of single and multilayer membranes
    A. Irace; P.M. Sarro;
    Sensors and Actuators,
    Volume A76, Issue 1-3, pp. 323-328, 1999.

  634. Technology and applications of micromachined adaptive mirrors
    G,Vdovin; P.M. Sarro; S.Middelhoek;
    J.Micromech. Microeng.,
    Volume 9, pp. 8-20, 1999. ISSN-0960-1317.

  635. Thin photodiodes for a scintillator-silicon well detector
    C.P. Allier; R.W. Hollander; P.M. Sarro; C.W.E. van Eijk;
    IEEE Trans. on Nuclear Science,
    Volume 46, Issue 6, pp. 1948-1951, 1999.

  636. Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250µm
    J. Sonsky; H.Valk; J.Huizenga; and R.W.Hollander; C.W.E. van Eijk; P.M. Sarro;
    IEEE Trans on Nucl. Science,
    Volume 46, Issue 3, pp. 271-274, 1999. ISSN 0018-9499.

  637. Diminished electron cloud broadening in a silicon drift detector by sawtooth p+ strips
    J. Sonsky; H.Valk; C. P. Allier; R.Hollander; C.W.E. van Eijk; P.M. Sarro;
    IEEE Trans on Nucl. Science,
    Volume 46, Issue 1, pp. 53-58, 1999. ISSN 0018-9499.

  638. Fluorescence detection in (sub-)nanoliter microarrays
    L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; J. Frank; G. van DedemWK; K.T. Hjelt; L. van VlietJ; I.T. Young;
    M Ferrari (Ed.);
    , pp. 28-39, 1999. ISSN: 0277-786X.

  639. Microinjection of beta-D-glucose standards and Amplex Red reagent on microarrays
    R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van DedemWK; K.T. Hjelt; M.J. Vellekoop; P.M. Sarro; I.T. Young;
    M Ferrari (Ed.);
    , pp. 119-128, 1999. ISSN: 0277-786X Proc. SPIE, Progress in Biomedical Optics, Vol: 3606.

  640. One- and two-dimensional CMOS position-sensitive detectors
    D.W. de Lima Monteiro; G.Vdovin; P.M. Sarro;
    In Topical meeting on Adaptive Optics, US Air Force,
    Albuquerque, USA, 1999.

  641. Fluorescence detection in (sub-)nanoliter microarrays
    L.R. van d. Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K. Hjelt; L.J. van Vliet; I.T. Young;
    In Proceedings SPIE,
    San Jose, pp. 28-39, Jan. 1999. ISBN 0-8194-3076-5.

  642. Micro-injection of b-D-glucose standards and Amplex Red reagent on micro-arrays
    R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van Dedem; K.T. Hjelt; M J Vellekoop; P M Sarro; I.T. Young;
    In Proceedings SPIE,
    San Jose, pp. 119-128, Jan. 1999. ISBN 0-8194-3076-5.

  643. Various layouts of analog CMOS optical position-sensitive detectors
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In Proc. SPIE Materials and Electronics for High-Speed and Infrared Detectors,
    Denver, pp. 134-142, Jul. 1999. ISBN 0-8194-3280-6.

  644. Recent progress in technology and applications of membrane micromachined deformable mirrors
    G. Vdovin; P.M. Sarro;
    In Proc. SPIE High-resolution wavefront control: methods, devices and applications,
    Denver, pp. 2-11, Jul. 1999. ISBN 0-8194-3246-6.

  645. Pressure and flow sensor for use in catheters
    J.F.L.Goosen; P.J. French; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication 1999 Symposium,
    Santa Clara, CA, SPIE, pp. 38-45, Sep. 1999. ISBN 0-8194-3473-6.

  646. IC-Compatible Two-level Bulk Micromachining for RF components
    N.P.Pham; K.T. Ng; J.M.W. Laros; T.L.M. Scholtes; P.M. Sarro; J.N. Burghartz;
    In J.P.Veen (Ed.), Proc.SAFE 99,
    Mierlo, The Netherlands, pp. 359-362, 1999. ISBN 90-73461-18-9.

  647. All-Glass Microstructures for Biochemical Analysis Systems
    A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop; G. Pignatel;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 975-978, Sept. 1999.

  648. Thermal Conductivity Measurement on a SiC Thin Film
    A. Irace; P.M. Sarro;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 809-812, Sept. 1999.

  649. Technology of Pixelated Flexible Silicon Structures for Spatial Light Modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 737-740, Sept. 1999.

  650. Piezoelectric ZnO Membrane Resonators for Liquid Property Sensing
    S. Koller; O. Brand; P.M. Sarro; M.J. Vellekoop; H. Baltes;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 677-680, Sept. 1999.

  651. Influence of the Formation Parameters on the Humidity Sensing Characteristics of a Capacitive Humidity Sensor Based on Porous Silicon
    G.M. O'Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 117-120, Sept. 1999. ISBN 90-76699-02-X.

  652. Combination of Epi-Poly and Electropolishing for Fabrication of Accelerometers with Large Substrate Separation Gaps
    P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M. O'Halloran; P.M. Sarro;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 1029-1032, Sept. 1999.

  653. Effect of Surfactant on Surface Quality of Silicon Microstructures Etched in Saturated TMAHW Solutions
    P.M. Sarro; D. Brida; W. van der Vlist; G. Pignatel; S.Brida;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 389-392, Sept. 1999.

  654. Design of Infrared Detector Arrays for Satellite Attitude Control
    A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; B. Goudena; M. Laros; P.M. Sarro; C.A.Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
    In Proc. XIII Eurosensors Conf.,
    The Hague, The Netherlands, pp. 309-316, Sept. 1999.

  655. Micromachined SLM based on pixelated reflective membranes
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In Proc. SPIE Conf. on High-Resolution Wavefront Control,
    Denver, USA, pp. 23-31, Jul. 1999.

  656. Technology of pixelated reflective membranes for spatial light modulators
    S. Sakarya; G.Vdovin; P.M. Sarro;
    In J.P.Veen (Ed.), Proc. SAFE 99,
    Mierlo, The Netherlands, pp. 671-676, 1999. ISBN 90-73461-18-9.

  657. Glass-To-Glass Anodic Bonding
    A.Berthold; L.Nicola; P.M. Sarro; M.J.Vellekoop;
    In J.P.Veen (Ed.), Proc. SAFE 99,
    Mierlo, The Netherlands, pp. 33-36, 1999. ISBN 90-73461-18-9.

  658. Position-sensitive detectors for a wavefront sensor
    D.W. de Lima Monteiro; G.Vdovin; P.M. Sarro;
    In J.P.Veen (Ed.), Proc. SAFE 99,
    Mierlo, The Netherlands, pp. 287-294, 1999. ISBN 90-73461-18-9.

  659. Integration of a Hartmann-Shack wavefront sensor
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In Proc. 2nd International Workshop on Adaptive Optics for Industry and Medicine,
    Durham, World Scientific, pp. 215-220, Jul. 1999. ISBN 981-02-4115-1.

  660. Lamb wave sensor with tensile ZnO Liquid Property Sensing
    S. Koller; O. Brand; H. Baltes; B.Jakoby; P.M. Sarro; M.J. Vellekoop;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, pp. 1512-1515, Jun. 1999.

  661. A novel technological process for glaas-to-glass anodic bonding
    A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, pp. 1324-1327, Jun. 1999.

  662. Silicon carbide as a new MEMS technology
    P.M. Sarro;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, The Institute of Electr. Eng. of Japan, pp. 186-189, Jun. 1999.

  663. Fabrication of a focal plane array infrared detector for a satellite attitude control system
    A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; B. Goudena; M. Laros; P.M. Sarro; C.A.Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, pp. 394-397, Jun. 1999.

  664. Practical considerations of the galvanic etch-stop for device application
    C.M.A.Ashruf; P.J. French; P.M. Sarro; W. van d.Vlist; E.L.Oemar; L.J.Breems; J.J.Kelly;
    In Proc. 10th Int. Conf. Solid-State Transducers,
    Sendai, Japan, pp. 560-563, Jun. 1999.

  665. Lamb wave sensor with tensile ZnO for liquid property sensing
    S. Koller; O. Brand; H. Baltes; B.H. Jakoby; P.M. Sarro; M.J. Vellekoop;
    In Transducers '99: digest of technical papers. Vol. 2,
    Institute of Electrical Engineers of Japan, pp. 1512-1515, 1999.

  666. A novel technological process for glass-to-glass anodic bonding
    M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
    In Transducers '99: digest of technical papers. Vol. 2,
    Institute of Electrical Engineers of Japan, pp. 1324-1327, 1999.

  667. Practical considerations of the galvanic etch-stop for device applications
    C.M.A. Ashruf; P.J. French; P.M. Sarro; W. van der Vlist; E.L. Oemar; L.J. Breems; J.J. Kelly;
    In Transducers '99: digest of technical papers. Vol. 1,
    Institute of Electrical Engineers of Japan, pp. 560-563, 1999.

  668. Technology of pixelated reflective membranes for spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In SAFE99: proceedings. ProRISC99: proceedings [CD-ROM],
    STW Technology Foundation, pp. 671-675, 1999.

  669. Glass-to-glass anodic bonding
    M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
    In SAFE99:proceedings. ProRISC99: proceedings,
    STW Technology Foundation, pp. 33-36, 1999.

  670. Position-sensitive detectors for a wavefront sensor
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In SAFE99: proceedings. ProRISC99: proceedings [CD-ROM],
    STW Technology Foundation, pp. 287-293, 1999.

  671. Micro-injection of b-D-glucose standards and Amplex Red reagent on micro-arrays
    R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van Dedem; K.T. Hjelt; M.J. Vellekoop; P.M. Sarro; I.T. Young;
    In {M Ferrari} (Ed.), Progress in biomedical optics (Proceedings SPIE 3606),
    International Society for Optical Engineering, pp. 119-128, 1999.

  672. Fluorescence detection in (sub-)nanoliter microarrays
    L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; J.E. Frank; G. van Dedem; K.T. Hjelt; L. van VlietJ; I.T. Young;
    In {M Ferrari} (Ed.), Progress in biomedical optics (Proceedings SPIE 3606),
    International Society for Optical Engineering, pp. 28-39, 1999.

  673. Various layouts of analog CMOS optical position-sensitive detectors
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In {SM Goodnick} (Ed.), Proceedings of SPIE, vol. 3794,
    International Society for Optical Engineering, pp. 134-142, 1999.

  674. Micromachined SLM based on pixelated reflective membranes
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {JD Gonglewski}; {MA Vorontsov} (Ed.), Proceedings of SPIE, vol. 3760,
    International Society for Optical Engineering, pp. 23-31, 1999.

  675. Integration of a Hartmann-shack wavefront sensor
    D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
    In Proceedings,
    World Scientific, pp. 215-220, 1999.

  676. Pressure and flow sensor for use in catheters
    J.F.L. Goosen; P.J. French; P.M. Sarro;
    In {P.J. French}; {E Peeters} (Ed.), Micromachined devices and components V (Proceedings of SPIE 3876),
    International Society for Optical Engineering, pp. 38-44, 1999.

  677. Technology of pixelated flexible silicon structures for spatial light modulators
    S. Sakarya; G. Vdovin; P.M. Sarro;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
    Delft University of Technology, pp. 737-740, 1999.

  678. Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
    P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M.O. O. Halloran; P.M. Sarro;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
    Delft University of Technology, pp. 1029-1032, 1999.

  679. All-glass microstructures for (bio)chemical analysis systems
    M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop; G. Pignatel;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings,
    Delft University of Technology, pp. 975-978, 1999.

  680. Piezoelectric ZnO membrane resonators for liquid property sensing
    S. Koller; O. Brand; P.M. Sarro; M.J. Vellekoop; H. Baltes;
    In {M. Bartek} (Ed.), Eurosensors XIII: proceedings,
    Delft University of Technology, pp. 677-680, 1999.

  681. Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
    G.M.O. O. Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
    In Eurosensors XIII: proceedings,
    Delft University of Technology, pp. 117-120, 1999.

  682. Offset reduction of Hall plates in three different crystal planes
    S. Bellekom; P.M. Sarro;
    Sensors and Actuators A,
    Volume 66, Issue 1-3 (1998), pp. 23-28, 1998.

  683. A new contactless electrochemical etch stop based on a gold/silicon/TMAH galvanic cell
    C.M.A. Ashruf; P.J. French; P.M.M.C. Bressers; P.M. Sarro; J.J. Kelly;
    Sensors and Actuators A,
    Volume 66, Issue 1-3 (1998), pp. 284-292, 1998.

  684. Anisotropic etching of silicon in saturated TMAHW solutions for IC-compatible micromachining
    P.M. Sarro; S. Brida; C.M.A. Ashruf; W. van d. Vlist; H. van Zeijl;
    Sensors and Materials,
    Volume 10, Issue 4, pp. 201-212, 1998.

  685. Thermo-optic effect exploitation in Silicon microstructures
    G. Cocorullo; F.G. Della Corte; I. Rendina; P. M. Sarro;
    Sensors and Actuators A,
    Volume 71, Issue 1-2, pp. 19-26, 1998. ISSN-0924-4247.

  686. Magnetic-field meassurement using an integrated resonant magnetic-field sensor
    Zs.Kadar; A.Bossche; P.M. Sarro; J.R.Mollinger;
    Sensors and Actuators A,
    Volume 70, pp. 225-232, 1998. ISSN-0924-4247.

  687. Low stress PECVD thin film SiC for IC compatible microstructures
    P.M. Sarro; C.R. de Boer; E. Korkmaz; J.W.M. Laros;
    Sensors and Actuators A,
    Volume 67, pp. 175-180, 1998.

  688. Temperature dependence and drift of a thermal accelerometer
    U.A. Dauderstadt; P.M. Sarro; P.J. French;
    Sensors & Actuators A,
    Volume 66, Issue 1-3, pp. 244-249, 1998.

  689. A microgap photomultiplier for the read-out of LaF3 : Nd (10%) scintillator
    J. van der Marel; V.R.Bom; C.W.E. van Eijk; R.W. Hollander; P.M Sarro;
    Nucl. Instr. and Meth. Phys.Res. A,
    Volume 410, pp. 229-237, 1998. ISSN 0168-9002.

  690. Design and characterization of MicroGap Counters on silicon
    F.D. van d. Berg; J. van d. Marel; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
    Nucl Instr and Meth. A.,
    Volume 409, pp. 90-94, 1998.

  691. Electrochemical etch stop engineering for bulk micromachining
    C.M.A. Ashruf; P.J. French; P.M. Sarro; M.C. Bressers; J.J. Kelly;
    Mechatronics,
    Volume 8 (1998), pp. 595-612, 1998.

  692. Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    J. Micromech. Microeng.,
    Volume 8, pp. 45-53, 1998.

  693. Silicon-on-silicon rib waveguides with a high-confining ion-implanted lower cladding
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    IEEE Journal of Quantum Electronics,
    Volume 4, Issue 6, pp. 983-989, 1998.

  694. Two silicon optical modulators realizable with a fully compatible bipolar process
    G. Breglio; A. Cutolo; A. Irace; P. Spirito; L. Zeni; M. Iodice; P.M. Sarro;
    IEEE Journal of Quantum Electronics vol. 4,
    Issue 6, pp. 1003-1010, 1998.

  695. Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 8, Issue 2, pp. 45-53, 1998.

  696. Magnetic-field measurements using an integrated resonant magnetic-field sensor [niet eerder opgevoerd]
    Z. Kádár; A. Bossche; P.M. Sarro; J.R. Mollinger;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 70, pp. 225-232, 1998.

  697. Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]
    C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly; PM.M.C. Bressers;
    Mechatronics,
    Volume 1998, Issue 8, pp. 595-612, 1998.

  698. Enhancement of propagation characteristics in all-silicon waveguide by ion implantation
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    In OSA Intern. Symposium on Integrated Photonics Research,
    Victoria, Canada, pp. 339-341, 1998.

  699. Galvanic etching of silicon
    C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly;
    In Proc.SPIE Micromachining and Microfabrication 98 Symposium,
    Santa Clara, USA, SPIE, pp. 82-87, Sep. 1998.

  700. A novel technique to measure the thermal conductivity of thin film membranes
    A. Irace; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication 1998 Symposium,
    Santa Clara, USA, SPIE, pp. 367-373, Sep. 1998.

  701. Fluorescence Detection in (sub)-nanoliter Microarrays
    L.R. van d. Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K. Hjelt; I.T. Young;
    In Proc. 4th Annual Conference of the Advanced School for Computing and Imaging (ASCI 98),
    Lommel, Belgium, pp. 58-62, Jun. 1998.

  702. Determination of mechanical properties of piezoelectric ZnO films
    S. Koller; V.Ziebart; O. Paul; O. Brand; H. Baltes; P.M. Sarro; M.J. Vellekoop;
    In Proc. SPIE Smart Electronics and MEMS Symposium,
    San Diego, USA, SPIE, pp. 102-109, Mar. 1998.

  703. Low temperature quartz-to-silicon bonding for SAW applications
    A.Berthold; P.M. Sarro; M.J.Vellekoop;
    In Proc. SPIE Smart Electronics and MEMS Symposium,
    San Diego, USA, SPIE, pp. 81-85, Mar. 1998.

  704. Integration Technology
    P.J. French; P.M. Sarro;
    In Proc. SPIE Smart Electronics and MEMS Symposium,
    San Diego, USA, SPIE, pp. 60-71, Mar. 1998.

  705. A neutron detector based on the Micro Gap Counter
    F.D. van den Berg; V.R. Bom; C.W.E. van Eijk; R.W. Hollander; M. Bartek; P.M. Sarro; H. Schellevis; M.W. Johnson; N.J. Rhodes;
    In C.W.E. van Eijk (Ed.), Proc. Neudess 98,
    Delft, The Netherlands, Oct. 1998. ISBN 90-73861-42.

  706. Porous silicon membrane for humidity sensing applications
    G.M. O'Hallaran; J. Groeneweg; P.M. Sarro; P.J. French;
    In Proc. Eurosensors XII Conf.,
    Southampton, UK, pp. 901-904, Sep. 1998.

  707. Thickness of membranes fabricated with galvanic etch-stop, uniformity and reproducibility
    E.L. Oemar; C.M.A. Ashruf; P.J. French; P.M. Sarro;
    In Proc. Eurosensors XII Conf.,
    Southampton, UK, pp. 3-6, Sep. 1998.

  708. Measurement of thermal conductivity and diffusivity on single and multi-layer membranes
    A. Irace; P.M. Sarro;
    In Proc. Eurosensors XII Conf.,
    Southampton, UK, pp. 27-30, Sep. 1998.

  709. Temperature dependence of a thermal accelerometer
    U.A. Dauderstadt; P.M. Sarro; P.J. French;
    In Proc. Dutch Sensor Conf,
    Twente, pp. 55-60, Mar. 1998.

  710. Quartz-to-silicon fusion bonding for micro acoustic wave applications
    A. Berthold; P.M. Sarro; M.J. Vellekoop;
    In Proc. Dutch Sensor Conf,
    Twente, pp. 213-218, Mar. 1998.

  711. Silicon Micromachining Technologies
    P.M. Sarro;
    In INSEL 98 Conf.,
    Naples, Italy, Oct. 1998.

  712. Experimental results of electron confinement in a silicon drift detector with saw tooth shaped p+ strips
    J. Sonsky; H. Valk; J. Huizenga; and R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
    In IEEE Nuclear Science Symposium 98,
    Toronto, Canada, Nov. 1998.

  713. Silicon Microsensors and Optical Switches Based on the Thermo-Optic Effect
    G. Cocorullo; F. G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    In CIMTEC 98,
    Florence, Italy, Jun. 1998.

  714. Fluorescence detection in (sub)-nano liter microarrays [niet eerder opgevoerd]
    L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K.T. Hjelt; I.T. Young;
    In {BM Haar Romeny}, ter; {D.H.J. Epema}; {JFM Tonino}; {AA Wolters} (Ed.), ASCI'98: proceedings,
    Advanced School for Computing and Imaging, pp. 58-62, 1998.

  715. Fluorescence detection in (sub-)nano liter microarrays
    L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van DedemWK; K.T. Hjelt; I.T. Young;
    In {ter Haar Romeny}, BM; D.H.J. Epema; JFM Tonino; AA Wolters (Ed.), Proc. ASCI'98, 4th Annual Conf. of the Advanced School for Computing and Imaging,
    pp. 58-62, 1998.

  716. Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]
    gmo O'Halloran; J. Groeneweg; P.M. Sarro; P.J. French;
    In proceedings,
    s.n., pp. 901-904, 1998.

  717. An integrated silicon interferometric temperature sensor
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    Sensors and Actuators A,
    Volume 61, Issue 1-3, pp. 267-272, 1997.

  718. New silicon micromachining techniques for microsystems
    P.J. French; P.T.J. Gennissen; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 62, Issue 1-3, pp. 652-662, Jul. 1997.

  719. Backside-illuminated silicon photodiode array in an integrated spectrometer
    T.A. Kwa; . P.M. Sarro; R.F. Wolffenbuttel;
    IEEE Transactions on Electron Devices,
    Volume 44, Issue 5 (1997), pp. 761-765, 1997.

  720. A temperature all-silicon micro-sensor based on the thermo-optic effect
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    IEEE Transactions on Electron Devices,
    Volume 44, Issue 5 (1997), pp. 766-774, 1997.

  721. Electrostatic aluminum micromirrors using double pass metallization
    J. Bhler; J. Funk; J.G. Korvink; F.-P. Steiner; P.M. Sarro; H. Baltes;
    Journal of Microelectromechanical Systems,
    Volume 6, Issue 2, pp. 126-135, 1997.

  722. Dual structural polysilicon BiFET-compatible surface-micromachining module
    Drieenhuizen; B.P. van; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 7, Issue 3, pp. 148-150, Sep. 1997.

  723. Technology and applications of micromachined silicon adaptive mirrors
    G. Vdovin; S. Middelhoek; P.M. Sarro;
    Opt. Eng.,
    Volume 36, Issue 5, pp. 1382-1390, 1997.

  724. Optimization of a low stress silicon nitride process for surface micromachining applications
    P.J. French; P.M. Sarro; R. Malle; E.J.M. Fakkeldij; R.F. Wolffenbuttel;
    Sensors and Actuators A,
    Volume 58, pp. 149-157, 1997.

  725. An integrated charge amplifier for a pyroelectric sensor
    D. Setiadi; A. Armitage; T.D. Binnie; P.P.L. Regtien; P.M. Sarro;
    Sensors and Actuators A,
    Volume 61, Issue 1-3, pp. 421-426, 1997.

  726. Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    Sensors and Actuators A,
    Volume 62, pp. 636-645, 1997.

  727. Strain effects in multilayers
    C.M.A. Ashruf; P.J. French; C. de Boer; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
    Austin, Texas, USA, SPIE, pp. 149-159, Sep. 1997.

  728. Bulk micromachined pressure sensor based on epi-poly technique
    P.T.J. Gennissen; C.M.A. Ashruf; M. Kaak; P.J. French; P.M. Sarro;
    In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
    Austin, Texas, USA, SPIE, pp. 212-219, Sep. 1997.

  729. Silicon thermooptic micromodulators for low-cost low-performance fiber-in-the-loop applications
    G. Cocorullo; F.G. Della Corte; I. Rendina; P.M. Sarro;
    In Proc.SPIE Integrated Optic Devices '97 Symposium,
    San Jose, California, USA, SPIE, pp. 312-337, 1997.

  730. Study of Selective and Non-Selective Deposition of Single- and Polycrystalline Silicon Layers in an Epitaxial Reactor
    M. Bartek; P.T.J. Gennissen; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Proc. Transducers 97,
    Chicago, USA, pp. 1403-1406, Jun. 1997.

  731. Surface versus bulk micromachining: the contest for suitable applications
    P.J. French; P.M. Sarro;
    In Proc. MME 97 Conf,
    Southampton, UK, pp. 18-30, Aug. 1997.

  732. Low stress PECVD thin film SiC for IC compatible microstructures
    P.M. Sarro; C.R. de Boer; M. Laros; E. Korkmaz;
    In Proc. Eurosensors '97 Conf.,
    Warsaw, Poland, pp. 920-932, Sep. 1997.

  733. Temperature dependence and drift of a thermal accelerometer
    U.A. Dauderstadt; P.M. Sarro; S. Middelhoek;
    In Proc. 9th Int. Conf. Solid-State Transducers,
    Chicago, USA, pp. 1209-1212, Jun. 1997.

  734. Fabrication of micromechanical structures with a new electrodeless electrochemical etch stop
    C.M.A. Ashruf; P.J. French; P.M. Sarro; M. Nagao; M. Esashi;
    In Proc. 9th Int. Conf. Solid-State Transducers,
    Chicago, USA, pp. 703-706, Jun. 1997.

  735. A bulk micromachined humidity sensor based on porous silicon
    G.M. O'Hallaran; P.M. Sarro; J. Groeneweg; P.J. Trimp; P.J. French;
    In Proc. 9th Int. Conf. Solid-State Transducers,
    Chicago, USA, pp. 563-566, Jun. 1997.

  736. Development of a 128 channel silicon drift detector for spectroscopic purposes
    H. Valk; J. Huizenga; C.W. van Eijk; R.W.Hollander; L.K. Nanver; P.M. Sarro; A. van den Bogaard;
    In Proc. 4th International Conference on Position-Sensitive Detectors,
    Manchester, UK, pp. 169-172, Sept. 1997.

  737. Recombination centers identification in very thin silicon epitaxial layers via lifetime measurements
    S. Daliento; A. Sanseverino; P. Spirito; P.M. Sarro; L. Zeni;
    IEEE Electr. De van Lett,
    Volume 17, Issue 3, pp. 148-150, 1996.

  738. The development of a low-stress polysilicon process compatible with standard device processing
    P.J. French; B.P. van Drieenhuizen; D. Poenar; J.F.L. Goosen; R. Mallee; P.M. Sarro; R.F. Wolffenbuttel;
    Journal of Microelectromechanical Systems,
    Volume 5, Issue 3, pp. 187-196, 1996.

  739. Silicon three-axial tactile sensor
    Z.Chu; P.M. Sarro; S. Middelhoek;
    Sensors and Actuators A,
    Volume 54, pp. 505-510, 1996.

  740. A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer
    D. Setiadi; P.M. Sarro; P.P.L. Regtien;
    Sensors and Actuators A,
    Volume 52, pp. 103-109, 1996.

  741. The PhotoElectroMagnetic Effect in planar silicon structures
    J.F. Creemer; S. Middelhoek; P.M. Sarro;
    Sensors and Actuators A,
    Volume 55, pp. 115-120, 1996.

  742. Simulation aspects of a thermal accelerometer
    U.A. Dauerstadt; P.H.S. de Vries; R. Hiratsuka; J.G. Korvink; P.M. Sarro; H. Baltes; S. Middelhoek;
    Sensors and Actuators A,
    Volume 55 (1996), pp. 3-6, 1996.

  743. Low temperature surface passivation for silicon solar cells
    C. Leguijt; P. Llgen; A.R. Burgers; J.A. Eikelboom; A.W. Weeber; F.M. Schuurmans; W.C. Sinke; P.F.A. Alkemade; P.M. Sarro; C.H.M. Mare; L.A. Verhoef;
    Solar Energy Materials and Solar Cells,
    Volume 40 (1996), pp. 297-345, 1996.

  744. Thin-film free-space optical components micromachined in silicon
    G.Vdovin; S. Middelhoek; P.M. Sarro;
    In Techn Digest IEEE/LEOS Summer Topical Meeting Optical MEMS and Their Applications,
    Keystone, Colorado, USA, pp. 5-6, Aug. 1996.

  745. Micromachined mirror with a variable focal distance
    G.Vdovin; S. Middelhoek; P.M. Sarro;
    In Tech. Digest EOS Free Space Micro-Optical Systems,
    Engelberg, Switzerland, pp. 28-29, Apr. 1996.

  746. New developments in the integration of micromachined sensors
    P.M. Sarro; P.J. French; P.T.J. Gennissen;
    In Proc. SPIE Micromachining and Microfabrication 1996 Symposium,
    Austin, Texas, USA, SPIE, pp. 26-36, Oct. 1996.

  747. Aluminum passivation in saturated TMAHW solutions for IC-compatible microstructures and device isolation
    P.M. Sarro; S. Brida; W. van der Vlist;
    In Proc.SPIE Micromachining and Microfabrication 96 Symposium,
    Austin, Texas, USA, SPIE, pp. 242-250, Oct. 1996.

  748. Bipolar compatible epitaxial poly for surface micromachined smart sensors
    P.T.J. Gennissen; P.J. French; M. Bartek; P.M. Sarro; A. van den Boogaard; C. Visser;
    In Proc. SPIE Conference on Micromachining & Microfabrication, Process Technology II,
    Austin, USA, SPIE, pp. 135-142, Oct. 1996.

  749. Dual structural polysilicon BiFET-compatible surface-micromachining module
    B.P.van Drieenhuizen; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Proc. MME 96,
    Barcelona, Spain, pp. 70-73, Oct. 1996.

  750. Silicon drift detectors for the detection of X- and g- rays
    H.Valk; E.A.Hijzen; J.Huizenga; C.W. van Eijk; R.W.Hollander; L.K.Nanver; P.M. Sarro; A. van d.Bogaard; J.Slabbekoorn;
    In Proc. National Sensor Conference,
    Delft, The Netherlands, pp. 103-107, Mar. 1996.

  751. Temperature monitoring with a fully integrable on chip interferometric silicon micro-sensor based on the thermo-optic effect
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    In Proc. MELECON '96,
    Bari, Italy, pp. 1321-1323, May 1996.

  752. Bipolar compatible epitaxial poly for smart sensors - stress minimization and applications
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. Eurosensors X,
    Leuven, Belgium, pp. 187-190, Sep. 1996.

  753. An integrated charge amplifier for a pyroelectric sensor
    D. Setiadi; A. Armitage; T.D. Binnie; P.P.L. Regtien; P.M. Sarro;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 355-358, Sep. 1996.

  754. IC-compatible silicon fusion bonding
    A. Berthold; P.M. Sarro; P.J. French; M.J. Vellekoop;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 489-491, Sep. 1996.

  755. New micromachining techniques for microsystems
    P.J. French; P.T.J. Gennissen; P.M. Sarro;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 465-472, Sep. 1996.

  756. An integrated silicon interferometric temperature sensor
    G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 1413-1416, Sep. 1996.

  757. A LaF3:Nd(10%) scintillator detector with microgap gas chamber read-out for the detection of x- rays
    J. van der Marel; V.R. Bom; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
    In Proc. 4th International Conference on Position-Sensitive Detectors,
    Manchester, UK, Sept. 1996.

  758. Anisotropic etching of silicon in saturated TMAHW solutions for IC-compatible micromachining
    P.M. Sarro; S.Brida; C.M.A.Ashruf; W. van d.Vlist; H. van Zeijl;
    In Proc. ASDAM '96 Conf.,
    Smolenice, Slovakia, pp. 293-296, Oct. 1996.

  759. Thick polysilicon microstructures by combination of epitaxial and poly growth in a single deposition step
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. 1996 National Sensor Conference,
    Delft, The Netherlands, pp. 189-192, Mar. 1996.

  760. New etchant for the fabrication of porous silicon
    G.M. O'Hallaran; M. Kuhl; P.M. Sarro; P.T.J. Gennissen; P.J. French;
    In Moustakas, Dismukes, Pearton) (Ed.), Proc. 189th Electrochemical Society Meeting: III-V Nitride Materials and Compounds,
    Los Angeles, California, USA, pp. 180-185, May 1996.

  761. Integrated ultraviolet sensor system with on-chip 1 Gohm Transimpedance Amplifier
    D. Bolliger; P. Malcovati; A. Haberli; P.M. Sarro; F. Malobert; H. Baltes;
    In ISSC 96 Digest of Technical Papers,
    San Francisco, CA, pp. 328-329, Feb. 1996.

  762. Silicon accelerometer based on thermopiles
    U.A. Dauderstadt; P.H.S. de Vries; R. Hiratsuka; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 46, Issue 1-3, pp. 201-204, Jan.-Feb. 1995.

  763. Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor
    D. Setiadi; P.P.L. Regtien; P.M. Sarro;
    Microelectronic Engineering,
    Volume 29, Issue 1-4, pp. 85-88, Dec. 1995.

  764. Automatic etch stop on buried oxide using epitaxial lateral overgrowth
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Transducers 95,
    Stockholm, Sweden, pp. 75-78, Jun. 1995.

  765. Technology characterization and application of adaptive mirrors fabricated with IC-compatible micromachining
    G. Vdovin; S. Middelhoek; M. Bartek; P.M. Sarro; D. Solomatine;
    In Proc. SPIE,
    San Diego, CA, USA, pp. 116-129, Jun. 1995.

  766. PSG layers for surface micromachining
    D. Poenar; P.J. French; R. Malle; P.M. Sarro; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 41, Issue 1-3, pp. 304-309, Apr. 1994.

  767. Application of VDF/TrFE copolymer for pyroelectric image sensors
    D. Setiadi; P.P.L. Regtien; P. M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 42, Issue 1-3, pp. 585-592, Apr. 1994.

  768. An integrated silicon colour sensor using selective epitaxial growth
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    Sensors and Actuators A,
    Volume 41, Issue 1-3, pp. 123-128, Apr. 1994.

  769. Reactive ion etching (RIE) techniques for micromachining applications
    Y.X. Li; M.R. Wolffenbuttel; P.J. French; M. Laros; P.M. Sarro; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 41, Issue 1-3, pp. 317-323, Apr. 1994.

  770. A silicon-silicon nitride membrane fabrication process for smart thermal sensors
    P.M. Sarro; A.W. van Herwaarden; W. van der Vlist;
    Sensors and Actuators A: Physical,
    Volume 42, Issue 1-3, pp. 666-671, Apr. 1994.

  771. Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer
    R.P. van Kampen; M.J. Vellekoop; P.M. Sarro; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 43, Issue 1-3, pp. 100-106, May 1994.

  772. Evaluation of liquid properties using a silicon lamb wave sensor
    M.J. Vellekoop; G.W. Lubking; P.M. Sarro; A. Venema;
    Sensors and Actuators A: Physical,
    Volume 43, Issue 1-3, pp. 175-180, May 1994.

  773. Surface micromachined tuneable interferometer array
    K. Aratani; P.J. French; P.M. Sarro; D. Poenar; R.F. Wolffenbuttel; S. Middelhoek;
    Sensors and Actuators A: Physical,
    Volume 43, Issue 1-3, pp. 17-23, May 1994.

  774. Liquid and gas micro-calorimeters for (bio)chemical measurements
    A. W. van Herwaarden; P.M. Sarro; J.W. Gardner; P. Bataillard;
    Sensors and Actuators A: Physical,
    Volume 43, Issue 1-3, pp. 24-30, May 1994.

  775. Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors
    M.J. Vellekoop; G.W. Lubking; P.M. Sarro; A. Venema;
    Sensors and Actuators A: Physical,
    Volume 44, Issue 3, pp. 249-263, Sep. 1994.

  776. A pyroelectric matrix sensor using PVDF on silicon containing FET readout circuitry
    P.C.A. Hammes; P.P.L. Regtien; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 37-38, pp. 290-295, Jun.-Aug. 1993.

  777. A Novel Silicon Colour Sensor Using Selective Epitaxial Growth
    M. Bartek; P.T.J. Gennissen; E.J. Blaauw; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers 93),
    Yokohama, Japan, pp. 144-147, Jun. 1993.

  778. Selective epitaxial growth for smart silicon sensor applications
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. Eurosensors VII,
    Budapest, Hungary, Sep. 1993.

  779. Sensor technology strategy in silicon
    P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 31, Issue 1-3, pp. 138-143, Mar. 1992.

  780. Design considerations for the thermal accelerometer
    R. Hiratsuka; D.C. van Duyn; T. Otaredian; P. de Vries; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 32, Issue 1-3, pp. 380-385, Apr. 1992.

  781. Design considerations for a permanent-rotor-charge-excited micromotor with an electrostatic bearing
    R.F. Wolffenbuttel; J.F.L. Goosen; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 27, Issue 1-3, pp. 597-603, May 1991.

  782. Compatibility of zinc oxide with silicon IC processing
    M.J. Vellekoop; C.C.G. P. Visser.M. Sarro; A. Venema;
    Sensors and Actuators A: Physical,
    Volume 23, Issue 1-3, pp. 1027-1030, Apr. 1990.

  783. Sensor array with A/D conversion based on flip-flops
    W. Lian; S.E. Wouters; D.A. Aupers; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 22, Issue 1-3, pp. 592-597, Jun. 1989.

  784. Integrated thermopile sensors
    A.W. van Herwaarden; D.C. van Duyn; B.W. van Oudheusden; P.M. Sarro;
    Sensors and Actuators A: Physical,
    Volume 22, Issue 1-3, pp. 621-630, Jun. 1989.

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