Lina Sarro

Publications

Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones
Roberto Pezone; Sebastian Anzinger; Gabriele Baglioni; Hutomo Suryo Wasisto; Lina Sarro; Peter Steeneken; Sten Vollebregt;
Microsystems & Nanoengineering,
Volume 10, Issue 27, pp. 1-9, 2024. DOI: 10.1038/s41378-024-00656-x
Effect of air-loading on the performance limits of graphene microphones
R. Pezone; G. Baglioni; C. Van Ruiten; S. Anzinger; H. S. Wasisto; P. M. Sarro; P. G. Steeneken; S. Vollebregt;
Applied Physics Letters,
Volume 124, Issue 12, 2024. DOI: 10.1063/5.0191939
Manufacturing thin ionic polymer metal composite for sensing at the microscale
Paul Motreuil-Ragot; Andres Hunt; Leandro N. Sacco; Pasqualina M. Sarro; Massimo Mastrangeli;
Smart Materials and Structures,
Volume 32, pp. 035006, 2023. DOI: 10.1088/1361-665X/acb305
Microfabricated albedo insensitive sun position sensor system in silicon carbide with integrated 3D optics and CMOS electronics
Joost Romijn; Sten Vollebregt; Vincent G. de Bie; Luke M. Middelburg; Brahim El Mansouri; Henk W. van Zeijl; Alexander May; Tobias Erlbacher; Johan Leijtens; Guoqi Zhang; Pasqualina M. Sarro;
Sensors and Actuators A: Physical,
Volume 354, pp. 114268, 2023. DOI: 10.1016/j.sna.2023.114268
An organ-on-chip device with integrated charge sensors and recording microelectrodes
Hande Aydogmus; Michel Hu; Lovro Ivancevic; Jean-Philippe Frimat; Arn M. J. M. van den Maagdenberg; Pasqualina M. Sarro; Massimo Mastrangeli;
Scientific Reports,
Volume 13, Issue 8062, 2023. DOI: https://doi.org/10.1038/s41598-023-34786-5
Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
Hao Hong; Jiangtao Wei; Xin Lei; Haiyun Chen; Pasqualina M. Sarro; Guoqi Zhang; Zewen Liu;
Microsystems & Nanoengineering,
Volume 9, pp. 63, 2023. DOI: 10.1038/s41378-023-00532-0
Optical self-cooling of a membrane oscillator in a cavity optomechanical experiment at room temperature
P. Vezio; M. Bonaldi; A. Borrielli; F. Marino; B. Morana; P.M. Sarro; E. Serra; F. Marin;
Physical Review A,
Volume 108, pp. 063508, 2023. DOI: 10.1103/PhysRevA.108.063508
Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications
Michele Bonaldi; Antonio Borrielli; Giovanni Di Giuseppe; Nicola Malossi; Bruno Morana; Riccardo Natali; Paolo Piergentili; Pasqualina Maria Sarro; Enrico Serra; David Vitali;
Entropy,
Volume 25, Issue 7, 2023. DOI: 10.3390/e25071087
Miniaturized engineered heart tissues from hiPSC-derived triple cell type co-cultures to study human cardiac function
L Windt; M. Wiendels; M. Dostanic; M. Bellin; P. M. Sarro; M. Mastrangeli; C. L. Mummery; B. J. van Meer;
Biochemical and Biophysical Research Communications,
2023. DOI: 10.1016/j.bbrc.2023.09.034
Highly reproducible tissue positioning with tapered pillar design in engineered heart tissue platforms
M. Dostanic; L. M. Windt; M. Wiendels; B. J. van Meer; C. L. Mummery; P. M. Sarro; M. Mastrangeli;
In IEEE 36th Intl. Conf. on Micro Electro Mechanical Systems (MEMS2023),
2023. DOI: 10.1109/MEMS49605.2023.10052166
High-performance wafer-scale transfer-free graphene microphones
Roberto Pezone; Gabriele Baglioni; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt;
In IEEE 36th Intl. Conf. on Micro Electro Mechanical Systems (MEMS2023),
2023. DOI: 10.1109/MEMS49605.2023.10052360
A Highly Sensitive Capacitive Displacement Sensor For Force Measurement Integrated In An Engineered Heart Tissue Platform
Milica Dostanic; Filippo Pfaiffer; Mahdieh Shojaei-Baghini; Laura M. Windt; Maury Wiendels; Berend J. van Meer; Christine L. Mummery; Pasqualina M. Sarro; Massimo Mastrangeli;
In 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2023),
2023.
Wafer-scale Transfer-free Graphene MEMS Condenser Microphones
Roberto Pezone; Gabriele Baglioni; Leonardo di Paola; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt;
In 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2023),
2023.
Design And Fabrication Of A Smart Vaporasing Liquid Microthruster For Cubesat Applications
Georgios Spernovasilis; Henk W. van Zeijl; Pasqualina M. Sarro;
In 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2023),
2023.
High aspect-ratio multi-layer graphene MEMS condenser microphones
Roberto Pezone; Gabriele Baglioni; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt;
In Graphene Week,
2023.
document
Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology
Joost Romijn; Sten Vollebregt; Luke M. Middelburg; Brahim El Mansouri; Henk W. van Zeijl; Alexander May; Tobias Erlbacher; Guoqi Zhang; Pasqualina M. Sarro;
IEEE Transactions on Electron Devices,
Volume 69, Issue 1, pp. 4-10, 2022. DOI: 10.1109/TED.2021.3125279
Rapid Prototyping of Organ-on-a-Chip Devices Using Maskless Photolithography
Dhanesh G. Kasi; Mees N. S. de Graaf; Paul A. Motreuil-Ragot; Jean-Phillipe M. S. Frimat; Michel D. Ferrari; Pasqualina M. Sarro; Massimo Mastrangeli; Arn M. J. M. van den Maagdenberg; Christine L. Mummery; Valeria V. Orlova;
Micromachines,
Volume 13, pp. 49, 2022. DOI: 10.3390/mi13010049
Sensitive Transfer-Free Wafer-Scale Graphene Microphones
Roberto Pezone; Gabriele Baglioni; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt;
ACS Applied Materials & Interfaces,
Volume 14, Issue 18, pp. 21705-21712, 2022. DOI: 10.1021/acsami.2c03305
Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
Yelena Hagendoorn; Gregory Pandraud; Sten Vollebregt; Bruno Morana; Pasqualina M. Sarro; Peter G. Steeneken;
MDPI Materials,
Volume 15, Issue 10, pp. 3723, 2022.
document
Angle Sensitive Optical Sensor for Light Source Tracker Miniaturization
Joost Romijn; Secil Sanseven; Guoqi Zhang; Sten Vollebregt; Pasqualina M. Sarro;
IEEE Sensors Letters,
Volume 6, Issue 6, pp. 1-4, 2022. DOI: 10.1109/LSENS.2022.3175607
Ultra-thin corrugated metamaterial film as large-area transmission dynode
H.W. Chan; V. Prodanović; A.M.M.G. Theulings; T. ten Bruggencate; C.W. Hagen; P.M. Sarro; H. v.d. Graaf;
Journal of Instrumentation,
Volume 17, pp. P09027, 2022. DOI: 10.1088/1748-0221/17/09/P09027
Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology
Joost Romijn; Sten Vollebregt; Luke M. Middelburg; Brahim El Mansouri; Henk W. van Zeijl; Alexander May; Tobias Erlbacher; Johan Leijtens; Guoqi Zhang; Pasqualina M. Sarro;
Nature Microsystems & Nanoengineering,
Volume 8, pp. 114, 2022. DOI: 10.1038/s41378-022-00446-3
Recording neuronal activity on chip with segmented 3D microelectrode arrays
Nele Revyn; Michel. H. Y. Hu; Jean-Philippe M. S. Frimat; B. de Wagenaar; Arn M. J. M. van den Maagdenberg; Pasqualina M. Sarro; Massimo Mastrangeli;
In 35th Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2022),
January 9-13 2022. DOI: 10.1109/MEMS51670.2022.9699597
Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology
Joost Romijn; Sten Vollebregt; Alexander May; Tobias Erlbacher; Henk W. van Zeijl; Johan Leijtens; GuoQi Zhang; Pasqualina M. Sarro;
In 35th Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2022),
2022. DOI: 10.1109/MEMS51670.2022.9699533
Wafer-Scale Transfer-Free Sensitive Graphene Microphones
Roberto Pezone; G. Baglioni; P.M. Sarro; P.G. Steeneken; S. Vollebregt;
In Graphene Week,
2022.
document
Ionic polymer metal composite-based microfluidic flow sensor for bio-MEMS applications
P. Motreuil-Ragot; G. Turcan; B. de Wagenaar; A. Hunt; P. M. Sarro; M. Mastrangeli;
In IEEE SENSORS 2022,
30 October - 2 November 2022. DOI: 10.1109/SENSORS52175.2022.9967281
Analysis of Platinum Distribution within a Nafion 212 Membrane during Electroless Deposition
P. Motreuil-Ragot; A. Hunt; L. N. Sacco; P. M. Sarro; M. Mastrangeli;
In 242nd Electro Chemical Society Meeting,
9-13 October 2022.
Tapered pillars increase tissue position reproducibility in engineered heart tissue platforms
M. Dostanic; L. M. Windt; J. M. Stein; B. J. Van Meer; C. L. Mummery; P. M. Sarro; M. Mastrangeli;
In EUROoCS Conference 2022,
4-5 July 2022.
Ionic polymer metal composite (IPMC)-based micropump for organs-on-chip
P. Motreuil-Ragot; D. Kasi; B. de Wagenaar; A. Hunt; V. Orlova; A. M. J. M. van den Maagdenberg; P. M. SARRO; M. Mastrangeli;
In EUROoCS Conference 2022,
4-5 July 2022.
Hybrid Silicon-Polymer Multi-Modal Sensing Device for Organ-on-Chip
H. Aydogmus; M. Hu; J.-P. Frimat; A. M. J. M. van den Maagdenberg; P. M. Sarro; M Mastrangeli;
In EUROoCS Conference 2022,
4-5 July 2022.
Highly-conformal sputtered through-silicon vias with sharp superconducting transition
Alfaro-Barrantes, J.A.; Mastrangeli, M.; Thoen, D.J.; Visser, S.; Bueno, J.; Baselmans, J.J.A.; Sarro, P.M.;
IEEE Journal of Microelectromechanical Systems,
Volume 30, Issue 2, pp. 253-261, Apr. 2021.
Highly-Conformal Sputtered Through-Silicon Vias with Sharp Superconducting Transition
J. A. Alfaro-Barrantes; M. Mastrangeli; D. J. Thoen; S. Visser; J. Bueno; J. J. A. Baselmans; P. M. Sarro;
Journal of Microelectromechanical Systems,
Volume 30, Issue 2, pp. 253-261, 2021. DOI: 10.1109/JMEMS.2021.3049822
Multi-Layer Graphene Pirani Pressure Sensors
Romijn, Joost; Dolleman, Robin; Singh, Manvika; van der Zant, Herre; Steeneken, Peter; Sarro, Pasqualina; Vollebregt, Sten;
IOP Nanotechnology,
Volume 32, Issue 33, pp. 335501, 2021. DOI: 10.1088/1361-6528/abff8e
Influence of defect density on the gas sensing properties of multi-layered graphene grown by chemical vapor deposition
Filiberto Ricciardella; Sten Vollebregt; Rita Tilmann; Oliver Hartwig; Cian Bartlam; Pasqualina M. Sarro; Hermann Sachdev; Georg S.Duesberg;
Carbon Trends,
Volume 3, pp. 100024, 2021.
document
Enhanced Sensitivity Pt/AlGaN/GaN Heterostructure NO₂ Sensor Using a Two-Step Gate Recess Technique
Jianwen Sun; Teng Zhan; Robert Sokolovskij; Zewen Liu; Pasqualina M. Sarro; Guoqi Zhang;
IEEE Sensors Journal,
Volume 21, Issue 15, pp. 16475-16483, 2021. DOI: 10.1109/JSEN.2021.3082205
Active feedback cooling of a SiN membrane resonator by electrostatic actuation
A. Borrielli; M. Bonaldi; E. Serra; P. M. Sarro; B. Morana;
Journal of Applied Physics,
Volume 130, pp. 014502, 2021.
document
Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control
J. Romijn; S. Vollebregt; H. W. van Zeijl; G. Zhang; J. Leijtens; P. M. Sarro;
In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS),
pp. 642-645, Jan 2021. DOI: 10.1109/MEMS51782.2021.9375434
Recording 3D neuronal activity on chip with segmented 3D microelectrode arrays
N. Revyn; M. H. Y. Hu; J.-P. Frimat; A. M. J. M. van den Maagdenberg; P. M. Sarro; M. Mastrangeli;
In EUROoCS Conference 2021,
online, 1-2 July, 2021.
FET-based integrated charge sensing in a MEM organ-on-chip platform
H. Aydogmus; H. J. van Ginkel; A.-D. Galiti; M. H. Y. Hu; J.-P. Frimat; A. M. J. M. van den Maagdenberg; G.Q. Zhang; M. Mastrangeli; P. M. Sarro;
In EUROoCS Conference 2021,
online, 1-2 July, 2021.
Dual-gate FET-based charge sensor enhanced by in-situ electrode decoration in a MEMS organs-on-chip platform
H. Aydogmus; H. J. van Ginkel; A.-D. Galiti; M. Hu; J.-P. Frimat; A. van den Maagdenberg; G.Q. Zhang; M. Mastrangeli; P. M. Sarro;
In 21st Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2021),
online, 20-25 June, 2021.
An engineered heart tissue platform with integrated pacing microelectrodes
M. Dostanic; L. Windt; J. Stein; B. van Meer; A. Diakou; C. L. Mummery; P. M. Sarro; M. Mastrangeli;
In EUROoCS Conference 2021,
online, 1-2 July, 2021.
ForceTracker: A versatile tool for contractile force assessment in 3D organ-on-chip platforms
J. M. Rivera-Arbelaez; M. Dostanic; J. M. Stein; A. van den Berg; L. I. Segerink; C. L. Mummery; P. M. Sarro; M. Mastrangeli; M. C. Ribeiro; R. Passier;
In EUROoCS Conference 2021,
online, 1-2 July, 2021.
Microelectronmechanical organs-on-chip
Massimo Mastrangeli; Hande Aydogmus; Milica Dostanic; Paul Motreuil-Ragot; Nele Revyn; Bjorn de Wagenaar; Ronald Dekker; Pasqualina M. Sarro;
In 21st Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2021),
online, 20-25 June, 2021.
Superconducting High-Aspect Ratio Through-Silicon Vias With DC-Sputtered Al for Quantum 3D Integration
J.A. Alfaro-Barrantes; M. Mastrangeli; D.J. Thoen; S. Visser; J. Bueno; J.J.A. Baselmans; P.M. Sarro;
IEEE Electron Device Letters,
Volume 41, Issue 7, pp. 1114-1117, July 2020. DOI: 10.1109/LED.2020.2994862
Quantum Signature of a Squeezed Mechanical Oscillator
A. Chowdhury; P. Vezio; M. Bonaldi; A. Borrielli; F. Marino; B. Morana; G. A. Prodi; P. M. Sarro; E. Serra; F. Marin;
Physical Review Letters,
Volume 124, pp. 023601, 2020. DOI: 10.1103/PhysRevLett.124.023601
Low-Impedance PEDOT:PSS MEA Integrated in a Stretchable Organ-on-Chip Device
Affan K. Waafi; Nikolas Gaio; William F. Quiros-Solano; Paul Dijkstra; Pasqualina M. Sarro; Ronald Dekker;
IEEE Sensors,
Volume 20, Issue 3, pp. 1150-1157, 2020. DOI: 10.1109/JSEN.2019.2946854
Self-aligned micro-optic integrated photonic platform
A. Jovic; N. Sanchez Losilla; J. Sancho Durá; K. Zinoviev; J. L. Rubio Guivernau; E. Margallo-Balbás; M. Mastrangeli; G. Pandraud; P. M. Sarro;
Applied Optics,
Volume 59, Issue 1, pp. 180-189, 2020. DOI: 10.1364/AO.59.000180
Low-Humidity Sensing Properties of Multi-Layered Graphene Grown by Chemical Vapor Deposition
Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Pasqualina M. Sarro; Georg S. Duesberg;
MDPI Sensors,
Volume 20, Issue 11, pp. 3174, 2020.
document
Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition
Filiberto Ricciardella; Sten Vollebregt; Bart Boshuizen; F.J.K. Danzl; Ilkay Cesar; Pierpaolo Spinelli; Pasqualina Maria Sarro;
Material Research Express,
2020. DOI: 10.1088/2053-1591/ab771e
The Impact of Gate Recess on the H2 Detection Properties of Pt-AlGaN/GaN HEMT Sensors
Robert Sokolovskij; Jian Zhang; Hongze Zheng; Wenmao Li; Yang Jiang; Gaiying Yang; Hongyu Yu; Pasqualina M. Sarro; Guoqi Zhang;
IEEE Sensors,
Volume 20, Issue 16, pp. 8947-8955, 2020.
document
Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration
J. A. Alfaro-Barrantes; M. Mastrangeli; D. J. Thoen; S. Visser; J. Bueno; J. J. A. Baselmans; P. M. Sarro;
IEEE Electron Device Letters,
Volume 41, Issue 7, pp. 1114-1117, 2020. DOI: 10.1109/LED.2020.2994862
A miniaturized EHT platform for accurate measurements of tissue contractile properties
M. Dostanic; L. M. Windt; J. M. Stein; B. J. van Meer; M. Bellin; V. Orlova; M. Mastrangeli; C. L. Mummery; P. M. Sarro;
Journal of Microelectromechanical Systems,
Volume 29, Issue 5, pp. 881-887, July 2020. DOI: 10.1109/JMEMS.2020.3011196
The influence of H2 and NH3 on catalyst nanoparticle formation and carbon nanotube growth
R. Pezone; S. Vollebregt; P.M. Sarro; Sandeep Unnikrishnan;
Carbon,
Volume 170, pp. 384-393, 2020.
document
Low power AlGaN/GaN MEMS pressure sensor for high vacuum application
Jianwen Sun; Dong Hu; Zewen Liu; Luke Middelburg; Sten Vollebregt; Pasqualina M. Sarro; Guoqi Zhang;
Sensors and Actuators A: Physical,
Volume 314, pp. 112217, 2020.
document
Quantum motion of a squeezed mechanical oscillator attained via an optomechanical experiment
P. Vezio; A. Chowdhury; M. Bonaldi; A. Borrielli; F. Marino; B. Morana; G. A. Prodi; P. M. Sarro; E. Serra; F. Marin;
Physical Review A,
Volume 102, pp. 053505, 2020.
document
A high responsivity and controllable recovery ultraviolet detector based on a WO3 gate AlGaN/GaN heterostructure with an integrated micro-heater
Sun, Jianwen; Zhang, Shuo; Zhan Teng; Liu, Zewen; Wang Junxi; Yi Xiaoyan; Li Jinmin; P. M. Sarro; GuoQi Zhang;
Journal of Materials Chemistry C,
Volume 8, Issue 16, pp. 5409-5416, 2020. DOI: 10.1039/D0TC00553C
document
FET-based charge sensor for organs-on-chip with in-situ electrode decoration
H. Aydogmus; H. J. van Ginkel; M. Mastrangeli; GuoQi Zhang; P.M. Sarro;
In International MicroNanoConference,
December 2020.
Enabling Actuation and Sensing in Organs-On-Chip Using Electroactive Polymers
P. Motreuil-Ragot; A. Hunt; D. Kasi; B. Brajon; A. M. J. M. van den Maagdenberg; V. Orlova; M. Mastrangeli; P. M. Sarro;
In IEEE 3rd International Conference on Soft Robotics (RoboSoft 2020),
2020. DOI: 10.1109/RoboSoft48309.2020.9115977
Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration
J. A. Alfaro-Barrantes; M. Mastrangeli; D. J. Thoen; J. Bueno; J. J. A. Baselmans; P. M. Sarro;
In IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2020),
2020. DOI: 10.1109/MEMS46641.2020.9056165
Miniaturized engineered heart tissues from human induced pluripotent cell-derived co-culture
L. Windt; M. Dostanic; J. Stein; V. Meraviglia; G. Campostrini; M. Bellin; V. Orlova; M. Mastrangeli; P. M. Sarro; B. van Meer; C. Mummery;
In EUROoCS Conference 2020,
2020.
A 3D microelectrode array to record neural activity at different tissue depths
T. de Rijk; M. Hu; J.-P. Frimat; A. M. J. M. van den Maagdenberg; P. M. Sarro; M. Mastrangeli;
In EUROoCS Conference 2020,
July 2020.
FET-based integrated charge sensor for organ-on-chip applications
H. Aydogmus; M. Dostanic; M. Jahangiri; R. Sinha; W. F. Quiros-Solano; M. Mastrangeli; P. M. Sarro;
In IEEE Sensors 2020,
2020. DOI: 10.1109/SENSORS47125.2020.9278692
Metal and Polymeric Strain Gauges for Si-Based, Monolithically Fabricated Organs-on-Chips
Quirós-Solano, William F.; Gaio, Nikolas; Silvestri, Cinzia; Pandraud, Gregory; Dekker, Ronald; Sarro, Pasqualina M.;
Micromachines,
Volume 10, Issue 8, pp. 536, Aug 2019. DOI: 10.3390/mi10080536
document
Analysis of a calibration method for non-stationary CVD multi-layered graphene-based gas sensors
Filiberto Ricciardella; Tiziana Polichetti; Sten Vollebregt; Brigida Alfano; Ettore Massera; Lina Sarro;
IOP Nanotechnology,
Volume 30, pp. 385501-1-8, 2019. DOI: 10.1088/1361-6528/ab2aac
document
Characterization of an Acetone Detector based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated with Micro-heater
Jianwen Sun; Robert Sokolovskij; Elina Iervolino; Fabio Santagata; Zewen Liu; Pasqualina M. Sarro; GuoQi Zhang;
IEEE Transactions on Electron Devices,
2019. DOI: 10.1109/TED.2019.2936912
document
Growth of multi-layered graphene on molybdenum catalyst by solid phase reaction with amorphous carbon
Filiberto Ricciardella; Sten Vollebregt; Evgenia Kurganova; A.J.M. Giesbers; Majid Ahmadi; Lina Sarro;
2D Materials,
Volume 6, pp. 035012, 2019. DOI: 10.1088/2053-1583/ab1518
Calibrated quantum thermometry in cavity optomechanics
Chowdhury, Avishek; Vezio, Paolo; Bonaldi, Michele; Borrielli, Antonio; Marino, Francesco; Morana, Bruno; Pandraud, Gregory; Pontin, Antonio; Prodi, Giovanni; Sarro, Lina; Serra, Enrico; Marin, Francesco;
Quantum Science and Technology,
2019.
Suspended tungsten trioxide (WO3) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater
Jianwen Sun; Teng Zhan; Zewen Liu; Junxi Wang; Xiaoyan Yi; Lina Sarro; GuoQi Zhang;
Optics Express,
Volume 27, Issue 25, 2019.
document
Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated with Micro-heater
Jianwen Sun; Robert Sokolovskija; Elina Iervolino; Zewen Liu; Pasqualina M. Sarro; GuoQi Zhang;
Journal of Microelectromechanical Systems,
2019.
document
MEMS Enabled Fast Time-Resolved X-Ray Diffraction Characterization Platform for Copper Nanoparticle Sintering in Heterogeneous Integration Applications
Boyao Zhang; Jia Wei; Bottger, A. J.; van Zeijl, H. W.; Sarro, P. M.; GuoQi Zhang;
In 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Danvers: IEEE,
2019. DOI: 10.1109/TRANSDUCERS.2019.8808192
Wafer-scale integration of CVD graphene on CMOS devices using a transfer-free approach
Sten Vollebregt; Joost Romijn; Henk W. van Zeijl; Pasqualina M. Sarro;
In Graphene Week,
2019.
Free-standing, Transfer-free Graphene-based Differential Pressure Sensors
R. Ramesha; S. Vollebregt; P.M. Sarro;
In SAFE/ProRISC,
2019.
A miniaturized EHT platform for contractile tissue measurements
M. Dostanic; L. Windt; J. Stein; B. van Meer; M. Mastrangeli; C. Mummery; P. M. Sarro;
In International MicroNanoConference,
Utrecht (NL), December 10-11, 2019.
Transfer-free Graphene-based Differential Pressure Sensor
Raghutham Ramesha; Sten Vollebregt; Lina Sarro;
In Proc. IEEE NMDC,
2019.
Enabling actuation and sensing in organs-on-chip using electroactive polymers
P. Motreuil-Ragot; A. Hunt; D. Kasi; B. Brajon; A. van den Maagdenberg; V. Orlova; M. Mastrangeli; P. M. Sarro;
In International MicroNanoConference,
Utrecht (NL), December 10-11, 2019.
A wafer-scale process for the monolithic integration of CVD graphene and CMOS logic for smart MEMS/NEMS sensors
Joost Romijn; Sten Vollebregt; Henk W. van Zeijl; Pasqualina M. Sarro;
In IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE,
2019. DOI: 10.1109/MEMSYS.2019.8870741
Sensor applications for organ-on-chip platforms
H. Aydogmus; M. Dostanic; M. Jahangiri; R. Sinha; W. F. Quiros-Solano; M. Mastrangeli; P. M. Sarro;
In International MicroNanoConference,
Utrecht (NL), December 10-11, 2019.
Microengineered organs-on-chip
H. Aydogmus; M. Dostanic; P. Motreuil-Ragot; M. Mastrangeli; P. M. Sarro;
Poster, presented at QBio Symposium, Utrecht (NL), October 29, 2019.
Full wafer transfer-free graphene
Filiberto Ricciardella; Sten Vollebregt; Lina Sarro;
Patent, WO2019125140; NL2020111, 2019.
Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO
Violeta Prodanovic; Hong Wah Chan; Anil U. Mane; Jeffrey W. Elam; Matthias M. Minjauw; Christophe Detavernier; Harry van der Graaf; Pasqualina M. Sarro;
Journal of Vacuum Science and Technology A,
Volume 36, Issue 6, pp. 06A102-1-9, 2018.
document
Microfabricated tuneable and transferable porous PDMS membranes for Organs-on-Chips
W. F. Quirós-Solano; N. Gaio; O. M. J. A. Stassen; Y. B. Arik; C. Silvestri; N. C. A. Van Engeland; A. Van der Meer; R. Passier; C. M. Sahlgren; C. V. C. Bouten; A. van den Berg; R. Dekker; P. M. Sarro;
Scientific Reports,
pp. 13524, 2018. DOI: 10.1038/s41598-018-31912-6
Advances in the electronics for cyclic voltammetry: the case of gas detection by using microfabricated electrodes
Giorgio Pennazza; Marco Santonico; Luca Vollero; Alessandro Zompanti; Anna Sabatini; Nandeesh Kumar; Ivan Pini; William F Quiros Solano; Lina Sarro; Arnaldo D'Amico;
Frontiers in Chemistry,
Volume 6, pp. 327, 2018.
document
Carbon Nanotube Array: Scaffolding Material for Opto, Electro, Thermo, and Mechanical Systems
Amir M. Gheytaghi; H. van Zeijl; S. Vollebregt; R.H. Poelma; C. Silvestri; R. Ishihara; G. Q. Zhang; P. M. Sarro;
Innovative Materials,
Volume 3, pp. 22-25, 2018.
Quantum nondemolition measurement of optical field fluctuations by optomechanical interaction
A Pontin; M Bonaldi; A Borrielli; L Marconi; F Marino; G Pandraud; GA Prodi; PM Sarro; E Serra; F Marin;
Physical Review A,
Volume 97, Issue 3, pp. 033833, 2018.
A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner
Aleksandar Jovic; Grégory Pandraud; Nuria Sanchez Losilla; Juan Sancho; Kirill Zinoviev; Jose Luis Rubio; Eduaro Margallo-Ballbas; Pasqualina M. Sarro;
Journal of Microelectromechanical Systems,
Volume 27, Issue 2, pp. 259-268, 2018.
document
Hydrogen sulfide detection properties of Pt-gated AlGaN/GaN HEMT-sensor
Sokolovskij, R.; Zhang, J.; Iervolino, E.; Zhao, C.; Santagata, F.; Wang, F.; Yu, H.; Sarro, P. M.; GuoQi Zhang;
Sensors and Actuators B: Chemical,
2018. DOI: 10.1016/j.snb.2018.08.015
Ultra-thin Alumina and Silicon Nitride MEMS Fabricated Membranes for the Electron Multiplication
Violeta Prodanović; Hong Wah Chan; W A van der Graaf; Lina Sarro;
Nanotechnology,
Volume 29, pp. 155703, 2018.
document
MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing
Iannacci, J.; Serra, E.; Sordo, G.; Bonaldi, M.; Borrielli, A.; Schmid, U.; Bittner, A.; Schneider, M.; Kuenzig, T.; Schrag, G.; Pandraud, G.; Sarro, P. M.;
Microsystem Technologies,
pp. 5027-5036, 2018. DOI: 10.1007/s00542-018-3923-1
Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes
Cinzia Silvestri; Michele Riccio; René H. Poelma; Aleksandar Jovic; Bruno Morana; Sten Vollebregt; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
Small,
Volume 14, Issue 20, pp. 1800614, 2018. DOI: 10.1002/smll.201800614
Vacuum assisted liquified metal (VALM) TSV filling method with superconductive material
J. A. Alfaro; P. M. Sberna; C. Silvestri; M. Mastrangeli; R. Ishihara; P. M. Sarro;
In IEEE Micro Electro Mechanical Systems (MEMS),
Belfast, Northern Ireland, UK, pp. 547-550, Jan. 21-25 2018. DOI: 10.1109/MEMSYS.2018.8346611
document
A Highly Miniaturized Single-chip MOMS Scanner for All-in-one Imaginging Solution
A. Jovic; T. Uto; K. Hei; J. Sancho; N. Sanchez; K. Zinoviev; J.L. Rubio; E. Margallo; G. Pandraud; P.M. Sarro;
In 31th IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018.
A novel method to transfer porous PDMS membranes for high throughput Organ-on-Chip and Lab-on-Chip assembly
William.F Quirós-Solano; Nikolas Gaio; Cinzia Silvestri; Oscar M. J. A. Arik; Yusuf, B. Stassen; Andries van der Meer; Carlijn V.C. Bouten; Albert van den Berg; Ronald Dekker; P.M. Sarro;
In 31th IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
pp. 318-321, 2018.
A transfer-free approach to wafer-scale graphene deposited by chemical vapour deposition
Sten Vollebregt; Filiberto Ricciardella; Joost Romijn; Manvika Singh; Shengtai Shi; Lina Sarro;
In Graphene Conference,
2018. (invited).
document
Vacuum Assisted Liquified Metal (VALM) TSV Filling Method With Superconductive Material
J.A. Alfaro; P.M. Sberna; C. Silvestri; M. Mastrangeli; R. Ishihara; P.M. Sarro;
In 31th IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018. DOI: 10.1109/MEMSYS.2018.8346611
A Multi Well Plate Organ-on-chip (Ooc) Device For In-vitro Cell Culture Stimulation And Monitoring
N. Gaio; A. Waafi; M.L.H. Vlaming; E. Boschman; P. Dijkstra; P. Nacken; S.R. Braam; C. Boucsein; P.M. Sarro; R. Dekker;
In 31th IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018.
A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene
Joost Romijn; Sten Vollebregt; Robin J. Dolleman; Manvika Singh; Herre S.J. van der Zant; Peter G. Steeneken; Pasqualina M. Sarro;
In Proceedings of IEEE NEMS,
2018.
Effect of droplet shrinking on surface acoustic wave response in microfluidic applications
Thu Hang Bui; Van Nguyen; Sten Vollebregt; Bruno Morana; Henk van Zeijl; Trinh Chu Duc; P.M. Sarro;
Applied Surface Science,
Volume 426, pp. 253-261, 2017.
document
Liquid identification by using a micro-electro-mechanical interdigital transducer
Thu Hang Bui; Bruno Morana; Atef Akhnoukh; Trinh Chu Duc; Pasqualina M Sarro;
Analyst,
Volume 142, Issue 5, pp. 763-771, 2017.
Effects of graphene defects on gas sensing properties towards NO2 detection
Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Mario Miscuglio; Brigida Alfano; Maria L. Miglietta; Ettore Massera; Girolamo Di Francia; Pasqualina M. Sarro;
Nanoscale,
Volume 9, pp. 6085-6093, 2017.
document
CVD transfer-free graphene for sensing applications
Chiara Schiattarella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Maria Lucia Miglietta; Girolamo Di Francia; Pasqualina Maria Sarro;
Beilstein Journal of Nanotechnology,
Volume 8, pp. 1015-1022, 2017.
document
A transfer-free wafer-scale method for the fabrication of suspended graphene beams for squeeze-film pressure sensors
S. Vollebregt; R.J. Dolleman; H.S.J. van der Zant; P.G. Steeneken; P.M. Sarro;
In Graphene Week,
2017.
An Innovative Approach to Overcome Saturation and Recovery Issues of CVD graphene-Based Gas Sensors
F. Ricciardella; S. Vollebregt; T. Polichetti; B. Alfano; E. Massera; P. M. Sarro;
In Proceedings of IEEE Sensors Conference,
pp. 1224-1226, 2017.
Integrated SiGe Detectors for Si Photonic Sensor Platforms
Gregory Pandraud; Silvana Milosavljevic; Amir Sammak; Matteo Cherchi; Aleksandar Jovic; Pasqualina Sarro;
In Proceedings of Eurosensors,
pp. 559, 2017.
Wafer-scale measurements of the specific contact resistance between different metals and mono- and multi-layer graphene
S. Vollebregt; M. Singh; D.J. Wehenkel; R. van Rijn; P.M. Sarro;
In Proc. of the 43rd international conference on Micro and Nanoengineering (MNE),
pp. 152, 2017.
Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions
Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
In Proceedings of Eurosensors 2017,
pp. 445, 2017.
document
Polymeric strain gauges as pressure sensor for microfabricated organ-on-chips
W.F. Quiros Solano; N. Gaio; C. Silvestri; G. Pandraud; P.M. Sarro;
In Proc.of Transducers 2017, the 19th International Conference on Solid-state Sensors, Actuators, and Microsystems,
pp. 1296-1299, 2017.
High sensitive CVD graphene-based gas sensors operating under environmental conditions
Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
In Graphene Conference,
2017.
Ultra-thin ALD MGO membranes as mems transmission dynodes in a timed photon counter
Violeta Prodanovic; Hong Wah Chan; Anil U Mane; Jeffrey W Elam; Harry VD Graaf; Pasqualina M Sarro;
In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
pp. 740-743, 2017.
Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity
Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; GuoQi Zhang; Pasqualina M Sarro;
In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
pp. 266-269, 2017.
Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners
Aleksandar Jovic; Gregory Pandraud; Nuria Sanchez; Juan Sancho; Kirill Zinoviev; Jose L Rubio; Eduardo Margallo; Pasqualina M Sarro;
In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
pp. 797-800, 2017.
Pt-AlGaN/GaN HEMT-Sensor for Hydrogen Sulfide (H2S) Detection
R Sokolovskij; E Iervolino; C Zhao; F Santagata; F Wang; H Yu; PM Sarro; GuoQi Zhang;
In Proceedings of Eurosensors,
pp. 463, 2017.
Suspended graphene beams with tunable gap for squeeze-film pressure sensing
S. Vollebregt; R.J. Dolleman; H.S.J. van der Zant; P.G. Steeneken; P.M. Sarro;
In Proc.of Transducers 2017, the 19th International Conference on Solid-state Sensors, Actuators, and Microsystems,
pp. 770-773, 2017.
Potential applications of electron emission membranes in medicine
Yevgen Bilevych; Stefan E. Brunner; Hong Wah Chan; Edoardo Charbon; Harry van der Graaf; Cornelis W. Hagen; Gert Nützelf; Serge D. Pintof; Violeta Prodanović; Daan Rotman; Fabio Santagata; Lina Sarro; Dennis R. Schaar;
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
Volume 809, pp. 171-174, 2016.
SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract
F. Puppo; M.-A. Doucey; J.-F. Delaloye; T.S.Y. Moh; G. Pandraud; P.M. Sarro; G. De Micheli; S. Carrara;
IEEE Sensors Journal,
Volume 16, Issue 10, pp. 3374-3381, 2016.
document
A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis
T.H. Bui; B. Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
Journal of Applied Physics,
Volume 120, Issue 7, pp. 074504, 2016.
The Tynode: A new vacuum electron multiplier
Harry van der Graaf; Hassan Akhtar; Neil Budko; Hong Wah Chan; Cornelis W. Hagen; Conny C.T. Hansson; Gert Nützel; Serge D. Pinto; Violeta Prodanović; Behrouz Raftari; Pasqualina M. Sarro; John Sinsheimer; John Smedle;
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
2016.
document
Cytostretch, an Organ-on-Chip Platform
Gaio, N.; van Meer, B.; Quiros Solano, W.; Bergers, L.; van de Stolpe, A.; Mummery, C.; Sarro, P.M.; Dekker, R.;
Micromachines,
Volume 7, Issue 7, pp. 120, 2016.
Control of recoil losses in nanomechanical SiN membrane resonators
A. Borrielli; L. Marconi; F. Marin; F. Marino; B. Morana; G. Pandraud; A. Pontin; G. A. Prodi; P. M. Sarro; E. Serra; M. Bonaldi;
Physical Review B,
Volume 94, pp. 121403, 2016.
Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
Nanoscale,
Volume 8, pp. 8266-8275, 2016.
document
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
E. Serra; M. Bawaj; A. Borrielli; G. Di Giuseppe; S. Forte; N. Kralj; N. Malossi; L. Marconi; F. Marin; F. Marino; B. Morana; R. Natali; G. Pandraud; A. Pontin; G. A. Prodi; M. Rossi; P. M. Sarro; D. Vita;
AIP Advances,
Volume 6, pp. 065004, 2016.
Dynamical two-mode squeezing of thermal fluctuations in a cavity opto-mechanical system
A. Pontin; M. Bonaldi; A. Borrielli; L. Marconi; F. Marino; G. Pandraud; G. A. Prodi; P.M. Sarro; E. Serra; F. Marin;
Physical Review Letters,
Volume 116, pp. 103601, 2016.
Stretchable Binary Fresnel Lens for Focus Tuning
Xueming Li; Lei Wei; Ren� H. Poelma; Sten Vollebregt; Jia Wei; Hendrik Paul Urbach; Pasqualina M. Sarro; GuoQi Zhang;
Scientific Reports,
Volume 6, pp. 25348, 2016.
Flexible Microsystems
P.J. French; P.M. Sarro;
In Proceeding Smart Systems Integration,
Munich, Germany, mesago, pp. 181-188, March 2016.
Flexible Microsystems
P.J. French; P.M. Sarro;
In Proceeding Smart Systems Integration,
Munich, Germany, mesago, pp. 181-188, March 2016.
Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application
Ying-ge Li; Lian-xiang Ma; P. M. Sarro; Dong-xing Du; Xue-feng Liu;
In Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA),
pp. 368-370, 2016.
PEDOT:PDMS: a conductive and flexible polymer for sensor integration in Organ-on-Chip platforms
W.Quiros Solano; N.Gaio; C. Silvestri; G. Pandraud; P.M. Sarro;
In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
pp. 1184-1187, 2016.
A calorimetry-based measurement apparatus for switching losses in high power electronic devices
D. Iero; F.G. Della Corte; G. Fiorentino; P.M. Sarro;
In IEEE International Energy Conference,
pp. 1-5, 2016.
Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators
S. Thomas; A. Jovic; B. Morana; F. Buja; A. Gkouzou; G. Pandraud; P.M. Sarro;
In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
pp. 1144-1147, 2016.
document
High sensitive gas sensors realized by a transfer-free process of CVD graphene
Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Lina Sarro;
In Proceedings of the IEEE Sensors conference,
2016.
Effect of the interruption of the propagation path on the response of surface acoustic wave transducers
Thu Hang Bui; An Tran; Bruno Morana; Jia Wei; Trinh Chu Duc; P.M. Sarro;
In Proceedings of the IEEE Sensors conference,
2016.
A predefined wafer-scale CVD graphene deposition method requiring no transfer
Sten Vollebregt; Lina Sarro;
In Graphene Week,
2016.
All-SiC surface micromachined nanoreactor for in-situ transmission electron microscopy
B. Morana; C. Silvestri; J.F. Creemer; P.M. Sarro;
In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
pp. 753-756, 2016.
Fabrication process of Si microlenses for OCT systems
A. Jovic; G. Pandraud; K. Zinoviev; J. L. Rubio; E. Margallo; P. M. Sarro;
In Proc. SPIE 9888, Micro-Optics,
2016.
document
A novel mixing surface acoustic wave device for liquid sensing applictions
Thu Hang Bui; B, Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
pp. 745-748, 2016.
A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors
S. Vollebregt; B. Alfano; F. Ricciardella; A.J.M. Giesbers; Y. Grachova; H.W. van Zeijl; T. Polichetti; P.M. Sarro;
In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
pp. 17-20, 2016.
Design, fabrication and measurement of 0.3 THz on-chip double-slot antenna enhanced by artificial dielectrics.
W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; M.P. Sarro; A. Neto;
IEEE Transactions on Terahertz Science and Technology,
Volume 5, Issue 2, pp. 288-298, Mar. 2015. DOI: 10.1109/TTHZ.2015.2399276
Design, Fabrication, and Measurements of a 0.3 THz On-Chip Double Slot Antenna Enhanced by Artificial Dielectrics
W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; P. M. Sarro; A. Neto;
IEEE Transactions on Terahertz Science and Technology,
Volume 5, Issue 2, pp. 288-298, March 2015.
SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract
Puppo, F.; Doucey, Marie-Agnes; Delaloye, Jean-Francois; Moh, T.S.Y.; Pandraud, G.; Sarro, P.M.; De Micheli, G.; Carrara, S.;
IEEE Sensors Journal,
2015.
Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties
E.Serra; M. Bonaldi; A.Borrielli; L.Conti; G. Pandraud; P. M. Sarro;
Sensors and Actuators A: Physical,
Volume 227, pp. 48-54, 2015.
Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances
G Fiorentino; S Vollebregt; FD Tichelaar; R Ishihara; PM Sarro;
IOP Nanotechnology,
Volume 26, Issue 6, pp. 064002, 2015.
document
Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics
E. Serra; M. Bonaldi; A. Borrielli; F. Marin; L. Marconi; F. Marino; G. Pandraud; A. Pontine; G.A. Prodi; P.M. Sarro;
Microelectronic Engineering,
2015.
document
Ingredients for sensors science
Arnaldo D'Amicoa; Corrado Di Natalea; Pasqualina M. Sarro;
Sensors and Actuators B: Chemical,
Volume 207, pp. 1060-1068, 2015.
Structured film for compensation of anthropogenic radiative forcing
G. Vdovin; P.M. Sarro; O. Soloviev; M. Loktev; R. Angel;
Optics Letters,
2015.
On-chip double slot antenna at 300 GHz enhanced by artificial dielectrics
W. H. Syed; G. Fiorentino; D. Cavallo; P. M. Sarro; A. Neto;
In Eur. Conf. Antennas Propag., Lisbon, Portugal,
April 12-17 2015.
Performance enhancement of 300 GHz on-chip double slot antenna by means of artificial dielectrics
W. H. Syed; G. Fiorentino; D. Cavallo; P. M. Sarro; A. Neto; I. E. Lager;
In 45th European Microwave Conference,
Paris, France, Sep. 6-11 2015.
A measurement apparatus for switching losses based on an heat-flux sensor
Iero, Demetrio; Della Corte, Francesco G.; Fiorentino, Giuseppe; Sarro, Pasqualina M.; Morana, B.;
In AISEM Annual Conference,
pp. 1-4, 2015.
Molybdenum grown CVD graphene Schottky diodes
S. Vollebregt; F. Ricciardella; Y. Grachova; T. Polichetti; P.M. Sarro;
In Graphene Week,
2015.
Tunable binary fresnel lens based on stretchable PDMS/CNT compsite
Xueming Li; L. Wei; S. Vollebregt; R. Poelma; Y. Shen; Jia Wei; P. Urbach; P.M. Sarro; GuoQi Zhang;
In Transducers,
pp. 2041-2044, 2015.
Silicon-PDMS optofluidic integration
Testa Genni; Gianluca Persichetti; Pasqualina M. Sarro; Romeo Bernini;
In Proc. SPIE 9367, Silicon Photonics X,
pp. 936718, 2015.
Optimization of Silicon-rich Silicon Nitride Films for Electron Multiplication in Timed Photon Counters
V. Prodanovic; H.W. Chan; J. Smedley; A. Theulings; S. Tao; H.v.d. Graaf; P.M. Sarro;
In Procedia Engineering 120: EUROSENSORS 2015,
pp. 1111-1114, 2015.
Crystallinity variations over the length of vertically aligned carbon nanotubes grown by chemical vapour deposition
S. Vollebregt; P. Padmanabhan; C. Silvestri; P.M. Sarro;
In 41st Micro and Nano Engineering conference,
2015.
The Role of Edge Defects in Liquid Phase Exfoliated and Chemical Vapor Deposited Graphene for NO2 Detection
F Ricciardella; S Vollebregt; T Polichetti; B Alfano; PM Sarro; ML Miglietta; E Massera; G Di Francia;
In GraphITA,
2015.
SAW device for liquid vaporization rate and remaining molecule sensing
Thu Hang Bui; Bruno Morana; An Tran; Tom Scholtes; Trinh Chu Duc; Pasqualina M. Sarro;
In IEEE Sensors Conference,
2015.
On-chip double slot antenna at 300 GHz enhanced by artificial dielectrics
Syed, W. H.; Fiorentino, G.; Cavallo, D.; Sarro, P. M.; Neto, A.;
In Eur. Conf. Antennas Propag.,
2015.
Performance enhancement of 300 GHz on-chip double slot antenna by means of artificial dielectrics
Syed, W. H.; Fiorentino, G.; Cavallo, D.; Sarro, P. M.; Neto, A.; Lager, I. E.;
In 45th European Microwave Conference,
2015.
Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing
William Quiros Solano; Gregory Pandraud; Pasqualina M. Sarro;
In IEEE Sensors Conference,
2015.
Fabrication and application of temperature triggered MEMS switch for active cooling control in solid state lighting system
Huaiyu Ye; Jai Wei; van Zeijl, HW; Sarro, PM; GuoQi Zhang;
Microelectronics Reliability,
Volume 54, Issue 6-7, pp. 1338-1343, 2014.
Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
Iannacci, J; Serre, E; Di Criscienzo, R; Sordo, G; Gottardi, M; Borrielli, A; Bonaldi, M; Kuenzig, T; Schrag, G; Pandraud, G; Sarro, PM;
Microsystem Technologies: micro and nanosystems - information storage and processing systems,
Volume 20, Issue 4-5, pp. 627-640, 2014.
Stiction-Induced Sealing of Surface Micromachined Channels
B Morana; RH Poelma; G Fiorentino; J Wei; JF Creemer; PM Sarro;
Journal of Microelectromechanical Systems,
Volume 23, Issue 2, pp. 459-470, 2014.
document
A hybrid silicon-PDMS optofluidic platform for sensing applications
Testa, G; Persichetti, G; Sarro, PM; Bernini, R;
Biomedical Optics Express,
Volume 5, Issue 2, pp. 417-426, 2014.
Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments
Borrielli, A; Bonaldi, M; Serre, E; Bagolini, A; Bellutti, P; Cataliotti, FS; Marin, F; Marino, F; Pontin, A; Prodi, GA; Pandraud, G; Sarro, PM; Lorito,; Zoumpoulidis, T;
Microsystem Technologies,
Volume 20, Issue 4-5, pp. 907-917, 2014.
Front-to-back ratio enhancement of on-chip antenna using artificial dielectrics at 300 GHz
W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; A. Neto; P. M. Sarro;
In 2014 USNC-URSI Radio Science Meeting (Joint with AP-S Symposium),
pp. 140-140, July 2014.
Enhancement of front to back ratio of on chip antenna by artificial dielectrics at 300 GHz
W. H. Syed; G. Fiorentino; D. Cavallo; M. Spirito; A. Neto; P. M. Sarro;
In 2014 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz),
pp. 1-2, Sept 2014.
High Sensitive Detection in Tumor Extracts with SiNW-FET in-Air Biosensors
F. Puppo; M.-A. Doucey; J.-F. Delaloye; T.S.Y. Moh; G. Pandraud; P.M. Sarro; G. De Micheli; S. Carrara;
In IEEE Sensors,
pp. 866-869, 2014.
Associated IDTs in Surface Acoustic Wave Devices for Closed-loop Control Inkjet System
Thu Hang Bui; T. Bui Duc; T. Chu Duc; P.M. Sarro;
In IEEE Sensors,
pp. 1936-1939, 2014.
Numerical modeling of flexible actuator for dynamic lighting
Teng Ma; Xueming Li; Jia Wei; GuoQi Zhang; P. M. Sarro;
In 15th International Conference on thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems,
2014.
Selective coating deposition on high Q single crystal silicon resonators for the investigation og thermal nois statistical properties
E. Serra; M. Bonaldi; A. Borrielli; L. Conti; G. Pandraud; P.M. Sarro;
In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
pp. 1485-1488, 2014.
Developing High-Optical Quality Silicon Resonators Working in the Quantum Regime
E. Serra, M. Bonaldi, A. Borrielli, F. Marin, L. Marconi, F. Marino, G. Pandraud, A. Pontin, G.A. Prodi; P.M. Sarro;
In 40th Micro and Nano Engineering Conference,
2014.
Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications
C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; GuoQi Zhang; P.M. Sarro;
In IEEE Sensors,
pp. 827-830, 2014.
document
Front-to-back ratio enhancement of on-chip antenna using artificial dielectrics at 300 GHz
Syed, WH; Fiorentino, G; Cavallo, D; Spirito, M; Neto, A; Sarro, PM;
In Proceedings - 2014 USNC-URSI Radio Science Meeting (Joint with AP-S Symposium),
pp. 140, 2014.
Miniaturized particulate matter sensor for portable air quality monitoring devices
Xueming Li; E Iervolino; F Santagata; Jia Wei; Cadmus Yuan; PM Sarro; GuoQi Zhang;
In IEEE Sensors,
pp. 2151-2154, 2014.
High Quality Wafer-scale CVD Graphene on Molybdenum Thin Film for Sensing Application
Yelena Grachova; Sten Vollebregt; Andrea Leonardo Lacaita; Pasqualina M. Sarro;
In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
pp. 1501-1504, 2014.
document
Artificial Dielectric Layer Based on PECVD Silicon Carbide for Terahertz Sensing Applications
G. Fiorentino; W. Syed; A. Adam; A. Neto; P.M. Sarro;
In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
pp. 1497-1500, 2014.
Optofluidic hybrid platform with integrated solid core waveguides
Testa, G; Persichetti, G; Sarro, PM; Bernini, R;
In Proceedings of SPIE - Integrated Optics: Devices, Materials and Technologies XVIII Vol. 8988. Proceedings of SPIE- International Society for Optical Engineering,
pp. 1-6, 2014.
Enhancement of Front to Back Ratio of on Chip Antenna by Artificial Dielectrics at 300 GHz
Syed, WH; Fiorentino, G; Cavallo, D; Spirito, M; Neto, A; Sarro, PM;
In 39th International Conference on Infrared, Millimeter, and Terahertz Waves,
2014.
3D solid-state supercapacitors obtained by ALD coating of high-density carbon nanotubes bundles
Fiorentino, Giuseppe; Vollebregt, Sten; Tichelaar, FD; Ishihara, Ryoichi; Sarro, Pasqualina M;
In Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on,
IEEE, pp. 342--345, 2014.
CNT bundles growth on microhotplates for direct measurement of their thermal properties
C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; GuoQi Zhang; P.M. Sarro;
In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
San Francisco, USA, Jan. 2014.
document
MEMS-Based Multi-Modal Vibration Energy Harvesters for Ultra-Low Power Autonomous Remote and Distributed Sensing
Jacopo Iannacci; Enrico Serra; Guido Sordo; Michele Bonaldi; Antonio Borrielli; Ulrich Schmid; Achim Bittner; Michael Schneider; Thomas Kuenzig; Gabriele Schrag; Gregory Pandraud; Pasqualina Sarro;
In 14th Mechatronics Forum International Conference,
2014.
The Tipsy Single Soft Photon Detector and the Trixy Ultrafast Tracking Detector
H. van der Graaf; M.A. Bakker; H.W. Chan; E. Charbon; F. Santagata; P.M. Sarro; D.R. Schaart;
IOP Journal of Instrumentation,
Volume 8, Issue 1, pp. C01036, January 2013.
document
Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications
Yujian Huang; Gregory Pandraud; Pasqualina M. Sarro;
Journal of Vacuum Science & Technology A,
Volume 31, Issue 1, pp. 01A148, 2013.
Resonance frequency of locally heated cantilever beams
E. Iervolino; M. Riccio; F. Santagata; J. Wei; A.W. van Herwaarden; A. Irace; G. Breglio; P.M. Sarro;
Sensors and Actuators A,
Volume 190, pp. 6-12, Feb. 2013. DOI 10.1016/j.sna.2012.10.008.
Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F. Santagata; C. Farriciello; G. Fiorentino; H.W. van Zeijl; C. Silvestri; GuoQi Zhang; P.M. Sarro;
Journal of Micromechanics and Microengineering,
2013.
Selectivity and reusability study of functionalized ALD TiO2 evanescent wave sensors
A. Purniawan; P.J. French; M.J.H. Almering; G. Pandraud; P.M. Sarro;
In IEEE Sensors,
Baltimore, USA, IEEE, Nov 2013.
A CMOS-compatible metamaterial to enhance the front to back radiation ratio in terahertz antenna for sensing application
G. Fiorentino; W. Syed; F. Santagata; M. Spirito; G. Pandraud; A. Neto; P. M. Sarro; A. J. L. Adam;
In 2013 IEEE SENSORS,
pp. 1-4, Nov 2013.
A CMOS-compatible metamaterial to enhance the front to back radiation ratio in terahertz antenna for sensing application
Fiorentino, G; Syed, W; Santagata, F; Spirito, M; Pandraud, G; Neto, A; Sarro, PM; Adam, AJL;
In Sensors, 2013 IEEE,
IEEE, pp. 1--4, 2013.
Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates
Morana, B; Fiorentino, G; Pandraud, G; Creemer, JF; Sarro, PM;
In Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on,
IEEE, pp. 484--487, 2013.
Heat flux sensor for power loss measurements of switching devices
Iero, Demetrio; Corte, Francesco G Della; Fiorentino, Giuseppe; Sarro, Pasqualina M; Morana, B;
In Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on,
IEEE, pp. 327--330, 2013.
Carbon Nanotube based heat-sink for solid state lighting
F. Santagata; G. Almanno; S. Vollebregt; C Silvestri; GuoQi Zhang; P.M. Sarro;
In 8th IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS),
pp. 1214-1217, Apr 2013. DOI 10.1109/NEMS.2013.6559937.
Fabrication and optical measurements of a TiO2-ALD evanescent waveguide sensor
A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
Sensors and Actuators A,
Volume 188, pp. 127-132, Dec. 2012. DOI 10.1016/j.sna.2012.05.037.
Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors
Yujian Huang; G. Pandraud; P.M. Sarro;
Optics Letters,
Volume 37, Issue 15, pp. 3162-3164, Aug. 2012. DOI 10.1364/OL.37.003162.
Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor
A. Purniawan; G. Pandraud; T.S.Y. Moh; A. Marthen; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 188, pp. 127-132, 2012.
The atomic layer deposition array defined by etch-back technique: A new method to fabricate TiO2 nanopillars, nanotubes and nanochannel arrays
Yujian Huang; G. Pandraud; P.M. Sarro;
Nanotechnology,
Volume 23, pp. 1-8, Nov. 2012. DOI 10.1088/0957-4484/23/48/485306.
Hybrid silicon-PDMS optofluidic ARROW waveguide
G. Testa; Yujian Huang; L. Zeni; P.M. Sarro;
IEEE Photonics Technology Letters,
Volume 24, Issue 15, pp. 1307-1309, Aug. 2012. DOI 10.1109/LPT.2012.2202645.
6 DOF force and torque sensor for micro-manipulation applications
P. Estevez; J.M. Bank; M. Porta; J. Wei; P.M. Sarro; M. Tichem; U. Staufer;
Sensors and Actuators A,
Volume 186, pp. 86-93, Oct. 2012. DOI 10.1016/j.sna.2012.02.037.
Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers
J. Wei; S. Magnani; P.M. Sarro;
Sensors and Actuators A,
Volume 186, pp. 80-85, Oct. 2012. DOI 10.1016/j.sna.2012.02.021.
A molybdenum MEMS microhotplate for high-temperature operation
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
Sensors and Actuators A,
2012. DOI 10.1016/j.sna.2011.11.023.
A buried vertical filter for micro and nanoparticle filtration
S.J. Li; C. Shen; P.M. Sarro;
Sensors and Actuators A,
Volume 186, pp. 203-209., Oct. 2012. DOI 10.1016/j.sna.2012.04.027.
Linear and rotational thermal micro-stepper motors
A. Khiat; J.W. Spronck; J. van Schieveen; S. Milosavljevic; J. Wei; P. Estevez; P.M. Sarro; U. Staufer;
Microelectronic Engineering,
Volume 98, pp. 497-501, Oct. 2012. DOI 10.1016/j.mee.2012.07.086.
Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
F. Santagata; J.F. Creemer; E. Iervolino; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 22, Issue 10, Sep. 2012. DOI 10.1088/0960-1317/22/10/105025.
Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides
G. Pandraud; E. Margallo-Balb�s; P.M. Sarro;
Journal of Nanophotonics,
Volume 6, pp. 1-7, Nov. 2012. DOI 10.1117/1.JNP.6.063530.
Microcantilevers encapsulated in fluid wells for sensing in liquids
W.J. Venstra; W.H. Wien; P.M. Sarro; J. van Eijk;
Microelectronic Engineering,
Volume 97, pp. 247-250, Sep. 2012. DOI 10.1016/j.mee.2012.03.030.
Mechanical design and characterization for MEMS thin-film packaging
F. Santagata; J.J.M. Zaal; V.G. Huerta; L. Mele; J.F. Creemer; P.M. Sarro;
Journal of Microelectromechanical Systems,
Volume 21, Issue 1, pp. 100-109, Feb. 2012. DOI 10.1109/JMEMS.2011.2170817.
Micromachined nanofiltration modules for lab-on-a-chip applications
C. Shen; V.R.S.S. Mokkapati; H.T.M. Pham; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 22, Issue 2, pp. 1-10., Jan. 2012. DOI 10.1088/0960-1317/22/2/025003.
Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
T. Alan; T. Yokosawa; J. Gaspar; G. Pandraud; O. Paul; F. Creemer; P.M. Sarro; H.W. Zandbergen;
Applied Physics Letters,
Volume 100, pp. 1-4, 2012. DOI 10.1063/1.3688490.
Integrated MEMS: Opportunities \& Challenges
P.J. French; P.M. Sarro;
M Kahrizi (Ed.);
Intech, , pp. 253-276, 2012.
Integrated MEMS: Opportunities & Challenges
P.J. French; P.M. Sarro;
In Micromachining Techniques for Fabrication of Micro and Nano Structures,
InTech, Feb. 2012. DOI 10.5772/31493.
Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
In Proc. SPIE: Optical Sensing and Detection II,
Brussels, Belgium, pp. 1-6, Apr 2012. DOI 10.1117/12.922498.
Artificial dielectric layer as sub-sm wave antenna super-strates
G. Fiorentino; W. H. Syed; A. Neto; P.M. Sarro;
In IEEE Antennas and Propagation Society International Symposium,
July 2012.
High accuracy dual side overlay with wet anisotropic etching for HAR MEMS
H.W. van Zeijl; K. Best; P.M. Sarro;
In Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2012),
pp. 180-183, 2012. ISBN 978-1-4665-6275-2.
Stiction-driven sealing of surface micromachined channels
B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202.
Ultra-flexible devices for 360 _m diameter guidewires
B. Mimoun; V. Henneken; P.M. Sarro; R. Dekker;
In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
Paris, France, IEEE, pp. 472-475, Jan. 2012. ISBN: 978-978-1-4673-0325-5, DOI 10.1109/MEMSYS.2012.6170227.
Silicon nanowire FET arrays for real time detection of chemical activation of cells
T.S.Y. Moh; S.K. Srivastava; S. Milosavljevic; M. Roelse; G. Pandraud; H.W. Zandbergen; L.C.P.M de Smet; C.J.M van Rijn; E.J.R. Sudh�lter; M.A. Jongsma; P.M. Sarro;
In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
Paris, France, IEEE, pp. 1344-1347, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170424.
A comparison between PECVD and ALD for the fabrication of slot-waveguide-based sensors
G. Pandraud; A. Purniawan; E. Margallo-Balb�s; P.M. Sarro;
In Proc. SPIE: Nanophotonics IV,
Brussels, Belgium, Apr. 2012. DOI 10.1117/12.922400.
Analyzing protein denaturation using fast differential scanning calorimetry
R. Splinter; A.W. van Herwaarden; E. Iervolino; G. Vanden Poel; D. Istrate; P.M. Sarro;
In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
Krakow, Poland, Procedia Engineering, pp. 140-143, Sep 2012. DOI 10.1016/j.proeng.2012.09.104.
Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating
A.T. Tran; G. Pandraud; H. Schellevis; P.M. Sarro;
In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
Krakow, Poland, Procedia Engineering, pp. 104-107, Sep 2012. DOI 10.1016/j.proeng.2012.09.095.
A novel approach for piezoresistivity characterization of silicon nanowires
M. Nie; F. Santagata; T. Moh; Q.-A. Huang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 1747-1750, Oct 2012.
Encapsulated aluminum nitride SAW devices for liquid sensing applications
A.T. Tran; G. Pandraud; T.S.Y. Moh; H. Schellevis; A. Akhnoukh; A. Purniawan; P.M. Sarro;
In Proc of the 11th IEEE Sensors Conf,
Taipei, Taiwan, pp. 604-607, Oct. 2012.
Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency
M. Aarts; J. Wei; P.M. Sarro;
In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012),
Kyoto, Japan, pp. 253-256, Mar. 2012. ISBN: 978-1-4673-1124-3; DOI 10.1109/NEMS.2012.6196768.
Multilayer conformal coating of highly dense Multi-Walled Carbon Nanotubes bundles
G. Fiorentino; S. Vollebregt; R. Ishihara; P.M. Sarro;
In 2012 12th IEEE Conference on Nanotechnology (IEEE-NANO),
Birmingham, UK, Aug. 2012. ISBN 978-1-4673-2198-3; DOI 10.1109/NANO.2012.6322054.
Optofluidics: waveguides and devices
G. Testa; Yujian Huang; L. Zeni; P.M. Sarro; R. Bernini;
In Proc. SPIE: Integrated Optics: Devices, Materials, and Technologies XVI,
Feb 2012. DOI 10.1117/12.908683.
Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system
J. Wei; H. Ye; H.W. van Zeijl; P.M Sarro; GuoQi Zhang;
In R. Walczak; J. Dziuban (Ed.), Proc. Eurosensors XXVI,
Krakow, Poland, Procedia Engineering, pp. 849-852, Sep 2012. DOI 10.1016/j.proeng.2012.09.280.
Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F. Santagata; G. Fiorentino; M. Nie; C. Farriciello; R. Poelma; GuoQi Zhang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 668-671, Oct 2012.
Monitoring of meniscus motion at nozzle orifice with capacitive sensor for inkjet applications
J. Wei; C. Yue; GuoQi Zhang; J.F. Dijksman; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 2172-2175, Oct 2012.
Evaluation of Antibody Surface Functionalisation of TiO2-ALD Waveguide Using Escherichia coli type K12
A. Purniawan; M. Almering; G. Pandraud; K.A. Vakalopoulos; P.J. French,; P.M. Sarro;
In Proc. Conference for ICT-Research in the Netherlands,
Rotterdam, the Netherlands, Oct 2012.
Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
A. Purniawan; G. Pandraud; K.A. Vakalopoulos; P.J. French; P.M. Sarro;
In SPIE Photonics Europe Conference,
Brussels, Belgium, SPIE, April 2012.
Encapsulated aluminum nitride SAW devices for liquid sensing applications
A.T. Tran; G. Pandraud; M. Nie; H. Schellevis; A. Akhnoukh; A. Purniawan; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
IEEE, pp. 604-607, 2012.
A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors
G. Pandraud; A. Purniawan; E. Margallo-Balbás; P.M. Sarro;
In DL Andrews; J-M Nunzi; A Ostendorf (Ed.), Proceeings of SPIE - Nanophotonics IV,
SPIE, pp. 1-7, 2012. harvest.
Temperature calibration and electrical characterization of the differential scanning calorimeter chip UFS1 for the Mettler-Toledo Flash DSC 1
E. Iervolino; A.W. van Herwaarden; F.G. van Herwaarden; E. van de Kerkhof; P.P.W. van Grinsven; A.C.H.I. Leenaers; V.B.F. Mathot; P.M. Sarro;
Thermochimica Acta,
Volume 522, Issue 1-2, pp. 53-59, Aug. 2011. DOI 10.1016/j.tca.2011.01.023.
MEMS silicon-based micro-evaporator
M. Mihailovic; C.M. Rops; J. Hao; L. Mele; J.F. Creemer; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 7, pp. 1-9, 2011. DOI 10.1088/0960-1317/21/7/075007.
An analytical model and verification for MEMS Pirani gauges
F. Santagata; E. Iervolino; L. Mele; A.W. van Herwaarden; J.F. Creemer; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 11, pp. 1-7, 2011. DOI 10.1088/0960-1317/21/11/115007.
A surface micromachined thermopile detector array with an interference-based absorber
H. Wu; A. Emadi; P.M. Sarro; G. de Graaf; R.F. Wolffenbuttel;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 7, pp. 1-8, Jun. 2011. DOI 10.1088/0960-1317/21/7/074009.
Mixed motion in deterministic ratchets due to anisotropic permeability
T. Kulrattanarak; R.G.M. van der Sman; Y.S. Lubbersen; C.G.P.H. Schro�n; H.T.M. Pham; P.M. Sarro; R.M. Boom;
Journal of Colloid and Interface Science,
Volume 354, Issue 1, pp. 7-14., Feb. 2011. DOI 10.1016/j.jcis.2010.10.02.
MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses
E. Iervolino; A.W. van Herwaarden; W. van der Vlist; P.M. Sarro;
IEEE/ASME Journal of Microelectromechanical Systems,
Volume 20, Issue 6, pp. 1277-1286, Dec. 2011. DOI 10.1109/JMEMS.2011.2167672.
Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride or PE-ALD titanium nitride for void-free bottom-up copper electroplating
M. Saadaoui; H. van Zeijl; W.H.A. Wien; H.T.M. Pham; C. Kwakernaak; H.C.M. Knoops; W.M.M. Erwin Kessels; R.M.C.M. van de Sanden; F.C. Voogt; F. Roozeboom; P.M. Sarro;
IEEE Transactions on Components, Packaging and Manufacturing Technology,
Volume 1, Issue 11, pp. 1728-1738, 2011. DOI 10.1109/TCPMT.2011.2167969.
A tube-shaped buried Pirani gauge for low detection limit with small footprint
F. Santagata; J.F. Creemer; E. Iervolino; L. Mele; A.W. van Herwaarden; P.M. Sarro;
IEEE Journal of Microelectromechanical Systems,
Volume 20, Issue 3, pp. 676-684, Jun. 2011. DOI 10.1109/JMEMS.2011.2127457.
A surface micromachined thermopile detector array with an interference-based absorber
H.W. Wu; A. Emadi; P.M. Sarro; G. de Graaf; R.F. Wolffenbuttel;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 7, pp. 1-8, 2011.
PECVD silicon carbide surface micriomachining technology and selected MEMS applications
V. Rajaraman; L. Pakula; H. Yang; P.J. French; P.M. Sarro;
International Journal of Advances in Engineering Sciences and Applied Mathematics,
pp. 1-7, 2011.
An investigation on ALD thin film evanescent waveguide sensor for biomedical application
A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
In Biomedical Engineering Systems and Technologies (BIOSTEC 2010), Communications Computer and Information Science,
Berlin, Springer Verlag, 2011. DOI 10.1007/978-3-642-18472-7_15.
TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2506-2509, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969754.
Low power PECVD SIC delay lines for optical coherence tomography in the visible
G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbas; P.J. French; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1554-1557, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969736.
All ALD TiO2-Al2O3-TiO2 horizontal slot waveguides for optical sensing
A. Purniawan; P.J. French; G. Pandraud; Yujian Huang; P.M. Sarro;
In Proc. IEEE SENSORS 2011 Conference,
Limerick, Ireland, pp. 1954-1957, Oct. 2011. ISBN 978-1-4244-9288-6.
document
Low temperature encapsulation of nanochannels with water inside
C. Shen; V.R.S.S. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 854-857, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969464.
Sputtered molybdenum as conductive material for high-temperature microhotplates
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2690-2693, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969500.
Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography
J. Wei; Y. Gao; A.J. Houtepen; G. Pandraud; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1749-1752, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969819.
MEMS silicon-based resistojet micro-thruster for attitude control of nano-satellites
M. Mihailovic; T.V. Mathew; J.F. Creemer; B.T.C. Zandbergen; P.M. Sarro;
In of 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 262-265, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969432.
Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum
E. Iervolino; L. Mele; F. Santagata; A.W. van Herwaarden; W. van der Vlist; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1038-1041, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969167.
IC compatible top down process for silicon nanowire FET arrays with three 100 surfaces for (BIO) chemical sensing
T.S.Y. Moh; Y. Maruyama; C. Shen; G. Pandraud; L.C.P.M. de Smet; H.D. Tong; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1590-1593, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969796.
Process for low temperature deposition of strain gauge materials based on chromium nitride thin films
H.A. Mol; H. Schellevis; P.M. Sarro; Y. Hou;
In Proc. IEEE SENSORS 2011 Conference,
Limerick, Ireland, pp. 226-229, Oct. 2011. ISBN 978-1-4244-9288-6; DOI 10.1109/ICSENS.2011.6127044.
Developer etched single and arrays of three 100 planes silicon nanowires (SiNWs) FET
T.S.Y. Moh; Y. Maruyama; G. Pandraud; L.C.P.M. de Smet; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
In Proc. ICT.OPEN: Micro technology and micro devices (SAFE 2011),
Veldhoven, The Netherlands, Nov. 2011.
Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations
A.T. Tran; G. Pandraud; H. Schellevis; T. Alan; V. Aravindh; O. Wunnicke; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 673-676, Sep. 2011. DOI 10.1016/j.proeng.2011.12.166.
6 DOF force and torque sensor for micro-manipulation applications
P. Estevez; J.M. Bank; M. Porta; J. Wei; P.M. Sarro; M. Tichem; U. Staufer;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 39-42, Sep. 2011. DOI 10.1016/j.proeng.2011.12.010.
Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
L. Mele; T. Rossi; M. Riccio; E. Iervolino; F. Santagata; A. Irace; G. Breglio; J.F. Creemer; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 387-390, Sep. 2011. DOI 10.1016/j.proeng.2011.12.096.
Suspended submicron silicon-beam for high sensitivity piezoresistive sensing
J. Wei; S. Magnani; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 1437-1440, Sep. 2011. DOI 10.1016/j.proeng.2011.12.355.
A buried vertical filter for micro and nanoparticle filtration
S.J. Li; C. Shen; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 1193-1196, Sep. 2011. DOI 10.1016/j.proeng.2011.12.294.
A silicon-based MEMS resistojet for propelling cubesats
T.V. Mathew; B.T.C. Zandbergen; M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proc. 62nd International Astronautical Congress,
Cape Town, South Africa, pp. 1-8, Oct. 2011.
An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622.
In situ HRTEM of a catalyst using a nanoreactor at 1 bar
S.B. Vendelbo; J.F. Creemer; S. Helveg; B. Morana; L. Mele; A.M. Molenbroek; P.M. Sarro; H.W. Zandbergen; P.J. Kooyman;
In Netherlands Catalysis and Chemistry Conference (NCCC-XII),
Noordwijk, pp. 332, Feb. 2011.
Conventional micro-fabrication process for silicon nanowires FET with three 100 surfaces
T.S.Y. Moh; G. Pandraud; L.C.P.M. de Smet; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
In International Conference on Materials for Advanced Technologies (ICMAT 2011),
Suntec City, Singapore, Jun. 2011.
Biosensing
E.J.R. Sudholter; G.Z. Garyfallou; D. Ullien; L.C.P.M. Smet; S. Srivastava; M.A. Jongsma; M. Mescher; J.H. Klootwijk; T.S.Y. Moh; P.M. Sarro; C. Rijn;
In Book of Abstracts, 4th IRUN Symposium on NanoTechnology,
Nijmegen, The Netherlands, pp. 32-33, Oct. 2011.
Linear and rotation thermal micro-stepper
A. Khiat; J. Spronck; J. van Schieveen; S. Milosavljevic; J. Wei; P. Estevez; P.M. Sarro; U. Staufer;
In 37th International Conference on Micro and Nano Engineering (MNE 2011,
Berlin, Germany, pp. 1, Sep. 2011.
document
A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441.
Microcantilevers encapsulated in fluid wells for sensing in liquids
W.J. Venstra; W.H. Wien; P.M. Sarro; J. van Eijk;
In 37th International Conference on Micro and Nano Engineering (MNE 2011),
Berlin, Germany, pp. 1, Sep. 2011.
document
Reflectance-based TiO2 photonic crystal sensors
Yujian Huang; G. Pandraud; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2682-2685, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969771.
PECVD SiC photonic crystal sensor
G. Pandraud; Yujian Huang; P.M. Sarro; F. Bernal Arango;
In Proc. IEEE SENSORS 2011 Conference,
Limerick, Ireland, pp. 367-370, Oct. 2011. ISBN 978-1-4244-9288-6; DOI 10.1109/ICSENS.2011.6127130.
Co-design of wafer level thin film package assembly
J.J.M. Zaal; F. Santagata; W.D. van Driel; GuoQi Zhang; J.F. Creemer; P.M. Sarro;
In 12th Internat. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments Microelectronics and Microsystems (EuroSimE 2011),
Linz, Austria, pp. 1-6, Apr. 2011. ISBN 978-1-4577-0106-1.
document
Reflectance-based photonic crystal liquid sensors made of ALD TiO2
Yujian Huang; G. Pandraud; P.M Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 1389-1392, Sep. 2011. DOI 10.1016/j.proeng.2011.12.343.
Low temperature encapsulation of nanochannels with water inside
C. Shen; VRSS. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
IEEE, pp. 854-857, 2011.
An Evanescent Waveguide Sensor Based Diagnostic of Post-Colon Surgery
A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
In Sensor Technology Conference Sense of Contact,
Zeist, the Netherlands, April 2011.
Evanescent Waveguide Sensor For Post Anastomosis Evaluation
A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
In J. Dankelman; P Veltink; T. van Walsum (Ed.), 3rd Dutch Biomedical Engineering,
BME, pp. 1-1, 2011.
All ALD TiO2-AI203-TiO2 horizontal slot waveguides for optical sensing
A. Purniawan; P.J. French; G. Pandraud; Y. Huang; P.M. Sarro;
In E. Lewis; T. Kenny (Ed.), Proceedings IEEE Sensors,
Limerick, Ireland, IEEE, pp. 1954-1957, October 2011.
Low power PECVD SIC delay lines for optical coherence tomography in the visible
G. Pandraud; L. Mele; B. Morana; E. Margallo-Balbás; P.J. French; P.M. Sarro;
In {Fan et al}, L-S (Ed.), 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, IEEE, pp. 1554-1557, June 2011.
TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS),
Beijing, China, IEEE, pp. 2506-2509, June 2011.
An investigation on ALD thin film evanescent waveguide sensor for biomedical application
A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
In 3rd International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2010),
Valencia, Spain, Springer Verlag, pp. 189-196, 2011.
Low temperature encapsulation of nanochannels with water inside
C. Shen; V.R.S.S Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference,
IEEE, pp. 854-857, 2011.
Sensitivity Measurement of TiO2-ALD Evanescent Waveguide Sensor
A. Purniawan; G. Pandraud; P.J. French; P.M. Sarro;
In SAFE Conference,
Veldhoven, the Netherland, November 2011.
PECVD silicon carbide surface micriomachining technology and selected MEMS applications
V. Rajaraman; L.S. Pakula; H. Yang; P.J. French; P.M. Sarro;
International journal of advances engineering sciences and applied mathematics,
Volume 2, Issue 1-2, pp. 28-34, 2010. DOI 10.1007/s12572-010-0020-9.
Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring
J. Wei; C. Yue; M. van der Velden; Z.L. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
Sensors and Actuators A,
Volume 162, Issue 2, pp. 406-417, 2010.
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
J. Wei; C. Yue; Z.L. Chen; Z.W. Liu; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 20, Issue 6, 2010.
Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
J. Micromech. Microeng.,
Volume 20, 2010.
Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring
J. Wei; C. Yue; M. van der Velden; T. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume 162, Issue 2, pp. 406-417, 2010.
Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides
G. Pandraud; A.B. Neira; E. Margallo Balbas; C.K. Yang; P.M. Sarro;
IEEE Photonics Technology Letters,
Volume 22, Issue 6, pp. 398-400, 2010.
Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible
G. Pandraud; E. Margallo Balbas; P.M. Sarro;
Proceedings of SPIE- International Society for Optical Engineering,
Volume 7715, pp. 1-10, 2010.
Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor
A. Purniawan; G. Pandraud; P.J. French; E. Margallo Balbas; P.M. Sarro;
conference, 2010. CD.
LPCVD amorphous SiCx for freestanding electron transparent windows
B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
Wanchai, Hong Kong, IEEE, pp. 572-575), 2010.
Design and Development of an Ultra Compact Silicon Phase-Change Heat Exchanger
Rops; C M; M. Mihailovic; P.M. Sarro;
In Proceedings of the 2nd European Conference Microfluidics,
Toulouse, France, Dec. 2010.
MEMS Silicon-Based Micro-Evaporator with Diamond-Shaped Fins
M. Mihailovic; C. Rops; J.F. Creemer; P.M. Sarro;
In Proceedings of EUROSENSORS XXIV,
Linz, Austria, Sep. 2010.
Electrical characterization of TiSi/TiN layer stack in temperature range from 0 � 500 �C
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 13th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 114-117, 2010.
A piezoresistive sensor for pressure monitoring at inkjet nozzle
J. Wei; P.M. Sarro; T. Chu Duc;
In Proc. IEEE Sensors,
pp. 2093-2096, 2010.
A position and force-distribution sensor-array for monitoring the contact condition of objects in microhandling
J. Wei; M. M. Porta. Tichem; U. Staufer; P.M. Sarro;
In Proc. the 23th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010),
pp. 623-626, 2010.
TiO2 ALD nanolayer as evanescent waveguide for biomedical sensor applications
A. Purniawan; P.J. French; G. Pandraud; P.M. Sarro;
In {Jakoby et al}, B (Ed.), Proceedings Eurosensor XXIV Conference,
Elsevier, pp. 1131-1135, 2010.
To integrate or not to integrate
P.J. French; P.M. Sarro;
In G. Fedder; T. Kenney (Ed.), Proceedings IEEE Sensors 2010,
IEEE, pp. 2179-2185, 2010.
PECVD SIC- SiO2-SIC Horizontal Slot Waveguides for Sensing Photonics devices
G. Pandraud; A. Barbosa Neira; E. Margallo Balbas; P.M. Sarro;
In G. Fedder; T. Kenney (Ed.), Proceedings IEEE SENSORS 2010,
IEEE, pp. 975-978, 2010.
Al2O3 nanolayer as evanescent waveguide for biomedical sensor application
A. Purniawan; Y. Huang; G. Pandraud; P.J. French; P.M. Sarro;
In {Amft et al}, O (Ed.), Proceedings of 3rd International Conference on Biomedical Electronics and Devices,
BIODEVICES, pp. 44-48, 2010. CD.
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
Journal of physics: conference series,
Volume 187, 2009.
Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
IOP journal of physics,
pp. 1-4, 2009.
Modulation speed improvement in a FabryPerot thermo-optical modulator through a driving signal optimization technique
F.G. della Corte; M. Merenda; G. Cocorullo; M. Iodice; I. Rendina; P.M. Sarro;
Optical engineering,
Volume 48, Issue 7, 2009.
Pattern transfer on a vertical cavity sidewall using SU8
T. Verhaar; J. Wei; P.M. Sarro;
Journal of micromechanics and microengineering,
Volume 19, 2009.
Photolithography on bulk micromachined substrates. Journal of micromechanics and microengineering
W.J. Venstra; J.W. Spronck; P.M. Sarro; J. van Eijk;
Journal of micromechanics and microengineering,
Volume 19, pp. 1-6, 2009.
A 2_2 Optofluidic Multimode Interference Coupler
R. Bernini; G. Testa; L. Zeni; P.M. Sarro;
IEEE journal of selected topics quantum electronics,
Volume 15, Issue 5, pp. 1478-1484, 2009. ISSN 1077-260X.
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
Journal of Physics: Conference Series,
Volume 187, pp. 012043-1-0120, 2009.
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
In Proc. IEEE MEMS 2009,
Sorrento, Italy, pp. 140-143, 2009.
Single wafer surface micromachined field emission electron source
F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
In PM Sarro & C Hierold (Eds.), Proceedings of IEEE MEMS 2009 Conference,
Sorrento, Italy, IEEE, pp. 848-851, 2009.
Alignment and Overlay Characterization for 3D Integration and Advanced Packaging
H.W. van Zeijl; P.M. Sarro;
In Proc. of 11th Electronic packaging and Technology conference 2009 (EPTC 2009),
Singapore, IEEE, 2009. ISBN 978-1-4244-5100-5.
Paalvast, SL, Sarro, PM & Munnig Schmidt, RH
S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
In Proceedings of the EuroSimE 2009,
Montigny le Bretonneux, pp. 318-321, 2009.
Fast response thermal linear motor with reduced power consumption
S.L. Paalvast; H.T.M. Pham; P.M. Sarro; R.H. Munnig Schmidt;
In Proceedings of the Eurosensors XXIII Conference, august 2009,
Lausanne, pp. 690-693, 2009.
Electro less deposition and structuring of silver electrodes inside closed micro fluidic channels
F.C.A. Heuck; P.M. Sarro; J.H.C.M. Slabbekoorn; T. Akiyama; U. Staufer;
In Proceedings of the Euspen 9th International Conference,
Bedford: Euspen, pp. 158-161, 2009.
Characterization of ultrathin membranes to enable TEM observation of gas reaction at high pressures
Alan; T; Gaspar; J; Paul; O; H.W. Zandbergen; J.F. Creemer; P.M. Sarro;
In Proceedings of the ASME 2009 International Mechanical Engineering Congress & Exposition,
Lake Buena Vista, Florida, USA: American Society of Mechanical Engineers (ASME), pp. 1-5, 2009.
Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
In Proceedings of IEEE Sensors 2009 Conference,
Christchurch, New Zealand, pp. 799-802, 2009.
document
Thermal analysis of peptides with a calorimeterchip
E. Iervolino; I.M.O. Finoulst; A.W. van Herwaarden; W.H.A. Wien; P.D.E. Verhaert; P.M. Sarro;
In Proceedings of 15th international conference on solid-state sensors, actuators & microsystems,
2009.
document
Silicon-based MEMS micro-evaporator
J. Hao; M. Mihailovic; C.M. Rops; J.F. Creemer; P.M. Sarro;
In Proceedings of 20th Micromechanics Europe Workshop (MME),
Toulouse, France, pp. 1-4, 2009.
document
Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 36-39, 2009.
document
Mems nanoreactor for atomic-resolution microscopy of nanomaterials in their working state
J.F. Creemer; S. Helveg; G.H. Hoveling; S. Ullman; P.J. Kooyman; A.M. Molenbroek; H.W. Zandbergen; P.M. Sarro;
In Proceedings 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009,
Sorrento, IEEE, pp. 76-79, 2009.
document
Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition
L. Mele; B. Morana; C.R. de Boer; J.F. Creemer; P.M. Sarro;
In Proceeding title: Proceedings of the Eurosensors XXIII Conference,
Lausanne, Switzerland, pp. 1531-1534, 2009.
document
Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology
H.T.M. Pham; T. Kulrattanarak; R.G.M. van der Sman; C. Schroen; R.M. Boom; P.M. Sarro;
In Proc. of the Eurosensors XXIII conference,
Lausanne, Switzerland, pp. 345-348, 2009.
document
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
A.T. Tran; H. Schellevis; C. Shen; H.T.M. Pham; P.M. Sarro;
In Proc. of SAFE 2009,
Veldhoven, The Netherlands, STW, pp. 121-124, 2009.
document
Sensing Microgripper with PID Control
P. Phan Huu; V.Q. Nguyen; T. Chu Duc; P.M. Sarro;
In Ngo Nguyen; N.K. Cheung (Ed.), Proc. of 2008 International Conference on Advanced Technologies for Communications,
Hanoi, Vietnam, pp. 319-322), 2009.
Thermal characterization of microliter amounts of liquids by a micromachined calorimetric transducer
S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
In Proc. IEEE MEMS 2009,
Sorrento, Italy: IEEE, pp. 535-538, 2009.
Vertical Contact Position Detection and Grasping Force Monitoring for Micro-Gripper Applications
M. Porta; J. Wei; M. Tichem; P.M. Sarro; U. Staufer;
In Proc. IEEE Sensors 2009 Conference,
Christchurch, New Zealand, pp. 967-970, 2009.
Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture
C. Yue; J. Wei; Z.L. Chen; Z.W. Liu; P.M. Sarro;
In P. Pons (Ed.), Proceedings of 20th Micromechanics Europe Workshop (MME),
Toulouse, France, LAAS-CNRS, pp. 1-4, 2009.
Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias
M. Saadaoui; H.W. van Zeijl; H.T.M. Pham; H.C. Knoops; W.M.M. Kessels; M.C.M. van de Sanden; F. Roozeboom; Y. Lamy; K.B. Jinesh; W. Besling; P.M. Sarro;
In MRS Proceedings Volume 1112, Materials and Technologies for 3-D Integration,
Warrendale, PA, pp. 1-8, 2009.
Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring.
J. Wei; C. Yue; Z.L. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
In J. Brugger; D. Briand (Ed.), Eurosensors XXIII,
Lausanne, Switzerland, Elsevier, pp. 120-123), 2009.
document
Through Silicon Interconnect Using grayscale Lithography for MEMS Applications.
H.W. van Zeijl; D. Liu; P.M. Sarro;
In J. Brugger; D. Briand (Ed.), Eurosensors XXIII,
Lausanne, Switzerland, Elsevier, pp. 1543-1546, 2009.
document
A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
C. Shen; T.M.H. Pham; P.M. Sarro;
In Micro Electro Mechanical Systems,
Sorrento, Italy, pp. 383-386, 2009.
A contact position detection and interaction force monitoring sensor for micro-assembly applications.
J. Wei; M. Porta; M. Tichem; P.M. Sarro;
In K Najafi & M Schmidt (Eds.), Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers 2009),
Denver, USA, IEEE, pp. 2385-2388), 2009. ISBN 978-1-4244-4193-8.
Alignment insensitive anisotropic etching of silicon cavities with smooth 49� sidewalls
C. Shen; H.T.M. Pham; P.M. Sarro;
In he 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009,
pp. 1071-1074, 2009.
document
Aluminum thermal motor for high bandwidth positioning stages
S.L. Paalvast; H.T.M. Pham; P.M. Sarro; R.H. Munnig Schmidt;
In 9th international conference of the european society for precision engineering and nanotechnology,
San Sebastian, SP, pp. 54-58, 2009.
Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications
Yujian Huang; P.M. Sarro;
In Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 24-27, 2009.
document
Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.
S.L. Paalvast; P.M. Sarro; R.H. Munnig Schmidt;
In L.J. Ernst; GuoQi Zhang (Ed.), Proceedings of the EuroSimE 2009,
Montigny le Bretonneux, IEEE, pp. 318-321, 2009. ISBN 978-1-4244-4159-4.
Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
In s.n. (Ed.), IOP journal of physics;conference series,
IOP, pp. 1-4, 2009.
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
V. Rajaraman; L.S. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
In P.M. Sarro; C Hierold (Ed.), Proc. IEEE MEMS 2009,
IEEE, pp. 140-143, 2009.
Single wafer surface micromachined field emission electron source
F. Santagata; C.K. Yang; J.F. Creemer; P.J. French; P.M. Sarro;
In P.M. Sarro; C Hierold (Ed.), Single wafer surface micromachined field emission electron source,
IEEE, pp. 848-851, 2009.
Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application
A. Purniawan; Y. Huang; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
In s.n. (Ed.), 12th Annual Workshop on Semiconductor Advances for Future Electronics,
s.n., pp. 48-51, 2009.
Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring
J. Wei; C. Yue; ZL. Chen; Z.W. Liu; K.A.A. Makinwa; P.M. Sarro;
In J Brugger; D Briand (Ed.), Proceeding of EUROSENSORS XXIII,
Elsevier, pp. 120-123, 2009.
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
R. Li; .Y Lamy; W.F.A. Besling; F. Roozeboom; P.M. Sarro;
J. Micromech. Microeng.,
Volume 18, 2008.
Fabrication and characterization of a PECVD SiC evanescent wave optical sensor
G. Pandraud; P.J. French; P.M. Sarro;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume 142, pp. 61-66, 2008.
Fabrication and optical characterization of nano-hole arrays in gold and gold/palladium films on glass
O.M. Piciu; M.W. Docter; M. van der KrogtC; Y. Garini; I.T. Young; P.M. Sarro; A. Bossche;
Institution of Mechanical Engineers. Proceedings. Part N: Journal of Nanoengineering and Nanosystems,
Volume 221, Issue 3, pp. 107-114, 2008.
Design and performance of a room-temperature TeraHertz detection array for real-time imaging
I. Kasalynas; A.J.L. Adam; T.O. Klaassen; J.N. Hovenier; G. Pandraud; V.P. Iordanov; P.M. Sarro;
IEEE Journal of Selected Topics in Quantum Electronics,
Volume 14, Issue 2, pp. 363-369, 2008.
Thin-film encapsulation of a silicon field emission electron source
F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
In s.n. (Ed.), Proceedings Eurosensors XXII,
Dresden, Germany: Eurosensors XXII, pp. 625-628, 2008.
document
Monocrystalline silicon microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of EUROSENSORS XXII,
Dresden, Germany, pp. 1611-1614, Sep. 2008.
Electrical behaviour of mono-Si based microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 11th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 411-414, 2008.
Analysis and characterization of an electrothermal silicon-polymer
J. Wei; P.M. Sarro;
In Proc. the 2008 annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008),
pp. 436-439, 2008.
Temperature Calibration of Fast Scan Calorimeter Chips.
E. Iervolino; A.W. van Herwaarden; P.M. Sarro;
In Proceedings Eurosensors XXII,
Dresden, Germany, Sep. 2008.
A novel semi SOI fabrication process for integrated 3D micromachining
J. Wei; T. Chu Duc; P.M. Sarro;
In Proc. IEEE NEMS 2008,
pp. 717-720, 2008.
Design and characterization of a novel icp plasma tool for high speed and high accuracy drie processing
N. Launay; H. W. van Zeijl; P. M. Sarro;
In Proc. IEEE MEMS 2008,
Tucson, Arizona, USA, pp. 311-314, Jan. 2008.
Electrothermal microgripper with large jaws displacement and integrated force sensors
T.Chu Duc; G.K.lau; J.F. Creemer; P.M. Sarro;
In Proc. IEEE MEMS 2008,
Tucson, Arizona, USA, pp. 519-522, Jan. 2008.
An electro-thermal silicon-polymer micro-gripper for simultaneous in-plane and out-of-plane motions
J. Wei; T. Chu Duc; P.M. Sarro;
In Proc. EUROSENSORS XXII,
pp. 1466-1469, 2008.
3D Microstructuring of silicon and SU8 polymer for microsystems applications
P.M. Sarro; J. Wei; T. Chu Duc;
In Proc. 19th Micromechanics Europe (MME 2008),
pp. 237-241, 2008.
Highly uniform coating of vertical sidewall for 3D pattern definition
T. Verhaar; J. Wei; P.M. Sarro;
In Proc. 19th Micromechanics Europe (MME 2008),
pp. 141-145, 2008.
Novel electrothermal bimorph actuator for large out-of-plane displacement and force
J.Wei; T.Chu Duc; G.K.Lau; P.M. Sarro;
In IEEE MEMS 2008,
Tucson, Arizona, USA, pp. 46-49, Jan. 2008.
Application of PECVD a-SiC thin-film layer for encapsulation of microstructures
V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
STW, pp. 609-612, 2008.
Design of a 2D TiO2 Photonic Crystal Waveguide Sensor
E. Jardinier; G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
In s.n. (Ed.), The annual workshop on semiconductor advances for future electronics and sensors,
STW, pp. 424-427, 2008.
Very thin SiC membranes for micromachines vacuum sensors
H.T.M. Pham; C. Fan; G. Pandraud; J.F. Creemer; N.M. van der Pers; P. Visser; K. Kwakernaak; P.M. Sarro;
In s.n. (Ed.), Proceedings of IEEE sensors 2008,
IEEE Sensors, pp. 1143-1146, 2008.
Thin-film MEMS encapsulation using low-stress PECVD silicon carbide
V. Rajaraman; L. Pakula; H.T.M. Pham; P.M. Sarro; P.J. French;
In G. Gerlach (Ed.), Proceedings Eurosensors XXII,
Eurosensors, pp. 491-494, 2008.
ALD Tio2 photonic crystals for biosensors
G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
In sn. (Ed.), Proceedings of APCTP-ASEAN workshop on Advanced Material Science and Nanotechnology,
APCTP-ASEAN workshop on AMSN, pp. 399-402, 2008.
Thin-film encapsulation of a silicon field emission electron source
F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
In s.n. (Ed.), Proceedings Eurosensors XXII,
Eurosensors XXII, pp. 625-628, 2008.
Atomic layer deposition TiO2 photonic crystal waveguide of biosensors,
G. Pandraud; E. Jardinier; H.T.M. Pham; P.J. French; P.M. Sarro;
In s.n (Ed.), Proceedings of the fourth IWON, APTC-ASEAN,
s.n., pp. 339-402, 2008.
A dual-side fabrication method for silicon plate springs with high out-of plane stiffness
S.L.Paalvast; H.W. van Zeijl; J.Su; P.M. Sarro; J. van Eijk;
J. Micromech. and Microeng.,
Volume 17, Issue 7, pp. 197-203, 2007.
An in-plane thermal unimorph using confined polymers
G.K.Lau; T.Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
J. Micromech. and Microeng.,
Volume 17, Issue 7, pp. 174-183, 2007.
Piezoresistive cantilever beam for force sensing in two dimensions
T.Chu Duc; J.F. Creemer; P.M. Sarro;
IEEE Sensors,
Volume 7, pp. 96-104, 2007.
2-D MMI devices based on integrated hollow ARROW waveguides
R.Bernini; E.De Nuccio; F.Brescia; A.Minardo; L.Zeni; P.M. Sarro;
IEEE J.of Selected Topics Quantum Electronics,
Volume 13, Issue 2, pp. 194-201, 2007.
Powerful polymeric thermal micro-actuator with embedded silicon microstructure
G.K. Lau; .F.L Goosen; F. van Keulen; T. Chu Duc; P.M. Sarro;
Applied Physics Letters,
Volume 90, Issue 21, 2007.
Polymer constraint effect for electro-thermal bimorph microactuators
T. Chu Duc; G.K. Lau; P.M. Sarro;
Appl. Phys. Lett.,
Volume 91, 2007.
Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
B. Yan; H.T.M. Pham; Y. Ma; Y. Zhuang; P.M. Sarro;
Appl. Phys. Lett.,
Volume 91, pp. 101902.1-3, 2007.
PDL free plasma enhanced chemical vapor deposition SIC optical waveguides and devices
G. Pandraud; P.M. Sarro; P.J. French;
Optics Communications,
Volume 269, Issue 2, pp. 338-345, 2007.
PECVD SiC optical waveguide loss and mode characteristics
G. Pandraud; H.T.M. Pham; P.J. French; P.M. Sarro;
Optics & Laser Technology,
Volume 39, Issue 3, pp. 532-536, 2007.
PECVD silicon carbide waveguides for multichannel sensors
G.Pandraud; P.J. French; P.M. Sarro;
In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
Atlanta, Georgia, USA, IEEE, pp. 395-398, Oct. 2007.
In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets
H.T.M.Hoa; C.d.Boer; J.Wei; P.M. Sarro;
In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
Lyon, France, IEEE, pp. 497-500, Jun. 2007.
Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness
H.W. van Zeijl; S.L. Paalvast; J. Su; J. van Eijk; P.M. Sarro;
In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
Lyon, France, IEEE, pp. 1605-1608, Jun. 2007.
Power efficient V-shape electro-thermal actuator using constrained SU8
G.K.Lau; T.Chu Duc; J.F.L Goosen; P.M. Sarro; F. van Keulen;
In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
Lyon, France, IEEE, pp. 287-290, Jun. 2007.
Fabrication of vertical electrodes on channel sidewall for picoliter liquid measurements
Jia Wei; M. van der Velden; P.M. Sarro;
In G. Delapierre; R. Puers (Ed.), Proc. Transducers 2007 Conference,
Lyon, France, IEEE, pp. 1613-1616, Jun. 2007.
Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems
M. van der Velden; J.W. Spronck; R.H. Munnig Schmidt; J. Wei; P.M. Sarro;
In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
Atlanta, Georgia, USA, IEEE, pp. 1241-1244, Oct. 2007.
Integrated Silicon-polymer laterally stacked bender for sensing microgrippers
T. Chu Duc; G.K.Lau; J.F.L Goosen; F. van Keulen; P.M. Sarro;
In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
Daegu, Korea, IEEE, pp. 662-665, Oct. 2007.
Local Sealing of High Aspect Ratio Vias for Single Step Bottom-up Copper Electroplating of Through Wafer Interconnects
M. Saadaoui; W. Wien; H. V. Zeijl; H. Schellevis; M. Laros; P. M. Sarro;
In B.Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conf,
Atlanta, Georgia, USA, IEEE, pp. 974-977, Oct. 2007.
Nano-hole arrays in thin Au/Pd film on glass for high speed molecular analysis
O. Piciu; M van der .Krogt; M.Docter; P.M. Sarro; A.Bossche;
In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
Daegu, Korea, IEEE, pp. 608-611, Oct. 2007.
Electro-thermally actuated polymeric stack for linear in-plane actuation
G.K. Lau; T .Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
In S.Lee; M. Esashi (Ed.), Proc. IEEE Sensors 2006 Conf,
Daegu, Korea, IEEE, pp. 538-541, Oct. 2007.
2D electro-thermal microgripper with large clamping and rotation motion at low driving voltage
T.Chu Duc; J.Wei; G.K.Lau; P.M. Sarro;
In Proc. 20th IEEE International Conference on MicroElectroMechganical Systems (IEEE MEMS 2007),
Kobe, Japan, pp. 687-690, Jan. 2007.
Simulation and measurement of a comb-structure silicon-polymer thermally actuated microgripper
F. Krecinic; T.Chu Duc; G.K. Lau; P.M. Sarro;
In Proc. 18th MicroMechanics Europe (MME 2006),
Guimares, Portugal, Univ. Minho, pp. 215-218, Sept.16-18 2007.
Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion
J.Wei; T.Chu Duc; P.M. Sarro;
In Proc. 18th MicroMechanics Europe (MME 2006),
Guimares, Portugal, Univ. Minho, pp. 187-190, Sept.16-18 2007.
Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
C. Olivadoti; H.T.M. Pham; P.M. Sarro;
In Proc. 18th MicroMechanics Europe (MME 2006),
Guimares, Portugal, Univ. Minho, Sept. 2007.
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
M. Cannavo; H.W. van Zeijl; G. Pandraud; J. V. Driel; T. Alan; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, The Netherlands, STW, pp. 509-512, Nov. 2007.
Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
J.Wei; T. Chu Duc; M. van der Velden; P. M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, The Netherlands, STW, pp. 625-628, Nov. 2007.
Roughness treatment of silicon surface after Deep Reactive Ion Etching
H.T.M. Pham; Charles R. de Boer; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, The Netherlands, pp. 535-538, Nov. 2007.
A comparative study of the strength of Si, SiN and SiC used at nanoscales
T. Alan; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, The Netherlands, STW, pp. 395-398, Nov. 2007.
Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias
M. Saadaoui; W. Wien; H. van Zeijl; A. van den Bogaard; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, The Netherlands, STW, pp. 543-546, Nov. 2007.
Integrated silicon optical sensors based on hollow core waveguide
R. Bernini; E. De Nuccio; A. Minardo; L. Zeni; P.M. Sarro;
In A. Kubby; G.T. Reed (Ed.), Photonics West, Proc. SPIE: Silicon Photonics II,
San Jose, California, USA, SPIE, Jan. 2007.
Monocrystalline Si-based microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proc. SAFE/STW,
Veldhoven, The Netherlands, pp. 608-611, Nov. 2007.
Nano-hole Arrays in Thin Au/Pd Film on Glass, for High Speed Molecular Analysis
O.M. Piciu; M. van der KrogtC; F. Tatar; P.M. Sarro; A. Bossche; M.W. Docter; Y. Garini; I.T. Young;
In s.n. (Ed.), Proceedings of 5th IEEE Conference on Sensors,
IEEE, pp. 608-611, 2007.
PECVD silicon carbide waveguides for multichannel sensors
G. Pandraud; P.J. French; P.M. Sarro;
In B Mizaikoff; P.J. French (Ed.), Proc. IEEE Sensors 2007 Conference,
IEEE, pp. 395-398, 2007.
Sub-wavelength apertures in Au/Pd film for fluorescence measurements
O.M. Piciu; M. van der KrogtC; M.W. Docter; Y. Garini; I.T. Young; P.M. Sarro; A. Bossche;
In s.n. (Ed.), Sense of Contact 2009, pp. 1-4, 2007.
Actuated elastometers with rigid vertical electrodes
G.K. Lau; J.F.L. Goosen; F. van Keulen; P. French; P.M. Sarro;
J. Micromech and Microeng.,
Volume 16, Issue 6, pp. 35-44, 2006.
Lateral nanoNewton force sensing piezocantilevers for microparticle handling
T. Chu Duc; J.F. Creemer; P.M. Sarro;
J. Micromech and Microeng.,
Volume 16, Issue 6, pp. 102-106, 2006.
Silicon Micromachining of High Aspect Ratio, High-Density Through-Wafer Electrical Interconnects for 3-D Multichip Packaging
Zheyao Wang; Lianwei Wang; N. T. Nguyen; Wim A. H. Wien; Hugo Schellevis; Pasqualina M. Sarro; Joachim N. Burghartz;
IEEE Tr. Advanced Packaging,
Volume 29, Issue 3, Aug. 2006.
In-package MEMS-based thermal actuators for micro-assembly
V.A. Henneken; M. Tichem; P.M. Sarro;
J. Micromech. Microeng.,
Volume 16, pp. S107-S115, 2006.
Development and characterization of an integrated silicon micro flow cytometer
R.Bernini; E.De Nuccio; F.Brescia; A.Minardo; L.Zeni; P.M. Sarro; R.Palumbo; M.R.Scarfi;
Analytical and Bioanalytical Chemistry,
Volume 386, pp. 1267-1272, 2006.
Actuated elastometers with rigid vertical electrodes
G.K. Lau; J.F.L. Goosen; F. van Keulen; P.J. French; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 16, Issue 6, pp. 35-44, 2006.
Polarization-insensitive PECVD SiC waveguides for sensor platform
G. Pandraud; P.J. French; H.T.M. Pham; P.M. Sarro;
Optical Materials,
Volume 28, Issue 4, pp. 380-384, 2006.
Development of post processing modules for integrated sensors and actuators applications (U-SP-2-I-ICT)
L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
STW, Volume STW , 2006.
Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
P.J. French; P.M. Sarro;
JG Korvinck; O Paul (Ed.);
William Andrew Publishing, , pp. 805-851, 2006.
Micromachining Technology: Bulk micromachining
P.J. French; P.M. Sarro;
In MEMS, A practical guide to Design, Analysis and Applications,
Norwich, NY, USA, William Andrew Publishing, 2006.
Fabrication and characteristics of a PECVD SiC evanescent wave optical sensor
G. Pandraud; P.J. French; P.M. Sarro;
In P.Enoksson (Ed.), Proc. Eurosensors XX,
Goteborg, Sweden, Sept. 2006.
document
Direct wafer bonding of processed LPCVD silicon nitride films
C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
Southampton, UK, pp. 89-92, Sept. 2006.
document
Piezoresistive cantilever for nano-Newton sensing in two dimensions
T. Chu Duc; J.F. Creemer; P.M. Sarro;
In Proc. 19th IEEE International Conference on MicroElectroMechganical Systems (IEEE MEMS 2006),
Istanbul, Turkey, pp. 586-589, 2006.
document
Advanced silicon micromachining for 3D micro and nanostructuring
P.M. Sarro; J.Wei;
In Proc. IWOFM-IWONN Conference,
Halong, Vietnam, Dec. 2006.
document
Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers
W.J. Venstra; M. van der Velden; J.W. Spronck; J. van Eijk; P.M. Sarro;
In Proc. IEEE Sensors 2005,
Irvine, California, USA, pp. 584-587, Oct. 2006.
document
MEMS Hotplates with TiN as a Heater Material
J.F. Creemer; D. Briand; W. van der Vlist; C. de Boer; H.W. Zandbergen; P.M. Sarro;
In Proc. IEEE Sensors 2005,
Irvine, California, USA, pp. 330-333, Oct. 2006.
ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
O. Piciu; M. van der Krogt; M. Docter; P.M. Sarro; A. Bossche;
In Proc. IEEE Sensors 2005,
Irvine, California, USA, pp. 452-456, Oct. 2006.
Improved thermal U-beam actuators for micro-assembly
V. Henneken; M. Tichem; P.M. Sarro;
In P.Enoksson (Ed.), Proc. Eurosensors XX,
Goteborg, Sweden, Sept. 2006.
document
Silicon bulk micromachining: from sub-mm to nm 3D structuring
P.M. Sarro;
In P.Enoksson (Ed.), Proc. Eurosensors XX,
Goteborg, Sweden, Sept. 2006.
document
A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
H.W. van Zeijl; J. Su; S.L. Paalvast; P.M. Sarro; J. van Eijk;
In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
Southampton, UK, pp. 209-212, Sept. 2006.
document
In-plane thermal unimorph using confined polymers
G.K.Lau; T.Chu Duc; J.F.L Goosen; F. van Keulen; P.M. Sarro;
In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
Southampton, UK, pp. 117-120, Sept. 2006.
Study on 2-lever DRIE for 3D MEMS structures
J.Wei; T.ChuDuc; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 494-497, Nov. 2006.
document
Copper electroplating for 3D interconnects
M.Saadaoui; W.Wien; H.van Zeijl; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 523-526, Nov. 2006.
document
Silicon-polymer laterally stacked bimorph micro-gripper
T. Chu Duc; G.K. Lau; J. Wei; P.M. Sarro;
In H. Morgan (Ed.), Proc. 17th MicroMechanics Europe (MME 2006),
Southampton, UK, pp. 197-200, Sept. 2006.
Fabrication of porous anodic aluminum oxide templates and pattern transfer
B.Yan; V.Vespini; H.T.M.Pham; H.Schellevis; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 498-501, Nov. 2006.
document
A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
J.Su; H.W.van Zeijl; S.L.Paalvast; P.M. Sarro; J.van Eijk;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 394-397, Nov. 2006.
document
Integrated Silicon-Polymer Laterally Stacked Bender for Sensing Microgrippers
T. Chu Duc; J. Wei; P. M. Sarro; G. K. Lau;
In IEEE SENSORS 2006, EXCO,
Daegu, Korea, Oct. 2006.
document
Electrostatically squeezed elastometers for out-of-plane microactuation
G.K.Lau; J.F.L Goosen; F. van Keulen; P.French; P.M. Sarro;
In APCOT 2006,
Singapore, Jun. 2006.
document
Some properties of a room temperature THz detection array
G. Pandraud; V.P. Iordanov; I. Kasalynas; A.J.L. Adam; T.O. Klaassen; J.N. Hovenier; P.M. Sarro;
In s.n. (Ed.), Some properties of a room temperature THz detection array,
SPIE, pp. 1-7, 2006.
A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)
G. Pandraud; P.J. French; P.M. Sarro;
In P. Enoksson (Ed.), Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX,
Eurosensors, pp. 1-4, 2006.
Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)
G. Pandraud; P.J. French; C.L. Hsu; J.F. Creemer; J.C. Wolff; B.J. Thijsse; P.M. Sarro;
In R.F. Wolffenbuttel (Ed.), Proceedings of the The 17th Micromechanics Europe Workshop, MME'06,
MME, pp. 1-4, 2006.
Fabrication Technology of Periodical Nano-cavities for Bio-analytical Applications (U-SP-2-I-ICT)
O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
In s.n. (Ed.), Proceedings of the Sense of Contact VIII,
STW, pp. 1-6, 2006.
Direct wafer bonding of processed LPCVD silicon nitride films
C.L. Hsu; J.F. Creemer; G. Pandraud; J.C. Wolff; B.J. Thijsse; P.M. Sarro; P.J. French;
In s.n. (Ed.), Proceedings of the 17th MME MicroMechanics Europe Workshop,
H.Morgan Ed., pp. 89-92, 2006.
Fabrication and Optical Characterization of Nano-hole Arrays for Molecular Detections (U-SP-2-I-ICT)
O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
In s.n. (Ed.), Proceedings of the 10th MicroTAS Conference 2006,
MicroTAS, pp. 666-669, 2006.
Optical Nano-hole Arrays for Molecular Recognition and Detection (U-SP-2-I-ICT)
O.M. Piciu; M. van der KrogtC; P.M. Sarro; A. Bossche; M.W. Docter;
In s.n. (Ed.), Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology¿APCOT 2006,
apcot, pp. 1-4, 2006.
Nano-hole arrays in thin Au/Pd film on glass for high speed molecular analysis
O. Piciu; M. van der Krogt; M. Docter; P.M. Sarro; A. Bossche;
In S. Lee; M Esashi (Ed.), Proc. IEEE Sensors 2006 Conference,
IEEE, pp. 608-611, 2006.
Fabrication and characteristics of PECVD SiC evanescent wave optical sensor (U-SP-2-I-ICT)
G. Pandraud; P.J. French; P.M. Sarro;
In s.n. (Ed.), fabrication and characteristics of PECVD SiC evenescent wave optical sensor,
Eurosensors, pp. 1-4, 2006.
Particle filters integrated inside a silicon wafer
W.Venstra; N.P. Pham; P.M. Sarro; J. van Eijk;
Microlelectronic Engineering,
Volume 78-79, 2005.
Evaluation of an empirical mdel to estimate and optimize mechanical properties of PECVD SiC films
H.T.M.Hoa; C.de Boer; P.M. Sarro;
Journal of the Electrochemical Society,
Volume 152, Issue 11, 2005.
Spray coating of photoresist for pattern transfer on high topography surfaces
N P Pham; J.N.Burghartz; P.M. Sarro;
J. Micromech. Microeng.,
Volume 15, pp. 691-697, 2005.
A porous SiC ammonia sensor
E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
Volume 109, Issue 1, pp. 44-46, 2005. 50/50 EI/ECTM-sb.
Experimental study of bent SiC optical waveguides
G. Pandraud; P.J. French; P.M. Sarro;
Microwave & Optical Technology Letters,
Volume 47, Issue 3, pp. 219-220, 2005. 100% EI, sb.
Development of post processing micromachining modules for integrated sensors and actuators applications
T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
STW, Volume STW meeting , 2005.
A new ammonia sensor based on a porous SiC membrane
E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
In Proc. Transducers 2005,
2005.
document
An ammonia sensor based on a porous SiC membrane
E.J. Connolly; B. Timmer; H.T.M. Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
In Proc. Eurosensors XIX,
2005.
document
Actuated elastometers with rigid vertical electrodes
G.K. Lau; J.F.L Goosen; F. van Keulen; P.J. French; P.M. Sarro;
In Proc. MME 2005,
pp. 382-385, 2005.
Suspended submicron SiC waveguides for gas and chemical sensor
G. Pandrau; C.K. Yang; P.J. French; P.M. Sarro;
In Proc. Eurosensors XIX,
2005.
document
Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications, Materials
S.B.S. Heil; E. Langereis; F. Roozeboom; A. Kemmeren; N.P. Pham; P.M. Sarro; M.C.M. van de Sanden; W.M.M. Kessels;
In Technology and Reliability of Advanced Interconnects 2005,
pp. B6.4.1-B6.4.6, 2005.
document
Lateral nanoNewton force sensing piezocantilevers for microparticle handling
C.D.Trinh; J.F. Creemer; P.M. Sarro;
In Proc. MME,
2005.
document
In-package MEMS-based thermal actuators for micro-assembly
V. Henneken; M. Tichem; P.M. Sarro;
In Proc. MME,
2005.
Non-Catalyst and Low Temperature Growth of Vertically Aligned Carbon Nanotubes for Nanosensor Arrays
H.T.M. Hoa; C. de Boer; P.M. Sarro;
In Proc. Transducers 2005,
pp. 97-100, 2005.
document
Highly Controllable Electrochemical Deep Etching Process On Silicon
Y.Chen; L.Wang; P.M. Sarro;
In Proc. IEEE MEMS 2005 Conf,
2005.
document
Porous silicon layeras a conformal insulator layer for high aspect ratio through wafer interconnects
N.P. Pham; G.P. Salvador; P.M. Sarro;
In Proc. Eurosensors XIX,
2005.
Integrated antiresonant hollow core waveguids as platforms for microoptical microfluidic TAS applications
R. Bernini; E. De Nuccio; F. Mottola; A. Minardo; P.M. Sarro; L. Zeni;
In Proc. Eurosensors XIX,
2005.
The fabrication of optical hole-arrays for use in the atto-liter plate device for single molecule detection
O.M. Piciu; M.C. van der krogt; M. Docter; P.M. Sarro; A.Bossche;
In Proc. Eurosensors XIX,
2005.
Influence of anodization parameters on the pore size and shape of anodic aluminum oxide nanotemplates
S.H. Le; A. Camerlingo; H.T.M. Pham; P.M. Sarro;
In Proc. Eurosensors XIX,
2005.
document
Compact building blocks for optical sensing on PECVD SiC technology
G. Pandraud; D.H.B. Wicaksono; P.J. French; P.M. Sarro;
In s.n. (Ed.), ICICI proceedings,
ICICI, pp. 453-458, 2005. Editor onbekend JH /100% EI.
A new ammonia sensor based on porous SIC membrane
E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
In s.n. (Ed.), Transducers'05 Digest of technical papers,
IEEE, pp. 1832-1835, 2005. Editor onbekend JH 50/50 EI/ECTM.
Low temperature LPCVD SiN direct bonding for sensors
C.L. Hsu; G. Pandraud; J.F. Creemer; P.J. French; P.M. Sarro;
In s.n. (Ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005),
Dutch Technology Foundation, pp. 162-166, 2005. Bij EWI gehonoreerd als 1V / 100% EI.
An ammonia sensor based on porous SiC
E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
In s.n. (Ed.), Proceedings of the Sense of Contact 7 workshop,
Sense of Contact 2009, pp. 1-4, 2005. Editor onbekend JH/ 100% EI.
Actuated elastomers with rigid vertical electrodes
G.K. Lau; J.F.L. Goosen; A. van Keulen; P.J. French; P.M. Sarro;
In s.n. (Ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop,
Chalmers University of Technology, pp. 382-385, 2005. Editor onbekend - IT.
ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
O.M. Piciu; M. van der KrogtC; M.W. Docter; P.M. Sarro; A. Bossche;
In s.n. (Ed.), Proceedings of IEEE Sensors, 2005,
s.l., pp. 452-456, 2005. NEO.
An ammonia sensor based on porous SIC membrane
E.J. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
In s.n. (Ed.), Eurosensors XIX, Proceedings,
IEEE, pp. 1-4, 2005. Editor onbekend JH /100% EI.
Suspended submicron PEVCD SiC waveguides for gas and chemical sensors
G. Pandraud; C.K. Yang; P.J. French; P.M. Sarro;
In s.n. (Ed.), Eurosensors XIX,
IEEE, pp. 1-4, 2005. 100% EI, sb.
The fabrication of optical hole-arrays for use in the atto-liter titer plate device for single molecule detection
O.M. Piciu; M. van der KrogtC; M.W. Docter; P.M. Sarro; A. Bossche;
In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIX,
IEEE, pp. 1-4, 2005.
PECVD SIC RIB channel waveguides loss and passive devices
G. Pandraud; T.M.H. Pham; P.M. Sarro; P.J. French;
In s.n. (Ed.), ECIO'05 proceedings,
s.n., pp. 262-265, 2005. Editor onbekend JH.
Polarization-insensitive PECVD SiC waveguides for photonic sensing
G. Pandraud; T.M.H. Pham; L. Pakula; P.M. Sarro; P.J. French;
In M Voet; R Willsch; W Ecke; J Jones; B Culshaw (Ed.), 17th International Conference on Optical Fibre Sensors,
SPIE, pp. 836-839, 2005. 100% EI, sb.
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
2005. Technische Universiteit Delft - 25/75 ECTM/EI, sb; US2005059158; Technische Universiteit Delft - 25/75 ECTM/EI, sb.
Inrichting voor het uitvoeren van een reactie
V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro;
2005. TUD 25/75 ECTM/EI-sb; 1024578; TUD 25/75 ECTM/EI-sb.
Microfluidic device for carrying out a reaction
V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro;
2005. TUD - 25/75 ECTM/EI, sb; WO2005037433; TUD - 25/75 ECTM/EI, sb.
Relative humidity sensors using porous SiC membranes and Al electrodes
E. J. Connolly; H. T. M. Pham; J. Groeneweg; P. M. Sarro; P. J. French;
Sensors and Actuators B,
Volume 100, Issue 1-2, 2004, pp. 216-220, 2004.
Fabrication of a CMOS compatible pressure sensor for harsh environment
L.S.Pakula; H.Yang; H.T.M.Pham; P.J. French; P.M. Sarro;
J. Micromech. Microeng.,
Volume 14, Issue 11, pp. 1478-1483, 2004.
Filter-protected photodiodes for high-throughput enzymatic analysis
V.P. Iordanov; J.Bastermeijer; R.Ishihara; P.M. Sarro; A.Bossche; M.Vellekoop;
IEEE Sensors Journal,
Volume 4, Issue 5, pp. 584-588, Oct. 2004.
Integrated Coulter counter based on 2-dimensional liquid aperture control
J.H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators B: Chemical,
2004.
Metal patterning on high topography surface for 3D RF devices fabrication
N.P. Pham; E. Boellaard; W. Wien; L.D.M. van den Brekel; J.N. Burghartz; P.M. Sarro;
Sensors and Actuators A,
Volume 115, pp. 557-562, Mar. 2004.
Microfluidic sensor based on integrated optical hollow waveguides
S.Campopiano; R.Bernini; L.Zeni; P.M. Sarro;
Optics letters,
Volume 29, Issue 16, pp. 1894-1896, Aug. 2004.
Integrated Coulter counter based on 2-dimensional liquid aperture control
J. H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P. M. Sarro; M. J. Vellekoop;
Sensors and Actuators B,
Volume 102, Issue 1, pp. 44-50, 2004.
Arrow optical waveguides based sensors
R.Bernini; S.Campopiano; L.Zeni; P.M. Sarro;
Sensors and Actuators B,
Volume 100, Issue 1-2, pp. 143-146, 2004.
Photoresist Coating Methods for the Integration of Novel 3-D RF Microstructures
N.P. Pham; E. Boellaard; J.N. Burghartz; P.M. Sarro;
Journal of Microelectromechanical Systems,
Volume 13, Issue 3, pp. 491-499, Jun. 2004. ISSN 1057-7157.
Polymer interconnections for 3D-chip stacking technology: directional volume patterning of flexible substrates with conducting polymer wires
C.Videlot; J. Ackermann; F.Fages; T.N.Nguyen; L.Wang; P.M. Sarro; D.Crawley; K.Nikolic; M.Forshaw;
J. Micromech. Microeng.,
Volume 14, pp. 1618-1624, 2004.
High-speed wavefront sensor compatible with standard CMOS technology
D. W. de Lima Monteiro; G. Vdovin; P. M. Sarro;
Sensors and Actuators A,
Volume 109, Issue 3, pp. 220-230, Jan. 2004.
Gel-layer- assisted, directional electropolymerization: a versatile method for high resolution volume and/or surface patterning of flexible substrates with conjugated polymers
J. Ackermann; C.Videlot; T.N.Nguyen; L.Wang; P.M. Sarro;
Advanced Materials,
Volume 16, Issue 19, 2004.
Fabrication of a CMOS compatible pressure sensor for harsh environments
L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 14, pp. 1478-1483, 2004. ed.is niet bekend.
Integrated Coulter counter based on 2-dimensional liquid aperture control
J.H. Nieuwenhuis; F. Kohl; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
Volume 102, Issue 1, pp. 44-50, 2004. ed. is niet bekend.
Relative humidity sensors using porous SiC membranes and Al electrodes
E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers,
Volume 100, pp. 216-220, 2004. 50-50 EI-ECTM.
Nano-array advances: Light measurement & temperature control
I.T. Young; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; L.R. van den Doel; A. Bossche; P.M. Sarro; G. van DedemWK;
Cytometry,
Volume 59A, Issue 1, pp. 53-53, 2004. phpub 31.
Filter-protected photodiodes for high-throughput enzymatic analysis
V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M.J. Vellekoop;
IEEE Sensors Journal,
Volume 4, Issue 5, pp. 584-588, 2004. 50-50 ECTM-EI.
Development of post processing micromachining modules for integrated sensors and actuators applications
T.M.H. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
Delft University of Technology - EI/ECTM-DIMES, Volume STW - DMF.5103 , 2004.
Technology of silicon-based liquid crystal wavefront correctors
G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang; A.N. Simonov;
Delft University of Technology, , 2004.
Nano impulse progress report May 2004; optical titre plate for molecular detection
O.M. Piciu; A. Bossche; P.M. Sarro;
s.n., , 2004.
M3: the third dimension of silicon, Advanced Micro and Nanosystems
P.M. Sarro;
In Enabling Technologies for MEMS and Nanodevices,
Wiley, 2004.
Particle discrimination with an improved projection cytometer
J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
In Proceed. MicroTAS 2004,
Malmo, Sweden, pp. 419-421, Sep. 2004.
Nanostructure formation on anodic aluminum oxide nanotemplates
H. T.M. Pham; C.R. de Boer; P. M. Sarro;
In The Second International Workshop on Nanophysics and Nanotechnology,
Hanoi, Vietnam, pp. 91-98, Oct. 2004.
Integrated antiresonant hollow waveguide liquid sensor
S. Campopiano; R.Bernini; L.Zeni; P.M. Sarro;
In Proc. Eurosensors XVIII,
Rome, pp. 765-766, Sept. 2004. ISBN: 88-7621-282-5.
TiN for MEMS hotplate heaters
J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; L. Steenweg; H.W. Zandbergen;
In Proc. Eurosensors XVIII,
Rome, pp. 706-707, Sept. 2004. ISBN 88-7621-282-5.
Particle size discrimination with a liquid aperture coulter counter
J. Nieuwenhuizen; P. Svasek; P.M. Sarro; M.J. Vellekoop;
In Proc. Eurosensors XVIII,
Rome, pp. 317-320, Sept. 2004. ISBN: 88-7621- 282-5.
Integrated Sensors Arrays For Bioluminescence And Fluorescence Bio-Chemical Analysis
V.Iordanov; B. Iliev; A.Bossche; J. Bastemeijer; P.M. Sarro; I.T.Young; G. van Dedem; M.Vellekoop;
In Proc. IEEE Sensors 2004 Conf.,
2004.
High-aspect-ratio bulk micromachined vias contacts
N.P. Pham; P.M. Sarro;
In Proc SAFE, & Prorisc 2004,
Veldhoven, pp. 657-661, Nov. 2004. ISBN 90-73461-43X.
document
Design of in-package MST-based actuators for micro-assembly
V. Henneken; S. van der Bedem; M. Tichem; B. Karpuschewski; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 747-752, Nov. 2004. ISBN 90-73461-43X.
Titanium Nitride for MEMS Hotplates
J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; T. Nathoeni; L. Steenweg; V. Svetchnikov; H.W. Zandbergen;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 742-746, Nov. 2004. ISBN 90-73461-43X.
Characterization of ferroelectric thin films materials for FeRAM
S.H. Le; B. R. Salmassi; J. N. Burghartz; P.M. Sarro;
In Proc SAFE & Prorisc 2004,
Veldhoven, pp. 710-713, Nov. 2004. ISBN 90-73461-43X.
A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure
W. Venstra; M. Laros; J.W. Spronck; P.M. Sarro; J. van Eijk;
In Proc. Eurosensors XVIII,
Rome, pp. 313-316, Sept. 2004. 88-7621-282-5.
Particle size discrimination with a liquid aperture Coulter counter
J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
In Palombie (Ed.), Proceedings of Eurosensors XVIII,
University of Rome, pp. 317-320, 2004.
Sensorized nanoliter reactor chamber for DNA multiplication
V.P. Iordanov; B.P. Iliev; V. Joseph; J. Bastemeijer; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
In D. Rocha; P.M. Sarro; M.J. Vellekoop (Ed.), Proceedings of IEEE Sensors, 2004,
IEEE, Piscataway, pp. 229-232, 2004. niet eerder opgevoerd 50/50 EI/ECTM.
Integrated nanoliter sensors reactor chamber for DNA multiplication - thermal characterization
V.P. Iordanov; B.P. Iliev; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
In G.C.M. Meijer (Ed.), The sense of contact VI; sensor workshop for industry and science,
s.n., pp. 1-6, 2004. verdeling?.
Relative humidity sensors for harsh enviroments
E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
In G.C.M. Meijer (Ed.), The sense of contact VI; sensor workshop for industry and science,
s.n., pp. 1-6, 2004.
Integrated nanoliter sensors reactor chamber for PCR analysis - from the idea to a complete system
B.P. Iliev; V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
In G.C.M. Meijer (Ed.), The sense of contact VI,
s.n., pp. 1-6, 2004. phpub 32.
Integrated sensors for nanoliter bioluminescence and fluorescence bio-chemical analysis
V.P. Iordanov; B.P. Iliev; J. Bastemeijer; A. Bossche; P.M. Sarro; I.T. Young; H.R.C. Dietrich; L.R. van den Doel; G. van DedemWK; A.R. Kroon; M.J. Vellekoop;
In G.C.M. Meijer (Ed.), The sense of contact VI,
s.n., pp. 1-6, 2004. phpub 34.
CMOS compatible pressure sensors: a comparison between SiC and SiN
L. Pakula; H. Yang; P.J. French; P.M. Sarro;
In SAFE bdf98e4d646247d79cef99391c2b9226 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
STW Technology Foundation, pp. 769-773, 2004. ed. is niet bekend.
SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor
G. Pandraud; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
In SAFE 38da0e1eb22143fbb7fad260632affd7 ProRISC 2004; Proceedings of semiconductor advances for future electronics,
STW Technology Foudation, pp. 1-4, 2004. ed. is niet bekend.
Titanium nitride for MEMS hotplates
J.F. Creemer; P.M. Sarro; M. Laros; H. Schellevis; T. Nathoeni; L.A. Steenweg; V. Svetchnikov; H.W. Zandbergen;
In W Krautschneider; C Claeys (Ed.), SAFE 2004; Semiconductor advances for future electronics,
STW Technology Foundation, pp. 742-746, 2004.
A new ammonia sensor
E. Connolly; B. Timmer; T.M.H. Pham; P.M. Sarro; W. Olthuis; P.J. French;
In H Varwijk (Ed.), SAFE 2004; Proceedings of semiconductor advances for future elecronics,
STW Technology Foundation, pp. 1-4, 2004.
Integrated sensor arrays for bioluminescence and fluorescence bio-chemical analysis
V.P. Iordanov; B.P. Iliev; A. Bossche; J. Bastemeijer; P.M. Sarro; I.T. Young; G. van DedemWK; M.J. Vellekoop;
In D. Rocha; P.M. Sarro; M.J. Vellekoop (Ed.), Proceedings of IEEE Sensors, 2004,
IEEE, Piscataway, pp. 810-813, 2004. niet eerder opgevoerd 50/50 EI/ECTM.
Porous SiC as an ammonia sensor
E. Connolly; B. Timmer; T.M.H. Pham; J. Groeneweg; P.M. Sarro; W. Olthuis; P.J. French;
In s.n. (Ed.), Proceedings of IEEE Sensors, 2004,
IEEE, pp. 178-181, 2004. niet eerder opgevoerd -sb 50/50 EI/ECTM.
Particle discrimination with an improved projection cytometer
J.H. Nieuwenhuis; P. Svasek; P.M. Sarro; M.J. Vellekoop;
In T Laurell; J Nilsson; K Jensen; JD Harrison; JP Kutter (Ed.), Proceedings of MicroTas 2004,
Royal Society of Chemistry, pp. 419-421, 2004.
Silicon carbide membrane relative humidity sensor with aluminium electrodes
E. Connolly; H.M.T. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
In MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems,
IEEE, pp. 193-196, 2004. ed. is niet bekend.
SiC passive optomechanical transducer head for sensor applications
G. Pandraud; L. Pakula; H.M.T. Pham; P.J. French; P.M. Sarro;
In Digest of technical papers; XVIII Eurosensors,
University of Rome, pp. 1-4, 2004. ed. is niet bekend/50-50 EI-ECTM.
Silicon micro-optics for smart light control
G.V. Vdovin; D.W. de Lima Monteiro; O. Akhzar-Mehr; M. Loktev; S. Sakarya; O.A. Soloviev; P.M. Sarro;
In H. Urey; DL Dickensheets (Ed.), Proceedings of SPIE MOEMS display and imaging systems II,
The International Society for Optical Engineering, pp. 135-149, 2004.
Silicon Carbide Membrane Relative Humidity Sensor with Aluminium Electrodes
E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
In MEMS 2004,
Maastricht, The Netherlands, pp. 193-196, Jan. 2004. ISBN 0-7803-8265-X.
document
SiC passive optomechanical transducer head for sensor applications
G. Pandrau; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
In Proc. Eurosensors XVIII,
Rome, pp. 24-28, Sept. 2004. ISBN 88-7621-282-5.
Porous SiC as ammonia sensor
E.J. Connolly; B. Timmer; H.T.M.Pham; J. Groeneweg; P.M. Sarro; W.Olthuis; P.J. French;
In Proc. Eurosensors XVIII,
Rome, pp. 672-674, Sept. 2004. 88-7621-282-5.
Spatial light modulators based on micromachined reflective membranes on viscoelastic layers
S. Sakarya; G. Vdovin; P.M. Sarro;
Sensors and Actuators A,
Volume 108, Issue 1-3, pp. 271-275, Nov. 2003.
Three terminals optoelectronics devices integrated into a silicon on silicon waveguide
G. Coppola; A. Irace; G. Breglio; M. Iodice; L. Zeni; A. Cutolo; P.M. Sarro;
Optics and Lasers Engineering,
Volume 39, Issue 3, pp. 317-332, Mar. 2003. ISSN 0143-8166.
Transient analysis of a high-speed thermo-optic modulator integrated in an all-silicon waveguide
M. Iodice; F.G. Della Corte; I. Rendina; P.M. Sarro; M. Bellucci;
Optical-Engineering,
Volume 42, Issue 1, pp. 169-175, Jan. 2003.
Electrical Characteristics of Plasma-Enhanced Chemical Vapor Deposited Silicon Carbide Thin Films
H.T.M. Pham; T. Akkaya; C.R. de Boer; P.M. Sarro;
Material Science Forum,
Volume 433-436, pp. 451-454, 2003. ISSN 0255-5476.
Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer
W.J. Venstra; P.M. Sarro;
Microelectronic Engineering,
Volume 67-68, pp. 502-507, Jun. 2003.
3D molecular interconnection technology
D. Crawley; K. Nikolic; M. Forshaw; J. Ackermann; C. Videlot; T.N. Nguyen; L. Wang; P.M. Sarro;
J. Micromech. Microeng,
Volume 13, Issue 5, pp. 655-662, Jun. 2003.
Planar antiresonant reflecting optical waveguides as integrated optical refractometer
R. Bernini; S. Campopiano; L. Zeni; C. de Boer; P.M. Sarro;
IEEE Sensors Journal,
Volume 3, Issue 5, pp. 652-657, Oct. 2003.
Self-Adjustment of Micro-mechatronic Systems
M. Tichem; B. Karpuschewski; P.M. Sarro;
Annals of the CIRP,
Volume 52, Issue 1, pp. 17-20, 2003.
Micro-patterning of self-supporting layers with conducting polymer wires for 3D-chip interconnection applications
J. Ackermann; C. Videlot; T.N. Nguyen; L. Wang; P.M. Sarro; D. Crawley; K. Nikoli; M. Forshaw;
Applied Surface Science,
Volume 212-213, pp. 411-416, May 2003.
Miniaturized analytical assays in biotechnology
R.M. van Guijt; R. Moerman; A.R. Kroon; G. van DedemWK; R. van den Doel; L. van Vliet; I.T. Young; F.P.J. Laugere; A. Bossche; P.M. Sarro;
Biotechnology Advances: research reviews,
Volume 21, Issue 5, pp. 431-444, 2003. 50/50 EI/ECTM.
Monitoring enzymatic reactions with in situ sensors
I.T. Young; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; R. Moerman; L.R. van den Doel; G. van DedemWK; A. Bossche; B.L. Gray; P.M. Sarro; P.W. Verbeek; L. van VlietJ;
Proceedings of SPIE- International Society for Optical Engineering,
Volume 4966, pp. 76-82, 2003.
Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
D.W. de Lima Monteiro; O. Akhzar-Mehr; P.M. Sarro; G.V. Vdovin;
Optics Express,
Volume 11, Issue 18, pp. 2244-2252, 2003.
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices
F.P.J. Laugere; R.M. van Guijt; J. Bastemeijer; G. van der Steen; A. Berthold; H.A. Baltussen; P.M. Sarro; G. van DedemWK; M.J. Vellekoop; A. Bossche;
Analytical Chemistry,
Volume 75, Issue 2, pp. 306-312, 2003.
Integrated flow-cells for novel adjustable sheath flows
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
Lab On a Chip: microfluidic and nanotechnologies for chemistry, biology, and bioengineering,
Issue 3, pp. 56-61, 2003.
Monitoring enzymatic reactions in nanolitre wells
I.T. Young; R. Moerman; L.R. van den Doel; V.P. Iordanov; A.R. Kroon; H.R.C. Dietrich; G. van DedemWK; A. Bossche; B.L. Gray; P.M. Sarro; P.W. Verbeek; L. van VlietJ;
Journal of Microscopy,
Volume 212, Issue 3, pp. 254-263, 2003. 50/50 EI/ECTM.
Technology of silicon-based liquid crystal wavefront correctors
G.V. Vdovin; P.J. French; P.M. Sarro; M. Loktev; X. Zhang;
s.n., Volume STW project DOE.5490 , 2003.
Development of post processing micromachining modules for integrated sensors and actuators applications
H.M.T. Pham; L. Pakula; G. Pandraud; P.J. French; P.M. Sarro;
s.n., Volume DMF 5103 , 2003.
Integrated Hartmann-Shack wavefront sensor progress report
D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
s.n., Volume STW project DOE.5375 , 2003.
M3: the third dimension of silicon
P.M. Sarro;
Delft University of Technology: , Apr. 2003. ISBN 90-75774-02-8.
Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
G.V. Vdovin; O. Akhzar-Mehr; P.M. Sarro; D.W. de Lima Monteiro; M. Loktev;
UF Behringer; B Courtois; AM Khounsary; DG Uttamchandani (Ed.);
The International Society for Optical Engineering, , pp. 107-111, 2003.
Polyimide Sacrificial Layer for an All-Dry Post-Process Surface Micromachining Module
H.T.M. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
In Transducers,
Boston, Massachuesetts, USA, pp. 813-816, Jun. 2003. ISBN 0-7803-7731-1.
document
Stiction of Surface Micromachined Structures: A Study of the Problem and the Possible Solutions
H.T.M. Pham; L.S. Pakula; P.J. French; P.M. Sarro;
In Proc. SAFE 2003,
Veldhoven, The Netherlands, pp. 711-715, Nov. 2003. ISBN 90-73461-39-1.
Electromechamical optical attenuation in micromachined SiC waveguides
G. Pandraud; H. Yang; L.S. Pakula; H.T.M. Pham; P.J. French; P.M. Sarro;
In Proc. SAFE 2003,
Veldhoven, The Netherlands, pp. 631-634, Nov. 2003. ISBN 90-73461-39-1.
Fabrication of a CMOS Compatible Pressure Sensor for Harsh Environments
L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P. M. Sarro;
In Proc. 16th IEEE International MEMS conference,
Kyoto, Japan, pp. 502-505, Jan. 2003.
document
Technological approaches for fabrication of elastomer based spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SPIE,
pp. 279-286, 2003. ISSN 0277-786X.
Through-Wafer Electrical Vias for RF Silicon technology
Z. Wang; L. Wang; H. Schellevis; W. Wien; J.N. Burghartz; P.M. Sarro;
In Proc. SAFE 2003,
Veldhoven, The Netherlands, pp. 761-765, Nov. 2003. ISBN 90-73461-39-1.
Experimental results of a three-terminal optical modulator based on a BMFET device
A. Irace; G. Breglio; M. Tordi; G. Coppola; C.R. de Boer; P.M. Sarro;
In Proc. of SPIE,
Brugge, Belgium, pp. 125-132, Oct. 2003. ISSN 0277-786X.
document
Liquid crystal wavefront corrector with modal response
M. Loktev; G. Vdovin; P.M. Sarro;
In Proc. Eurosensors XVII,
University of Minho, Guimaraes, Portugal, pp. 598-599, Sep. 2003.
Wafer thinning for high-density, through-wafer interconnects
L. Wang; C.C.G. Visser; C.R. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
In Proc. of SPIE,
San Jose, CA, pp. 532-539, Jan. 2003. ISSN 0277-786X.
document
Fabrication of a microfluidic chip for PCR applications
M. Bu; B. Husband; T. Melvin; G. ensell; N.P. Pham; P.M. Sarro; J.S. Wilkinson; A.G.R. Evans;
In Proc. MME 2003,
Delft, The Netherlands, pp. 119-122, Nov. 2003. ISBN 90-808266-1-8.
document
A model for film thickness using direct spray coating
N.P. Pham; J.N. Burghartz; P.M. Sarro;
In Proc. IEEE EPTC conference,
Singapore, Dec. 2003.
document
Metal patterning on high topography surface for 3-D RF devices fabrication
N.P. Pham; E. Boellaard; W. Wien; L.D.M. van den Brekel; J.N. Burghartz; P.M. Sarro;
In Proc. Eurosensors XVII,
University of Minho, Guimaraes, Portugal, pp. 440-443, Sep. 2003.
Integrated optical refractometer based on rib-ARROW waveguide
R. Bernini; S. Campopiano; L.Zeni; P.M. Sarro;
In Proc Eurosensors XVII,
University of Minho, Guimaraes, Portugal, pp. 139-142, Sep. 2003.
document
High Aspect Ratio through-Wafer Interconnections for 3D-Microsystems
L. Wang; A. Nichelatti; H. Schellevis; C. de Boer; C. Visser; T.N. Nguyen; P.M. Sarro;
In Proc. 16th IEEE International MEMS conference,
Kyoto, Japan, pp. 634-637, Jan. 2003.
document
Polyimide sacrificial layer for an all-dray post-process surface micromachining module
T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
In Transducers'03 Digest of technical papers,
IEEE, pp. 813-816, 2003.
Relative humidity sensors using porous SiC membranes and Al electrodes
E. Connolly; T.M.H. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
In SAFE 2003 Semiconductor advances for future electronics,
Stichting voor de Technische Wetenschappen, pp. 678-682, 2003. CD-ROM 50/50 EI/ECTM.
Electromechanical optical attenuation in micromachined SiC waveguids
G. Pandraud; H. Yang; L. Pakula; T.M.H. Pham; P.J. French; P.M. Sarro;
In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
Stichting voor de Technische Wetenschappen, pp. 631-634, 2003. CD-ROM.
Stiction of surface micromachined structures: a study of the problem and the possible solutions
T.M.H. Pham; L. Pakula; P.J. French; P.M. Sarro;
In s.n. (Ed.), SAFE 2003 Semiconductor advances for future electronics,
Stichting voor de Technische Wetenschappen, pp. 711-715, 2003. CD-ROM.
Wafer thinning for high-density, through-wafer interconnects
L. Wang; C.C.G. Visser; C.R. de Boer; J.M.W. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
In JA Yasaitis; MA Perez-Maher; JM Karam (Ed.), Proceedings of SPIE. Vol. 4979; micromachining and microfabrication process technnology VIII,
The International Society for Optical Enginering, pp. 532-539, 2003.
Development of a silicon-based modal liquid crystal wavefront corrector
M. Loktev; G.V. Vdovin; P.M. Sarro;
In M Hrabovsky; D Senderakova; P Tomanek (Ed.), Proceedings of SPIE; Photonics, devices, and systems II,
The International Society for Optical Engineering, pp. 558-564, 2003.
Modal corrector integrated in silicon: possibilities for implementation
M. Loktev; G.V. Vdovin; P.M. Sarro;
In A Kohnle; JD Gonglewski (Ed.), Proceedings of SPIE; optics in atmospheric propagation and adaptive systems V,
The International Society for Optical Engineering, pp. 196-205, 2003.
Technological aspects of a custom CMOS sensor for adaptive optics
D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
In M Hrabovsky; D Sendrakova; P Tomanek (Ed.), Proceeding of SPIE; photonics, devices, and systems II,
The International Society for Optical Engineering, pp. 31-36, 2003.
Fabrication technology for micromachined spatial light modulators
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In GC Righini (Ed.), Proceedings of SPIE; integrated optical devices: fabrication and testing,
The International Society for Optical Engineering, pp. 219-226, 2003.
Technological approaches for fabrication of elatomer based spatial light modulators
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In H. Urey (Ed.), Proceedings of SPIE; MOEMS display and imaging systems,
The International Society for Optical Engineering, pp. 334-341, 2003.
PCR Array on chip - thermal characterization
V.P. Iordanov; J. Bastemeijer; A. Bossche; P.M. Sarro; M. Malatek; I.T. Young; G. van DedemWK; M.J. Vellekoop;
In s.n. (Ed.), IEEE Sensors 2003,
IEEE, pp. 1045-1048, 2003. CD-rom 50/50 EI/ECTM.
First measurement results with an integrated projection citometer
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In MA Northrup; KF Jensen; DJ Harrison (Ed.), MTAS 2003 Seventh international conference on micro total analysis systems,
Transducer Research Foundation, pp. 1219-1222, 2003. CD ROM.
Fabrication of a CMOS compatibile pressure sensor for harsh environments
L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
In s.n. (Ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems,
IEEE, pp. 502-505, 2003.
Polymide sacrificial layer for an all-dry post-process surface micromachining module
T.M.H. Pham; A. Bagolini; C.R. de Boer; J.M.W. Laros; L. Pakula; P.J. French; P.M. Sarro;
In s.n. (Ed.), TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems,
IEEE, pp. 813-816, 2003.
Liquid crystal wavefront corrector with modal response
M. Loktev; G.V. Vdovin; P.M. Sarro;
In s.n. (Ed.), Eurosensors XVII The 17th European conference on solid-state transducers,
University of Minho, pp. 352-353, 2003.
Novel flow-cell to create sheath flows with adaptable sample flow dimensions
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In G Fiedler; D Donhoffer (Ed.), Beiträge der Informationstagung Mikroelektronik 2003,
Osterreichischer Verband für Elektrotechnik, pp. 1-5, 2003.
Technology of spatial light modulator based on viscoelastic layers
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In M Hrabovsky; D Sendrakova; P Tomanek (Ed.), Proceeding of SPIE; Photonics, devices, and systems II,
The International Society for Optical Engineering, pp. 477-482, 2003.
Fabrication of a CMOS compatible vertical accelerometer
L. Pakula; H. Yang; T.M.H. Pham; P.M. Sarro; P.J. French;
In s.n. (Ed.), EUROSENSORS 17th European conference on solid-state transducers,
University of Minho, pp. 635-638, 2003.
Membrane porous-SiC humidity sensor with aluminium electrodes
E. Connolly; H.M.T. Pham; P.M. Sarro; P.J. French;
In s.n. (Ed.), E-MRS 2003 20th Anniversary European Materials Research Society Spring meeting,
s.n., pp. 1-2, 2003.
Relative Humidity sensors using porous SiC membranes and Al electrodes
E.J. Connolly; H.T.M. Pham; J. Groeneweg; P.M. Sarro; P.J. French;
In Proc. Eurosensors XVII,
University of Minho, Guimaraes, Portugal, pp. 621-622, Sep. 24 2003. ISBN 90-73461-39-1.
document
Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
2003. niet eerder opgenomen; 1017989; niet eerder opgenomen.
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
E.J. Connolly; G.M. O Halloran; H.T.M. Pham; P.M. Sarro; P.J. French;
Sensors and Actuators A,
Volume 99, Issue 1-2, pp. 25-30, Apr. 2002.
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A. Bagolini; L. Pakula; T.L.M. Scholtes; H.T.M. Pham; P.J. French; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 12, Issue 4, pp. 385-389, Jul. 2002. ISSN 0960-1317.
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
G. Craciun; M.A. Blauw; E. van der Drift; P.M. Sarro; P.J. French;
J. of Micromechanics Microengineering,
Volume 12, Issue 4, pp. 390-394, Jul. 2002.
Technology of reflective membranes for spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
Sensors and Actuators A,
Volume 97-98, pp. 468-472, Apr. 2002.
Silicon thin-film UV filter for NADH fluorescence analysis
V.P. Iordanov; G.W. Lubking; R. R. IshiharaF. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators A,
Volume 97-98, pp. 161-166, Apr. 2002.
X-ray spectroscopy with a Multi-anode Sawtooth Silicon Drift Detector: the diffusion process
J. Sonsky; R.W.Hollander; P.M. Sarro; C.W.E. van Eijk;
Nucl. Instr. and Meth. A,
Volume 477, pp. 93-98, 2002. ISSN 0168-9002.
Through-wafer copper electroplating for 3-D interconnects
N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 12, Issue 4, pp. 395-399, Jul. 2002. ISSN 0960-1317.
Fabrication of a glass-implemented microcapillary electrophoresis device with integrated contactless conductivity detection
A. Berthold; F. Laugere; H. Schellevis; C.R. de Boer; M. Laros; R.M. Guijt; P.M. Sarro; M.J. Vellekoop;
Electrophoresis,
Volume 23, Issue 20, pp. 3511-3519, Oct. 2002. ISSN 0173-0835.
Technological aspects of a custom CMOS sensor for adaptive optics
D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
Proceedings of SPIE- International Society for Optical Engineering,
pp. 31-36, 2002.
Through-wafer copper electroplating for three-dimensional interconnects
N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 12, pp. 395-399, 2002.
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A. Bagolini; L. Pakula; T.L.M. Scholtes; T.M.H. Pham; P.J. French; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 12, pp. 385-389, 2002.
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
E. Connolly; G.M. O'Halloran; T.M.H. Pham; P.M. Sarro; P.J. French;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume A 99, pp. 25-30, 2002.
Technology of reflective manbranes for spatial light modulators
S. Sakarya; G.V. Vdovin; P.M. Sarro;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume A 97-98, pp. 468-472, 2002.
Technology of spatial light modulators based on viscoelastic layers
S. Sakarya; G.V. Vdovin; P.M. Sarro;
Proceedings of SPIE- International Society for Optical Engineering,
pp. 466-471, 2002.
Silicon thin-film UV filter for NADH fluorescence analysis
V.P. Iordanov; G.W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume A 97-98, pp. 161-166, 2002.
Through-wafer copper electroplating for three-dimensional interconnects
N.T. Nguyen; E. Boellaard; N.P. Pham; V.G. Kutchoukov; G. Craciun; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 12, pp. 395-399, 2002.
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
Journal of Micromechanics and Microengineering,
Volume 12, pp. 390-394, 2002.
Fabrication of a glass-implemented microcapillary elettrophoresis device integrated contactless conductivity
A. Berthold; F.P.J. Laugere; H. Schellevis; C.R. de Boer; M. Laros; R.M. van Guijt; P.M. Sarro; M.J. Vellekoop;
Electrophoresis,
Volume 23, Issue 21, pp. 3511-3519, 2002. wet 6.
Integrated Hartmann-Shack wavefront sensor
D.W. de Lima Monteiro; G.V. Vdovin; P.M. Sarro; P.J. French;
Delft University of Technology, Faculty ITS, , 2002.
Technology for integrated spatial light modulators based on reflective membranes
S. Sakarya; G.V. Vdovin; P.M. Sarro;
JD Gonglewski; MA Vorontsov; MT Gruneisen (Ed.);
SPIE, , pp. 21-28, 2002.
Pressure Sensor for Automotive Applications
L.S. Pakula; H. Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 649-652, Nov. 2002. ISBN 90-73461-33-2.
Relative Humidity Sensors based on Porous Polysilicon and Porous Silicon Carbide
E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 603-607, Nov. 2002. ISBN 90-73461-33-2.
Pressure Sensor for Harsh Environments
L.S. Pakula; H .Yang; H.T.M. Pham; P.J. French; P.M. Sarro;
In Proc. MME 2002,
Sinaia, Romania, pp. 295-298, Oct. 2002. ISBN 973-0-02472-3.
Relative-Humidity Sensors Based on Porous Polysilicon and Porous Silicon Carbide
E.J. Connolly; H.T.M. Pham; P.M. Sarro; P.J. French;
In IEEE Sensors 2002,
Hyatt Orlando, Orlando, Florida, USA, pp. 12.4/1-12.4/4, Jun. 2002. ISBN 0-7803-7455-X.
Agile beams and micromachined membrane deformable mirrors
G. Vdovin; P.M. Sarro;
In The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002),
pp. 576-577, 2002. ISBN 0-7803-7500-9.
Self-adjustment of optical interconnects using in-package MEMS-based actuators
K.J. van Nielen; W.J. Venstra; M. Tichem; M. Laros; P.M. Sarro; B. Karpuschewski;
In J. Saneistr; P. Ripka (Ed.), Proceedings Eurosensors XVI,
Prague, Czech Republic, Czech Technical University, pp. 794-797, Sep. 2002.
Development of a silicon-based modal liquid crystal wavefront corrector
M.Y. Loktev; G.V. Vdovin; P.M. Sarro;
In Proc. SPIE: Photonics, Devices, and Sytems II,
Prague, Czech Republic, pp. 558-564, May 2002.
Substrate Options and Add-On Process Modules for Monolithic RF Silicon Technology
J.N. Burghartz; M. Bartek; B. Rejaei; P.M. Sarro; A. Polyakov; N.P. Pham; E. Boullaard; K.T. Ng;
In Proc. 2002 Bipolar/BiCMOS Circuits and Technology Meeting (BCTM 2002),
Monterey, CA, pp. 17-23, Sept. 2002. ISBN 0-7803-7562-9.
Technological aspects of a custom CMOS sensor for adaptive optics
D. de Lima Monteiro; G.V. Vdovin; P.M. Sarro;
In Proc. SPIE: Photonics, Devices, and Sytems II,
Prague, Czech Republic, pp. 31-36, May 2002.
Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
G.V. Vdovin; O. Akhzar Mehr; P.M. Sarro; D.W. de Lima Monteiro; M.Y. Loktev;
In Proc. SPIE: MEMS/MOEMS: Advances Photonic Communications, Sensing, Metrology, Packaging and Assembly,
Brugge, Belgium, pp. 107-111, Oct. 2002.
Low-cost technological approaches to micromachined spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applications IV,
Seattle, WA, USA, pp. 264-271, Jul. 2002.
Modal corrector integrated in silicon: possibilities for implementation
M.Y. Loktev; G.V. Vdovin; P.M. Sarro;
In Proc. SPIE: Optics Atmospheric Propagation and Adaptive Systems V,
Agia Pelagia, Greece, pp. 196-205, Sept. 2002.
Fabrication technology for micromachined spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SPIE: Integrated Optical Devices: Fabrication and Testing,
Brugge, Belgium, pp. 219-226, Oct. 2002.
CMOS-compatible wells for integrated high-speed screening arrays
B.L. Gray; R. Moerman; L.R. van den Doel; H.R. Dietrich; V.P. Iordanov; N.P. Pham; L.M. Sarro; A. Bossche; M.J. Vellekoop;
In Proc. SPIE: Biomedical Nanotechnology Architectures and Applications,
pp. 103-108, Jan. 2002.
Technology for integrated spatial light modulators based on reflective membranes
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In J.D. Gonglewski; M.A. Vorontsov; M.T. Gruneisen (Ed.), Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applic. III,
pp. 21-28, Feb. 2002.
Technology for Integrated Spatial Light Modulators based on Viscoelastic Layers
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 672-675, Nov. 2002. ISBN 90-73461-33-2.
Electrical and Optical Properties of PECVD SiC Thin Films for Surface Micromachined Devices
H.T.M. Pham; T. Akkaya; C. de Boer; C.C.G. P. Visser.M. Sarro;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 662-666, Nov. 2002. ISBN 90-73461-33-2.
Customized CMOS wavefront sensor
D.W. de Lima Monteiro; G.V. Vdovin; J.G. Rocha; V.P. Iordanov; M.Y. Loktev; P.M. Sarro;
In J.D. Gonglewski; M.A. Vorontsov; M.T. Gruneisen (Ed.), Proc. SPIE: High-Resolution Wavefront Control: Methods, Devices, and Applic. III,
pp. 88-99, Feb. 2002.
Photoresist wells for integrated high-speed screening arrays
B.L. Gray; R. Moerman; L.R. van den Doel; V.P. Iordanov; N.P. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
In Proc. SESENS 2002,
Veldhoven, The Netherlands, pp. 791-794, Nov. 2002. ISBN 90-73461-28-6.
Filtered Photodiode Arrays for NADH Fluorescence Analysis
V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M. Vellekoop;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 627-630, Nov. 2002. ISBN 90-73461-33-2.
Fluorescence Measurements in Thick-Film Polymer Wells
B.L. Gray; V.P. Iordanov; R. van den Doel; P.M. Sarro; A. Bossche;
In Proc. SeSens 2002,
Veldhoven, The Netherlands, STW, pp. 622-626, Nov. 2002. ISBN 90-73461-33-2.
Spin, Spray and Eloctroplating of Photoresist for MEMS Structures: A Comparison
N.P. Pham; E. Boellaard; P.M. Sarro; J.N. Burghartz;
In Proc. SAFE 2002,
Veldhoven, The Netherlands, STW, pp. 81-86, Nov. 2002. ISBN 90-73461-33-2.
Thinning of Micromachined Wafers for High-Density, Through-Wafer Interconnects
L. Wang; C.C.G. Visser; C. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
In Proc. SAFE 2002,
Veldhoven, The Netherlands, STW, pp. 121-126, Nov. 2002. ISBN 90-73461-33-2.
Planar Antiresonant Reflecting Optical Waveguides as Sensors for Liquid Substances
R. Bernini; S. Campopiano; L. Zeni; C. de Boer; P.M. Sarro;
In Proc. IEEE Sensors 2002,
Orlando, Florida, USA, pp. 13.4/1-13.4/4, Jun. 2002. ISBN 0-7803-7455-X.
Through-Wafer Copper Electroplating for RF Silicon Technology
N.T. Nguyen; K. Ng; E. Boellaard; N.P. Pham; G. Craciun; P.M. Sarro; J.N. Burghartz;
In Proc. ESSDERC 2002,
Firenze, Italy, University of Bologna, pp. 255-258, Sep. 2002. ISBN 88-900847-8-2.
CMOS-Compatible Optical Filter for High-Throughput Enzymatic-Analysis Devices
V.P. Iordanov; R. Ishihara; P.M. Sarro; J. Bastemeijer; A. Bossche; M.J. Vellekoop;
In IEEE Sensors 2002,
Hyatt Orlando, Orlando, Florida, USA, pp. 9.6/1-9.6/4, Jun. 2002. ISBN 0-7803-7455-X.
Fabrication of Crystalline Membranes Oriented in the (111) plane in a (100) Silicon Wafer
W.J. Venstra; P.M. Sarro;
In Micro- and NanoEngineering 2002 International Conference,
Lugano, Switzerland, pp. 226-227, Sep. 2002.
Electronic baseline-suppression for liquid conductivity detection in a capillary electrophoresis microchip
F. Laugere; J. Bastemeijer; G. van der Steen; M.J. Vellekoop; P.M. Sarro; A. Bossche;
In IEEE Sensors 2002,
Hyatt Orlando, Orlando, Florida, USA, pp. 20.3/1-20.3/4, Jun. 2002. ISBN 0-7803-7455-X.
Self-adjustment of optical interconnects using in-package MEMS-based actuators
K.J. van Nielen; W.J. Venstra; M. M. Tichem. Laros; P.M. Sarro; B. Karpuschewski;
In Eurosensors XVI - Part 2,
Prague, Czech Republic, Czech Technical University, pp. 457-458, Sep. 2002. ISBN 80-01-02576-4.
Electrical characteristics of plasma enhanced chemical vapor deposition silicon carbide thin films
H.T.M. Pham; T. Akkaya; C.R. de Boer; P.M. Sarro;
In Fourth European Conference on Silicon Carbide and Related Materials (ECSCRM 2002),
Linkoping, Sweden, Sep. 2002.
Integrated Coulter counter with non-coaxial sheath-flow and dynamic aperture control
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
Prague, Czech Republic, Czech Technical University, pp. 699-700, Sep. 2002. ISBN 80-01-02576-4.
In-situ doped PECVD SiC for surface micromachined devices
H.T.M. Pham; C.R. de Boer; L.S. Pakula; P.M. Sarro;
In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
Prague, Czech Republic, Czech Technical University, pp. 119-120, Sep. 2002. ISBN 80-01-02576-4.
Direct spray coating of photoresist - a new method for patterning 3-D structures
N.P. Pham; T.L.M. Scholtes; R. Klerks; E. Boellaard; P.M. Sarro; J.N. Burghartz;
In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
Prague, Czech Republic, Czech Technical University, pp. 89-90, Sep. 2002. ISBN 80-01-02576-4.
Realization of High Aspect Ratio Interconnections Based on Macroporous Silicon
A. Nichelatti; T. Nguyen; P.M. Sarro;
In J. Saneistr; P. Ripka (Ed.), Eurosensors XVI - Part 1,
Prague, Czech Republic, Czech Technical University, pp. 97-98, Sep. 2002. ISBN 80-01-02576-4.
Technology for integrated spatial light modulators based on reflective membranes
S. Sakarya; P.M. Sarro; G.V. Vdovin;
In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics for industry and medicine,
s.n., pp. 107-114, 2002.
In-situ doped PECVD SiC for surface micromachined devices
C.R. de Boer; L. Pakula; P.M. Sarro; T.M.H. Pham;
In J Saneistr; P Ripka (Ed.), Eurosensors XVI 16th European Conference on Solid-State Transducers,
Czech Technical University, pp. 232-235, 2002.
Micromachined spatial light modulators based on viscoalastic layers
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In Xiamen University Press, pp. 625-628, 2002.
Micromachined membrane deformable mirrors for laser applications
G.V. Vdovin; P.M. Sarro; V. Kiyko;
In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics for industry and medicine,
s.n., pp. 35-48, 2002.
Integrated Hartmann-Shack wavefront sensor
D.W. de Lima Monteiro; A. Vilaca; G.V. Vdovin; M. Loktev; P.M. Sarro;
In SR Restaino; SW Teare (Ed.), Proceedings of the 3rd international workshop on adaptive optics foor industry and medicine,
s.n., pp. 179-183, 2002.
Technology for integrated spatial light modulators based on viscoelastic layers
S. Sakarya; G.V. Vdovin; P.M. Sarro;
In Proceedings of SeSens 2002,
STW Stichting voor de Technische Wetenschappen, pp. 672-675, 2002.
Filtered photodiode arrays for NADH fluorescence analysis
V.P. Iordanov; J. Bastemeijer; R. Ishihara; P.M. Sarro; A. Bossche; M.J. Vellekoop;
In Proceedings of SeSens 2002,
STW Stichting voor de Technische Wetenschappen, pp. 627-630, 2002.
Relative humidity sensors based on porous polysilicon and porous silicon carbide
E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
In Proceedings of SeSens 2002,
STW Stichting voor de Technische Wetenschappen, pp. 603-607, 2002.
Fluorescence measurements in thick-film polymer wells
B.L. Gray; V.P. Iordanov; P.M. Sarro; A. Bossche;
In Proceedings of SeSens 2002,
STW Stichting voor de Technische Wetenschappen, pp. 622-626, 2002.
Pressure sensor for automotive applications
L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
In Proceedings of SenSens 2002,
STW Stichting voor de Technische Wetenschappen, pp. 649-652, 2002.
Thinning of micromachined wafers for high-density, through-wafer interconnects
L. Wang; C.C.G. Visser; C.R. de Boer; M. Laros; W. van der Vlist; J. Groeneweg; G. Craciun; P.M. Sarro;
In Proceedings of SAFE 2002,
STW Stichting voor de Technische Wetenschappen, pp. 121-126, 2002.
Separation and detection of organic acids in a CE microchip with contactless four-electrode conductivity detection
F.P.J. Laugere; G. van der Steen; J. Bastemeijer; R.M. van Guijt; P.M. Sarro; M.J. Vellekoop; A. Bossche;
In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002: proceedings of the µTAS 2002 symposium, held in Nara, Japan, 3-7 November 2002,
Kluwer Academic Publishers, pp. 491-493, 2002.
12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide
E. Connolly; P.J. French; T.M.H. Pham; P.M. Sarro;
In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors,
IEEE, pp. 499-502, 2002.
9.6: CMOS compatible optical filter for high-throughput enzymatic analysis devices
V.P. Iordanov; R. Ishihara; P.M. Sarro; J. Bastemeijer; A. Bossche; M.J. Vellekoop;
In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors. Vol. I,
IEEE, pp. 225-228, 2002.
20.3: Electronic baseline-suppression for liquid conductivity detection in a capillary electrophoresis microchip
F.P.J. Laugere; J. Bastemeijer; G. van der Steen; M.J. Vellekoop; P.M. Sarro; A. Bossche;
In Proceedings of IEEE sensors 2002: first IEEE international conference on sensors. Vol. 1,
IEEE, pp. 450-453, 2002.
Pressure sensor for harsh environments
L. Pakula; H. Yang; T.M.H. Pham; P.J. French; P.M. Sarro;
In MME'02 micromechanics Europe,
Nat. Inst. for Res. and Development in Microtechnoplogies, pp. 295-298, 2002.
SU-8 structures for integrated high-speed screening
B.L. Gray; V.P. Iordanov; P.M. Sarro; A. Bossche;
In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium,
Kluwer Academic Publishes, pp. 464-466, 2002.
Virtual flow channel: a novel micro-fluidics system with orthogonal, dynamic control of sample flow dimensions
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In Y Baba; S Shoji; {van den Berg}, A (Ed.), Micro total analysis systems 2002: proceedings of the µTAS 2002 symposium, held in Nara, Japan,
Kluwer Academic Publishers, pp. 103-105, 2002.
Influence of deposition parameters and temperature on stress and strain of In Situ doped PECVD silicon carbide
T.M.H. Pham; C.R. de Boer; L. Pakula; P.M. Sarro;
In S Yoshida (Ed.), ICSCRM2001 Proceedings of the International Conference on Silicon Carbide and Related Materials,
Trans Tech Publications, pp. 759-762, 2002.
Through-wafer copper electroplating for RF silicon technology
N.T. Nguyen; T.K. Ng; E. Boellaard; N.P. Pham; G. Craciun; P.M. Sarro; J.N. Burghartz;
In ESSDERC 2002 32nd European Solid-State Device Research Conference,
University of Bologna, pp. 255-258, 2002.
CMOS-compatible wells for integrated high-speed screening arrays
B.L. Gray; R. Moerman; L.R. van den Doel; H.R.C. Dietrich; V.P. Iordanov; N.P. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
In DJ Bornhop; DA Dunn; RP Mariella; CJ Murphy; DV Nicolau; Shuming Nie; M Palmer; R Raghavachari (Ed.), Biomedical Nanotechnology Architectures and Applications, Proceedings,
SPIE, pp. 103-108, 2002. ISSN 0277-786X, phpub 31.
Integrated Coulter counter with non-caxial sheath-flow and dynamic aperture control
J.H. Nieuwenhuis; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In Eurosensors 2002,
Czech Technical University, pp. 1194-1197, 2002.
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
2002. niet eerder gehonnoreerd; WO 02/090945 A2; niet eerder gehonnoreerd.
Thin photodiodes for a neutron scintillator silicon-well detector
C.P. Allier; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro; M. de Boer; J.B. Czirr; J.P. Chaminade; C. Fouassier;
IEEE Transactions on Nuclear Science,
Volume 48, Issue 4, pp. 1154-1157, Aug. 2001.
Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers
J. Sonsky; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro; V. Kouchpil;
IEEE Trans. on Nuclear Science,
Volume 48, pp. 258-261, 2001. ISSN 0018-9499.
IC-compatible two-level bulk micromachining process module for RF silicon technology
N.P. Pham; P.M. Sarro; K.T. Ng; J.N. Burghartz;
IEEE Tr. Electron Devices,
Volume 48, Issue 8, pp. 1756-1764, Aug. 2001.
Capillary electrophoresis with on-chip four-electrode capacitively coupeled conductivity detection for application in bioanalysis
R.M. van Guijt; E. Baltussen; G. van der Steen; H. Frank; H. Billiet; T.G.M. Schalkhammer; F.P.J. Laugere; M.J. Vellekoop; A. Berthold; P.M. Sarro; G. van Dedem;
Electrophoresis,
Volume 22, pp. 2537-2541, 2001.
Capillary electrophoresis with on-chip four-electrode capacitively coupled conductivity for application in bioanalysis.
R.M. van Guijt; H.A. Baltussen; G. van der Steen; H. Frank; H.A. Billiet; T.G.M. Schalkhammer; F.P.J. Laugere; M.J. Vellekoop; A. Berthold; P.M. Sarro; G. van DedemWK;
Electrophoresis,
Volume 22, Issue 12, pp. 2537-2541, 2001.
Thermophysical characterisation of PolySi0,7Ce0,3 for use in thermoelectric devices
D.D.L. Wijngaards; S.H. Kong; P.M. Sarro; R.F. Wolffenbuttel;
{E Obermeier} (Ed.);
Springer, , pp. 1010-1013, 2001.
Si based thin-film filter with high visible-over-UV selectivity for biochemical fluorescence analysis
V.P. Jordanov; W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
{E Obermeier} (Ed.);
Springer, , pp. 1-4, 2001.
Polycrystalline silicon thin-film on glass as a UV filter for NADH fluorescence measuremants
V.P. Jordanov; R. Ishihara; P.M. Sarro; M.J. Vellekoop; R.F. Wolffenbuttel; J. Bastemeijer; A. Bossche;
STW Technology Foundation, , pp. 799-802, 2001.
Integrated high rejection filter for NADH fluorescence measuremnts
V.P. Jordanov; W. Lubking; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
AMA Service, , pp. 107-111, 2001.
Si Based Thin-Film Filter with High Visible-Over-UV Selectivity for Biochemical Fluorescence Analysis
V.P. Iordanov; G.W. Lubking; R. R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
In The 11th Intern. Conf. on Solid-State Sensors and Actuators (Transducers 01),
Munich, Germany, pp. 1182-1185, Jun. 2001. ISBN 3-540-42150-5.
Thermophysical Characterisation of PolySi0.7Ge0.3 for Use in Thermoelectric Devices
D.D.L. Wijngaards; S.H. Kong; P.M. Sarro; R.F. Wolffenbuttel;
In The 11th International Conference on Solid-State Sensors and Actuators (Transducers 01),
Munich, Germany, pp. 1010-1013, Jun. 2001. ISBN 3-540-42150-5.
document
Technology of reflective membranes for spatial light modulators
S. Sakarya; G.Vdovin; P.M. Sarro;
In The 11th Intern. Conf. on Solid-State Sensors and Actuators (Transducers 01),
Munich, Germany, pp. 1336-1339, Jun. 2001. ISBN 3-540-42150-5.
document
Direct Spray Coating of Photoresist for MEMS applications
N.P.Pham; T.M.L.Scholtes; R.Klerk; B.Wieder; P.M. Sarro; J.N.Burghartz;
In Proceedings of the SPIE,
San Fransisco, USA, pp. 312-319, Oct. 2001. ISBN 0-8194-4285-2.
document
Temperature Optical Sensor based on all silicon Bimodal Waveguide
G. Coppola; C. R. de Boer; G. Breglio; M. Iodice; A. Irace; P. M. Sarro;
In Proceedings of SESENS 2001,
Veldhoven, The Netherlands, pp. 777-782, 2001. ISBN 90-73461-29-4.
document
Evaluation of In-Situ Doped PECVD SiC Thin Films for Surface Micromachining
H.T.M. Pham; C.R. de Boer; C. Kwakernaak; W.G. Sloof; P.M. Sarro;
In Proceedings of SESENS 2001,
Veldhoven, The Netherlands, pp. 856-860, 2001. ISBN 90-73461-29-4.
document
Dry Etching Release of Structures in Post-Process Surface Micromachining using Polyimide as a Sacrificial Layer
A. Bagolini; H.T.M. Pham; T.L.M. Scholtes; L. Pakula; P.M. Sarro;
In Proceedings of SESENS 2001,
Veldhoven, The Netherlands, pp. 769-772, 2001. ISBN 90-73461-29-4.
document
Optoelectronic Modulator Realized by a Fully Compatible Bipolar Process
G. Coppola; C.R. de Boer; G. Breglio; A. Irace; P. M. Sarro;
In Proceedings of SAFE 2001,
Veldhoven, The Netherlands, pp. 24-29, 2001. ISBN 90-73461-29-4.
Wafer Thinning for Highly Dense 3D Electronic Structures
L. Wang; P.M. Sarro;
In Proceedings of SAFE 2001,
Veldhoven, The Netherlands, pp. 214-219, 2001. ISBN 90-73461-29-4.
document
Through-wafer Copper plug formation for 3-dimensional ICs
T.Nguyen Nhu; E Boellard; N.P.Pham; V.G.Kutchukov; G.Craciun; P.M. Sarro;
In Proceedings of SAFE 2001,
Veldhoven, The Netherlands, pp. 141-144, 2001. ISBN 90-73461-29-4.
Through-wafer copper electroplating for 3-D interconnects
N.T.Nguyen; E. Boellaard; N.P.Pham; G.Craciun; V.G.Kutchoukov; P.M. Sarro;
In M.Hill; B.Lane (Ed.), Proceedings MME 2001,
Cork-Ireland, pp. 74-77, Sept. 2001.
Spray coating of AZ4562 photoresist for MEMS applications
N.P.Pham; P.M. Sarro; J.N.Burghartz;
In Proceedings of SAFE 2001,
Veldhoven, The Netherlands, 2001. ISBN 90-73461-28-6.
Technology for Spatial Light Modulators based on Reflective Silicon Structures
S. Sakarya; G.Vdovin; P.M. Sarro;
In Proc. Sensor Technology Conference,
The Netherlands, pp. 25-30, 2001.
document
Flexible silicon micromachined structures for use in integrated spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SeSens 2001,
Veldhoven, The Netherlands, STW, pp. 861-864, Nov., 2001 2001. ISBN 90-73461-?.
document
Micromachined Si-well scintillator pixel sensors for thermal neutron detection
C.P. Allier; R.W. Hollander; C.W.E. van Eijk; M. de Boer; J.G.E. Gardeniers; P.M. Sarro; J.B. Czirr;
In M. Elwenspoek (Ed.), Proc. Sensor Technology Conf,
Enschede, The Netherlands, pp. 191-196, May 2001. ISBN 0-7923-7012-0.
document
Polyimide sacrificial layer for post-processing surface micromachining
A. Bagolini; T.L.M. Scholtes; H.T.M. Pham; L. Pakula; P.M. Sarro;
In M.Hill; B.Lane (Ed.), Proc. MME 2001,
Cork, Ireland, pp. 58-61, Sept. 2001.
Integrated high rejection filter for NADH fluorescence measurements
V.P. Iordanov; G.W. Lubking; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
In Proc. Sensor2001,
Nurnberg, Germany, May 2001.
A Micromachining Post-Process Module with Pattern Transfer in Deep Cavities for RF Silicon Technology
N.P. Pham; P.M. Sarro; K. Ng; J.N. Burghartz;
In Proc. MEMS 2001,
Interlaken, Switzerland, pp. 345-348, Jan. 2001. ISBN 0-7803-5998-4.
Influence of deposition parameters and temperature on stress and strain of in-situ doped PECVD Silicon carbide
H.T.M. Pham; C.R. de Boer; L. Pakula; P.M. Sarro;
In S. Yoshida et al. (Ed.), Proc. International Conference on Silicon Carbide and Related Materials 2001 (ICSCRM2001),
Tsukuba, Japan, pp. 759-762, Oct. 2001. ISBN 0-87849-X.
Integrated Hartmann-Shack wavefront sensor
D.W. de Lima Monteiro; A. Vilaca; G. Vdovin; M. Loktev; P.M. Sarro;
In Proc. 3rd Adaptive optics conference for Industry and Medicine,
Albuquerque, USA, pp. 179-183, 2001.
Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining
H.T.M. Pham; C.R. de Boer; C. Kwakernaak; W.G. Sloof; P.M. Sarro;
In Proc of SPIE Micromachining and Microfabrication,
San Francisco, CA, pp. 272-279, 2001. ISBN 0-8194-4285-2.
Effect of annealing on mechanical and optical properties of in-situ doped sic thin films
H.T.M. Pham; C.R. de Boer; C.C.G. P. Visser.M. Sarro;
In Proc of SPIE International Symposium on Optoelectronics and Microelectronics,
Nanjing, China, pp. 59-66, 2001. ISBN 0-8194-4340-9.
Integrated RF passive components - discrete vs. distributed
J.N. Burghartz; K.T. Ng; N.P. Pham; B. Rejaei; P.M. Sarro;
In Device Research Conference,
pp. 113-114, 2001.
document
Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems
F.P.J. Laugere; A. Berthold; W. Lubking; J. Bastemeijer; R.M. van Guijt; E. Baltussen; P.M. Sarro; M.J. Vellekoop;
In {E Obermeier} (Ed.), Transducers'01: technical papers. Vol.2,
Springer, pp. 1178-1181, 2001.
Technology of reflective membranes for spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In {E Obermeier} (Ed.), Tansducers'01: technical papers,
Springer, pp. 1336-1339, 2001.
Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer
A. Bagolini; H.M.T. Pham; T.L.M. Scholtes; L. Pakula; P.M. Sarro;
In SAFE2001: proceedings,
STW Technology Foundation, pp. 769-772, 2001.
Photoresist wells for integrated high-speed screening arrays
B.L. Gray; R. Moerman; L.R. van den Doel; V.P. Jordanov; P.N. Pham; P.M. Sarro; A. Bossche; M.J. Vellekoop;
In SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
STW Technology Foundation, pp. 791-794, 2001.
Flexible silicon micromachined structures for use in integrated spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
STW Technology Foundation, pp. 861-864, 2001.
New post-processing modules
L. Pakula; H.M.T. Pham; C.R. de Boer; P.M. Sarro; P.J. French;
In SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology,
STW Technology Foundation, pp. 848-851, 2001.
Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic
E. Connolly; G.M.O. O. Halloran; H.M.T. Pham; P.M. Sarro; P.J. French;
In SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology,
STW Technology Foundation, pp. 773-776, 2001.
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.
G. Craciun; M.A. Blauw; EW.J.M. van der Drift; P.M. Sarro; P.J. French;
In M Hill (Ed.), Proceedings of the 12th Micromechanics Europe Workshop MME.,
pp. 62-65, 2001.
Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide
E. Connolly; G.M.O. O. Halloran; P.M. Sarro; P.J. French;
In {M Elwenspoek} (Ed.), Proceedings,
Kluwer, pp. 83-88, 2001.
Technology for spatial light modulators based on reflective silicon structures
S. Sakarya; G. Vdovin; P.M. Sarro;
In {M Elwenspoek} (Ed.), Proceedings,
Kluwer, pp. 25-30, 2001.
Measurement system for biochemical analysis based on capillary electrophoresis and microscale conductivity detection
F.P.J. Laugere; A. Berthold; R.M. van Guijt; E. Baltussen; J. Bastemeijer; P.M. Sarro; M.J. Vellekoop;
In {M Elwenspoek} (Ed.), Proceedings,
Kluwer, pp. 1-6, 2001.
Novel material for low temperature post-processing micromachining
L. Pakula; H.M.T. Pham; P.M. Sarro; P.J. French;
In MME 2001: workshop,
s.n., pp. 70-73, 2001.
Polyimide sacrificial layer for postprocessing surface micromachining
A. Bagolini; T.L.M. Scholtes; H.M.T. Pham; L. Pakula; P.M. Sarro;
In MME 2001,
s.n., pp. 58-61, 2001.
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
G. Cracium; M.A. Blauw; P.M. Sarro; P.J. French;
In MMe 2001:workshop,
s.n., pp. 62-65, 2001.
Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems.
F.P.J. Laugere; A. Berthold; G.W. Lubking; J. Bastemeijer; R.M. van Guijt; H.A. Baltussen; P.M. Sarro; M.J. Vellekoop;
In Digest of techn. papers of tranducers '01,
pp. 1178-1181, 2001.
Galvanic etching for sensor fabrication
Ashruf C.M.A.; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
Journal of micromechanics and microengineering,
Volume 10, pp. 505-515, 2000. ISSN 0960-1317.
Silicon carbide as a new MEMS technology
P.M. Sarro;
Sensors and Actuators A,
Volume 82, pp. 210-218, 2000. ISSN 0924-4247.
Effect of Surfactant on Surface Quality of Silicon Microstructures Etched in Saturated TMAHW Solutions
P.M. Sarro; D. Brida; W. van der Vlist; S. Brida;
Sensors and Actuators A,
Volume 85, pp. 340-345, 2000. ISSN 0924-4247.
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators A,
Volume 82, Issue 1-3, pp. 224-228, 2000.
Design and fabrication of infrared detector arrays for satellite attitude control
A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; E.J.G. Goudena; M. Laros; P.M. Sarro; C.A. Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
Sensors and Actuators A,
Volume 83, pp. 101-108, 2000.
Micro-CAT with redundant electrodes (CATER)
F.D. van den Berg; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
Nuclear Instruments and Methods Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
Volume 453, Issue 3, pp. 530-535, Oct. 2000.
Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells
C.P. Allier; R.W. Hollander; P.M. Sarro; M. de Boer; C.W.E. van Eijk;
IEEE Trans. on Nuclear Science,
Volume 47, Issue 4, pp. 1303-1306, 2000.
X-ray Detection With Multi-anode Sawtooth Silicon Drift Detectors
J. Sonsky; J. Huizenga; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
IEEE Trans. Nucl. Sci.,
Volume 47, Issue 3, pp. 750-755, 2000. ISSN 0018-9499.
Silicon drift detector with reduced lateral diffusion: experimental results
J. Sonsky; H. Valk; J. Huizenga; R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
IEEE Nucl. Instrum. and Meth. Phys. Res. A,
Volume 439, Issue 2-3, pp. 513-518, 2000.
Scintillation light read-out by thin photodiodes in silicon wells
C.P. Allier; R.W. Hollander; P.M. Sarro; C.W.E. van Eijk;
IEEE Nuclear Instruments & Methods Physics Research A,
Volume 442, pp. 255-258, 2000.
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume 82, Issue 1-3, pp. 224-238, 2000.
Galvanic etching for sensor fabrication
C.M.A. Ashruf; P.J. French; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
Journal of Micromechanics and Microengineering,
Volume 10, pp. 505-515, 2000.
Sealing RIE etch holes for an epi-micromachined pressure sensor
J.F.L. Goosen; J.P. Dartee; C. de Boer; P.J. French; P.M. Sarro;
In Proc. MME,
Uppsala, Sweden, pp. B8.1-B8.4, Oct. 2000.
Pressure, flow and oxygen sensors on one chip for use in catheters
J.F.L. Goosen; P.J. French; P.M. Sarro;
In Proc. MEMS,
Miyazaki, Japan, pp. 537-540, Jan. 2000.
Anisotropic etching of silicon using a galvanic cell
P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
In 2nd Workshop on Physical Chemistry of Wet Etching of Silicon,
Toulouse, pp. 1-8, May 2000.
Low-loss small cross-section silicon-on-silicon rib waveguides with high-confining ion-implanted lower cladding
M. Iodice; G. Cocorullo; F. G. Della Corte; T. Polichetti; I. Rendina; P. M. Sarro;
In SPIE Photonics West Conf.,
San Jose, Ca, USA, pp. 120-126, Jan. 2000.
A Micromachining Post-Process Module for RF Silicon Technology
N.P. Pham; K.T. Ng; M. Bartek; P. M. Sarro; B. Rejaei; J.N. Burghartz;
In Proc. IEDM 2000,
San Francisco, USA, pp. 481-484, Dec. 2000. ISBN 0-7803-6438-4.
Infrared Thermal Imaging of SiNx membranes
A. Irace; G. Breglio; P. Spirito; P.M. Sarro;
In SPIE Photonics West Conf.,
San Diego, USA, Jul. 2000.
Fluorescence analysis in subnanoliter reactor wells: evaluation of different possible illumination configurations
Iordanov V.; W. Lubking; P.M. Sarro; M.J. Vellekoop;
In SeSens 2000,
pp. 643-645, Dec. 2000.
Technology of reflective micromachined pixelated membranes for use in spatial light modulators
Sakarya S.; G. Vdovin; P.M. Sarro;
In SeSens 2000,
pp. 689-691, Dec. 2000. ISBN 90-73461-24-3.
Multisensing in Subnanoliters High-Speed Screning (HSS) Arrays
M.J. Vellekoop; K.T. Hjelt; G.W. Lubking; J. Bastermeijer; P.M. Sarro; et al;
In Proc. XIV Eurosensors Conf.,
Copenhagen, Denmark, pp. 39-42, Aug. 2000. ISBN 87-89935-50-0.
Micromachined membrane deformable mirrors for space applications
G. Vdovin; P.M. Sarro; S. Manhart; Z. Sodnik;
In Proc. XIV Eurosensors Conf.,
Copenhagen, Denmark, pp. 559-560, Aug. 2000.
Integrated shape sensor for particles and cells based on optical projection
J.H. Nieuwenhuis; G.W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
In Proc. XIV Eurosensors Conf.,
Copenhagen, Denmark, pp. 891-894, Aug. 2000.
Two-step glass-etching for microfluidic devices
A. Berthold; P.M. Sarro; M.J. Vellekoop;
In Proc. SeSens 2000 workshop,
Veldhoven, pp. 613-616, Dec. 2000.
Reflective 2D pixelated membranes for micromachined spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. XIV Eurosensors Conf.,
Copenhagen, Denmark, pp. 333-336, Aug. 2000. ISBN 87-89935-50-0.
A novel micromachining process using pattern transfer over large topography for RF components
N.P. Pham; P.M. Sarro; K.T. Ng; R. Behzad; J.N. Burghartz;
In Proc. SAFE,
Veldhoven, pp. 125-128, 2000. ISBN 90-73461-24-3.
A Sub-Surface Metallization Post-Process IC Module for RF Technology
K.T. Ng; N.P. Pham; B. Rejaei; P.M. Sarro; J.N. Burghartz;
In Proc. of IEEE BCTM,
Minneapolis, pp. 195-198, Sept. 25-27 2000. ISBN 0-7803-6384-1.
IC-compatible Two-level Bulk Micromachining for RF Silicon Technology
N.P. Pham; P.M. Sarro; K.T. Ng; J.N. Burghartz;
In Proc. ESSDERC,
Cork, Ireland, pp. 204-207, Sept. 2000. ISBN 2-86332-248-6.
IC-compatible process for pattern transfer in deep wells for integration of RF components
N.P.Pham; P.M. Sarro; J.N.Burghartz;
In J.M.Karam; Y.Yasitis (Ed.), Proc of SPIE Micromachining and Microfabrication Process Technology VI,
Santa Clara, pp. 390-397, Sept. 2000. ISSN 0277-786X.
Characterization of a Bullk-Micromachined Post-Process Module for Silicon RF Technology
K.T. Ng; N.P. Pham; P.M. Sarro; B. Rejaei Salmassi; J.N. Burghartz;
In IEEE topical meeting on Silicon Monolithic integrated Circuits RF systems,
pp. 99-102, Apr. 2000.
Integrated shape sensor for particles and cells based on optical projection
J.H. Nieuwenhuis; W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
STW Technology Foundation, pp. 669-672, 2000.
Fluorescence analysis in subnanoliter reactor wells: evaluation of different possible illumination configurations
V.P. Jordanov; W. Lubking; P.M. Sarro; M.J. Vellekoop;
In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
STW Technology Foundation, pp. 643-645, 2000.
Technology of reflective micromachined pixelated membranes for use in spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
STW Technology Foundation, pp. 689-691, 2000.
Two-step glass wet-etching for micro-fluidic devices
A. Berthold; P.M. Sarro; M.J. Vellekoop;
In {JP Veen} (Ed.), SAFE-ProRISC-SeSens 2000: proceedings,
STW Technology Foundation, pp. 613-616, 2000.
Multisensing in subnanoliter high-speed screening (HSS) arrays.
M.J. Vellekoop; K.H. Hjelt; G.W. Lubking; J. Bastemeijer; P.M. Sarro; T.G.M. Schalkhammer; D. Criado; V.P. Iordanov;
In Proceedings of Eurosensors XIV. 14th European conference on solid state transducers. Copenhagen, August 2000.,
pp. 39-42, 2000.
Pressure, flow and oxygen saturation sensors on one chip for use in catheters
J.F.L. Goosen; P.J. French; P.M. Sarro;
In MEMS 2000: proceedings,
IEEE, pp. 537-540, 2000.
Microarrays for biotechnology: The imaging challenge.
L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; R. Moerman; J. Frank; G. van DedemWK; K.T. Hjelt; L. van VlietJ; I.T. Young;
In YJ Zhang (Ed.), Proceedings ICIG'2000, First International Conference on Image and Graphics,
pp. 36-41, 2000. ISSN: 1006-8961.
Sealing RIE etch holes for an epi-micromachined pressure sensor
J.F.L. Goosen; J.P. Dartee; C. den Boer; P.J. French; P.M. Sarro;
In {Y Bäcklund}; {C Hedlund} (Ed.), MME '00,
s.n., pp. 1-4, 2000.
Integration of a Hartmann-Shack wavefront sensor
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In {G.D. Love} (Ed.), Proceedings,
World Scientific, pp. 215-220, 2000.
Multisensing in subnanoliter high-speed screening (HSS) arrays
M.J. Vellekoop; K.T. Hjelt; W. Lubking; J. Bastemeijer; P.M. Sarro; T.G.M. Schalkhammer; D. Criado; V.P. Jordanov;
In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
Mikroelektronik Centret, pp. 39-42, 2000.
Reflective 2D pixelated membranes for micromachined spatial light modules
S. Sakarya; G. Vdovin; P.M. Sarro;
In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
Mikroelektronik Centret, pp. 333-336, 2000.
Anisotropic etching of silicon using a galvanic cell
P.J. French; C.M.A. Ashruf; P.M. Sarro; R. Kazinczi; X.H. Xia; J.J. Kelly;
In Abstracts booklet,
s.n., pp. 1-8, 2000.
Integrated shape sensor for particles and cells based on optical projection
J.H. Nieuwenhuis; W. Lubking; A. Berthold; P.M. Sarro; M.J. Vellekoop;
In {R Reus}, de; {S Bouwstra} (Ed.), Eurosensors XIV,
Mikroelektronik Centret, pp. 891-894, 2000.
Measurement of thermal conductivity and diffusivity of single and multilayer membranes
A. Irace; P.M. Sarro;
Sensors and Actuators,
Volume A76, Issue 1-3, pp. 323-328, 1999.
Technology and applications of micromachined adaptive mirrors
G,Vdovin; P.M. Sarro; S.Middelhoek;
J.Micromech. Microeng.,
Volume 9, pp. 8-20, 1999. ISSN-0960-1317.
Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250µm
J. Sonsky; H.Valk; J.Huizenga; and R.W.Hollander; C.W.E. van Eijk; P.M. Sarro;
IEEE Trans on Nucl. Science,
Volume 46, Issue 3, pp. 271-274, 1999. ISSN 0018-9499.
Thin photodiodes for a scintillator-silicon well detector
C.P. Allier; R.W. Hollander; P.M. Sarro; C.W.E. van Eijk;
IEEE Trans. on Nuclear Science,
Volume 46, Issue 6, pp. 1948-1951, 1999.
Diminished electron cloud broadening in a silicon drift detector by sawtooth p+ strips
J. Sonsky; H.Valk; C. P. Allier; R.Hollander; C.W.E. van Eijk; P.M. Sarro;
IEEE Trans on Nucl. Science,
Volume 46, Issue 1, pp. 53-58, 1999. ISSN 0018-9499.
Fluorescence detection in (sub-)nanoliter microarrays
L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; J. Frank; G. van DedemWK; K.T. Hjelt; L. van VlietJ; I.T. Young;
M Ferrari (Ed.);
, pp. 28-39, 1999. ISSN: 0277-786X.
Microinjection of beta-D-glucose standards and Amplex Red reagent on microarrays
R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van DedemWK; K.T. Hjelt; M.J. Vellekoop; P.M. Sarro; I.T. Young;
M Ferrari (Ed.);
, pp. 119-128, 1999. ISSN: 0277-786X Proc. SPIE, Progress in Biomedical Optics, Vol: 3606.
Pressure and flow sensor for use in catheters
J.F.L.Goosen; P.J. French; P.M. Sarro;
In Proc.SPIE Micromachining and Microfabrication 1999 Symposium,
Santa Clara, CA, SPIE, pp. 38-45, Sep. 1999. ISBN 0-8194-3473-6.
Influence of the Formation Parameters on the Humidity Sensing Characteristics of a Capacitive Humidity Sensor Based on Porous Silicon
G.M. O'Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 117-120, Sept. 1999. ISBN 90-76699-02-X.
Combination of Epi-Poly and Electropolishing for Fabrication of Accelerometers with Large Substrate Separation Gaps
P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M. O'Halloran; P.M. Sarro;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 1029-1032, Sept. 1999.
Practical considerations of the galvanic etch-stop for device application
C.M.A.Ashruf; P.J. French; P.M. Sarro; W. van d.Vlist; E.L.Oemar; L.J.Breems; J.J.Kelly;
In Proc. 10th Int. Conf. Solid-State Transducers,
Sendai, Japan, pp. 560-563, Jun. 1999.
One- and two-dimensional CMOS position-sensitive detectors
D.W. de Lima Monteiro; G.Vdovin; P.M. Sarro;
In Topical meeting on Adaptive Optics, US Air Force,
Albuquerque, USA, 1999.
Various layouts of analog CMOS optical position-sensitive detectors
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In Proc. SPIE Materials and Electronics for High-Speed and Infrared Detectors,
Denver, pp. 134-142, Jul. 1999. ISBN 0-8194-3280-6.
Micro-injection of b-D-glucose standards and Amplex Red reagent on micro-arrays
R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van Dedem; K.T. Hjelt; M J Vellekoop; P M Sarro; I.T. Young;
In Proceedings SPIE,
San Jose, pp. 119-128, Jan. 1999. ISBN 0-8194-3076-5.
Fluorescence detection in (sub-)nanoliter microarrays
L.R. van d. Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K. Hjelt; L.J. van Vliet; I.T. Young;
In Proceedings SPIE,
San Jose, pp. 28-39, Jan. 1999. ISBN 0-8194-3076-5.
Recent progress in technology and applications of membrane micromachined deformable mirrors
G. Vdovin; P.M. Sarro;
In Proc. SPIE High-resolution wavefront control: methods, devices and applications,
Denver, pp. 2-11, Jul. 1999. ISBN 0-8194-3246-6.
IC-Compatible Two-level Bulk Micromachining for RF components
N.P.Pham; K.T. Ng; J.M.W. Laros; T.L.M. Scholtes; P.M. Sarro; J.N. Burghartz;
In J.P.Veen (Ed.), Proc.SAFE 99,
Mierlo, The Netherlands, pp. 359-362, 1999. ISBN 90-73461-18-9.
Thermal Conductivity Measurement on a SiC Thin Film
A. Irace; P.M. Sarro;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 809-812, Sept. 1999.
All-Glass Microstructures for Biochemical Analysis Systems
A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop; G. Pignatel;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 975-978, Sept. 1999.
Technology of Pixelated Flexible Silicon Structures for Spatial Light Modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 737-740, Sept. 1999.
Piezoelectric ZnO Membrane Resonators for Liquid Property Sensing
S. Koller; O. Brand; P.M. Sarro; M.J. Vellekoop; H. Baltes;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 677-680, Sept. 1999.
Design of Infrared Detector Arrays for Satellite Attitude Control
A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; B. Goudena; M. Laros; P.M. Sarro; C.A.Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 309-316, Sept. 1999.
Micromachined SLM based on pixelated reflective membranes
S. Sakarya; G. Vdovin; P.M. Sarro;
In Proc. SPIE Conf. on High-Resolution Wavefront Control,
Denver, USA, pp. 23-31, Jul. 1999.
Effect of Surfactant on Surface Quality of Silicon Microstructures Etched in Saturated TMAHW Solutions
P.M. Sarro; D. Brida; W. van der Vlist; G. Pignatel; S.Brida;
In Proc. XIII Eurosensors Conf.,
The Hague, The Netherlands, pp. 389-392, Sept. 1999.
Technology of pixelated reflective membranes for spatial light modulators
S. Sakarya; G.Vdovin; P.M. Sarro;
In J.P.Veen (Ed.), Proc. SAFE 99,
Mierlo, The Netherlands, pp. 671-676, 1999. ISBN 90-73461-18-9.
Position-sensitive detectors for a wavefront sensor
D.W. de Lima Monteiro; G.Vdovin; P.M. Sarro;
In J.P.Veen (Ed.), Proc. SAFE 99,
Mierlo, The Netherlands, pp. 287-294, 1999. ISBN 90-73461-18-9.
Glass-To-Glass Anodic Bonding
A.Berthold; L.Nicola; P.M. Sarro; M.J.Vellekoop;
In J.P.Veen (Ed.), Proc. SAFE 99,
Mierlo, The Netherlands, pp. 33-36, 1999. ISBN 90-73461-18-9.
Integration of a Hartmann-Shack wavefront sensor
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In Proc. 2nd International Workshop on Adaptive Optics for Industry and Medicine,
Durham, World Scientific, pp. 215-220, Jul. 1999. ISBN 981-02-4115-1.
Lamb wave sensor with tensile ZnO Liquid Property Sensing
S. Koller; O. Brand; H. Baltes; B.Jakoby; P.M. Sarro; M.J. Vellekoop;
In Proc. 10th Int. Conf. Solid-State Transducers,
Sendai, Japan, pp. 1512-1515, Jun. 1999.
Silicon carbide as a new MEMS technology
P.M. Sarro;
In Proc. 10th Int. Conf. Solid-State Transducers,
Sendai, Japan, The Institute of Electr. Eng. of Japan, pp. 186-189, Jun. 1999.
A novel technological process for glaas-to-glass anodic bonding
A. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
In Proc. 10th Int. Conf. Solid-State Transducers,
Sendai, Japan, pp. 1324-1327, Jun. 1999.
Fabrication of a focal plane array infrared detector for a satellite attitude control system
A.W. van Herwaarden; F.G. van Herwaarden; S.A. Molenaar; B. Goudena; M. Laros; P.M. Sarro; C.A.Schot; W. van der Vlist; L. Blarre; J.P. Krebs;
In Proc. 10th Int. Conf. Solid-State Transducers,
Sendai, Japan, pp. 394-397, Jun. 1999.
Lamb wave sensor with tensile ZnO for liquid property sensing
S. Koller; O. Brand; H. Baltes; B.H. Jakoby; P.M. Sarro; M.J. Vellekoop;
In Transducers '99: digest of technical papers. Vol. 2,
Institute of Electrical Engineers of Japan, pp. 1512-1515, 1999.
A novel technological process for glass-to-glass anodic bonding
M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
In Transducers '99: digest of technical papers. Vol. 2,
Institute of Electrical Engineers of Japan, pp. 1324-1327, 1999.
Practical considerations of the galvanic etch-stop for device applications
C.M.A. Ashruf; P.J. French; P.M. Sarro; W. van der Vlist; E.L. Oemar; L.J. Breems; J.J. Kelly;
In Transducers '99: digest of technical papers. Vol. 1,
Institute of Electrical Engineers of Japan, pp. 560-563, 1999.
Technology of pixelated reflective membranes for spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In SAFE99: proceedings. ProRISC99: proceedings [CD-ROM],
STW Technology Foundation, pp. 671-675, 1999.
Glass-to-glass anodic bonding
M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop;
In SAFE99:proceedings. ProRISC99: proceedings,
STW Technology Foundation, pp. 33-36, 1999.
Position-sensitive detectors for a wavefront sensor
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In SAFE99: proceedings. ProRISC99: proceedings [CD-ROM],
STW Technology Foundation, pp. 287-293, 1999.
Micro-injection of b-D-glucose standards and Amplex Red reagent on micro-arrays
R. Moerman; L.R. van den Doel; S. Picioreanu; J. Frank; J.C.M. Marijnissen; G. van Dedem; K.T. Hjelt; M.J. Vellekoop; P.M. Sarro; I.T. Young;
In {M Ferrari} (Ed.), Progress in biomedical optics (Proceedings SPIE 3606),
International Society for Optical Engineering, pp. 119-128, 1999.
Fluorescence detection in (sub-)nanoliter microarrays
L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; J.E. Frank; G. van Dedem; K.T. Hjelt; L. van VlietJ; I.T. Young;
In {M Ferrari} (Ed.), Progress in biomedical optics (Proceedings SPIE 3606),
International Society for Optical Engineering, pp. 28-39, 1999.
Various layouts of analog CMOS optical position-sensitive detectors
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In {SM Goodnick} (Ed.), Proceedings of SPIE, vol. 3794,
International Society for Optical Engineering, pp. 134-142, 1999.
Micromachined SLM based on pixelated reflective membranes
S. Sakarya; G. Vdovin; P.M. Sarro;
In {JD Gonglewski}; {MA Vorontsov} (Ed.), Proceedings of SPIE, vol. 3760,
International Society for Optical Engineering, pp. 23-31, 1999.
Integration of a Hartmann-shack wavefront sensor
D.W. de Lima Monteiro; G. Vdovin; P.M. Sarro;
In Proceedings,
World Scientific, pp. 215-220, 1999.
Pressure and flow sensor for use in catheters
J.F.L. Goosen; P.J. French; P.M. Sarro;
In {P.J. French}; {E Peeters} (Ed.), Micromachined devices and components V (Proceedings of SPIE 3876),
International Society for Optical Engineering, pp. 38-44, 1999.
Technology of pixelated flexible silicon structures for spatial light modulators
S. Sakarya; G. Vdovin; P.M. Sarro;
In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
Delft University of Technology, pp. 737-740, 1999.
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M.O. O. Halloran; P.M. Sarro;
In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
Delft University of Technology, pp. 1029-1032, 1999.
All-glass microstructures for (bio)chemical analysis systems
M. Berthold; L. Nicola; P.M. Sarro; M.J. Vellekoop; G. Pignatel;
In {M. Bartek} (Ed.), Eurosensors XIII: proceedings,
Delft University of Technology, pp. 975-978, 1999.
Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
G.M.O. O. Halloran; W. van der Vlist; P.M. Sarro; P.J. French;
In Eurosensors XIII: proceedings,
Delft University of Technology, pp. 117-120, 1999.
Piezoelectric ZnO membrane resonators for liquid property sensing
S. Koller; O. Brand; P.M. Sarro; M.J. Vellekoop; H. Baltes;
In {M. Bartek} (Ed.), Eurosensors XIII: proceedings,
Delft University of Technology, pp. 677-680, 1999.
A new contactless electrochemical etch stop based on a gold/silicon/TMAH galvanic cell
C.M.A. Ashruf; P.J. French; P.M.M.C. Bressers; P.M. Sarro; J.J. Kelly;
Sensors and Actuators A,
Volume 66, Issue 1-3 (1998), pp. 284-292, 1998.
Temperature dependence and drift of a thermal accelerometer
U.A. Dauderstadt; P.M. Sarro; P.J. French;
Sensors & Actuators A,
Volume 66, Issue 1-3, pp. 244-249, 1998.
Electrochemical etch stop engineering for bulk micromachining
C.M.A. Ashruf; P.J. French; P.M. Sarro; M.C. Bressers; J.J. Kelly;
Mechatronics,
Volume 8 (1998), pp. 595-612, 1998.
Surface versus bulk micromachining: the contest for suitable applications
P.J. French; P.M. Sarro;
J. Micromech. Microeng.,
Volume 8, pp. 45-53, 1998.
Offset reduction of Hall plates in three different crystal planes
S. Bellekom; P.M. Sarro;
Sensors and Actuators A,
Volume 66, Issue 1-3 (1998), pp. 23-28, 1998.
Anisotropic etching of silicon in saturated TMAHW solutions for IC-compatible micromachining
P.M. Sarro; S. Brida; C.M.A. Ashruf; W. van d. Vlist; H. van Zeijl;
Sensors and Materials,
Volume 10, Issue 4, pp. 201-212, 1998.
Thermo-optic effect exploitation in Silicon microstructures
G. Cocorullo; F.G. Della Corte; I. Rendina; P. M. Sarro;
Sensors and Actuators A,
Volume 71, Issue 1-2, pp. 19-26, 1998. ISSN-0924-4247.
Magnetic-field meassurement using an integrated resonant magnetic-field sensor
Zs.Kadar; A.Bossche; P.M. Sarro; J.R.Mollinger;
Sensors and Actuators A,
Volume 70, pp. 225-232, 1998. ISSN-0924-4247.
Low stress PECVD thin film SiC for IC compatible microstructures
P.M. Sarro; C.R. de Boer; E. Korkmaz; J.W.M. Laros;
Sensors and Actuators A,
Volume 67, pp. 175-180, 1998.
A microgap photomultiplier for the read-out of LaF3 : Nd (10%) scintillator
J. van der Marel; V.R.Bom; C.W.E. van Eijk; R.W. Hollander; P.M Sarro;
Nucl. Instr. and Meth. Phys.Res. A,
Volume 410, pp. 229-237, 1998. ISSN 0168-9002.
Design and characterization of MicroGap Counters on silicon
F.D. van d. Berg; J. van d. Marel; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
Nucl Instr and Meth. A.,
Volume 409, pp. 90-94, 1998.
Two silicon optical modulators realizable with a fully compatible bipolar process
G. Breglio; A. Cutolo; A. Irace; P. Spirito; L. Zeni; M. Iodice; P.M. Sarro;
IEEE Journal of Quantum Electronics vol. 4,
Issue 6, pp. 1003-1010, 1998.
Silicon-on-silicon rib waveguides with a high-confining ion-implanted lower cladding
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
IEEE Journal of Quantum Electronics,
Volume 4, Issue 6, pp. 983-989, 1998.
Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]
C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly; PM.M.C. Bressers;
Mechatronics,
Volume 1998, Issue 8, pp. 595-612, 1998.
Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications
P.J. French; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 8, Issue 2, pp. 45-53, 1998.
Magnetic-field measurements using an integrated resonant magnetic-field sensor [niet eerder opgevoerd]
Z. Kádár; A. Bossche; P.M. Sarro; J.R. Mollinger;
Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
Volume 70, pp. 225-232, 1998.
Galvanic etching of silicon
C.M.A. Ashruf; P.J. French; P.M. Sarro; J.J. Kelly;
In Proc.SPIE Micromachining and Microfabrication 98 Symposium,
Santa Clara, USA, SPIE, pp. 82-87, Sep. 1998.
Integration Technology
P.J. French; P.M. Sarro;
In Proc. SPIE Smart Electronics and MEMS Symposium,
San Diego, USA, SPIE, pp. 60-71, Mar. 1998.
Porous silicon membrane for humidity sensing applications
G.M. O'Hallaran; J. Groeneweg; P.M. Sarro; P.J. French;
In Proc. Eurosensors XII Conf.,
Southampton, UK, pp. 901-904, Sep. 1998.
Thickness of membranes fabricated with galvanic etch-stop, uniformity and reproducibility
E.L. Oemar; C.M.A. Ashruf; P.J. French; P.M. Sarro;
In Proc. Eurosensors XII Conf.,
Southampton, UK, pp. 3-6, Sep. 1998.
Temperature dependence of a thermal accelerometer
U.A. Dauderstadt; P.M. Sarro; P.J. French;
In Proc. Dutch Sensor Conf,
Twente, pp. 55-60, Mar. 1998.
Enhancement of propagation characteristics in all-silicon waveguide by ion implantation
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
In OSA Intern. Symposium on Integrated Photonics Research,
Victoria, Canada, pp. 339-341, 1998.
A novel technique to measure the thermal conductivity of thin film membranes
A. Irace; P.M. Sarro;
In Proc.SPIE Micromachining and Microfabrication 1998 Symposium,
Santa Clara, USA, SPIE, pp. 367-373, Sep. 1998.
Fluorescence Detection in (sub)-nanoliter Microarrays
L.R. van d. Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K. Hjelt; I.T. Young;
In Proc. 4th Annual Conference of the Advanced School for Computing and Imaging (ASCI 98),
Lommel, Belgium, pp. 58-62, Jun. 1998.
Determination of mechanical properties of piezoelectric ZnO films
S. Koller; V.Ziebart; O. Paul; O. Brand; H. Baltes; P.M. Sarro; M.J. Vellekoop;
In Proc. SPIE Smart Electronics and MEMS Symposium,
San Diego, USA, SPIE, pp. 102-109, Mar. 1998.
Low temperature quartz-to-silicon bonding for SAW applications
A.Berthold; P.M. Sarro; M.J.Vellekoop;
In Proc. SPIE Smart Electronics and MEMS Symposium,
San Diego, USA, SPIE, pp. 81-85, Mar. 1998.
Quartz-to-silicon fusion bonding for micro acoustic wave applications
A. Berthold; P.M. Sarro; M.J. Vellekoop;
In Proc. Dutch Sensor Conf,
Twente, pp. 213-218, Mar. 1998.
Measurement of thermal conductivity and diffusivity on single and multi-layer membranes
A. Irace; P.M. Sarro;
In Proc. Eurosensors XII Conf.,
Southampton, UK, pp. 27-30, Sep. 1998.
A neutron detector based on the Micro Gap Counter
F.D. van den Berg; V.R. Bom; C.W.E. van Eijk; R.W. Hollander; M. Bartek; P.M. Sarro; H. Schellevis; M.W. Johnson; N.J. Rhodes;
In C.W.E. van Eijk (Ed.), Proc. Neudess 98,
Delft, The Netherlands, Oct. 1998. ISBN 90-73861-42.
Silicon Micromachining Technologies
P.M. Sarro;
In INSEL 98 Conf.,
Naples, Italy, Oct. 1998.
Experimental results of electron confinement in a silicon drift detector with saw tooth shaped p+ strips
J. Sonsky; H. Valk; J. Huizenga; and R.W. Hollander; C.W.E. van Eijk; P.M. Sarro;
In IEEE Nuclear Science Symposium 98,
Toronto, Canada, Nov. 1998.
Silicon Microsensors and Optical Switches Based on the Thermo-Optic Effect
G. Cocorullo; F. G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
In CIMTEC 98,
Florence, Italy, Jun. 1998.
Fluorescence detection in (sub)-nano liter microarrays [niet eerder opgevoerd]
L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van Dedem; K.T. Hjelt; I.T. Young;
In {BM Haar Romeny}, ter; {D.H.J. Epema}; {JFM Tonino}; {AA Wolters} (Ed.), ASCI'98: proceedings,
Advanced School for Computing and Imaging, pp. 58-62, 1998.
Fluorescence detection in (sub-)nano liter microarrays
L.R. van den Doel; M.J. Vellekoop; P.M. Sarro; S. Picioreanu; R. Moerman; H. Frank; G. van DedemWK; K.T. Hjelt; I.T. Young;
In {ter Haar Romeny}, BM; D.H.J. Epema; JFM Tonino; AA Wolters (Ed.), Proc. ASCI'98, 4th Annual Conf. of the Advanced School for Computing and Imaging,
pp. 58-62, 1998.
Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]
gmo O'Halloran; J. Groeneweg; P.M. Sarro; P.J. French;
In proceedings,
s.n., pp. 901-904, 1998.
New silicon micromachining techniques for microsystems
P.J. French; P.T.J. Gennissen; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 62, Issue 1-3, pp. 652-662, Jul. 1997.
Dual structural polysilicon BiFET-compatible surface-micromachining module
Drieenhuizen; B.P. van; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
Journal of Micromechanics and Microengineering,
Volume 7, Issue 3, pp. 148-150, Sep. 1997.
Optimization of a low stress silicon nitride process for surface micromachining applications
P.J. French; P.M. Sarro; R. Mall?e; E.J.M. Fakkeldij; R.F. Wolffenbuttel;
Sensors and Actuators A,
Volume 58, pp. 149-157, 1997.
Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
Sensors and Actuators A,
Volume 62, pp. 636-645, 1997.
An integrated silicon interferometric temperature sensor
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
Sensors and Actuators A,
Volume 61, Issue 1-3, pp. 267-272, 1997.
Backside-illuminated silicon photodiode array in an integrated spectrometer
T.A. Kwa; . P.M. Sarro; R.F. Wolffenbuttel;
IEEE Transactions on Electron Devices,
Volume 44, Issue 5 (1997), pp. 761-765, 1997.
A temperature all-silicon micro-sensor based on the thermo-optic effect
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
IEEE Transactions on Electron Devices,
Volume 44, Issue 5 (1997), pp. 766-774, 1997.
Electrostatic aluminum micromirrors using double pass metallization
J. B�hler; J. Funk; J.G. Korvink; F.-P. Steiner; P.M. Sarro; H. Baltes;
Journal of Microelectromechanical Systems,
Volume 6, Issue 2, pp. 126-135, 1997.
Technology and applications of micromachined silicon adaptive mirrors
G. Vdovin; S. Middelhoek; P.M. Sarro;
Opt. Eng.,
Volume 36, Issue 5, pp. 1382-1390, 1997.
An integrated charge amplifier for a pyroelectric sensor
D. Setiadi; A. Armitage; T.D. Binnie; P.P.L. Regtien; P.M. Sarro;
Sensors and Actuators A,
Volume 61, Issue 1-3, pp. 421-426, 1997.
Strain effects in multilayers
C.M.A. Ashruf; P.J. French; C. de Boer; P.M. Sarro;
In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
Austin, Texas, USA, SPIE, pp. 149-159, Sep. 1997.
Bulk micromachined pressure sensor based on epi-poly technique
P.T.J. Gennissen; C.M.A. Ashruf; M. Kaak; P.J. French; P.M. Sarro;
In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
Austin, Texas, USA, SPIE, pp. 212-219, Sep. 1997.
Study of Selective and Non-Selective Deposition of Single- and Polycrystalline Silicon Layers in an Epitaxial Reactor
M. Bartek; P.T.J. Gennissen; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
In Proc. Transducers 97,
Chicago, USA, pp. 1403-1406, Jun. 1997.
Surface versus bulk micromachining: the contest for suitable applications
P.J. French; P.M. Sarro;
In Proc. MME 97 Conf,
Southampton, UK, pp. 18-30, Aug. 1997.
Fabrication of micromechanical structures with a new electrodeless electrochemical etch stop
C.M.A. Ashruf; P.J. French; P.M. Sarro; M. Nagao; M. Esashi;
In Proc. 9th Int. Conf. Solid-State Transducers,
Chicago, USA, pp. 703-706, Jun. 1997.
A bulk micromachined humidity sensor based on porous silicon
G.M. O'Hallaran; P.M. Sarro; J. Groeneweg; P.J. Trimp; P.J. French;
In Proc. 9th Int. Conf. Solid-State Transducers,
Chicago, USA, pp. 563-566, Jun. 1997.
Silicon thermooptic micromodulators for low-cost low-performance fiber-in-the-loop applications
G. Cocorullo; F.G. Della Corte; I. Rendina; P.M. Sarro;
In Proc.SPIE Integrated Optic Devices '97 Symposium,
San Jose, California, USA, SPIE, pp. 312-337, 1997.
Low stress PECVD thin film SiC for IC compatible microstructures
P.M. Sarro; C.R. de Boer; M. Laros; E. Korkmaz;
In Proc. Eurosensors '97 Conf.,
Warsaw, Poland, pp. 920-932, Sep. 1997.
Temperature dependence and drift of a thermal accelerometer
U.A. Dauderstadt; P.M. Sarro; S. Middelhoek;
In Proc. 9th Int. Conf. Solid-State Transducers,
Chicago, USA, pp. 1209-1212, Jun. 1997.
Development of a 128 channel silicon drift detector for spectroscopic purposes
H. Valk; J. Huizenga; C.W. van Eijk; R.W.Hollander; L.K. Nanver; P.M. Sarro; A. van den Bogaard;
In Proc. 4th International Conference on Position-Sensitive Detectors,
Manchester, UK, pp. 169-172, Sept. 1997.
The development of a low-stress polysilicon process compatible with standard device processing
P.J. French; B.P. van Drieenhuizen; D. Poenar; J.F.L. Goosen; R. Mallee; P.M. Sarro; R.F. Wolffenbuttel;
Journal of Microelectromechanical Systems,
Volume 5, Issue 3, pp. 187-196, 1996.
Recombination centers identification in very thin silicon epitaxial layers via lifetime measurements
S. Daliento; A. Sanseverino; P. Spirito; P.M. Sarro; L. Zeni;
IEEE Electr. De van Lett,
Volume 17, Issue 3, pp. 148-150, 1996.
Silicon three-axial tactile sensor
Z.Chu; P.M. Sarro; S. Middelhoek;
Sensors and Actuators A,
Volume 54, pp. 505-510, 1996.
The PhotoElectroMagnetic Effect in planar silicon structures
J.F. Creemer; S. Middelhoek; P.M. Sarro;
Sensors and Actuators A,
Volume 55, pp. 115-120, 1996.
Low temperature surface passivation for silicon solar cells
C. Leguijt; P. L�lgen; A.R. Burgers; J.A. Eikelboom; A.W. Weeber; F.M. Schuurmans; W.C. Sinke; P.F.A. Alkemade; P.M. Sarro; C.H.M. Mar�e; L.A. Verhoef;
Solar Energy Materials and Solar Cells,
Volume 40 (1996), pp. 297-345, 1996.
A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer
D. Setiadi; P.M. Sarro; P.P.L. Regtien;
Sensors and Actuators A,
Volume 52, pp. 103-109, 1996.
Simulation aspects of a thermal accelerometer
U.A. Dauerstadt; P.H.S. de Vries; R. Hiratsuka; J.G. Korvink; P.M. Sarro; H. Baltes; S. Middelhoek;
Sensors and Actuators A,
Volume 55 (1996), pp. 3-6, 1996.
Bipolar compatible epitaxial poly for surface micromachined smart sensors
P.T.J. Gennissen; P.J. French; M. Bartek; P.M. Sarro; A. van den Boogaard; C. Visser;
In Proc. SPIE Conference on Micromachining & Microfabrication, Process Technology II,
Austin, USA, SPIE, pp. 135-142, Oct. 1996.
New developments in the integration of micromachined sensors
P.M. Sarro; P.J. French; P.T.J. Gennissen;
In Proc. SPIE Micromachining and Microfabrication 1996 Symposium,
Austin, Texas, USA, SPIE, pp. 26-36, Oct. 1996.
Dual structural polysilicon BiFET-compatible surface-micromachining module
B.P.van Drieenhuizen; J.F.L. Goosen; Y.X. Li; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
In Proc. MME 96,
Barcelona, Spain, pp. 70-73, Oct. 1996.
Bipolar compatible epitaxial poly for smart sensors - stress minimization and applications
P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
In Proc. Eurosensors X,
Leuven, Belgium, pp. 187-190, Sep. 1996.
IC-compatible silicon fusion bonding
A. Berthold; P.M. Sarro; P.J. French; M.J. Vellekoop;
In Proc. Eurosensors '96 Conf.,
Leuven, Belgium, pp. 489-491, Sep. 1996.
New micromachining techniques for microsystems
P.J. French; P.T.J. Gennissen; P.M. Sarro;
In Proc. Eurosensors '96 Conf.,
Leuven, Belgium, pp. 465-472, Sep. 1996.
Thick polysilicon microstructures by combination of epitaxial and poly growth in a single deposition step
P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
In Proc. 1996 National Sensor Conference,
Delft, The Netherlands, pp. 189-192, Mar. 1996.
New etchant for the fabrication of porous silicon
G.M. O'Hallaran; M. Kuhl; P.M. Sarro; P.T.J. Gennissen; P.J. French;
In Moustakas, Dismukes, Pearton) (Ed.), Proc. 189th Electrochemical Society Meeting: III-V Nitride Materials and Compounds,
Los Angeles, California, USA, pp. 180-185, May 1996.
Integrated ultraviolet sensor system with on-chip 1 Gohm Transimpedance Amplifier
D. Bolliger; P. Malcovati; A. Haberli; P.M. Sarro; F. Malobert; H. Baltes;
In ISSC 96 Digest of Technical Papers,
San Francisco, CA, pp. 328-329, Feb. 1996.
Anisotropic etching of silicon in saturated TMAHW solutions for IC-compatible micromachining
P.M. Sarro; S.Brida; C.M.A.Ashruf; W. van d.Vlist; H. van Zeijl;
In Proc. ASDAM '96 Conf.,
Smolenice, Slovakia, pp. 293-296, Oct. 1996.
A LaF3:Nd(10%) scintillator detector with microgap gas chamber read-out for the detection of x- rays
J. van der Marel; V.R. Bom; C.W.E. van Eijk; R.W. Hollander; P.M. Sarro;
In Proc. 4th International Conference on Position-Sensitive Detectors,
Manchester, UK, Sept. 1996.
An integrated silicon interferometric temperature sensor
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
In Proc. Eurosensors '96 Conf.,
Leuven, Belgium, pp. 1413-1416, Sep. 1996.
An integrated charge amplifier for a pyroelectric sensor
D. Setiadi; A. Armitage; T.D. Binnie; P.P.L. Regtien; P.M. Sarro;
In Proc. Eurosensors '96 Conf.,
Leuven, Belgium, pp. 355-358, Sep. 1996.
Micromachined mirror with a variable focal distance
G.Vdovin; S. Middelhoek; P.M. Sarro;
In Tech. Digest EOS Free Space Micro-Optical Systems,
Engelberg, Switzerland, pp. 28-29, Apr. 1996.
Thin-film free-space optical components micromachined in silicon
G.Vdovin; S. Middelhoek; P.M. Sarro;
In Techn Digest IEEE/LEOS Summer Topical Meeting Optical MEMS and Their Applications,
Keystone, Colorado, USA, pp. 5-6, Aug. 1996.
Silicon drift detectors for the detection of X- and g- rays
H.Valk; E.A.Hijzen; J.Huizenga; C.W. van Eijk; R.W.Hollander; L.K.Nanver; P.M. Sarro; A. van d.Bogaard; J.Slabbekoorn;
In Proc. National Sensor Conference,
Delft, The Netherlands, pp. 103-107, Mar. 1996.
Aluminum passivation in saturated TMAHW solutions for IC-compatible microstructures and device isolation
P.M. Sarro; S. Brida; W. van der Vlist;
In Proc.SPIE Micromachining and Microfabrication �96 Symposium,
Austin, Texas, USA, SPIE, pp. 242-250, Oct. 1996.
Temperature monitoring with a fully integrable on chip interferometric silicon micro-sensor based on the thermo-optic effect
G. Cocorullo; F.G. Della Corte; M. Iodice; I. Rendina; P.M. Sarro;
In Proc. MELECON '96,
Bari, Italy, pp. 1321-1323, May 1996.
Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor
D. Setiadi; P.P.L. Regtien; P.M. Sarro;
Microelectronic Engineering,
Volume 29, Issue 1-4, pp. 85-88, Dec. 1995.
Silicon accelerometer based on thermopiles
U.A. Dauderstadt; P.H.S. de Vries; R. Hiratsuka; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 46, Issue 1-3, pp. 201-204, Jan.-Feb. 1995.
Automatic etch stop on buried oxide using epitaxial lateral overgrowth
P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
In Transducers 95,
Stockholm, Sweden, pp. 75-78, Jun. 1995.
Technology characterization and application of adaptive mirrors fabricated with IC-compatible micromachining
G. Vdovin; S. Middelhoek; M. Bartek; P.M. Sarro; D. Solomatine;
In Proc. SPIE,
San Diego, CA, USA, pp. 116-129, Jun. 1995.
PSG layers for surface micromachining
D. Poenar; P.J. French; R. Mall?e; P.M. Sarro; R.F. Wolffenbuttel;
Sensors and Actuators A: Physical,
Volume 41, Issue 1-3, pp. 304-309, Apr. 1994.
An integrated silicon colour sensor using selective epitaxial growth
M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
Sensors and Actuators A,
Volume 41, Issue 1-3, pp. 123-128, Apr. 1994.
Reactive ion etching (RIE) techniques for micromachining applications
Y.X. Li; M.R. Wolffenbuttel; P.J. French; M. Laros; P.M. Sarro; R.F. Wolffenbuttel;
Sensors and Actuators A: Physical,
Volume 41, Issue 1-3, pp. 317-323, Apr. 1994.
Surface micromachined tuneable interferometer array
K. Aratani; P.J. French; P.M. Sarro; D. Poenar; R.F. Wolffenbuttel; S. Middelhoek;
Sensors and Actuators A: Physical,
Volume 43, Issue 1-3, pp. 17-23, May 1994.
Evaluation of liquid properties using a silicon lamb wave sensor
M.J. Vellekoop; G.W. Lubking; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 43, Issue 1-3, pp. 175-180, May 1994.
Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors
M.J. Vellekoop; G.W. Lubking; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 44, Issue 3, pp. 249-263, Sep. 1994.
Liquid and gas micro-calorimeters for (bio)chemical measurements
A. W. van Herwaarden; P.M. Sarro; J.W. Gardner; P. Bataillard;
Sensors and Actuators A: Physical,
Volume 43, Issue 1-3, pp. 24-30, May 1994.
Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer
R.P. van Kampen; M.J. Vellekoop; P.M. Sarro; R.F. Wolffenbuttel;
Sensors and Actuators A: Physical,
Volume 43, Issue 1-3, pp. 100-106, May 1994.
A silicon-silicon nitride membrane fabrication process for smart thermal sensors
P.M. Sarro; A.W. van Herwaarden; W. van der Vlist;
Sensors and Actuators A: Physical,
Volume 42, Issue 1-3, pp. 666-671, Apr. 1994.
Application of VDF/TrFE copolymer for pyroelectric image sensors
D. Setiadi; P.P.L. Regtien; P. M. Sarro;
Sensors and Actuators A: Physical,
Volume 42, Issue 1-3, pp. 585-592, Apr. 1994.
A pyroelectric matrix sensor using PVDF on silicon containing FET readout circuitry
P.C.A. Hammes; P.P.L. Regtien; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 37-38, pp. 290-295, Jun.-Aug. 1993.
A Novel Silicon Colour Sensor Using Selective Epitaxial Growth
M. Bartek; P.T.J. Gennissen; E.J. Blaauw; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
In Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers 93),
Yokohama, Japan, pp. 144-147, Jun. 1993.
Selective epitaxial growth for smart silicon sensor applications
M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
In Proc. Eurosensors VII,
Budapest, Hungary, Sep. 1993.
Design considerations for the thermal accelerometer
R. Hiratsuka; D.C. van Duyn; T. Otaredian; P. de Vries; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 32, Issue 1-3, pp. 380-385, Apr. 1992.
Sensor technology strategy in silicon
P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 31, Issue 1-3, pp. 138-143, Mar. 1992.
Design considerations for a permanent-rotor-charge-excited micromotor with an electrostatic bearing
R.F. Wolffenbuttel; J.F.L. Goosen; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 27, Issue 1-3, pp. 597-603, May 1991.
Compatibility of zinc oxide with silicon IC processing
M.J. Vellekoop; C.C.G. P. Visser.M. Sarro;
Sensors and Actuators A: Physical,
Volume 23, Issue 1-3, pp. 1027-1030, Apr. 1990.
Integrated thermopile sensors
A.W. van Herwaarden; D.C. van Duyn; B.W. van Oudheusden; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 22, Issue 1-3, pp. 621-630, Jun. 1989.
Sensor array with A/D conversion based on flip-flops
W. Lian; S.E. Wouters; D.A. Aupers; P.M. Sarro;
Sensors and Actuators A: Physical,
Volume 22, Issue 1-3, pp. 592-597, Jun. 1989.

BibTeX support