Agenda

PhD Thesis Defence

• Monday, 12 October 2020
• Aula Senaatszaal

From Silicon Toward Silicon Carbide Smart Integrated Sensors

Abstract
This PhD thesis focusses on the possibilities and challenges of the pathway from silicon toward silicon carbide smart integrated sensors. The research toward extended functionality of sensors in state-of-the-art silicon technology and the exploration of the application of wide-bandgap semiconductors can both be seen as realization of the More-than-Moore trend, described by diversification, the introduction of novel materials and integrated process development.
In this context, different types of sensors are developed, such a high-resolution gravimeter in silicon technology and different poly-SiC-based sensors such as a platform for an optical PM sensor and different pressure sensing structures. Additionally, a SiC CMOS chip is developed in collaboration with Fraunhofer IISB consisting of discrete electronic devices, resistive and capacitive read-out circuits and temperature sensors.

Overview of PhD Thesis Defence